CN217423930U

CN217423930U - Tantalum oxide ceramic target vacuum hot pressing furnace

Info

Publication number: CN217423930U
Application number: CN202221103344.1U
Authority: CN
Inventors: 侯闽渤
Original assignee: Guangde Tewang Photoelectric Material Co ltd
Current assignee: Guangde Tewang Photoelectric Material Co ltd
Priority date: 2022-05-09
Filing date: 2022-05-09
Publication date: 2022-09-13
Anticipated expiration: 2032-05-09

Abstract

The utility model discloses a tantalum oxide ceramic target vacuum hot pressing furnace, including casing, furnace body, heating member, mould and heat-conducting member, wherein: the shell is provided with a vacuum cavity, the furnace body is arranged in the vacuum cavity, and the shell is provided with an exhaust pipe as in the prior art; the furnace body is provided with a heating cavity, the heating elements are arranged in the side walls of the heating cavity, the heating elements are arranged on each side wall of the heating cavity, and the heating elements can be electric heating elements in the prior art; the mould is arranged in the heating cavity, the heat conducting piece is vertically provided with a heat conducting through hole, and the mould is sleeved in the heat conducting through hole. The utility model discloses in, the tantalum oxide ceramic target vacuum hot pressing stove that provides, simple structure is convenient for carry out the even heating to the mould through setting up of heat-conducting piece, and then increases the quality of product.

Description

Tantalum oxide ceramic target vacuum hot pressing furnace

Technical Field

The utility model relates to an electric stove technical field especially relates to a tantalum oxide ceramic target vacuum hot pressing stove.

Background

Metal, ceramic and some refractory metal intermediate compound powders need to be heated and sintered into materials with certain density and certain mechanical properties. The powdery material is put in a high-carbon mould in vacuum and protective atmosphere, and is pressed and molded when heated to a softening state at high temperature. The vacuum hot-pressing furnace combines vacuum, hot-pressing molding and high-temperature sintering together, and is mainly suitable for high-temperature hot-forming of new materials such as powder metallurgy, functional ceramics and the like. With the leap of science and technology, the high-temperature sintering process under normal pressure cannot meet the requirement of new material production. Thus, a new process of vacuum hot pressing slowly appeared.

The existing vacuum hot-pressing furnace generally comprises a shell, a heating element, a furnace body, a mold and a pressurizing element, wherein the mold is placed in the heating furnace body, the common heating element is installed on the inner wall of the furnace body, and the outer wall of the mold is different in shape and further different in distance from the outer wall of the mold to the heating element, so that the mold is heated unevenly and further the quality of the part is influenced to a certain degree.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems existing in the background technology, the utility model provides a tantalum oxide ceramic target vacuum hot pressing furnace.

The utility model provides a tantalum oxide ceramic target vacuum hot pressing furnace, including casing, furnace body, heating member, mould and heat-conducting member, wherein:

the shell is provided with a vacuum cavity, the furnace body is arranged in the vacuum cavity, and the shell is provided with an exhaust pipe as in the prior art;

the furnace body is provided with a heating cavity, the heating elements are arranged in the side walls of the heating cavity, the heating elements are arranged on each side wall of the heating cavity, and the heating elements can be electric heating elements in the prior art;

the mould is arranged in the heating cavity, the heat conducting piece is vertically provided with a heat conducting through hole, and the mould is sleeved in the heat conducting through hole.

As the utility model discloses the scheme of further optimization, the outer wall of heat-conducting piece is parallel with heating chamber lateral wall, and the inside wall of through-hole is parallel with the lateral surface of mould, further increases the heat conduction effect of heat-conducting piece, makes the mould be heated evenly.

As the utility model discloses the scheme of further optimization, including elastic component and heat-conducting plate, the heat-conducting plate passes through the elastic component to be installed at heat conduction through-hole lateral wall, and the heat-conducting plate is kept away from one side of heat conduction through-hole and the lateral wall contact of mould, and is concrete, and the elastic component is high temperature resistant elastic component, and the elastic component can be the spring that high temperature resistant material made among the prior art.

As the utility model discloses the scheme of further optimization, the heat-conducting plate is equipped with two at least, and two piece at least heat-conducting plates cladding mould outer wall completely, and then the homogeneity of increase to the mould heat conduction.

