CN217425686U - Distance sensing device - Google Patents

Distance sensing device Download PDF

Info

Publication number
CN217425686U
CN217425686U CN202220717427.3U CN202220717427U CN217425686U CN 217425686 U CN217425686 U CN 217425686U CN 202220717427 U CN202220717427 U CN 202220717427U CN 217425686 U CN217425686 U CN 217425686U
Authority
CN
China
Prior art keywords
light
sensing
blocking layer
array substrate
microlens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202220717427.3U
Other languages
Chinese (zh)
Inventor
范成至
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Egis Technology Inc
Original Assignee
Egis Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW111202074U external-priority patent/TWM629117U/en
Application filed by Egis Technology Inc filed Critical Egis Technology Inc
Application granted granted Critical
Publication of CN217425686U publication Critical patent/CN217425686U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measurement Of Optical Distance (AREA)

Abstract

The utility model provides a distance sensing equipment, including light source and sensing device. The sensing device comprises a light sensing array substrate and a micro-lens layer. The light sensing array substrate comprises a plurality of light sensing units, and the light sensing units are grouped into a plurality of sensing areas. The micro-lens layer is arranged on the light sensing array substrate and comprises a plurality of micro-lenses. The micro lenses are respectively arranged to converge light to be detected on the light sensing units, and each light sensing unit corresponds to one micro lens. The sensing regions and the corresponding microlenses are respectively arranged to enable the sensing regions to sense a plurality of sub-beams corresponding to different fields of view in the light to be detected.

