CN217385877U - Multifunctional efficient beam splitter based on super-structured grating - Google Patents
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Abstract
The utility model discloses a multi-functional high-efficient beam splitter based on super structure grating, the beam splitter includes a plurality of periodically distributed super structure gratings, super structure grating includes a plurality of interval distribution's dielectric layer, is formed with a plurality of air slits between the dielectric layer, and the dielectric layer equals with the thickness of air slit, and the dielectric layer has different widths, and the air slit has different widths, and every super structure grating's phase delay stridees across 2 pi's phase range, and phase difference delta phi between the adjacent air slit equals. The utility model discloses a beam splitter can realize the high efficiency beam splitting of energy and polarization simultaneously based on the diffraction mechanism of super structure grating to have the broadband response, can be applicable to imaging system and optical communication field.
Description
Technical Field
The utility model belongs to the technical field of the light beam transmission, concretely relates to multi-functional high-efficient beam splitter based on super structure grating.
Background
A Beam splitter (LBS) can split an incident Beam into two parts, is an indispensable optical element in modern advanced optical technology, and plays an important role in many applications and various optical devices, such as optical switches, optical polarizers, quantum photonic integrated circuits, communication devices, etc., and the LBS is usually a grating or a half-reflecting mirror surface, which is heavy and difficult to integrate into compact optical devices.
With the development of integrated photonics, there is an urgent need for compact and efficient LBS, which motivates efforts to achieve this goal in various ways. The emergence of optical phase gradient super-surfaces (PGM) in nanophotonics provides us with a new paradigm for designing compact, flat, high-performance LBS. PGM is a periodic arrangement of sub-wavelength element atoms, and by properly designing the interaction between light and element atoms, the amplitude, phase and polarization characteristics of electromagnetic waves (EM) can be effectively manipulated, thereby creating various functions such as ultra-thin stealth, superlens, retro-reflection, asymmetric propagation, and the like.
However, for most subsurface-based LBS reported so far, they can only achieve polarization splitting or energy separation for fixed polarized light, and few studies report that both functions are simultaneously achieved in one design. Photonic integrated systems have flexible and versatile optical flow control capabilities, and thus a multifunctional, efficient LBS is needed.
Therefore, in view of the above technical problems, it is necessary to provide a multifunctional high-efficiency beam splitter based on a super-structured grating.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a multifunctional high-efficiency beam splitter based on a super-structured grating.
In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:
a multifunctional efficient beam splitter based on an ultra-structure grating comprises a plurality of periodically distributed ultra-structure gratings, each ultra-structure grating comprises a plurality of medium layers distributed at intervals, a plurality of air slits are formed between the medium layers, the thickness of each medium layer is equal to that of each air slit, the medium layers have different widths, the air slits have different widths, the phase delay of each ultra-structure grating spans the phase range of 2 pi, and the phase difference delta phi between the adjacent air slits is equal.
In one embodiment, the beam splitter is configured to implement polarization splitting of an incident beam, where the incident beam includes transverse electric polarized light and transverse magnetic polarized light, and the beam splitter is capable of implementing total reflection of the transverse electric polarized light and negative refraction with a lowest diffraction order of the transverse magnetic polarized light.
In one embodiment, the super-structure grating comprises m air slits, the period width of the super-structure grating is p, the thicknesses of the dielectric layer and the air slits are d, and the width of the air slits is w i I is 1 to m, the center distance between adjacent air slits is p/m, and the phase difference Δ Φ between adjacent air slits is 2 pi/m.
In one embodiment, the transverse magnetic polarized light has only a fundamental mode in the air slit, and satisfies:
wherein beta is i For the propagation constant, its real part represents the propagating wave vector, its imaginary part represents the dissipation of surface plasmons in the air slit, k 0 2 pi/lambda is the wave vector in vacuum, lambda is the wavelength of the incident beam, epsilon m Is the dielectric constant of the dielectric layer;
phase delay phi of ith air slit i Comprises the following steps:
Φ i ＝β i *d-δ；
where δ is the additional phase produced by multiple reflections at the interface between the grating and air.
In one embodiment, the dielectric layer is made of silver and has a dielectric constant epsilon m The period width of the super-structure grating is p ═ lambda, the thickness of the medium layer and the air slit is d ═ 0.6 lambda-2.4 lambda, the super-structure grating comprises 5 air slits, the width is w respectively 1 、w 2 、w 3 、w 4 、w 5 And the phase difference delta phi between the adjacent air slits is 2 pi/5.
