CN217438344U

CN217438344U - Cleaning device for exhaust pipeline of single crystal furnace

Info

Publication number: CN217438344U
Application number: CN202220596538.3U
Authority: CN
Inventors: 张国峰; 刘瑞强; 穆光裕
Original assignee: Liaoning Boxinke Semiconductor Material Co ltd
Current assignee: Liaoning Boxinke Semiconductor Material Co ltd
Priority date: 2022-03-18
Filing date: 2022-03-18
Publication date: 2022-09-16
Anticipated expiration: 2032-03-18

Abstract

The utility model discloses a cleaning device of single crystal growing furnace exhaust duct, including the body, the inner chamber of body is fixed to be equipped with the baffle, and the center department of body runs through there is the telescopic shaft, and the left end integrated into one piece of telescopic shaft has the clearance frame, and the center department of open slot is equipped with supplementary clearance mechanism, has seted up the through-hole that runs through the clearance frame in the open slot, and the center department of telescopic shaft is equipped with the drive assembly who is connected with supplementary clearance mechanism transmission. When clearance frame left motion, the supplementary cleaning board of supplementary cleaning mechanism keeps the level, and impurity in the exhaust duct can enter into the right side of clearance frame through the through-hole, then when the telescopic shaft drives clearance frame and resets, makes supplementary cleaning board of supplementary cleaning mechanism keep perpendicular through drive assembly, guarantees that impurity can enter into and carry out subsequent centralized processing in first inner chamber, can further strengthen the clearance to exhaust duct inner chamber lateral wall through the clean cotton piece that sets up at clearance frame lateral wall.

Description

Cleaning device for exhaust pipeline of single crystal furnace

Technical Field

The utility model relates to a single crystal growing furnace exhaust pipe technical field, concretely relates to single crystal growing furnace exhaust duct's cleaning device.

Background

The single crystal furnace is the main equipment for producing the monocrystalline silicon, and the gas generated in the production process needs to be discharged by using the exhaust pipeline in the process of producing the monocrystalline silicon by the single crystal furnace, so that the stability of the internal pressure of the single crystal furnace is ensured, but impurities (volatile matters for producing the monocrystalline silicon) generated in the production process can be accumulated in the exhaust pipeline, and if the impurities are accumulated too much, the smoothness of exhaust of the exhaust pipeline is easily influenced, so that the product quality of producing the monocrystalline silicon by the single crystal furnace is influenced.

In order to guarantee that exhaust duct's exhaust is unobstructed, need clear up the impurity in the exhaust duct, present cleaning equipment is mostly in the impurity single crystal growing furnace with in the exhaust duct in the in-process of using and carries out the propelling movement, though dredged exhaust duct, can not clear away impurity from the exhaust duct in, still can cause the jam in the exhaust duct along with the follow-up increase of impurity.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a cleaning device of single crystal growing furnace exhaust duct to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a cleaning device of single crystal growing furnace exhaust duct, includes the body, the left end integrated into one piece of body has the interface, the inner chamber of body is fixed to be equipped with the baffle, the center department of body runs through there is the telescopic shaft, the left end integrated into one piece of telescopic shaft has the clearance frame, the right-hand member lateral wall of telescopic shaft has cup jointed gloves, the open slot has been seted up to the lateral wall of clearance frame, and the center department of open slot is equipped with supplementary clearance mechanism, set up the through-hole that runs through the clearance frame in the open slot, the center department of telescopic shaft is equipped with the drive assembly who is connected with supplementary clearance mechanism transmission.

Preferably, the side wall of the partition board is provided with air holes, the side wall of the pipe body is provided with a ventilation groove, and the air holes and the ventilation groove are both fixedly provided with a separation net.

Preferably, the outer side wall of the cleaning frame is provided with a clamping groove, and cleaning cotton is clamped in the clamping groove.

Preferably, supplementary clearance mechanism is including the installation piece, installation piece fixed mounting is at the lateral wall of clearance frame, the assembly groove has evenly been seted up to the lateral wall of installation piece, be connected with supplementary clearance board through the axis of rotation in the assembly groove.

