CN217404344U - Crystal bar performance continuous test frame for semiconductor production - Google Patents
Crystal bar performance continuous test frame for semiconductor production Download PDFInfo
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- CN217404344U CN217404344U CN202220297936.5U CN202220297936U CN217404344U CN 217404344 U CN217404344 U CN 217404344U CN 202220297936 U CN202220297936 U CN 202220297936U CN 217404344 U CN217404344 U CN 217404344U
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Abstract
The utility model discloses a continuous testing jig of crystal bar performance for semiconductor production, which relates to the technical field of crystal bar testing, and comprises a plurality of supports, a tester body arranged at the left front end of the top of the support, a transverse plate arranged at the left rear end of the top of the support through a stand column and the transverse plate arranged below the transverse plate in a sliding manner and an upper testing plate used for detecting crystal bars, wherein the crystal bars are respectively fixed in a placing mechanism; the bottom of the lower measuring seat is provided with a rotating shaft which is rotationally connected with the bracket and is driven by a motor. The utility model discloses in, earlier through placing the fixed a plurality of crystal bars of mechanism, measurement personnel only need to insert the mechanism with placing in the support top pivoted base of surveying down, realize a plurality of crystal bars fast and detect in succession on the testing stand to reduce measurement personnel's working strength great, thereby improve crystal bar capability test's efficiency.
Description
Technical Field
The utility model relates to a crystal bar test technical field especially relates to a crystal bar performance continuous test frame for semiconductor production.
Background
The crystal bar refers to the whole monocrystalline silicon, because the preparation of the monocrystalline silicon bar is completed by a czochralski method and a zone melting method, the finished product is rod-shaped, so the crystal bar is called as the crystal bar, and the performance of the crystal bar needs to be detected for the convenience of later processing of the crystal bar at present.
Traditional crystal bar capability test needs the test personnel a lot of single crystal bar clamping on the test rack, and the test rack can't be continuous detects the crystal bar for test personnel's working strength is great, thereby leads to crystal bar capability test's efficiency lower.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem of insufficiency in the prior art and providing a continuous testing jig of crystal bar performance for semiconductor production.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a continuous test rack for the performance of crystal bars for semiconductor production comprises a support, a tester body arranged at the left front end of the top of the support, a transverse plate which is arranged at the left rear end of the top of the support through a stand column, and an upper test plate which is arranged below the transverse plate in a sliding manner and used for detecting crystal bars, wherein a plurality of crystal bars are respectively fixed in a placing mechanism, a lower test seat used for placing the placing mechanism is rotatably arranged at the right side of the top of the support, and the upper test plate and the lower test seat are respectively and electrically connected with the tester body;
the bottom of the lower measuring seat is provided with a rotating shaft which is rotationally connected with the bracket, and the rotating shaft is driven by a motor;
the placing mechanism comprises a circular plate which is arranged in the lower measuring seat in an up-and-down sliding mode, a plurality of placing holes which are formed in the circumference of the circular plate and used for placing crystal bars, a plurality of third electric telescopic rods which are embedded in the placing holes respectively, and clamping plates which are arranged at the output ends of the third electric telescopic rods and used for clamping the crystal bars in a disassembling mode, wherein the third electric telescopic rods are perpendicular to the crystal bars, and the placing holes are through holes.
Furthermore, a plurality of infrared transmitters which are in one-to-one correspondence with the placing holes are embedded in the upper surface of the circular plate, the infrared transmitters are located on one side, away from the circle center of the circular plate, of the placing holes, and an infrared receiver matched with the infrared transmitters is arranged on the left side of the upper measuring plate.
Further, infrared receiver is connected with the control panel electricity, control panel sets up in the stand front side, be provided with treater and relay in the control panel, infrared receiver's output is connected with the input electricity of treater, the output of treater is connected with the input electricity of relay, the output and the motor electricity of relay are connected.
Furthermore, the bottom of the circular plate is provided with a connecting plate, the left side and the right side of the connecting plate are respectively provided with two conductive blocks connected with the anode and the cathode of the infrared receiver, the inner wall of the lower measuring seat is provided with two conductive columns inserted with the conductive blocks, and the two conductive columns are electrically connected with a power supply.
Further, the inner wall of the placing hole and one side of the clamping plate contacting with the crystal bar are provided with first insulating pads, and second insulating pads are arranged between the inner walls of the conducting block and the connecting plate and between the guide column and the inner wall of the lower measuring seat.