In one embodiment, the wavelength λ of the incident light beam is 590nm to 668nm,incident angle of theta i ∈(-74°,-7°)。
In one embodiment, when the wavelength λ of the incident light beam is 650nm and d is 1.5 λ, the widths of the air slits are w 1 ＝120nm、w 2 ＝68nm、w 3 ＝46nm、w 4 ＝34nm、w 5 ＝27nm。
In one embodiment, the incident angle and the reflection angle of the transverse magnetic polarized light at the super-structured grating satisfy:
k 0 sinθ i ＝k 0 sinθ t +nG；
wherein,
for phase gradient, θ i And theta t Angle of incidence and angle of refraction, respectively, G-2 pi/p is the reciprocal lattice vector, n is the diffraction order, and ζ -G.
In one embodiment, n-1 is the lowest diffraction order of the transverse magnetic polarized light;
when the incident angle is less than the critical angle, the refracted light follows a diffraction order of n-1;
when the angle of incidence is greater than the critical angle, the refracted light follows a diffraction order of n-1.
In one embodiment, the reflection extinction ratio ERTE of the transverse electric polarized light is greater than 10dB, and the transmission extinction ratio ERTM of the transverse magnetic polarized light is greater than 132 dB.
The utility model discloses following beneficial effect has:
the utility model discloses a beam splitter can realize the high efficiency beam splitting of energy and polarization simultaneously based on the diffraction mechanism of super structure grating to have the broadband response, can be applicable to imaging system and optical communication field.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a multifunctional high-efficiency beam splitter based on a super-structured grating according to the present invention;
FIG. 2 shows an embodiment of the present invention in which the phase delay phi i And the width w of the air slit i A corresponding relation curve chart of (2);
fig. 3a is a graph illustrating the correspondence between the incident angle of transverse magnetic polarized light (TM) and the diffraction efficiency of each diffraction order according to an embodiment of the present invention;
fig. 3b is a graph illustrating the correspondence between the incident angle of transverse electric polarized light (TE) and the diffraction efficiency of each diffraction order according to an embodiment of the present invention;
fig. 3c is a diagram showing a magnetic field simulation of transverse magnetic polarized light (TM) according to an embodiment of the present invention;
fig. 3d is a diagram illustrating a magnetic field simulation of transverse electric polarized light (TE) according to an embodiment of the present invention;
FIG. 4a shows the reflection extinction ratio ER in an embodiment of the present invention TE And the incidence angle;
FIG. 4b shows the transmittance-extinction ratio ER in an embodiment of the present invention TE And the incidence angle;
fig. 4c shows an incident angle θ according to an embodiment of the present invention i A plot of the frequency response of transverse electric polarized light (TE) at-30 °;
FIG. 4d shows an incident angle θ according to an embodiment of the present invention i A plot of the frequency response of transverse magnetic polarized light (TM) at-30 °;
FIG. 5a shows the incident angle and T at different thicknesses according to an embodiment of the present invention -1 A plot of the diffraction efficiency of orders;
FIG. 5b shows the incident angle and R at different thicknesses according to an embodiment of the present invention 0 A plot of the diffraction efficiency of orders;
fig. 5c is a graph showing the relationship between the absorption efficiency and the thickness according to an embodiment of the present invention;
FIG. 5d shows an incident angle θ according to an embodiment of the present invention i When equal to-30 DEGThe magnetic field simulation diagram of (1).
Detailed Description
In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall fall within the protection scope of the present invention.
Based on the concept of PGM, by exploring and manipulating its diffractive properties, the present invention designs a PGM-based multi-functional beam splitter (LBS) that works in the optical zone. As is well known, PGMs are periodic gratings with supercells containing m cells with different optical responses that discretely introduce an Abrupt Phase Shift (APS) that covers exactly 2 π. The introduced APS creates a phase gradient (i.e., an additional wave vector) that changes the basic laws of reflection and refraction of light occurring at the interface. Diffraction effects are prevalent in PGMs, with higher order diffraction described by the odd-even dependence of diffraction laws. Therefore, free control of diffraction effects in PGMs and their efficiency is key to improving the performance of PGM-based devices, including beam splitters.
