CN217411834U

CN217411834U - Sampling valve safety interlocking assembly of wet groove type wafer cleaning machine table

Info

Publication number: CN217411834U
Application number: CN202220545584.0U
Authority: CN
Inventors: 李鲤帆
Original assignee: Guangzhou Yuexin Semiconductor Technology Co Ltd
Current assignee: Yuexin Semiconductor Technology Co ltd
Priority date: 2022-03-14
Filing date: 2022-03-14
Publication date: 2022-09-13
Anticipated expiration: 2032-03-14

Abstract

The safety interlocking component of the sampling valve of the wet-process groove type wafer cleaning machine comprises an interlocking main body, a sampling valve and a sampling valve, wherein the interlocking main body is connected with one end of a cover body, which faces a cleaning cavity; the interlocking body comprises a supporting rod and an abutting plate; the abutting plate is connected to the cover body through a supporting rod; the extending direction of the supporting rod is parallel to the buckling direction of the cover body; and the length of the supporting rod is accumulated, the distance of the thickness of the butt plate corresponds to the distance between the first closing position and the cover body, so that the cover body is buckled in the cleaning cavity, the butt plate can push the handle to rotate to the first closing position from the opening position, at the moment, the butt plate is in contact with the handle when the cover body is buckled in the cleaning cavity, the handle is driven to swing towards the first closing position, the handle is guaranteed to be maintained at the first closing position when the cover body is buckled in the cleaning cavity, the detection of the state of the handle is avoided, and the safety of the wet groove type wafer cleaning machine table is improved.

Description

Sampling valve safety interlocking assembly of wet groove type wafer cleaning machine table

Technical Field

The utility model belongs to the technical field of semiconductor chip processing and specifically relates to a sample valve safety interlock subassembly of wet process slot type wafer cleaning machine platform.

Background

Along with the development of science and technology, semiconductor processing equipment is applied to in the washing process of semiconductor, and semiconductor processing equipment is semiconductor slot type wet process cleaning equipment, and semiconductor processing equipment is including wasing chamber, lid and handle, and the handle is connected in wasing the chamber to be in wasing the intracavity, when semiconductor processing equipment is in non-operating condition, the lid closes and washs the chamber, and at this moment, the state of handle does not have the detection means, and operating personnel forgets to close the handle after closing and wasing the chamber occasionally.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a sampling valve safety interlocking component of a wet groove type wafer cleaning machine platform, which comprises a cleaning cavity and a cover body capable of covering the cleaning cavity; the sampling valve is arranged in the cleaning cavity and is provided with a handle capable of controlling the switch through rotation; said handle being rotatable between a first closed position and an open position; the handle is arranged towards the cover body;

the sampling valve safety interlocking assembly of the wet groove type wafer cleaning machine platform comprises:

an interlocking body connected to an end of the cover body facing the washing chamber; the interlocking body comprises a supporting rod and an abutting plate; the abutting plate is connected to the cover body through a supporting rod; the extending direction of the supporting rod is parallel to the buckling direction of the cover body; and the length of the supporting rod is accumulated, and the distance between the thickness of the abutting plate corresponds to the distance between the first closing position and the cover body, so that when the cover body is buckled in the cleaning cavity, the abutting plate can push the handle to rotate from the opening position to the first closing position.

The utility model discloses in another kind of embodiment of the sample valve safety interlocking subassembly of well wet process slot type wafer cleaning board, the bracing piece is telescopic structure and flexible direction also the time delay direction of bracing piece is unanimous.

The utility model discloses in another kind of embodiment of the sample valve safety interlocking subassembly of well wet process slot type wafer cleaning board, the bracing piece includes: an outer tube and an inner tube; the outer tube comprises an inner sleeve hole arranged along the extension direction of the outer tube; the inner tube is slidably disposed in the inner sleeve bore.

In another embodiment of the safety interlocking assembly of the sampling valve of the middle wet groove type wafer cleaning machine table, an internal thread is arranged in the inner sleeve hole; and the outer periphery of the inner pipe is provided with external threads so that the outer pipe and the inner pipe are connected through threads.

In another embodiment of the sampling valve safety interlock assembly of the wet process tank type wafer cleaning machine of the present invention, the outer tube is fixedly connected to the cover; the inner pipe is connected with the abutting plate.

In another embodiment of the sampling valve safety interlock assembly of the wet process tank type wafer cleaning machine of the present invention, the inner pipe is fixedly connected to the outer pipe by a screw or a threaded rod; the extending direction of the screw or the threaded rod is perpendicular to the extending direction of the supporting rod.