Description

Distance sensing device
Technical Field
The utility model relates to a distance sensing equipment.
Background
One technique for measuring the time of flight of light in a sensor of an optical radar or a time-of-flight ranging sensor is to use a single photon breakdown diode (SPAD) array substrate. In a conventional sensor, a diffractive optical element or a lens is disposed at a sensing end to image light to be detected reflected from a sensing range onto a sensing region. However, the sensing region has a peripheral circuit with a certain width. When the lens images the light to be measured from the outside onto the peripheral circuit, the light of the part cannot be sensed and is wasted. In addition, the range corresponding to the external space of the light becomes a dead zone which cannot be sensed, so that the sensing range of the sensing module adopting the light sensing array substrate in the external space is not continuous, and a plurality of separated dead zones exist. When an object to be measured just falls into the blind area, the distance cannot be measured.
SUMMERY OF THE UTILITY MODEL
According to the utility model discloses an embodiment provides a distance sensing equipment. The sensing devices of the distance sensing apparatus can sense different fields of view (FOV) respectively, and prevent the reflected light to be measured from imaging on the peripheral lines of the sensing regions. The distance sensing equipment with the sensing device can sense a continuous range without the problem of a blind area.
According to an embodiment of the present invention, a distance sensing apparatus is provided, including a light source and a sensing device. The light source is configured to emit a light beam toward a target to be measured, wherein the light beam is formed as light to be measured after being reflected by the target to be measured. The sensing device comprises a light sensing array substrate and a micro lens (micro lenses) layer. The light sensing array substrate comprises a plurality of light sensing units which are arranged in an array, and the light sensing units are grouped into a plurality of sensing areas. The micro-lens layer is arranged on the light sensing array substrate and comprises a plurality of micro-lenses arranged in an array. The micro lenses are respectively arranged to converge light to be detected on the light sensing units, and each light sensing unit corresponds to one micro lens. The sensing regions and the corresponding microlenses are respectively arranged to enable the sensing regions to sense a plurality of sub-beams corresponding to different fields of view in the light to be detected.
Based on the foregoing, the embodiment of the utility model provides a distance sensing equipment corresponds a microlens with each light sensing unit, treats that the photometry is transmitted to the light sensing unit by accurate, and not transmitted to peripheral line, has avoided the light that awaits measuring to be by extravagant situation. By arranging the plurality of light sensing units and the plurality of micro lenses, the distance information of the target to be detected can be completely sensed without a sensing blind area.
In order to make the aforementioned and other features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
Fig. 1 is a schematic diagram of a distance sensing apparatus according to an embodiment of the present invention.
Fig. 2A is a schematic cross-sectional view of a sensing device according to an embodiment of the invention.
FIG. 2B is a schematic plan view of the sensing region of FIG. 2A.
Fig. 2C is a schematic plan view of the microlens layer in fig. 2A.
Fig. 2D is a schematic plan view of a light-transmitting region in the light-blocking layer in fig. 2A.
Fig. 3A is a schematic diagram of a sensing signal of a sensing device according to an embodiment of the present invention.
Fig. 3B is a schematic diagram of a sensing signal of a sensing device according to an embodiment of the present invention.
Fig. 4A is a schematic diagram of a sensing device according to an embodiment of the present invention.
Fig. 4B is a schematic diagram of a sensing device according to an embodiment of the present invention.
The reference numbers illustrate:
100 distance sensing device
100B retaining wall
100R reference light sensing device
100S casing
101 light source
101L beam
102 optical element
200. 200A, 200B sensing device
201 light sensing array substrate
201C peripheral circuit
201R sensing region
202. 202A, 202B multiple field of view filter
202L microlens layer
202S microlens group
211A, 212A, 213A, 214A light sensing unit
211B, 212B, 213B, 214B microlenses
211C, 212C, 213C, 214C light-transmitting hole
B1 target to be measured
LB1, LB2 light-blocking layer
Z1, Z2, Z3, Z4 field of view
SL0 light to be measured
SL1, SL2, SL3, SL4 sub-beams
TL1, TL2 transparent layer
TR1, TR2 light-transmitting region
Detailed Description
Reference will now be made in detail to the embodiments of the present invention, which are illustrated in the accompanying drawings. And wherever possible, the same reference numbers will be used throughout the drawings and the description herein to refer to the same or like parts.
Referring to fig. 1, a schematic diagram of a distance sensing apparatus according to an embodiment of the present invention is shown. The distance sensing apparatus 100 includes a housing 100S, a light source 101 and a sensing device 200, wherein the light source 101 and the sensing device 200 are disposed in the housing 100S, and the housing 100S is provided with an opening above the light source 101 and the sensing device 200. The light source 101 is configured to emit a light beam 101L through an opening of the housing 100S toward the object B1 to be measured. The light beam 101L is reflected by the object B1 to form a light SL0, and the light SL0 includes a plurality of sub-light beams reflected from different positions of the object B1, and the sub-light beams are received by the sensing device 200 through the opening of the housing 100S above the sensing device 200. The distance sensing apparatus 100 may be configured to sense the light SL0 to be detected within the total field of view Z range to obtain the distance between the object B1 to be detected and the distance sensing apparatus 100.
In this embodiment, the distance sensing apparatus 100 may further include an optical element 102, and the optical element 102 may be, for example, a Micro Lens Array (MLA) or a Diffractive Optical Element (DOE), and is disposed in the housing 100S and above the light source 101 to control the optical characteristics of the light beam 101L, but the invention is not limited thereto, and in other embodiments, the distance sensing apparatus 100 may not include the optical element 102.