The utility model discloses a LBS is a pure plasmon PGM, introduces along the required APS of transmission interface through the width of adjustment air slit, and the air slit has decided the propagation wave vector through its surface plasmon. It has been demonstrated that the designed LBS can achieve both energy and polarization efficient beam splitting with broadband and wide-angle response. For example, when transverse electric polarized light (TE) and transverse magnetic polarized light (TM) are in theta i LBS may completely reflect transverse electric polarized light (TE) at an incident angle of-30 ° simultaneously, with a reflection angle θ r At-30 °, perfect specular reflection occurs; whereas for transverse magnetic polarized light (TM), due to the diffraction effect in PGM, efficient negative refraction with the lowest diffraction order can be seen in LBS, and the angle of refraction is θ t 30 ° is set. In this way, polarization splitting can be achieved. In addition, the ohmic loss of the metal plays an important role in determining the diffraction efficiency of each diffraction order on the reflection side and the transmission side of TM polarization. With these physical principles, the LBS can also uniformly transfer TM polarized incident energy to the reflective and refractive sides. The utility model discloses to the research of LBS based on PGM have fundamental meaning, and the design that proposes shows huge application potential in fields such as integrated optical communication or light measurement.
The utility model discloses a multi-functional high-efficient beam splitter (LBS) based on super structure grating in the embodiment, the beam splitter includes a plurality of periodically distributed super structure grating, the structure of single period super structure grating is referred to as shown in figure 1, super structure grating includes a plurality of interval distribution's dielectric layer 10, be formed with a plurality of air slits 20 between the dielectric layer 10, the dielectric layer is equal with the thickness of air slit, the dielectric layer has different widths, the air slit has different widths, the phase delay of every super structure grating stridees across the phase range of 2 pi, phase difference delta phi between the adjacent air slit equals.
The beam splitter is used for realizing polarization splitting of incident beams, the incident beams comprise transverse electric polarized light (TE) and transverse magnetic polarized light (TM), and the beam splitter can realize total reflection of the transverse electric polarized light and negative refraction with the lowest diffraction order of the transverse magnetic polarized light.
The super-structure grating comprises m air slits, the period width of the super-structure grating is p, the thicknesses of the dielectric layer and the air slits are d, and the width of the air slits is w i I is 1-m, the center distance between adjacent air slits is a-p/m, the phase difference between adjacent air slits is delta phi 2 pi/m, and w i Has a sub-wavelength size satisfying w i <<λ。
Specifically, the super-structured grating in this embodiment includes 5 air slits each having a width w 1 、w 2 、w 3 、w 4 、w 5 The dielectric layer is made of metal silver.
Transverse magnetic polarized light only has a fundamental mode in the air slit, and the following conditions are met:
wherein, beta i For the propagation constant, its real part represents the propagating wave vector, its imaginary part represents the dissipation of surface plasmons in the air slit, k 0 2 pi/lambda is the wave vector in vacuum, lambda is the wavelength of the incident beam, epsilon m Is the dielectric constant of the dielectric layer;
when the incident beam passes through the ith air slit and reaches the transmission interface, the total phase delay Φ i Comprises the following steps:
Φ i ＝β i *d-δ；
where δ is the additional phase produced by multiple reflections at the interface between the grating and air, and the value of δ is the same for all air slits.
According to the PGM concept, the phase delay of each super-structured grating spans a phase range of 2 pi, and the phase difference Δ Φ between adjacent air slits is equal. Thus, by adjusting the width w of each air slit i The required phase shift can be achieved discretely.
In this embodiment, the wavelength λ of the incident beam is set to 650nm, and the dielectric constant ∈ of the dielectric layer m 17.36+0.715i, the super-structure grating includes 5 air slits (i.e. m is 5), the period width of the super-structure grating is p is λ, the thickness of the medium layer and the air slits is d is 1.5 λ, and the phase delay Φ i And the width w of the air slit i As shown in fig. 2, in order to ensure that the phase difference Δ Φ between the adjacent air slits is equal, the widths of the air slits in this embodiment are w 1 ＝120nm、w 2 ＝68nm、w 3 ＝46nm、w 4 ＝34nm、w 5 ＝27nm。
When transverse magnetic polarized light is incident, a phase gradient is introduced on the transmission side
It will control the direction of the outgoing light. The incident angle and the reflection angle satisfy:
k 0 sinθ i ＝k 0 sinθ t +nG；
wherein,
for phase gradient, θ i And theta t Angle of incidence and angle of refraction, respectively, G-2 pi/p is reciprocal lattice vector, n is diffraction order, n-v-1, and ζ -G.
v-0 (i.e., n-1) is the lowest diffraction order of the transverse magnetically polarized light, which predicts the critical angle θ at which higher order diffraction occurs i 0 deg.. When the incident angle is smaller than the critical angle (theta) i < 0 °), the refracted light follows a diffraction order of n ═ 1; when the incident angle is larger than the critical angle (theta) i > 0 deg.), the refracted light follows a diffraction order of n-1.
On the other hand, for transverse electric polarized light, it will be totally reflected by the super-structured grating due to the presence of the sub-wavelength air slits.
Next, how the incident beam achieves polarization splitting in the super-structured grating is analyzed.