Under the even prerequisite of guaranteeing that the mould is heated, can be again in the pressurization in-process and then avoid the mould to take place deformation, conduct the utility model discloses the scheme of further optimizing, when heat-conducting plate and mould outer wall contact, the elastic component is in compression state.

As the utility model discloses the scheme of further optimizing, it includes first heat conduction spare and second heat conduction spare to lead the heat conduction spare, first heat conduction spare and second heat conduction spare can be dismantled and connect, first heat conduction spare and second heat conduction spare have first heat conduction opening and second heat conduction opening respectively, first heat conduction opening and second heat conduction opening form the heat conduction through-hole, at least one heat-conducting plate passes through the elastic component to be installed in first heat conduction opening, and at least one heat-conducting plate passes through the elastic component to be installed in second heat conduction opening.

As the utility model discloses the scheme of further optimization is equipped with the heat conduction backup pad in the heating chamber, and the mould is installed in the heat conduction backup pad with heat conduction spare. This preferred solution enables the mold to be heated more uniformly than if the mold were mounted directly on the lower bottom surface of the heating cavity.

As the utility model discloses the scheme of further optimization still includes compresses tightly piece and driving piece, compresses tightly the piece and installs the removal end at the driving piece, and the driving piece is installed on the casing, compresses tightly in the piece extends to the heating chamber and is arranged in extruding the mould that heats in the chamber.

The utility model discloses in, the tantalum oxide ceramic target vacuum hot pressing stove that provides, simple structure is convenient for carry out the even heating to the mould through setting up of heat-conducting piece, and then increases the quality of product.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of the present invention;

fig. 2 is a schematic view of the internal structure of the housing of the present invention.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar designations denote like or similar elements or elements having like or similar functionality throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

It will be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in an orientation or positional relationship indicated in the drawings for convenience and simplicity of description only, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, a first feature "on" or "under" a second feature may be directly contacting the second feature or the first and second features may be indirectly contacting the second feature through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

The tantalum oxide ceramic target vacuum hot pressing furnace shown in fig. 1-2 comprises a shell 1, a furnace body 2, a heating element 3, a supporting plate 4, a mold 5, a heat conducting element 6, a pressing element 7 and a driving element 8, wherein:

the shell 1 is provided with a vacuum cavity, the furnace body 2 is arranged in the vacuum cavity, the shell 1 is provided with structures (not shown in the figure) such as an exhaust pipe, and the like, and the shell 1 is vacuumized by a vacuum machine through the exhaust pipe;

the furnace body 2 has a heating chamber, the heating elements 3 are installed in the side walls of the heating chamber, the heating elements 3 are installed in each side wall of the heating chamber, and the heating elements 3 can be electric heating elements 3 in the prior art;

the supporting plate 4 is arranged in the heating cavity, specifically, the supporting plate 4 is arranged in the heating cavity through a supporting column, a supporting rod 9 is vertically arranged, and the distance between the supporting surface of the supporting plate 4 and the lower bottom surface and the distance between the supporting surface and the upper top surface of the heating cavity are basically equal;

the mould 5 is arranged on the supporting plate 4 of the heating cavity, the heat conducting piece 6 is provided with a vertical heat conducting through hole, and the mould 5 is sleeved in the heat conducting through hole;

the outer wall of the heat conducting piece 6 is parallel to the side wall of the heating cavity, and the inner side wall of the through hole is parallel to the outer side surface of the mold 5, so that the heat conducting effect of the heat conducting piece 6 is further improved, and the mold 5 is heated uniformly;

the heat conduction plate comprises an elastic part 10 and a heat conduction plate 11, wherein the heat conduction plate 11 is arranged on the side wall of a heat conduction through hole through the elastic part 10, one side, away from the heat conduction through hole, of the heat conduction plate 11 is in contact with the outer side wall of the mold 5, specifically, the elastic part 10 is a high-temperature-resistant spring, if the outer side wall of the mold 5 is cylindrical, the elastic part 10 can elastically deform along the radial direction of the mold 5, and if the outer side wall of the mold 5 is a numerical plane, the elastic part 10 can deform along the direction vertical to the outer side surface of the mold 5;