Preferably, the drive assembly includes the drive shaft, the drive shaft runs through the inner chamber of telescopic shaft, be equipped with stop gear between the lateral wall of drive shaft and the inner chamber of telescopic shaft, the left end fixed mounting of drive shaft has the fixed block, the lateral wall of fixed block articulates there is the one end of link, and the other end of link is articulated mutually with the lateral wall of supplementary cleaning plate, the right-hand member fixed mounting of drive shaft has the handle piece.

Preferably, the limiting mechanism comprises a limiting sliding block and a limiting sliding groove, the limiting sliding block is fixedly installed on the side wall of the driving shaft, the limiting sliding block is connected in the limiting sliding groove in a sliding mode, and the limiting sliding groove is formed in the side wall of the inner cavity of the telescopic shaft.

Compared with the prior art, the beneficial effects of the utility model are that: a cleaning device for an exhaust pipeline of a single crystal furnace is in butt joint with the exhaust pipeline of the single crystal furnace through a butt joint port in the using process, a cleaning frame is driven to move through a telescopic shaft, when the cleaning frame moves leftwards, the auxiliary cleaning plate of the auxiliary cleaning mechanism keeps horizontal, impurities in the exhaust pipeline can enter the right side of the cleaning frame through the through hole, then when the telescopic shaft drives the cleaning frame to reset, the auxiliary cleaning plate of the auxiliary cleaning mechanism is kept vertical through the driving component, the through hole is partially shielded to ensure that impurities can enter the first inner cavity for subsequent centralized treatment, the cleaning cotton blocks arranged on the side wall of the cleaning frame can further enhance the cleaning of the side wall of the inner cavity of the exhaust pipeline, through the utility model, easy operation, convenience make single crystal furnace exhaust duct keep unobstructed in the monocrystalline silicon production process, improve monocrystalline silicon's production quality.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is the structure diagram of the left side movement of the telescopic shaft of the utility model.

Fig. 3 is a detailed view of fig. 2 at a.

Fig. 4 is a schematic structural view of the telescopic shaft in the resetting process of the utility model.

Fig. 5 is a detailed view of fig. 4 at b.

In the figure: 1. the body, 2, to the interface, 3, the baffle, 4, first inner chamber, 5, the second inner chamber, 6, the bleeder vent, 7, ventilative groove, 8, separate the net, 9, the telescopic shaft, 10, clearance frame, 11, the handle cover, 12, the draw-in groove, 13, clean cotton piece, 14, open slot, 15, supplementary clearance mechanism, 151, installation piece, 152, assembly groove, 153, supplementary clearance board, 16, drive assembly, 161, drive shaft, 162, handle piece, 163, fixed block, 164, link, 17, stop gear, 171, spacing slider, 172, spacing spout, 18, through-hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 5, the present invention provides a technical solution: a cleaning device for an exhaust pipeline of a single crystal furnace comprises a pipe body 1, wherein a butt joint port 2 is integrally formed at the left end of the pipe body 1, the butt joint port 2 is horn-shaped, the horn-shaped butt joint port 2 is used for butt joint with an exhaust pipeline of the single crystal furnace, a partition plate 3 is integrally formed in an inner cavity of the pipe body 1, the inner cavity of the pipe body 1 is divided into a first inner cavity 4 and a second inner cavity 5 through the partition plate 3, the first inner cavity 4 is an impurity temporary storage cavity, impurities cleaned in the process of cleaning the exhaust pipeline enter the impurity temporary storage cavity 4 for temporary storage, air holes 6 are uniformly formed in the side wall of the partition plate 3, the first inner cavity 4 is communicated with the second inner cavity 5 through the air holes 6, a ventilation groove 7 is formed in the side wall of the second inner cavity 5, and through the air holes 6 and the ventilation groove 7, when impurities are cleaned in the exhaust pipeline in the process of the single crystal furnace, gas in the exhaust pipeline can be discharged outwards through the first inner cavity 4 and the second inner cavity 5, avoid influencing the pressure of the working environment in the single crystal furnace and ensure the production quality of products.

The air holes 6 and the air permeable grooves 7 are both fixedly provided with the separation net 8, and impurities cannot float outwards through the air holes 6 and the air permeable grooves 7 in the process of cleaning the impurities through the separation net 8, so that the surrounding environment is polluted.