FIG. 3a is a graph of the relationship between the angle of incidence of transverse magnetic polarized light (TM) and the diffraction efficiency per diffraction order. When theta is measured i At < 0 °, the transmission of the lowest diffraction order dominates (i.e., n-1), and the angle of incidence θ i At 30 °, the transmission efficiency is about 70%. When theta is i At > 0 deg., diffraction is dominated by reflection of higher order n-1 due to the parity of m (where m is 5), the incident light will be efficiently coupled into reflected light of order n-1, which means that in this case back reflection will occur, especially at the angle of incidence θ i At 30 °, θ r ＝-30°，R -1 About 40%. In higher order diffraction, more dissipation or lower diffraction efficiency is caused by multiple reflections inside the grating.
FIG. 3b is a graph showing the relationship between the incident angle of transverse electric polarized light (TE) and the diffraction efficiency of each diffraction order. Only n-0 order reflections are left reflections and dominate, since the sub-wavelength air slits are well below the cut-off frequency at which TE passes. Specular reflection, θ, occurs for the incident TE beam i ＝θ r . When the incident angle theta i When the angle is 30 DEG, the reflection isEfficiency of R 0 ＝96％。
Fig. 3c and fig. 3d are the magnetic field simulation diagram of horizontal magnetic polarization light (TM) and horizontal electric polarization light (TE) respectively, and it is visible, the TM takes place high-efficient negative refraction, and perfect reflection appears in the TE, consequently, the utility model discloses a super structure grating can realize efficient polarization beam splitting.
The extinction ratio, which is often an important parameter for evaluating the performance of a polarizing beam splitter, is divided into the reflection extinction ratio ER TE And the transmission extinction ratio ER TM Namely:
reflection extinction ratio ER TE The ratio of the reflection efficiency of transverse electric polarized light (TE) to transverse magnetic polarized light (TM), and the transmission extinction ratio ER TM Refers to the ratio of the transmission efficiency of Transverse Magnetic (TM) polarized light to Transverse Electric (TE) polarized light.
FIG. 4a shows the reflection extinction ratio ER in this embodiment TE And the relationship between the incident angle, when theta i E (-74 DEG, -7 DEG), the reflection extinction ratio ER TE Are all above 10dB, and when theta is i At-62 deg. the reflection extinction ratio ER TE And at the highest, 18 dB. FIG. 4b shows the transmission extinction ratio ER in this embodiment TE And the angle of incidence, the transmission extinction ratio ER over the entire angular range TM Relatively high (ER) TE >130 dB). Generally, when the incident angle θ i E (-74 DEG, -7 DEG), the reflection extinction ratio ER TE And the transmission extinction ratio ER TM Are all larger than 10dB, the device is considered to have good polarization beam splitting effect. Therefore, the utility model provides a super grating has wide angle response characteristic.
In addition, fig. 4c and 4d show the incident angle θ in this embodiment, respectively i A frequency response curve of-30 deg., although the wavelength λ in the above embodiment is illustrated with 650nm as an example, it still has a broadband response with polarization splitting due to tolerances in the PGM design. ER TE >At 10dB, the bandwidth is about 78nm, the wavelength lambda is 590 nm-668 nm, wherein ER TM Greater than 132 dB.
In addition, the super-structured grating in this embodiment can also realize energy splitting of only transverse magnetic polarized light (TM), and referring to fig. 3a or fig. 3c, the incident energy is divided into three parts, corresponding to R respectively 0 、T 0 And T -1 The orders are diffracted. Due to the loss of the two metal structures themselves and the interaction between the surface plasmons passing through the air slit, the energy splitting can be controlled by controlling the thickness of the grating, thereby determining the diffraction efficiency of each diffraction order. FIG. 5a and FIG. 5b show the incident angle and T at different thicknesses -1 And R 0 The phase gradient in the case of the graphs of the diffraction efficiency of the order of 0.6 λ, 1.5 λ, 2.4 λ and d, respectively
Remain unchanged. Propagation constant beta as the thickness varies i (w) is varied to obtain a constant APS (i.e., + -. phi.) i ＝β i (w) d- δ), which can be satisfied by selecting an appropriate air slit width. As shown in FIGS. 5a and 5b, T increases from 0.6 λ to 2.4 λ -1 The order diffraction efficiency increases and then decreases, R 0 The order diffraction efficiency gradually decreases.