the two heat conduction plates are arranged and completely cover the outer wall of the mold 5, so that the uniformity of heat conduction to the mold 5 is improved; when the heat conducting plate is contacted with the outer wall of the mold 5, the elastic part 10 is in a compressed state, so that the mold 5 can be prevented from deforming in the pressurizing process on the premise of ensuring the uniform heating of the mold 5;

specifically, the heat conducting member 6 includes a first heat conducting member 60 and a second heat conducting member 61, the first heat conducting member 60 and the second heat conducting member 61 are detachably connected, the first heat conducting member 60 and the second heat conducting member 61 have a first heat conducting opening and a second heat conducting opening, respectively, the first heat conducting opening and the second heat conducting opening form a heat conducting through hole, one heat conducting plate 11 is installed in the first heat conducting opening through the elastic member 10, and one heat conducting plate 11 is installed in the second heat conducting opening through the elastic member 10;

the driving piece 8 is installed on the housing 1, the driving piece 8 is an electric cylinder in the prior art, the pressing piece 7 extends into the heating cavity and is used for extruding the die 5 in the heating cavity, and the pressing piece 7 is a pressing plate made of a high-temperature resistant material.

In the course of the work, at first place the material in mould 5, then install first heat-conducting piece 60 in backup pad 4, it is concrete, can install first heat-conducting piece 60 in backup pad 4 through the mounting, and make the heat-conducting plate 11 of first heat-conducting piece 60 contradict with the outer wall of mould 5, then install second heat-conducting piece 61 in backup pad 4 and try on the heat-conducting plate 11 on the second heat-conducting piece 61 and contradict with the outer wall of mould 5, heat-conducting through-hole is constituteed to first heat-conducting piece 60 and second heat-conducting piece 61, and the cladding heat-conducting plate mould 5 of first heat-conducting piece 60 and second heat-conducting piece 61, and high temperature resistant spring is in compression state, then evacuation to casing 1, then heating member 3 heats, driving member 8 drives and compresses tightly mould 5 by compressing tightly 7.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a tantalum oxide ceramic target vacuum hot pressing stove which characterized in that, includes casing, furnace body, heating member, mould and heat-conducting member, wherein:

the shell is provided with a vacuum cavity, and the furnace body is arranged in the vacuum cavity;

the furnace body is provided with a heating cavity, and the heating element is arranged in the side wall of the heating cavity;

2. The tantalum oxide ceramic target vacuum hot-pressing furnace as claimed in claim 1, wherein the outer wall of the heat conducting member is parallel to the side wall of the heating cavity, and the inner side wall of the through hole is parallel to the outer side surface of the mold.

3. The vacuum hot-pressing furnace for tantalum oxide ceramic targets as claimed in claim 1, comprising an elastic member and a heat conducting plate, wherein the heat conducting plate is mounted on the side wall of the heat conducting through hole through the elastic member, and the side of the heat conducting plate away from the heat conducting through hole is in contact with the outer side wall of the mold.

4. The tantalum oxide ceramic target vacuum autoclave furnace of claim 2, wherein the heat conducting plates are at least two, and at least two heat conducting plates completely cover the outer wall of the mold.

5. The tantalum oxide ceramic target vacuum autoclave furnace of claim 3, wherein the elastic member is in a compressed state when the heat conducting plate is in contact with the outer wall of the mold.

6. The tantalum oxide ceramic target vacuum autoclave furnace according to claim 3, wherein the heat conducting member comprises a first heat conducting member and a second heat conducting member, the first heat conducting member and the second heat conducting member are detachably connected, the first heat conducting member and the second heat conducting member respectively have a first heat conducting opening and a second heat conducting opening, and the first heat conducting opening and the second heat conducting opening form a heat conducting through hole.

7. The tantalum oxide ceramic target vacuum hot pressing furnace according to claim 2, wherein a heat conducting support plate is arranged in the heating cavity, and the mold and the heat conducting member are mounted on the heat conducting support plate.

8. The tantalum oxide ceramic target vacuum hot pressing furnace according to claim 1, further comprising a pressing member and a driving member, wherein the pressing member is mounted at a moving end of the driving member, the driving member is mounted on the housing, and the pressing member extends into the heating cavity and is used for pressing the mold in the heating cavity.