In this embodiment, the distance sensing apparatus 100 may further include a reference photo sensing device 100R and a retaining wall 100B disposed in the housing 100S, the reference photo sensing device 100R is configured to monitor the light beam 101L emitted by the light source 101, and the retaining wall 100B is disposed between the light source 101 and the sensing device 200 to prevent the light beam 101L from being transmitted to the sensing device 200 in the housing 100S and affecting the sensing result of the distance sensing apparatus 100. The reference light sensing device 100R and the light source 101 are disposed on the same side of the retaining wall 100B. However, the present invention is not limited thereto, and in other embodiments, the distance sensing apparatus 100 does not include the retaining wall 100B, and the multi-field filter to be described below is used to define the viewing angle of the sensing device 200, so that even if the light beam 101L is transmitted to the vicinity of the sensing device 200 in the housing 100S, the light beam will be filtered by the multi-field filter and will not be transmitted to the sensing region in the sensing device 200.
Referring to fig. 2A to 2C, the cross-sectional view shown in fig. 2A corresponds to the dashed line AA' in fig. 2B and 2C. As shown in fig. 2A, the sensing device 200 includes a light sensing array substrate 201 and a multi-field-of-view filter 202. The photo sensing array substrate 201 includes a plurality of sensing regions 201R, and each sensing region 201R includes a plurality of single photon breakdown diodes (211A, 212A, 213A, 214A shown in fig. 2B). The multi-field-of-view filter 202 includes a microlens layer 202L, the microlens layer 202L includes a plurality of microlens clusters 202S, and each microlens cluster 202S includes a plurality of microlenses (e.g., microlenses 211B, 212B, 213B, 214B shown in fig. 2C).
The sensing regions 201R and the microlens groups 202S respectively sense sub-beams corresponding to a part of sub-visual fields in the total visual field Z. In fig. 2A, only 4 sensing regions 201R and 4 microlens arrays 202S are exemplarily shown, and each sensing region 201R corresponds to one microlens array 202S to respectively sense 4 sub-beams corresponding to 4 sub-fields in the total field of view Z. The 4 subfields are hereinafter referred to as fields Z1, Z2, Z3, and Z4, respectively, and the corresponding beamlets are referred to as beamlets SL1, SL2, SL3, and SL4, respectively. However, the present invention is not limited thereto, and the sensing device 200 may include more than 4 sensing regions 201R to respectively sense more than 4 sub-fields of view. In some embodiments, the microlens layer 202L may further include a light shielding layer (not shown) disposed between the plurality of microlens groups 202S, in addition to the plurality of microlens groups 202S, to prevent light from entering from gaps between the microlens groups 202S and causing stray light interference.
For example, fig. 2B illustrates a schematic diagram of the sensing region corresponding to the sub-beam SL4, and fig. 2C illustrates a schematic diagram of the microlens group corresponding to the sub-beam SL 4. As shown in fig. 2B, each sensing region 201R includes a peripheral circuit 201C and 16 light sensing units arranged in a 4 × 4 array. In an embodiment, the light sensing unit is a single photon breakdown diode. As shown in fig. 2C, each microlens group 202S includes 16 microlenses arranged in a 4 × 4 array. However, the present invention is not limited thereto, and in some embodiments, each sensing region 201R may include a plurality of light sensing units arranged in an m × n array, and each microlens group 202S includes a plurality of microlenses arranged in an m × n array, where m and n are positive integers. In some embodiments, mxn is greater than or equal to 2.
It should be noted that the 16 light sensing units shown in fig. 2B correspond one-to-one to the 16 microlenses shown in fig. 2C. For example, the light sensing unit 211A corresponds to the micro lens 211B, the light sensing unit 212A corresponds to the micro lens 212B, the light sensing unit 213A corresponds to the micro lens 213B, and the light sensing unit 214A corresponds to the micro lens 214B, wherein the micro lenses 211B, 212B, 213B, and 214B are respectively illustrated as four lenses sequentially arranged from left to right in the micro lens layer 202L of fig. 2A, which are penetrated by the sub light beam SL 4. That is, the sub-beam SL4 is converged on the light sensing unit 211A after passing through the microlens 211B. After penetrating through the microlens 212B, the sub-beam SL4 converges on the light sensing unit 212A. After penetrating through the microlens 213B, the sub-beam SL4 converges on the light sensing unit 213A. The sub-beam SL4 is converged to the light sensing unit 214A after passing through the microlens 214B. Specifically, referring to fig. 2A, taking the sub-beam SL4 as an example, the microlens group 202S corresponding to the sub-beam SL4 is disposed to be offset from the sensing region 201R, so that the sub-beam SL4 can converge on the photo sensing units 211A, 212A, 213A and 214A without converging on the peripheral circuit 201C. That is, the sub-beam SL4 can be completely sensed, and the optical signal of the field of view Z4 shown in fig. 2A can be completely sensed to obtain the distance information. Similarly, for the fields of view Z1-Z3, the positional relationship (offset relationship) between each microlens group 202S and the sensing region 201R and the size of the light sensing unit in the sensing region 201R are designed appropriately, so that the sub-beams corresponding to different fields of view can be sensed by different sensing regions 201R respectively to obtain distance information of multiple fields of view.
In some embodiments, each sensing region 201R may further include a plurality of light sensing units arranged in an m × n array, and each microlens group 202S may include m p ×n q A plurality of micro lenses arranged in an array, wherein m, n, p and q are positive integers. That is, a plurality of microlenses (p × q) corresponds to 1 photo sensing unit.
In some embodiments of the present invention, the viewing angles (angles of views) of the microlenses 211B, 212B, 213B, and 214B are completely overlapped. In other embodiments, the viewing angles (angles of views) of the microlenses 211B, 212B, 213B, and 214B partially overlap, i.e., the microlenses 211B, 212B, 213B, 214B respectively correspond to a portion of the field of view Z4.