The utility model discloses in another kind of embodiment of the sample valve safety interlocking subassembly of well wet process slot type wafer cleaning board, inside external diameter of tubes is: phi 1 cm-phi 1.5 cm; the length of the inner pipe is 4 cm-6 cm; the outer diameter of the inner pipe is as follows: phi is 1.2cm to phi 1.7 cm; the length of the inner tube is 4 cm-6 cm.

In another embodiment of the safety interlock assembly for a sampling valve of a wet tank wafer cleaning machine of the present invention, the open position and the inner surface of the cover have an inclination angle; the inclination angle is 80-60 degrees.

The utility model discloses in another kind of embodiment of the sample valve safety interlock subassembly of well wet process slot type wafer cleaning board, the length of butt joint board is: 5 cm-5.5 cm; the width of the abutting plate is 2 cm-2.5 cm.

The utility model discloses in another kind of embodiment of the sample valve safety interlocking subassembly of well wet process slot type wafer cleaning board, the bracing piece with the material of butt plate is plastics.

Drawings

The following drawings are only schematic illustrations and explanations of the present invention, and do not limit the scope of the present invention.

FIG. 1 is an exploded view of one illustrative embodiment of a sample valve safety interlock assembly for a wet tank wafer cleaning station.

FIG. 2 is a front view of one illustrative embodiment of a sample valve safety interlock assembly of a wet tank wafer cleaning station.

Fig. 3 is a sectional view taken along the direction a in fig. 2.

Fig. 4 is a partial enlarged view in the direction B in fig. 3.

Figure 5 is a schematic view of one illustrative embodiment of a support bar for an interlocking group of semiconductor processing equipment.

Detailed Description

In order to clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will be described with reference to the accompanying drawings, wherein the same reference numerals in the drawings denote the same or similar components.

"exemplary" means "serving as an example, instance, or illustration" herein, and any illustration, embodiment, or steps described as "exemplary" herein should not be construed as a preferred or advantageous alternative.

In an embodiment of the present invention, as shown in fig. 1 to 5, a semiconductor processing apparatus is provided, which includes a wet groove type wafer cleaning machine 100 and a sampling valve safety interlock assembly 200 of the wet groove type wafer cleaning machine, wherein the wet groove type wafer cleaning machine 100 includes a cleaning chamber 10 and a cover 20 capable of covering the cleaning chamber; the sampling valve 30 is arranged in the cleaning cavity 10 and is provided with a handle 31 which can be controlled to be switched by rotating; the handle 31 is rotatable between a first closed position and an open position; the handle 31 is provided toward the lid body 20, and at this time, the state is changed by rotating the handle 31.

The sampling valve safety interlocking assembly 200 of the wet groove type wafer cleaning machine platform comprises an interlocking main body 40, wherein the interlocking main body 40 is connected with one end, facing a cleaning cavity, of a cover body 20; the interlocking body 40 includes a support rod 41 and an abutting plate 42; the abutting plate 42 is connected to the cover body 20 through the support rod 41; the extending direction of the support rod 41 is parallel to the buckling direction of the cover body 20; and the distance of the thickness of the support rod 41 accumulating the thickness of the abutting plate 42 corresponds to the distance between the first closed position and the cover 20, so that when the cover 20 is fastened to the cleaning cavity, the abutting plate 42 can push the handle 31 to rotate from the open position to the first closed position, at this time, when the cover 20 is fastened to the cleaning cavity, the abutting plate 42 contacts the handle 31 and drives the handle 31 to swing towards the first closed position, thereby ensuring that the handle 31 is maintained at the first closed position when the cover 20 is fastened to the cleaning cavity, avoiding the detection of the state of the handle 31, and improving the safety of the wet groove type wafer cleaning machine 100.

Wherein, the bracing piece 41 is the telescopic structure and the flexible direction also the delay direction of bracing piece 41 is unanimous, and the length of bracing piece 41 self is adjusted under the flexible state to the distance between adjustment butt plate 42 and the lid 20, so that improve the commonality of the sample valve safety interlock subassembly 200 of wet process slot type wafer cleaning board, the various service environment of adaptation.

