CN217426693U - Automatic positioning mechanism for wafer box unlocking - Google Patents
Automatic positioning mechanism for wafer box unlocking Download PDFInfo
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- CN217426693U CN217426693U CN202220745698.XU CN202220745698U CN217426693U CN 217426693 U CN217426693 U CN 217426693U CN 202220745698 U CN202220745698 U CN 202220745698U CN 217426693 U CN217426693 U CN 217426693U
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Abstract
The utility model provides an automatic positioning mechanism for wafer box unblock, including direction supporting member, switching load-bearing member, power drives the component that changes, join in marriage and connect positioning member and location switching component, this automatic positioning mechanism will bear the weight of the bedplate and install on the guide rail pole of supporting seat frame through the switching slider, and set up driving motor below bearing the bedplate, driving motor passes through drive lead screw and drive nut and drives bearing the bedplate and remove along the guide rail pole, make the wafer box on bearing the bedplate can with the accurate butt joint of release mechanism, still set up and fix a position the wafer box of bearing the bedplate top by switching cylinder driven location clamping jaw, avoid the wafer box to slide at the unblock in-process, thereby promote the accuracy and the stability of unblock process, improve unblock efficiency.
Description
Technical Field
The utility model relates to a semiconductor production equipment especially relates to an automatic positioning mechanism for wafer box unblock.
Background
In the operation process of a wafer box unlocking device, a positioning mechanism of the wafer box is relatively fixed, the device is easy to generate micro-deflection after being used for a long time, and meanwhile, after the specification of the wafer box changes, the unlocking device is difficult to adjust in real time, so that the matching state of the unlocking mechanism and the wafer box is not tight enough, the unlocking fault is increased, and the device is damaged. Therefore, a need exists for a wafer cassette positioning mechanism that overcomes the above-mentioned deficiencies.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an automatic positioning mechanism for wafer box unblock to in advance fix a position wafer box, improve unblock efficiency.
The utility model discloses a solve the technical scheme that its technical problem adopted and be:
an automatic positioning mechanism for wafer cassette unlocking comprising:
a guide support member mounted on the frame;
the switching bearing component is arranged on the guide supporting component through a movable connecting structure and can move on the guide supporting component, and a space for placing the wafer box is arranged on the switching bearing component;
the power driving and rotating component is arranged on the rack, is matched with the switching bearing component and drives the switching bearing component to move on the guide supporting component;
the adapting and positioning component is arranged on the adapting and bearing component through a movable connecting structure, is matched with the wafer box and positions the wafer box through the adapting and positioning component;
and the positioning switching component is arranged on the switching bearing component and matched with the matching and connecting positioning component, and the positioning switching component switches the positioning state of the matching and connecting positioning component.
The guide support member includes:
a pair of supporting seat frames, wherein each supporting seat frame is respectively arranged on the machine frame and is parallel to the machine frame;
and a pair of guide rail rods, wherein each guide rail rod is arranged at the top of the supporting seat frame and extends along the length direction of the supporting seat frame.
The adapter carrier includes:
the bearing seat plate is positioned above the guide rail rod, and the top of the bearing seat plate is provided with a space for placing the wafer box;
and the two pairs of the switching slide blocks are arranged, each pair of the switching slide blocks is respectively arranged at the bottom of the bearing seat plate and is matched with the guide rail rod, and the bearing seat plate can move along the guide rail rod through the switching slide rail.
The power driving member includes:
the driving motor is arranged on the rack and is positioned below the bearing seat plate;
the transmission screw rod is connected to the tail end of a power output shaft of the driving motor and is parallel to the guide rail rod;
and the transmission nut is arranged at the bottom of the bearing seat plate and is matched with the transmission screw rod, and the driving motor drives the bearing seat plate to move along the guide rail rod through the transmission screw rod and the transmission nut.