Referring to fig. 2A again, it can be seen that the sensing regions and the microlens groups corresponding to the other sub-beams SL1, SL2, and SL3 are similar to the sensing regions and the microlens groups corresponding to the sub-beam SL 4. Specifically, in the present embodiment, the multiple groups of sensing regions and the microlens groups are disposed in a staggered manner, so that each group receives the sub-beams of different sub-fields. The light beams which are not in each group of light path paths cannot pass through the micro lens and are sensed by the corresponding light sensing units. In other words, the sub-beams SL1, SL2, SL3 and SL4 corresponding to different fields of view Z1, Z2, Z3 and Z4 are sensed by different sensing regions and microlens groups, respectively.
That is, the distance information of the fields of view Z1, Z2, Z3, Z4 shown in fig. 2A can be completely sensed. Moreover, when the sensing regions and the microlens groups are designed to sense sub-beams in consecutive fields of view respectively, for example, the fields of view Z1, Z2, Z3, and Z4 shown in fig. 2A are distributed continuously, the sensing device 200 can sense all sub-beams in the total field of view Z, so that the sensing device 200 has no sensing dead zone. For example, Z1-Z4 are defined as the viewing field regions of-20 degrees to-10 degrees, -10 degrees to 0 degrees, 0 degrees to 10 degrees and 10 degrees to 20 degrees, respectively, and the multi-field filter 202 is designed to have corresponding viewing field angles. For the detailed description of the sensing regions and the microlens groups corresponding to the sub-beams SL1, SL2, and SL3 in fig. 2A, reference may be made to the above description of the sensing regions and the microlens groups corresponding to the sub-beam SL4, which is not repeated herein.
Referring to fig. 2A and 2D together, the cross-sectional view shown in fig. 2A corresponds to the dashed line AA' in fig. 2D. In the embodiment, the multi-field-of-view filter 202 further includes a light blocking layer LB1, light transmissive layers TL1 and TL2 disposed between the photo sensor array substrate 201 and the microlens layer 202L. Light transmissive layers TL1 and TL2 may be filled with air or other light transmissive medium. However, the present invention is not limited to this, and in other embodiments, the size of the light sensing unit in the sensing region is set, so that only the sub-beam with a specific angle range can be received by the corresponding light sensing unit after the light to be detected passes through the micro-lens, and the light blocking layer may not be disposed between the light sensing array substrate 201 and the micro-lens layer 202L under this design.
The light-blocking layer LB1 in fig. 2A includes a plurality of light-transmitting regions TR 1. In fig. 2A, 4 light-transmitting regions TR1 are exemplarily shown only, and each light-transmitting region TR1 corresponds to one microlens group 202S. However, the present invention is not limited to this, and the light blocking layer LB1 may have more than 4 light transmitting regions TR 1.
For example, fig. 2D is a schematic diagram illustrating a light-transmitting region corresponding to the sub-beam SL 4. As shown in fig. 2D, each of the light-transmitting regions TR1 includes 16 light-transmitting holes arranged in a 4 × 4 array. However, the present invention is not limited to this, the design of the aperture size and the position of the light hole can be changed according to different requirements; in some embodiments, each light-transmitting region TR1 may include a plurality of light-transmitting holes arranged in an m × n array, where m and n are positive integers. In some embodiments, mxn is greater than or equal to 2.
It should be noted that the above-mentioned 16 light transmission holes correspond one-to-one to the 16 microlenses in fig. 2C, and also correspond one-to-one to the 16 light sensing units in fig. 2B. For example, the light-transmitting hole 211C corresponds to the microlens 211B, the light-transmitting hole 212C corresponds to the microlens 212B, the light-transmitting hole 213C corresponds to the microlens 213B, and the light-transmitting hole 214C corresponds to the microlens 214B, wherein the light-transmitting holes 211C, 212C, 213C, and 214C are respectively illustrated as four frames sequentially arranged from left to right in the light-blocking layer LB1 of fig. 2A and penetrated by the sub-light beam SL 4. That is, the sub-beam SL4 passes through the micro-lens 211B and the light-transmitting hole 211C, and then converges on the light sensing unit 211A. The sub-beam SL4 passes through the micro-lens 212B and the light hole 212C and then converges on the photo sensing unit 212A. The sub-beam SL4 passes through the micro-lens 213B and the light hole 213C and then converges on the photo sensing unit 213A. The sub-beam SL4 passes through the micro-lens 214B and the light hole 214C and then converges on the light sensing unit 214A.
Please refer to fig. 2A, fig. 2C and fig. 2D simultaneously. As shown in fig. 2A, since the angle between the sub-beam SL4 and the normal of the photo-sensing array substrate 201 is larger than the angle between the sub-beam SL2 or the sub-beam SL3 and the normal, the vertical projection of the geometric center of each of the plurality of light-transmitting holes of the light-transmitting region TR1 corresponding to the sub-beam SL4 on the photo-sensing array substrate 201 may not overlap the vertical projection of the geometric center of the corresponding microlens. For example, the vertical projection of the geometric center of the light-transmitting hole 211C in fig. 2D on the light sensing array substrate 201 does not overlap the vertical projection of the geometric center of the microlens 211B in fig. 2C. Likewise, the vertical projection of the geometric center of the light-transmitting hole 212C in fig. 2D on the light sensing array substrate 201 does not overlap the vertical projection of the geometric center of the microlens 212B in fig. 2C. A vertical projection of the geometric center of the light transmission hole 213C in fig. 2D on the light sensing array substrate 201 does not overlap a vertical projection of the geometric center of the microlens 213B in fig. 2C. The vertical projection of the geometric center of the light-transmitting hole 214C in fig. 2D on the light sensing array substrate 201 does not overlap the vertical projection of the geometric center of the microlens 214B in fig. 2C.
It should be noted that, for the sub-light beams SL2 or SL3 (with a smaller angle with the light sensing array substrate 201) in fig. 2A, the vertical projection of the light-transmitting holes in the corresponding light-transmitting areas on the light sensing array substrate 201 may or may not overlap the vertical projection of the geometric centers of the corresponding microlenses. For the detailed description of the light-transmitting area corresponding to the sub-beam SL1 in fig. 2A, reference may be made to the above description of the light-transmitting area corresponding to the sub-beam SL4, which is not repeated herein.