The center of the tube body 1 is inserted with a telescopic shaft 9 penetrating through the tube body 1, the left end of the telescopic shaft 9 is integrally formed with a cleaning frame 10, the cleaning frame 10 is inserted into an exhaust pipeline of a single crystal furnace, the outer side wall of the right end of the telescopic shaft 9 is fixedly provided with a pair of gloves 11, the gloves 11 drive the telescopic shaft 9 to move so that the cleaning frame 10 cleans impurities in the exhaust pipeline, the outer side wall of the cleaning frame 10 is provided with a clamping groove 12, cleaning cotton 13 is clamped in the clamping groove 12, the cross section of the cleaning frame 10 is circular, the size of the cleaning frame 10 is slightly smaller than that of an inner cavity of the exhaust pipeline, after the cleaning frame 10 is inserted into the inner cavity of the exhaust pipeline, the cleaning cotton 13 is attached to the inner cavity side wall of the exhaust pipeline, in the moving process of the cleaning frame 10, the inner cavity side wall of the exhaust pipeline can be cleaned through the cleaning cotton 13, the cleaning cotton 13 is clamped in the annular clamping groove 12, and the cleaning cotton 13 is periodically replaced, the cleaning effect of the cleaning cotton 13 on the side wall of the inner cavity of the exhaust pipeline can be ensured.

The left side wall of the cleaning frame 10 is provided with an open slot 14, the center of the open slot 14 is fixedly provided with a mounting block 151, the side wall of the open slot 14 is provided with a through hole 18, the through hole 18 is fan-shaped, the through holes 18 are uniformly distributed in a circular manner by taking the center of the mounting block 151 as the center, the through hole 18 is used for passing impurities in an exhaust pipeline in the cleaning process, the impurities can enter the first inner cavity 4 to be collected and treated in a centralized manner in the cleaning process, the side wall of the mounting block 151 is provided with four assembly grooves 152, the four assembly grooves 152 are uniformly distributed in a circular manner by taking the mounting block 151 as the center, the four assembly grooves 152 are all rotatably connected with auxiliary cleaning plates 153 through rotating shafts, the center of the telescopic shaft 9 is provided with a driving component 16 in transmission connection with the auxiliary cleaning plates 153, and the auxiliary cleaning plates 153 can be kept horizontal or vertical by the arranged driving component 16, the mounting block 151, the assembly groove 152 and the auxiliary cleaning plate 153 form an auxiliary cleaning mechanism 15, when the cleaning frame 10 moves to the deep position of the exhaust pipeline from the left side, the cleaning plate 153 keeping horizontal can facilitate impurities in the exhaust pipeline to enter the right side of the cleaning frame 10 through the through hole 18 (as shown in fig. 3), then when the cleaning frame 10 moves to the right side, the auxiliary cleaning plate 153 can be driven to keep vertical (as shown in fig. 5) through the driving component 16, the auxiliary cleaning plate 153 in a vertical state can assist the cleaning frame 10 to partially shield the through hole 18 in the process of moving the auxiliary cleaning frame 10 to the right, and it is ensured that most of the impurities can be brought into the first inner cavity 4 through the cleaning frame 10 when the cleaning frame 10 is reset, so that the impurities in the exhaust pipeline are cleaned.

The driving assembly 16 includes a driving shaft 161 slidably connected to the inner cavity of the telescopic shaft 9, a handle block 162 is fixedly installed at the right end of the driving shaft 161 through the right end of the telescopic shaft 9, a fixing block 163 is fixedly installed at the left end of the driving shaft 161 through the left end of the telescopic shaft 9, a limiting slider 171 is integrally formed on the side wall of the driving shaft 161, the limiting slider 171 is slidably connected to a limiting sliding groove 172, a limiting mechanism 17 is composed of the limiting slider 171 and the limiting sliding groove 172, the position of the driving shaft 161 in the telescopic shaft 9 is limited by the sliding connection of the limiting slider 171 and the limiting sliding groove 172, one end of a connecting frame 164 is hinged to the side wall of the fixing block 163, the other end of the connecting frame 164 is hinged to the side wall of the auxiliary cleaning plate 153, the number of the connecting frames 164 is matched with the number of the auxiliary cleaning plate 153, and the positions are corresponding, as shown in fig. 5, after the driving shaft 161 is moved to the right side, the auxiliary cleaning plate 153 can be rotated in the fitting groove 152 by changing the position of the connecting frame 164, and is converted from a horizontal state to a vertical state to partially close the through hole 18.