The adaptor positioning member includes:
the assembling seat block is arranged at the bottom of the bearing seat plate;
the middle part of the positioning clamping jaw is installed on the assembling seat block through a rotating shaft, a position avoiding notch is formed in the bearing seat plate, the top of the positioning clamping jaw penetrates through the position avoiding notch and then extends to the upper part of the bearing seat plate, so that the positioning clamping jaw can deflect on the assembling seat block, and the positioning clamping jaw positions the wafer box at the top of the bearing seat plate.
The positioning switching member includes:
the cylinder body of the switching cylinder is arranged at the bottom of the bearing seat plate, the tail end of a piston rod of the switching cylinder is hinged with the bottom of the positioning clamping jaw, and the switching cylinder drives the positioning clamping jaw to switch a deflection position.
The utility model has the advantages that:
this automatic positioning mechanism will bear the weight of the bedplate and install on the guide rail pole of supporting seat frame through the switching slider to set up driving motor in bearing the weight of bedplate below, driving motor passes through transmission lead screw and drive nut and drives and bear the weight of the bedplate and remove along the guide rail pole, make the wafer box that bears on the weight of the bedplate can with the accurate butt joint of release mechanism, still set up and fix a position the wafer box of bedplate top by switching cylinder driven location clamping jaw, avoid the wafer box to slide at the unblock in-process, thereby promote the accuracy and the stability of unblock process, improve unblock efficiency.
Drawings
Fig. 1 is a front schematic structural view of an automatic positioning mechanism for unlocking a wafer cassette according to the present invention;
fig. 2 is a schematic view of the back structure of the automatic positioning mechanism.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 and fig. 2, the automatic positioning mechanism for unlocking a wafer cassette of the present invention comprises a guiding support member, a transferring support member, a power driving member, a matching positioning member and a positioning switching member, wherein the guiding support member is mounted on a frame, the transferring support member is mounted on the guiding support member through a movable connection structure and can move on the guiding support member, the transferring support member has a space for placing the wafer cassette thereon, the power driving member is mounted on the frame and is matched with the transferring support member, the power driving member drives the transferring support member to move on the guiding support member, the matching positioning member is mounted on the transferring support member through a movable connection structure and is matched with the wafer cassette, the wafer cassette is positioned by the matching positioning member, the positioning switching member is mounted on the transferring support member and is matched with the matching positioning member, the positioning state of the mating positioning member is switched by the positioning switching member. In this embodiment, the guide support member includes a pair of support brackets 110, each of which is mounted on the housing and parallel to each other, and a pair of guide rails 120, each of which is mounted on the top of the support bracket and extends in the longitudinal direction of the support bracket. The transfer bearing member comprises a bearing seat plate 210 and transfer sliding blocks 220, the bearing seat plate is positioned above the guide rail rod, the top of the bearing seat plate is provided with a space for placing the wafer box, two pairs of transfer sliding blocks are arranged, each pair of transfer sliding blocks are respectively arranged at the bottom of the bearing seat plate and are matched with the guide rail rod, and the bearing seat plate can move along the guide rail rod through the transfer sliding rails. The power driving component comprises a driving motor 310, a transmission screw rod 320 and a transmission nut 330, the driving motor is installed on the rack and located below the bearing seat plate, the transmission screw rod is connected to the tail end of a power output shaft of the driving motor and parallel to the guide rail rod, the transmission nut is installed at the bottom of the bearing seat plate and matched with the transmission screw rod, and the driving motor drives the bearing seat plate to move along the guide rail rod through the transmission screw rod and the transmission nut. The matched and connected positioning component comprises an assembling seat block 410 and a positioning clamping jaw 420, the assembling seat block is installed at the bottom of the bearing seat plate, the middle part of the positioning clamping jaw is installed on the assembling seat block through a rotating shaft, a position avoiding notch is formed in the bearing seat plate, the top of the positioning clamping jaw penetrates through the position avoiding notch and then extends to the position above the bearing seat plate, so that the positioning clamping jaw can deflect on the assembling seat block, and the positioning clamping jaw positions the wafer box at the top of the bearing seat plate. The location switches the component and including switching cylinder 500, switches the cylinder body of cylinder and installs in bearing the bedplate bottom, and its piston rod end is