In the embodiment shown in fig. 2A, the multi-field-of-view filter 202 further includes a light blocking layer LB2 disposed between the light blocking layer LB1 and the light sensing array substrate 201. The light-blocking layer LB2 includes a plurality of light-transmitting regions TR2 corresponding to the plurality of light-transmitting regions TR1 on the light-blocking layer LB 1. Although not shown as a schematic plan view, the light-transmitting region TR2 of the light-blocking layer LB2 has a planar structure similar to the light-transmitting region TR1 of the light-blocking layer LB1 shown in fig. 2D. The light holes in the light-blocking layer LB2 correspond to the light holes in the light-blocking layer LB 1.
Because the included angle between the sub-beam SL4 and the normal of the photo-sensing array substrate 201 is large, the vertical projection of the geometric center of the light-transmitting hole on the light-blocking layer LB1 corresponding to the sub-beam SL4 on the photo-sensing array substrate 201 does not overlap the vertical projection of the geometric center of the light-transmitting hole of the light-blocking layer LB2 corresponding to the sub-beam SL 4. Also, the vertical projection of the geometric center of the light-transmitting hole on the light-blocking layer LB1 corresponding to the sub-beam SL4 on the light sensing array substrate 201 falls between the vertical projection of the geometric center of the light-transmitting hole of the light-blocking layer LB2 corresponding to the sub-beam SL4 and the vertical projection of the geometric center (optical axis) of the corresponding microlens, as shown in fig. 2A.
Fig. 2A, fig. 3A and fig. 3B are schematic diagrams illustrating optical power of a transmission microlens according to an embodiment of the present invention. As described above, by properly designing the positional relationship (offset relationship) between the microlens 202S and the corresponding sensing region 201R, which of the sub-beams SL1 to SL4 is sensed by the sensing region 201R can be determined.
Referring to fig. 3A and 3B, schematic diagrams of sensing signals of the sensing device according to an embodiment of the invention are shown. In one embodiment, the sensing region 201R corresponding to the sub-beam SL2 or the sub-beam SL3 may receive optical signals at an angle of 0 degree to +10 degrees as shown in fig. 3A, and the sensing region 201R corresponding to the sub-beam SL1 or the sub-beam SL4 may receive optical signals at an angle of +10 degrees to +20 degrees as shown in fig. 3B, wherein the angle 0 represents a direction parallel to the normal of the photo-sensing array substrate 201. However, the present invention is not limited thereto, and in other embodiments, the light receiving angles of the different sensing regions 201R can be adjusted according to the requirement. For example, if the angle corresponding to the total field of view is-20 to +20 degrees, when 4 sets of sensing regions 201R are used, the 4 sets of sensing regions 201R may be sequentially configured to receive optical signals in the range of-20 to-10 degrees, receive optical signals in the range of-10 to 0 degrees, receive optical signals in the range of 0 to +10 degrees, and receive optical signals in the range of +10 to +20 degrees. In other embodiments, the light receiving ranges of the 4 sets of sensing regions 201R can be adjusted as required and overlapped with each other. For example, the optical signal receiving device is sequentially configured to receive an optical signal in a range of-20 degrees to-10 degrees, an optical signal in a range of-15 degrees to +5 degrees, an optical signal in a range of 0 degrees to +15 degrees, and an optical signal in a range of +10 degrees to +20 degrees.
In order to fully illustrate various aspects of the present invention, other embodiments of the invention will be described below. It should be noted that the following embodiments follow the reference numerals and parts of the contents of the foregoing embodiments, wherein the same reference numerals are used to indicate the same or similar elements, and the description of the same technical contents is omitted. For the description of the omitted parts, reference may be made to the foregoing embodiments, and the following embodiments will not be repeated.
Referring to fig. 4A, a schematic diagram of a sensing device according to an embodiment of the invention is shown. The sensing device 200A includes a light sensing array substrate 201 and a multi-field-of-view filter 202A. The multi-field-of-view filter 202A includes a microlens layer. The viewing fields Z3, Z4, Z1 and Z2 are sequentially arranged from left to right, wherein the viewing fields Z1, Z2, Z3 and Z4 respectively correspond to the sensing region 201R on the photo-sensing array substrate 201 from left to right.
Referring to fig. 4B, a schematic diagram of a sensing device according to an embodiment of the invention is shown. The sensing device 200B includes a light sensing array substrate 201 and a multi-field-of-view filter 202B. The multi-field-of-view filter 202B includes a microlens layer. The viewing fields Z2, Z1, Z4 and Z3 are sequentially arranged from left to right, wherein the viewing fields Z1, Z2, Z3 and Z4 respectively correspond to the sensing region 201R on the light sensing array substrate 201 from left to right. In fig. 2A, the fields of view sensed by the different sequentially arranged sensing regions 201R are also sequentially arranged. In contrast, the multi-field-of-view filter and the photo sensing array substrate may be designed according to the requirement, such that the fields of view sensed by the different sensing regions 201R arranged in sequence are configured in a staggered manner, as shown in fig. 4A and 4B.
To sum up, the embodiment of the utility model provides a sensing device and distance sensing equipment correspond a microlens with each light sensing unit, treat that the photometry is transmitted to light sensing unit by accurate, and not transmitted to peripheral circuit, have avoided the light that awaits measuring by extravagant situation. By arranging the plurality of light sensing units and the plurality of micro lenses, the distance information of the target to be detected can be completely sensed without a sensing blind area.
It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present disclosure cover modifications and variations of this disclosure that fall within the scope of the appended claims and their equivalents.