Referring to fig. 5c, the absorption efficiency of the whole structure increases gradually with increasing thickness, since a decrease in thickness will reduce the width of the air slit and the duty cycle of the metal in the grating will increase accordingly, which will result in a decrease in transmission and an increase in reflection. On the other hand, however, the thickness cannot be too large. This is because when an incident beam propagates in an air slit, an increase in thickness will result in more loss, and therefore absorption efficiency will increase, and corresponding transmission efficiency will decrease, and therefore there is a critical thickness of transmission due to loss. When d is 0.6 lambda and theta i At-30 °, the transmission efficiency of order n-1 is almost equal to the reflection efficiency of order n-0, which is 43% and 39%, respectively. Fig. 5d is a corresponding magnetic field simulation diagram, and it can be clearly seen that the incident light is divided into two beams (reflected light and transmitted light), and the two beams are straight lines. Therefore, the designed grating can realize various light splitting functions.
According to the technical scheme, the utility model has the advantages of it is following:
the utility model discloses a beam splitter can realize the high efficiency beam splitting of energy and polarization simultaneously based on the diffraction mechanism of super structure grating to have the broadband response, can be applicable to imaging system and optical communication field.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A multifunctional high-efficiency beam splitter based on an ultra-structure grating is characterized by comprising a plurality of periodically distributed ultra-structure gratings, wherein each ultra-structure grating comprises a plurality of medium layers distributed at intervals, a plurality of air slits are formed between the medium layers, the thickness of each medium layer is equal to that of each air slit, the medium layers have different widths, the air slits have different widths, the phase delay of each ultra-structure grating spans a phase range of 2 pi, and the phase difference delta phi between the adjacent air slits is equal.
2. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 1, wherein the beam splitter is configured to implement polarization splitting of an incident beam, the incident beam comprises transverse electric polarized light and transverse magnetic polarized light, and the beam splitter is capable of implementing total reflection of the transverse electric polarized light and negative refraction with the lowest diffraction order of the transverse magnetic polarized light.
3. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 1, wherein the super-structured grating comprises m air slits, the period width of the super-structured grating is p, the thickness of the dielectric layer and the air slits is d, and the width of the air slits is w i I is 1 to m, the center distance between adjacent air slits is a is p/m, and the phase difference Δ Φ between adjacent air slits is 2 pi/m.
4. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 3, wherein the transverse magnetic polarized light has only fundamental mode in the air slit, and satisfies the following conditions:
wherein, beta i For a propagation constant, the real part represents the propagating wave vector, the imaginary part represents the dissipation of surface plasmons in the air slit, k 0 2 pi/lambda is the wave vector in vacuum, lambda is the wavelength of the incident beam, epsilon m Is the dielectric constant of the dielectric layer;
phase delay of ith air slit phi i Comprises the following steps:
Φ i ＝β i *d-δ；
where δ is the additional phase produced by multiple reflections at the interface between the grating and air.
5. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 4, wherein the dielectric layer is made of silver, and has a dielectric constant ε m -17.36+0.715i, the period width of the super-structured grating isp is lambda, the thickness of the medium layer and the air slit is d is 0.6 lambda-2.4 lambda, the super-structure grating comprises 5 air slits with width w 1 、w 2 、w 3 、w 4 、w 5 And the phase difference delta phi between the adjacent air slits is 2 pi/5.
6. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 5, wherein the incident beam has a wavelength λ of 590nm to 668nm and an incident angle θ i ∈(-74°,-7°)。
7. The multifunctional efficient beam splitter based on super-structured grating as claimed in claim 5, wherein when the wavelength λ of the incident light beam is 650nm and d is 1.5 λ, the width of the air slit is w 1 ＝120nm、w 2 ＝68nm、w 3 ＝46nm、w 4 ＝34nm、w 5 ＝27nm。
8. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 6 or 7, wherein the incident angle and the reflection angle of the transverse magnetic polarized light at the super-structured grating satisfy:
k 0 sinθ i ＝k 0 sinθ t +nG；
wherein,
to the phase gradient, θ i And theta t Angle of incidence and angle of refraction, respectively, G ═ 2 pi/p is the reciprocal lattice vector, n is the diffraction order, and ζ ═ G.
9. The multifunctional efficient beam splitter based on a super-structured grating as claimed in claim 8, wherein n-1 is the lowest diffraction order of transverse magnetic polarized light;
when the incident angle is less than the critical angle, the refracted light follows a diffraction order of n-1;
when the incident angle is larger than the critical angle, the refracted light follows a diffraction order of n-1.
10. The multifunctional efficient beam splitter based on the super-structured grating as claimed in claim 2, wherein the reflection extinction ratio ERTE of the transverse electric polarized light is larger than 10dB, and the transmission extinction ratio ERTM of the transverse magnetic polarized light is larger than 132 dB.
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