Furthermore, the left end and the right end of the bottom of the inner wall of the lower measuring base are respectively provided with a guide post, and the lower part of the circular plate is provided with a guide groove inserted with the guide post.
Furthermore, a button for controlling a plurality of third electric telescopic rods is arranged in the middle of the top of the circular plate, and the left side and the right side of the top of the circular plate are respectively provided with a handle convenient to hold.
Further, go up survey board top and be provided with second electric telescopic handle, cooperation and diaphragm sliding connection through slider and spout are passed through at second electric telescopic handle top, be provided with the first electric telescopic handle of being connected with the slider in the diaphragm, the diaphragm bottom is seted up and is used for the gliding slide rail of second electric telescopic handle, second electric telescopic handle is connected with the output electricity of relay.
Compared with the prior art, the utility model discloses possess following beneficial effect:
the utility model discloses in, earlier through the fixed a plurality of crystal bars of placement mechanism, measurement personnel only need insert the support top pivoted with placement mechanism in surveying the seat down, realize a plurality of crystal bars fast and detect in succession on the testing stand in the time measuring seat down to it is great to reduce measurement personnel's working strength, thereby improves crystal bar capability test's efficiency.
Drawings
Fig. 1 is a schematic structural view of a continuous testing jig for the performance of a crystal bar for semiconductor production according to the present invention;
FIG. 2 is a front view of a placement mechanism in a continuous testing jig for the performance of a crystal bar for semiconductor production according to the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2;
fig. 4 is a front view of a third electric telescopic rod and a clamping plate in the continuous testing jig for the performance of the crystal bar for semiconductor production according to the present invention;
fig. 5 is a top view of a placing mechanism in a continuous testing jig for testing the performance of a crystal bar for semiconductor production according to the present invention.
In the figure: 1. a support; 2. a tester body; 3. a transverse plate; 4. a first electric telescopic rod; 5. a second electric telescopic rod; 6. an upper measuring plate; 61. an infrared receiver; 7. a lower measuring seat; 71. a guide post; 72. a conductive post; 8. a placement mechanism; 81. a circular plate; 82. placing holes; 83. a third electric telescopic rod; 84. a splint; 85. an infrared emitter; 86. carrying by hand; 87. a conductive block; 88. a button; 9. and (4) crystal bars.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Referring to fig. 1-5, a continuous testing jig for the performance of a crystal bar for semiconductor production comprises a tester body 2, a plurality of crystal bars 9, a transverse plate 3 and an upper testing plate 6, wherein the bracket 1 is arranged at the left front end of the top of the bracket 1, the transverse plate 3 is arranged at the left rear end of the top of the bracket 1 through a stand column, the upper testing plate 6 is arranged below the transverse plate 3 in a sliding manner and is used for detecting the crystal bars 9, the crystal bars 9 are respectively fixed in a placing mechanism 8, a lower testing seat 7 is rotatably arranged at the right side of the top of the bracket 1 and is used for placing the placing mechanism 8, and the upper testing plate 6 and the lower testing seat 7 are respectively and electrically connected with the tester body 2;
the bottom of the lower measuring seat 7 is provided with a rotating shaft which is rotationally connected with the bracket 1 and is driven by a motor;
the placing mechanism 8 comprises a circular plate 81 arranged in the lower measuring seat 7 in a vertically sliding mode, a plurality of placing holes 82 formed in the circumference of the circular plate 81 and used for placing the crystal bars 9, third electric telescopic rods 83 respectively embedded in the placing holes 82, and clamping plates 84 detachably arranged at the output ends of the third electric telescopic rods 83 and used for clamping the crystal bars 9, the third electric telescopic rods 83 are perpendicular to the crystal bars 9, and the placing holes 82 are through holes.
Further, a plurality of infrared transmitters corresponding to the placing holes 82 one to one are embedded in the upper surface of the circular plate 81, the infrared transmitters are located on one side of the placing holes 82 far away from the circle center of the circular plate 81, and the infrared receiver 61 matched with the infrared transmitters is arranged on the left side of the upper measuring plate 6.
Further, infrared receiver 61 is connected with control panel electricity, and control panel sets up in the stand front side, is provided with treater and relay in the control panel, and infrared receiver 61's output is connected with the input electricity of treater, and the output of treater is connected with the input electricity of relay, and the output and the motor electricity of relay are connected.