The working principle is as follows: during the use process, firstly, the butt joint port 2 is in butt joint with an exhaust pipeline of a single crystal furnace, then the driving shaft 161 is pushed to the left side through the handle block 162, the telescopic shaft 9 is moved to the left side through the handle 11, the cleaning frame 10 is driven to move to the deep part of the exhaust pipeline in the process that the telescopic shaft 9 moves to the left side, because the auxiliary cleaning plate 153 is in a horizontal state at the moment, impurities in the exhaust pipeline can enter the right side of the cleaning frame 10 through the through hole 18 in the process that the cleaning frame 10 moves, when the telescopic shaft 9 is controlled to reset, firstly, the driving shaft 161 is moved to the right side through the handle block 162, the driving shaft 161 drives the auxiliary cleaning plate 153 to rotate through the connecting frame 164, the auxiliary cleaning plate 153 is in a vertical state, then the telescopic shaft 9 is reset to the right side, and the through hole 18 is partially sealed due to the auxiliary cleaning plate 153 which is vertical in the moving process, most impurity can follow clearance frame 10 and enter into first inner chamber 4 in collect, convenient subsequent centralized processing, and the clearance to the exhaust duct is accomplished to the clearance in the exhaust duct to the clean cotton 13 of clearance frame 10 lateral wall clearance of few impurity, makes exhaust duct can keep unobstructed.

Claims

1. The utility model provides a cleaning device of single crystal growing furnace exhaust duct, includes body (1), its characterized in that: the left end integrated into one piece of body (1) has butt joint mouth (2), the inner chamber fixed mounting of body (1) has baffle (3), the center department of body (1) runs through telescopic shaft (9), the left end integrated into one piece of telescopic shaft (9) has clearance frame (10), gloves (11) have been cup jointed to the right-hand member lateral wall of telescopic shaft (9), open slot (14) have been seted up to the lateral wall of clearance frame (10), and the center department of open slot (14) is equipped with supplementary clearance mechanism (15), through-hole (18) of running through clearance frame (10) have been seted up in open slot (14), the center department of telescopic shaft (9) is equipped with drive assembly (16) of being connected with supplementary clearance mechanism (15) transmission.

2. The cleaning device for the exhaust pipeline of the single crystal furnace according to claim 1, wherein: the side wall of the partition plate (3) is provided with air holes (6), the side wall of the pipe body (1) is provided with a ventilation groove (7), and the air holes (6) and the ventilation groove (7) are internally and fixedly provided with a separation net (8).

3. The cleaning device for the exhaust pipeline of the single crystal furnace according to claim 1, wherein: the outer side wall of the cleaning frame (10) is provided with a clamping groove (12), and cleaning cotton (13) is clamped in the clamping groove (12).

4. The cleaning device for the exhaust pipeline of the single crystal furnace according to claim 1, wherein: supplementary clearance mechanism (15) are including installation piece (151), installation piece (151) fixed mounting is at the lateral wall of clearance frame (10), assembly groove (152) have evenly been seted up to the lateral wall of installation piece (151), be connected with supplementary clearance board (153) through the axis of rotation in assembly groove (152).

5. The cleaning device for the exhaust pipeline of the single crystal furnace according to claim 1, wherein: drive assembly (16) include drive shaft (161), the inner chamber of telescopic shaft (9) is run through in drive shaft (161), be equipped with stop gear (17) between the lateral wall of drive shaft (161) and the inner chamber of telescopic shaft (9), the left end fixed mounting of drive shaft (161) has fixed block (163), the lateral wall of fixed block (163) articulates the one end that has link (164), and the other end of link (164) articulates mutually with the lateral wall of supplementary cleaning plate (153), the right-hand member fixed mounting of drive shaft (161) has handle piece (162).

6. The cleaning device for the exhaust pipeline of the single crystal furnace according to claim 5, wherein: limiting mechanism (17) include limiting slide block (171) and limiting sliding groove (172), limiting slide block (171) fixed mounting is at the lateral wall of drive shaft (161), limiting slide block (171) sliding connection is in limiting sliding groove (172), the inner chamber lateral wall at telescopic shaft (9) is seted up in limiting sliding groove (172).