The support rod 41 includes an outer tube 411 and an inner tube 412; the outer tube 411 is fixedly connected with the cover body 20; the inner tube 412 is connected with the abutting plate 42, and at this time, the distance between the cover body 20 and the abutting plate 42 is adjusted by the relative movement between the outer tube 411 and the inner tube 412, wherein the outer tube 411 comprises an inner sleeve hole arranged along the extending direction of the outer tube 411; the inner tube 412 is slidably disposed in the inner sleeve hole, and at this time, the inner tube 412 is sleeved in the inner sleeve hole and practically slides under the guide of the inner sleeve hole to realize the relative sliding between the outer tube 411 and the inner tube 412, thereby realizing the extension and contraction of the support rod 41. Optionally, an internal thread is arranged in the inner sleeve hole; the outer circumference of the inner pipe 412 is externally threaded so that the outer pipe 411 and the inner pipe 412 are threadedly coupled. Optionally, the inner tube 412 is fixedly connected with the outer tube 411 by screws or bolts; the extension direction of the screw or bolt is perpendicular to the extension direction of the support bar 41.

Specifically, the outer diameter of the inner tube 412 is: phi 1 cm-phi 1.5 cm; the length of the inner tube 412 is 4cm to 6 cm; the outer diameter of the inner tube 412 is: phi is 1.2cm to phi 1.7 cm; the length of the inner tube 412 is 4cm to 6 cm. The length of the abutting plate 42 is: 5 cm-5.5 cm; the width of the abutting plate 42 is 2 cm-2.5 cm. The support rod 41 and the abutting plate 42 are made of plastic. The open position and the inner face of the lid 20 have an oblique angle; the inclination angle is 80-60 degrees.

It should be understood that although the description has been described in terms of various embodiments, not every embodiment may include only a single embodiment, and such description is for clarity only, and those skilled in the art will recognize that the embodiments described herein may be combined as a whole to form other embodiments as would be understood by those skilled in the art.

The above list of details is only for the practical examples of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent embodiments or modifications, such as combinations, divisions or repetitions of the features, which do not depart from the technical spirit of the present invention, should be included in the scope of the present invention.

Claims

1. A safety interlocking component of a sampling valve of a wet groove type wafer cleaning machine is characterized in that the wet groove type wafer cleaning machine comprises a cleaning cavity and a cover body capable of covering the cleaning cavity; the sampling valve is arranged in the cleaning cavity and is provided with a handle capable of rotating a control switch; said handle being rotatable between a first closed position and an open position; the handle is arranged towards the cover body;

an interlocking body connected to an end of the cover facing the wash chamber; the interlocking body comprises a supporting rod and an abutting plate; the abutting plate is connected to the cover body through a supporting rod; the extending direction of the supporting rod is parallel to the buckling direction of the cover body; and the length of the supporting rod is accumulated, and the distance between the thickness of the abutting plate corresponds to the distance between the first closing position and the cover body, so that when the cover body is buckled in the cleaning cavity, the abutting plate can push the handle to rotate from the opening position to the first closing position.

2. The sampling valve safety interlock assembly of a wet slot wafer cleaning machine as claimed in claim 1, wherein the support rod is of a telescopic structure and the telescopic direction is also the same as the delay direction of the support rod.

3. The sample valve safety interlock assembly for a wet slot wafer cleaning station of claim 1, wherein the support bar comprises: an outer tube and an inner tube; the outer tube comprises an inner sleeve hole arranged along the extension direction of the outer tube; the inner tube is slidably disposed in the inner sleeve bore.

4. The sampling valve safety interlock assembly of a wet slot wafer cleaning machine as claimed in claim 3, wherein the inner sleeve hole is internally threaded; and the outer periphery of the inner pipe is provided with external threads so that the outer pipe and the inner pipe are connected through threads.

5. The sampling valve safety interlock assembly of a wet tank wafer cleaning station of claim 3, wherein the outer tube is fixedly connected to the lid; the inner pipe is connected with the abutting plate.

6. The sampling valve safety interlock assembly of a wet slot wafer cleaning machine as claimed in claim 3, wherein the inner tube is fixedly connected to the outer tube by a screw or bolt; the extending direction of the screw or the threaded rod is perpendicular to the extending direction of the supporting rod.

7. The sample valve safety interlock assembly for a wet tank wafer cleaning machine of claim 1, wherein the open position and the interior face of the lid have an oblique angle; the inclination angle is 80-60 degrees.

8. The sample valve safety interlock assembly for a wet slot wafer cleaning station of claim 1, wherein the length of the abutment plate is: 5 cm-5.5 cm; the width of the abutting plate is 2 cm-2.5 cm.

9. The sampling valve safety interlock assembly of a wet slot wafer cleaning station of claim 1, wherein the support bar and the abutment plate are made of plastic.