Further, the bottom of the circular plate 81 is provided with a connecting plate, the left side and the right side of the connecting plate are respectively provided with two conductive blocks 87 connected with the anode and the cathode of the infrared receiver 61, the inner wall of the lower measuring seat 7 is provided with two conductive columns 72 inserted into the conductive blocks 87, and the two conductive columns 72 are electrically connected with a power supply.
Further, the inner wall of the placing hole 82 and the side of the clamping plate 84 contacting the ingot 9 are provided with first insulating pads, and second insulating pads are provided between the conductive block 87 and the inner wall of the connecting plate and between the guide column 71 and the inner wall of the lower measuring seat 7.
Furthermore, the left end and the right end of the bottom of the inner wall of the lower measuring seat 7 are respectively provided with a guide post 71, and the lower part of the circular plate 81 is provided with a guide groove inserted with the guide post 71.
Further, a button 88 for controlling the plurality of third electric telescopic rods 83 is arranged in the middle of the top of the circular plate 81, and handgrips 86 convenient to hold by hand are respectively arranged on the left side and the right side of the top of the circular plate 81.
Further, go up survey 6 tops of board and be provided with second electric telescopic handle 5, cooperation and the diaphragm 3 sliding connection of slider and spout are passed through at 5 tops of second electric telescopic handle, are provided with the first electric telescopic handle 4 of being connected with the slider in the diaphragm 3, and 3 bottoms of diaphragm are offered and are used for the gliding slide rail of second electric telescopic handle 5, and second electric telescopic handle 5 is connected with the output electricity of relay.
The working principle is as follows: in actual use, the crystal bars 9 are sequentially placed into the plurality of placing holes 82 in the circular plate 81, then the button 88 on the top of the circular plate 81 is pressed to start the third electric telescopic rod 83 in the placing hole 82 to extend, and the crystal bars 9 in the placing holes 82 are clamped by the clamping plates 84 at the end parts of the third electric telescopic rod 83;
further, two handgrips 86 at the top of the circular plate 81 are held to place the circular plate 81 into the lower measuring seat 7, and two guide grooves at the bottom of the circular plate 81 are inserted into two guide posts 71 in the lower measuring seat 7;
when the circular plate 81 is inserted into the lower measuring seat 7, the conductive block 87 in the connecting plate at the bottom of the circular plate 81 is inserted into the conductive post 72 in the lower measuring seat 7, so that the plurality of infrared emitters 85 at the top of the circular plate 81 are electrified;
further, the first electric telescopic rod 4 is started to drive the second electric telescopic rod 5 to move, so that the upper measuring plate 6 at the bottom of the second electric telescopic rod 5 is positioned above the crystal bar 9;
further, a motor is started to rotate to drive the lower measuring seat 7 to rotate, so that the circular plate 81 in the lower measuring seat 7 rotates, when the crystal bar 9 on the circular plate 81, which is close to the upper measuring plate 6, is positioned under the crystal bar 9, so that the infrared emitter 85 on one side of the crystal bar 9 is aligned with the infrared emitter 85 on the left side of the upper measuring plate 6, at the moment, the infrared emitter 85 is triggered, the infrared emitter 85 sends a signal to a processor for processing, the processor sends an instruction to a relay to control the motor to stop rotating, and meanwhile, the second electric telescopic rod 5 is controlled to be started, so that the upper measuring plate 6 at the bottom of the second electric telescopic rod 5 is contacted with the top of the crystal bar 9, and further, parameter information of the crystal bar 9 is sent to the tester body 2 to be convenient for an operator to observe;
the above operations are repeated until the whole set of boules 9 are detected, the hand-held handle 86 removes the disk 81, places a new disk 81 thereon, and detects the parameters of the boules 9 on the new disk 81.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (8)
1. The continuous testing frame for the performance of the crystal bar for semiconductor production is characterized by comprising a support (1), a tester body (2) arranged at the left front end of the top of the support (1), a transverse plate (3) arranged at the left rear end of the top of the support (1) through an upright post, and an upper testing plate (6) which is arranged below the transverse plate (3) in a sliding manner and used for detecting the crystal bar (9), wherein a plurality of crystal bars (9) are respectively fixed in a placing mechanism (8), a lower testing seat (7) used for placing the placing mechanism (8) is rotatably arranged at the right side of the top of the support (1), and the upper testing plate (6) and the lower testing seat (7) are respectively and electrically connected with the tester body (2);
the bottom of the lower measuring seat (7) is provided with a rotating shaft which is rotationally connected with the bracket (1), and the rotating shaft is driven by a motor;
the placing mechanism (8) comprises a circular plate (81) which is arranged in the lower measuring seat (7) in an up-and-down sliding mode, a plurality of placing holes (82) which are arranged on the circumference of the circular plate (81) and used for placing crystal bars (9), third electric telescopic rods (83) which are respectively embedded in the placing holes (82) and clamping plates (84) which are arranged at the output ends of the third electric telescopic rods (83) and used for clamping the crystal bars (9) in a disassembling mode, wherein the third electric telescopic rods (83) are perpendicular to the crystal bars (9), and the placing holes (82) are through holes.