Claims (9)

1. A distance sensing apparatus, comprising:
the light source is configured to emit a light beam towards a target to be measured, wherein the light beam is reflected by the target to be measured to form light to be measured; and
a sensing device, comprising:
the light sensing array substrate comprises a plurality of light sensing units which are arranged in an array, and the plurality of light sensing units are grouped into a plurality of sensing areas; and
a microlens layer disposed on the light sensing array substrate and including a plurality of microlenses arranged in an array, wherein the plurality of microlenses are respectively disposed to converge the light to be detected on the plurality of light sensing units, and each light sensing unit corresponds to one microlens,
wherein the plurality of sensing regions are respectively arranged to sense a plurality of sub-beams corresponding to different fields of view in the light to be detected.
2. The distance sensing apparatus of claim 1, wherein each of the sensing regions comprises at least a plurality of the light sensing units arranged in an m x n array, m and n are positive integers, and m x n ≧ 2.
3. The distance sensing device according to claim 1, wherein the sensing device further comprises at least one light blocking layer disposed between the light sensing array substrate and the microlens layer, the at least one light blocking layer having a plurality of light holes, and the plurality of light holes respectively correspond to the plurality of microlenses.
4. The distance sensing device of claim 3, wherein a vertical projection of a geometric center of at least one of the plurality of light-transmissive holes onto the light sensing array substrate does not overlap a vertical projection of a geometric center of the corresponding microlens.
5. The distance sensing apparatus according to claim 3, wherein the at least one light blocking layer comprises a first light blocking layer and a second light blocking layer disposed between the first light blocking layer and the light sensing array substrate, the first light blocking layer and the second light blocking layer each have a plurality of light holes, and the plurality of light holes of the first light blocking layer correspond to the plurality of light holes of the second light blocking layer, respectively.
6. The distance sensing apparatus of claim 5, wherein a vertical projection of a geometric center of at least one light-transmitting hole of the first light-blocking layer onto the light-sensing array substrate does not overlap a corresponding vertical projection of a geometric center of the light-transmitting hole of the second light-blocking layer.
7. The distance sensing apparatus of claim 6, wherein the vertical projection of the geometric center of the at least one light-transmitting hole of the first light-blocking layer falls between a vertical projection of the geometric center of the corresponding microlens on the light sensing array substrate and the vertical projection of the geometric center of the light-transmitting hole of the second light-blocking layer.
8. Distance sensing device according to claim 1, characterized in that the light sensing unit is a single photon breakdown diode.
9. The distance sensing device of claim 1, wherein the different fields of view for the plurality of sub-beams sensed by the plurality of sensing regions are continuously distributed.
CN202220717427.3U 2021-04-06 2022-03-29 Distance sensing device Active CN217425686U (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163171569P 2021-04-06 2021-04-06
US63/171,569 2021-04-06
TW111202074U TWM629117U (en) 2021-04-06 2022-03-02 Distance sensing apparatus
TW111202074 2022-03-02