articulated with location clamping jaw bottom, switches the deflection position by switching cylinder drive location clamping jaw. This automatic positioning mechanism will bear the weight of the bedplate and install on the guide rail pole of supporting seat frame through the switching slider to set up driving motor in bearing the weight of bedplate below, driving motor passes through transmission lead screw and drive nut and drives and bear the weight of the bedplate and remove along the guide rail pole, make the wafer box that bears on the weight of the bedplate can with the accurate butt joint of release mechanism, still set up and fix a position the wafer box of bedplate top by switching cylinder driven location clamping jaw, avoid the wafer box to slide at the unblock in-process, thereby promote the accuracy and the stability of unblock process, improve unblock efficiency.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "left", "right", and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are usually placed when used, or the directions or positional relationships that the skilled person usually understand, which are only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the indicated device or element must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be further noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" should be broadly construed, for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Claims (6)
1. An automatic positioning mechanism for wafer cassette unlocking, comprising:
a guide support member mounted on the frame;
the switching bearing component is arranged on the guide supporting component through a movable connecting structure and can move on the guide supporting component, and a space for placing the wafer box is arranged on the switching bearing component;
the power driving and rotating component is arranged on the rack, is matched with the switching bearing component and drives the switching bearing component to move on the guide supporting component;
the adapting and positioning component is arranged on the adapting and bearing component through a movable connecting structure, is matched with the wafer box and positions the wafer box through the adapting and positioning component;
and the positioning switching component is arranged on the switching bearing component and matched with the matching and connecting positioning component, and the positioning switching component switches the positioning state of the matching and connecting positioning component.
2. The automatic positioning mechanism for wafer cassette unlocking of claim 1 wherein the guide support member comprises:
a pair of supporting seat frames, wherein each supporting seat frame is respectively arranged on the machine frame and is parallel to the machine frame;
and the guide rail rods are provided with a pair of guide rail rods, and each guide rail rod is respectively arranged at the top of the support frame.
3. The automatic positioning mechanism for wafer cassette unlocking of claim 2, wherein the transfer carriage comprises:
the bearing seat plate is positioned above the guide rail rod, and the top of the bearing seat plate is provided with a space for placing the wafer box;
and two pairs of switching slide blocks are arranged, and each pair of switching slide blocks are respectively arranged at the bottom of the bearing seat plate and are matched with the guide rail rod.
4. The automatic positioning mechanism for wafer cassette unlocking of claim 3 wherein the power driven rotation member comprises:
the driving motor is arranged on the rack and is positioned below the bearing seat plate;
the transmission screw rod is connected to the tail end of a power output shaft of the driving motor;
and the transmission nut is arranged at the bottom of the bearing seat plate and is matched with the transmission screw rod.
5. The automatic positioning mechanism for wafer cassette unlocking of claim 3 wherein the adaptor positioning member comprises:
the assembling seat block is arranged at the bottom of the bearing seat plate;
the middle part of the positioning clamping jaw is installed on the assembling seat block through a rotating shaft, a avoiding notch is formed in the bearing seat plate, and the top of the positioning clamping jaw penetrates through the avoiding notch and then extends to the upper part of the bearing seat plate.
6. The automatic positioning mechanism for wafer cassette unlocking of claim 5 wherein the positioning switch member comprises:
the cylinder body of the switching cylinder is arranged at the bottom of the bearing seat plate, and the tail end of a piston rod of the switching cylinder is hinged with the bottom of the positioning clamping jaw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220745698.XU CN217426693U (en) | 2022-04-01 | 2022-04-01 | Automatic positioning mechanism for wafer box unlocking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220745698.XU CN217426693U (en) | 2022-04-01 | 2022-04-01 | Automatic positioning mechanism for wafer box unlocking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217426693U true CN217426693U (en) | 2022-09-13 |
Family
ID=83180855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220745698.XU Active CN217426693U (en) | 2022-04-01 | 2022-04-01 | Automatic positioning mechanism for wafer box unlocking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217426693U (en) |
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2022
- 2022-04-01 CN CN202220745698.XU patent/CN217426693U/en active Active
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