2. The apparatus according to claim 1, wherein a plurality of infrared transmitters corresponding to the placing holes (82) one by one are embedded in the upper surface of the circular plate (81), the infrared transmitters are located on one side of the placing holes (82) far away from the center of the circular plate (81), and an infrared receiver (61) matched with the infrared transmitters is arranged on the left side of the upper measuring plate (6).
3. The continuous testing jig of the performance of the crystal bar for the semiconductor production as claimed in claim 2, wherein the infrared receiver (61) is electrically connected with a control panel, the control panel is arranged on the front side of the upright post, a processor and a relay are arranged in the control panel, the output end of the infrared receiver (61) is electrically connected with the input end of the processor, the output end of the processor is electrically connected with the input end of the relay, and the output end of the relay is electrically connected with the motor.
4. The continuous testing jig for the performance of the crystal bar for the production of the semiconductor according to claim 3, characterized in that a connecting plate is arranged at the bottom of the circular plate (81), two conductive blocks (87) connected with the positive electrode and the negative electrode of the infrared receiver (61) are respectively arranged at the left side and the right side of the connecting plate, two conductive posts (72) inserted with the conductive blocks (87) are arranged on the inner wall of the lower measuring seat (7), and the two conductive posts (72) are electrically connected with a power supply.
5. The continuous test jig for the performance of the crystal bar for the production of the semiconductor according to claim 4, characterized in that the inner wall of the placing hole (82) and one side of the clamping plate (84) contacting with the crystal bar (9) are provided with a first insulating pad, and second insulating pads are arranged between the conductive block (87) and the inner wall of the connecting plate and between the guide column (71) and the inner wall of the lower test seat (7).
6. The continuous testing jig for the performance of the crystal bar for the production of the semiconductor according to claim 5, characterized in that the left and right ends of the bottom of the inner wall of the lower testing seat (7) are respectively provided with a guide post (71), and the lower part of the circular plate (81) is provided with a guide groove inserted with the guide post (71).
7. The continuous test jig for the performance of the crystal bar for the production of semiconductors according to claim 6, characterized in that a button (88) for controlling a plurality of third electric telescopic rods (83) is arranged in the middle of the top of the circular plate (81), and a handle (86) convenient to hold is respectively arranged on the left side and the right side of the top of the circular plate (81).
8. The continuous testing jig for the performance of the crystal bar for the semiconductor production according to claim 1, characterized in that a second electric telescopic rod (5) is arranged at the top of the upper testing plate (6), the top of the second electric telescopic rod (5) is slidably connected with the transverse plate (3) through the matching of a sliding block and a sliding groove, a first electric telescopic rod (4) connected with the sliding block is arranged in the transverse plate (3), a sliding rail used for the sliding of the second electric telescopic rod (5) is arranged at the bottom of the transverse plate (3), and the second electric telescopic rod (5) is electrically connected with the output end of the relay.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220297936.5U CN217404344U (en) | 2022-02-15 | 2022-02-15 | Crystal bar performance continuous test frame for semiconductor production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220297936.5U CN217404344U (en) | 2022-02-15 | 2022-02-15 | Crystal bar performance continuous test frame for semiconductor production |
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| CN217404344U true CN217404344U (en) | 2022-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220297936.5U Active CN217404344U (en) | 2022-02-15 | 2022-02-15 | Crystal bar performance continuous test frame for semiconductor production |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117288435A (en) * | 2023-09-26 | 2023-12-26 | 杭州爱晶伦科技有限公司 | Intraocular lens glare testing device and application method thereof |
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- 2022-02-15 CN CN202220297936.5U patent/CN217404344U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117288435A (en) * | 2023-09-26 | 2023-12-26 | 杭州爱晶伦科技有限公司 | Intraocular lens glare testing device and application method thereof |
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