Publications (1)

Publication Number Publication Date
CN217425686U true CN217425686U (en) 2022-09-13

Family

ID=83181867

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220717427.3U Active CN217425686U (en) 2021-04-06 2022-03-29 Distance sensing device

Country Status (1)

Country Link
CN (1) CN217425686U (en)

Similar Documents

Publication Publication Date Title
JP5488928B2 (en) Optical navigation device, input device for data processing unit, and method of controlling a cursor on an image output device
CN110275606B (en) Sensing element
WO2019027100A1 (en) Multi-channel lidar sensor module
CN105229788A (en) Have further function, especially for the optical imaging apparatus being calculated to be picture
US8946638B2 (en) Subpixel resolution by interpolation of crosstalk from adjacent pixels
KR20190091801A (en) Image sensor
US11532657B2 (en) Image sensor and imaging apparatus having the same
JP7262600B2 (en) Screen assembly and electronic device
US11776301B2 (en) Fingerprint detection apparatus and electronic device
KR20190000052A (en) Light transmission apparatus and tof module using the same
CN108594249B (en) Display panel and method for measuring distance of external object by using same
US20200084850A1 (en) Light grid
CN217425686U (en) Distance sensing device
US20200045297A1 (en) Depth map generator
CN111818242A (en) Image sensing device
CN111726601B (en) Image sensing device
US20200273899A1 (en) Photoelectric conversion device, method of manufacturing photoelectric conversion device, imaging system, and image reading apparatus
TWM629117U (en) Distance sensing apparatus
US11658195B2 (en) Image sensor including microlenses having different shapes
CN114467176A (en) Image sensor, image processing method and device and imaging system
KR102393910B1 (en) Tiled image sensor
KR20180053916A (en) Image sensor
US20220333911A1 (en) Distance sensing apparatus
CN113176551B (en) Light source assembly, emission module and electronic equipment
US11923388B2 (en) Image sensing device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant