CN217440550U - Sealing connection structure of ball head and ball bowl - Google Patents
Sealing connection structure of ball head and ball bowl Download PDFInfo
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- CN217440550U CN217440550U CN202221387577.9U CN202221387577U CN217440550U CN 217440550 U CN217440550 U CN 217440550U CN 202221387577 U CN202221387577 U CN 202221387577U CN 217440550 U CN217440550 U CN 217440550U
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- ball
- ball bowl
- bowl
- sealing
- sealing connection
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Abstract
The utility model discloses a bulb and ball bowl's sealing connection structure, including setting up straw on the vacuum pump and setting up the outlet duct on LPCVD stove, straw one end has the ball bowl, and outlet duct one end has the bulb, is provided with the sealing washer between bulb and the ball bowl, and the inside cooling chamber that is provided with of ball bowl is provided with the coolant liquid in the cooling chamber, reduces the temperature that the sealing washer was experienced through the coolant liquid, thereby avoids the sealing washer excessive deformation and quick ageing vacuum effect in the influence reaction chamber under the effect of high temperature.
Description
Technical Field
The utility model relates to a LPCVD deposition apparatus technical field, concretely relates to bulb and ball bowl's sealing connection structure.
Background
At present, when a thin film is manufactured on the outer surface of a material such as a wafer by an LPCVD technology, a reaction chamber of an LPCVD furnace needs to be vacuumized by a vacuum pump to store the wafer in a vacuum environment, then the LPCVD furnace is heated, chemical gas is filled into the reaction chamber, and the gas adheres to the surface of the wafer in a pressing and high-temperature environment to generate the required thin film.
In the prior art, a suction pipe of a vacuum pump is connected with an air outlet pipe of the LPCVD furnace during vacuum pumping, wherein one end of the air outlet pipe is a ball head, one end of the suction pipe is a ball bowl, the suction pipe is in butt joint with the ball bowl through the ball head, a sealing ring is arranged between the suction pipe and the ball bowl for sealing, and the vacuum pump is in sealing connection with the LPCVD furnace. However, the furnace body has high temperature, which causes the bulb of the air outlet pipe to have high temperature, and the sealing ring between the bulb and the ball bowl is easy to excessively deform and age rapidly under the action of high temperature, thereby causing the technical problem that the vacuum in the reaction cavity rises or the vacuum cannot be guaranteed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a bulb and ball bowl's sealing connection structure solves how to realize sealing connection's between vacuum pump and the LPCVD stove reliability among the prior art, guarantees the technical problem of vacuum pump to the evacuation effect of reaction chamber.
The purpose of the utility model can be realized by the following technical scheme:
the utility model provides a bulb and ball bowl's sealing connection structure, is including setting up straw and the outlet duct of setting on LPCVD stove on the vacuum pump, straw one end has the ball bowl, outlet duct one end has the bulb, be provided with the sealing washer between bulb and the ball bowl, the inside cooling chamber that is provided with of ball bowl, the cooling intracavity is provided with the coolant liquid.
As a further aspect of the present invention: the outer circumferential surface of the spherical bowl is provided with a water inlet and a water outlet which are communicated with the cooling cavity, and the cooling liquid flows in the cooling cavity.
As a further aspect of the present invention: the cooling cavity is arranged in a spiral shape.
As a further aspect of the present invention: the sealing ring is provided with two, follows ball bowl axial, be provided with two installations on the ball bowl inner wall the mounting groove of sealing ring.
As a further aspect of the present invention: the cooling cavity is located between the two mounting grooves.
As a further aspect of the present invention: the straw is made of a stainless steel pipe.
As a further aspect of the present invention: the gas outlet pipe is a quartz pipe.
The utility model has the advantages that: this application is through being provided with the cooling chamber in ball bowl inside, cools down for ball bowl and bulb through putting into the coolant liquid in the cooling chamber, and then reduces the temperature that the sealing washer was experienced, thereby avoids the sealing washer excessive deformation and quick ageing vacuum effect in the influence reaction chamber under the effect of high temperature.
Drawings
The present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a sectional view of the overall structure of the present invention;
FIG. 2 is a structural section view of the ball bowl of the present invention;
fig. 3 is a top view of the ball bowl of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention relates to a sealing connection structure of a ball head 21 and a ball bowl 11, which comprises a suction pipe 1 located on a vacuum pump and an air outlet pipe 2 located on an LPCVD furnace, wherein the suction pipe 1 is made of a stainless steel pipe, and the air outlet pipe 2 is made of a quartz pipe. One end of the suction pipe 1 is provided with a ball bowl 11, one end of the air outlet pipe 2 is provided with a ball head 21, the vacuum pump and the LPCVD furnace are communicated through the butt joint of the ball bowl 11 and the ball head 21, and the vacuum pump can vacuumize a reaction cavity in the LPCVD furnace.
A sealing ring (not shown) is arranged between the ball head 21 and the ball bowl 11, so that the ball head 21 and the ball bowl 11 are in sealing butt joint, and external gas is prevented from entering the reaction cavity from the joint of the ball head 21 and the ball bowl 11. Specifically, two annular mounting grooves 112 are formed in the inner wall of the ball bowl 11 in the axial direction of the ball bowl 11, a gap is formed between the two mounting grooves 112, an annular sealing ring is embedded in each mounting groove 112, the top of each sealing ring slightly protrudes out of the mounting groove 112, and when the ball head 21 is in butt joint with the ball bowl 11, the top of each sealing ring abuts against the outer circumferential surface of the ball head 21. Through the setting of double sealing washer, improve the sealed effect between bulb 21 and ball bowl 11.
The inside cooling chamber 111 that is provided with of ball bowl 11, through pouring into the cooling liquid can be fine realization to the cooling of ball bowl 11 in cooling chamber 111, and then reduce the temperature of sealing washer and bulb 21, thereby avoid the sealing washer excessive deformation and quick ageing influence the vacuum effect in the reaction chamber under the effect of high temperature. Specifically, the cooling cavity 111 is disposed in a spiral shape and is located between two mounting grooves 112. The outer circumferential surface of the ball bowl 11 is further provided with a water inlet 113 and a water outlet 114 which are communicated with the cooling cavity 111, the water inlet 113 and the water outlet 114 are connected with a circulating water pump, the circulating water pump circularly injects cooling liquid in the refrigerating device into the cooling cavity 111, so that the temperature of the cooling liquid in the cooling cavity 111 is kept constant, and the cooling effect of the cooling liquid on the sealing ring is improved.
While one embodiment of the present invention has been described in detail, the present invention is only a preferred embodiment of the present invention, and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (7)
1. The utility model provides a bulb and ball sealing connection structure of bowl, is including setting up the straw on the vacuum pump and setting up the outlet duct on LPCVD stove, straw one end has the ball bowl, outlet duct one end has the bulb, be provided with the sealing washer between bulb and the ball bowl, its characterized in that, the inside cooling chamber that is provided with of ball bowl, the cooling intracavity is provided with the coolant liquid.
2. A ball end to ball bowl sealing structure as claimed in claim 1, wherein said ball bowl has a water inlet and a water outlet on its outer circumference, said cooling cavity is connected to said water inlet and said water outlet, and said cooling liquid is disposed in said cooling cavity in a flowing manner.
3. A ball head and ball bowl sealing connection as claimed in claim 1, wherein said cooling chamber is configured as a spiral.
4. A sealing connection structure between a ball head and a ball bowl as claimed in claim 1, wherein there are two sealing rings, and two mounting grooves for mounting the sealing rings are provided on the inner wall of the ball bowl along the axial direction of the ball bowl.
5. A ball head and ball bowl sealing connection as claimed in claim 4, wherein said cooling cavity is located between two of said mounting grooves.
6. The sealing connection structure of the ball head and the ball bowl as claimed in claim 1, wherein the suction pipe is a stainless steel pipe.
7. The sealing connection structure of the ball head and the ball bowl as claimed in claim 1, wherein the air outlet pipe is a quartz pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221387577.9U CN217440550U (en) | 2022-06-01 | 2022-06-01 | Sealing connection structure of ball head and ball bowl |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221387577.9U CN217440550U (en) | 2022-06-01 | 2022-06-01 | Sealing connection structure of ball head and ball bowl |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217440550U true CN217440550U (en) | 2022-09-16 |
Family
ID=83222793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221387577.9U Active CN217440550U (en) | 2022-06-01 | 2022-06-01 | Sealing connection structure of ball head and ball bowl |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217440550U (en) |
-
2022
- 2022-06-01 CN CN202221387577.9U patent/CN217440550U/en active Active
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