CN217384362U - Testing device for testing steam stability of active steel cylinder - Google Patents
Testing device for testing steam stability of active steel cylinder Download PDFInfo
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- CN217384362U CN217384362U CN202221189368.3U CN202221189368U CN217384362U CN 217384362 U CN217384362 U CN 217384362U CN 202221189368 U CN202221189368 U CN 202221189368U CN 217384362 U CN217384362 U CN 217384362U
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Abstract
The utility model relates to a testing arrangement for testing active steel bottle steam stability, the carrier gas steel bottle links to each other with mass flow controller, and mass flow controller links to each other with mass flow meter and active steel bottle respectively, and active steel bottle is arranged in the water bath, and active steel bottle links to each other with mass flow meter, and mass flow meter links to each other with pressure controller and steam collecting bottle respectively, and the steam collecting bottle links to each other with pressure controller, and pressure controller links to each other with the cold trap, and the vacuum pump is connected to the cold trap. The gas flow is adjusted to be quantitative carrier gas flow through an MFC (micro-fuel cell) with matched gas types, an active steel cylinder is placed in a water bath, the active steel cylinder is heated and kept at a certain temperature range, the direction of the carrier gas is controlled by changing the opening and closing of a valve, real-time flow data are obtained after source steam and the carrier gas pass through an MFM, and the source steam is cooled in a collecting bottle; the test line can test all liquid and solid precursors basically, and can use the same steel cylinder to compare the advantages and the disadvantages of MO sources with different purities.
Description
Technical Field
The utility model relates to a testing arrangement for testing active steel bottle steam stability.
Background
At present, MOCVD and ALD are common semiconductor chemical thin film deposition technologies, and MOCVD (metal organic chemical vapor deposition) mainly uses organic compounds of IIIA group and IIA group elements, hydrides of VA group and VIA group elements and other precursors as crystal growth source materials, and carries out vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow various III-V group and II-VI group compound semiconductors and multi-solid thin layer materials thereof.
ALD (atomic layer deposition) is a thin film fabrication technique suitable for developing the latest and leading edge products, a technique for forming a deposited film by alternately passing pulses of vapor phase precursors into a reactor and chemisorbing and reacting on a deposition substrate. When precursors reach the substrate surface, they chemisorb and react at the surface, requiring purging of the ald reactor with an inert gas between precursor pulses. Typically, high-precision, pinhole-free, highly conformal nanofilms, including transistor gate dielectric (high-k) and metal gate electrodes (metal gate) such as oxides, nitrides, carbides, metals, sulfides, and fluorides, are deposited on substrates of various sizes and shapes, and are widely used in high-end chip fabrication, including logic chips, AI chips, 5G chips, mass memory, and cloud computing chips.
The semiconductor MOCVD/ALD precursor is a key raw material at the core of a semiconductor film deposition process, and can be used for preparing a metal/oxide/nitride film through related equipment and an integrated circuit manufacturing process of an advanced technology node of 90nm-14nm or even 7 nm. Common precursor liquid sources include: trialkyl gallium, trialkyl aluminum, trialkyl antimony, dialkyl zinc, diethyl tellurium, carbon tetrachloride, titanium tetrachloride, tetrakis (dimethylamino) titanium, tetrakis (dimethylamino) hafnium, tetrakis (dimethylamino) zirconium, tris (dimethylamino) antimony, tetrakis (methylethylamino) titanium, tetrakis (methylethylamino) hafnium, tetrakis (methylethylamino) zirconium, tris (methylethylamino) antimony, and the like; common solid state sources include: trimethyl indium, magnesium cyclopentadienyl, ferrocene, carbon tetrabromide, aluminum trichloride and the like.
The precursor is packaged in various stainless steel cylinders due to the influence of chemical activity and purity, the transportation and the like, the stainless steel is usually made of 316L material, and an inert layer is further coated inside part of the cylinders. In a new age, MOCVD and ALD techniques are continuously advanced, and meanwhile, more and more complex requirements are put forward on the quality requirement, the mixing source, the volume and the structure of the precursor, especially the solid precursor has high requirements on the particle size, the particle accumulation form, the steel cylinder structure and the heating stability, and a large amount of tests are required before mass production.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of prior art existence, provide a testing arrangement for testing active steel bottle steam stability.
The purpose of the utility model is realized through the following technical scheme:
a testing arrangement for testing active steel bottle steam stability, the characteristics are: the carrier gas steel bottle links to each other with mass flow controller, and mass flow controller links to each other with mass flow meter and active steel bottle respectively, and active steel bottle is arranged in the water bath, and active steel bottle links to each other with mass flow meter, and mass flow meter links to each other with pressure controller and steam collecting bottle respectively, and the steam collecting bottle links to each other with pressure controller, and pressure controller links to each other with the cold trap, and the vacuum pump is connected to the cold trap.
Further, the above testing device for testing the steam stability of the active steel cylinder is characterized in that a first valve is arranged on a connecting pipeline between the carrier gas steel cylinder and the mass flow controller, a second valve is arranged on a connecting pipeline between the mass flow controller and the active steel cylinder, a third valve is arranged on a connecting pipeline between the active steel cylinder and the mass flow meter, a fourth valve is arranged on a connecting pipeline between the mass flow controller and the mass flow meter, a fifth valve and a seventh valve are arranged on a connecting pipeline between the mass flow meter and the steam collecting cylinder, an eighth valve is arranged on a connecting pipeline between the steam collecting cylinder and the pressure controller, a sixth valve is arranged on a connecting pipeline between the mass flow meter and the pressure controller, a ninth valve is arranged on a connecting pipeline between the pressure controller and the cold trap, and a tenth valve is arranged on a connecting pipeline between the cold trap and the vacuum pump.
Further, the testing device for testing the vapor stability of the active steel cylinder is characterized in that the PLC system for reading the instantaneous flow and the accumulated flow and setting the mass flow controller is electrically connected with the mass flow controller.
Further, the testing device for testing the steam stability of the active steel cylinder is characterized in that a second PLC system for reading the instantaneous flow and the accumulated flow and setting the mass flow controller is electrically connected with the mass flow meter.
Further, the testing device for testing the steam stability of the active steel cylinder is characterized in that the third PLC system is electrically connected with the pressure controller.
Further, the above testing device for testing the steam stability of the active steel cylinder is characterized in that the volume of the steam collecting bottle is 1.5 times of that of the active steel cylinder, a dewar filled with liquid nitrogen is arranged outside the steam collecting bottle, the active steel cylinder blows steam, real-time flow data are obtained after the steam and carrier gas pass through the mass flow meter, and the steam is cooled into the steam collecting bottle.
Further, the above testing device for testing the vapor stability of the active steel cylinder is characterized in that the vapor collecting bottle and the cold trap are both arranged in a liquid nitrogen cooling system.
Further, the above testing device for testing the steam stability of the active steel cylinder is characterized in that the steam collecting cylinder is connected with the blowout source collecting tank.
Compared with the prior art, the utility model have apparent advantage and beneficial effect, the concrete aspect that embodies is in following:
firstly, the utility model discloses testing arrangement structural design is succinct, adopts the mode of nimble collocation, adapts to a large amount of all kinds of air source steel bottles on the market, and MFC through the gas species matching, the air current is adjusted to quantitative carrier gas flow, and active steel bottle is arranged in the water bath, is heated the constant temperature and at a certain temperature range, opens and close through changing the valve, controls the direction of carrier gas, and source steam and carrier gas obtain real-time flow data after passing through MFM, and source steam is cooled off in the receiving flask;
the test line can basically test all liquid and solid precursors, and can use the same steel cylinder to compare the quality of MO sources with different purities; the same MO source can be used for testing the quality of the structure of the steel cylinder; the steel cylinder can be used for testing the steam performance of the newly developed MO source; the selection range is far larger than that of the complete equipment;
the utility model discloses testing arrangement easily dismantles, and is with low costs, and the input is little, does not receive the field control, and transportability is strong.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.
FIG. 1: the utility model discloses the structure schematic diagram of device.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present invention, the directional terms and the sequence terms and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
As shown in figure 1, the testing device for testing the steam stability of the active steel cylinder is characterized in that a carrier gas steel cylinder 1 is connected with a mass flow controller 3, the mass flow controller 3 is respectively connected with a mass flow meter 6 and the active steel cylinder 4, the active steel cylinder 4 is arranged in a water bath 5, the active steel cylinder 4 is connected with the mass flow meter 6, the mass flow meter 6 is respectively connected with a pressure controller 10 and a steam collecting bottle 8, the steam collecting bottle 8 is connected with the pressure controller 10, the pressure controller 10 is connected with a cold trap 12, and the cold trap 12 is connected with a vacuum pump 13.
A first valve 21 is arranged on a connecting pipeline between the carrier gas steel cylinder 1 and the mass flow controller 3, a second valve 22 is arranged on a connecting pipeline between the mass flow controller 3 and the active steel cylinder 4, a third valve 23 is arranged on a connecting pipeline between the active steel cylinder 4 and the mass flow meter 6, a fourth valve 24 is arranged on a connecting pipeline between the mass flow controller 3 and the mass flow meter 6, a fifth valve 25 and a seventh valve 27 are arranged on a connecting pipeline between the mass flow meter 6 and the steam collecting cylinder 8, an eighth valve 28 is arranged on a connecting pipeline between the steam collecting cylinder 8 and the pressure controller 10, a sixth valve 26 is arranged on a connecting pipeline between the mass flow meter 6 and the pressure controller 10, a ninth valve 29 is arranged on a connecting pipeline between the pressure controller 10 and the cold trap 12, and a tenth valve 20 is arranged on a connecting pipeline between the cold trap 12 and the vacuum pump 13.
The PLC system 2 for reading the instantaneous flow rate and the accumulated flow rate and setting the mass flow controller 3 is electrically connected to the mass flow controller 3. The second PLC system 7 for reading the instantaneous flow rate and the accumulated flow rate and setting the mass flow controller 3 is electrically connected to the mass flow meter 6. The third PLC system 11 is electrically connected to the pressure controller 10.
The steam collecting bottle 8 is connected with a blowout source collecting groove 9. Both the vapor collection bottle 8 and the cold trap 12 are placed in a liquid nitrogen cooling system. The volume of the steam collecting bottle 8 is 1.5 times of that of the active steel cylinder 4, a Dewar filled with liquid nitrogen is arranged outside the steam collecting bottle, steam is blown out of the active steel cylinder 4, real-time flow data is obtained after the steam and carrier gas pass through the mass flow meter 6, and the steam is cooled into the steam collecting bottle 8.
The clean gas source is nitrogen, argon, helium or hydrogen, and is changed into the clean gas source through the high-efficiency filter. The Mass Flow Controller 3 (MFC) uses nitrogen, argon, helium, or hydrogen, and the Flow unit is sccm or sLm, and the PLC system 2 can read the instantaneous Flow and the accumulated Flow, and can set the MFC. The water bath 5 provides a constant temperature environment for the active steel cylinder 4, and avoids the fluctuation of steam in the test line caused by the change of temperature. The Mass Flow Meter 6 (MFM) uses nitrogen, argon, helium or hydrogen as a medium, and the Flow unit is sccm or sLm, and the instantaneous Flow and the cumulative Flow can be read through the PLC system two 7, and the MFM can be set at the same time. The Pressure Controller 10 (PC) is used to regulate the vacuum system, so as to meet the control of the volatilization speeds of different source vapors. The vacuum system can provide a vacuum of 100 to 1500torr, and the cold trap 12 cooled by liquid nitrogen is made of 304 stainless steel material and is used for protecting the vacuum pump from being corroded by source steam. Adopt heating and heat retaining stainless steel pipe, the diameter is 3/8 or 1/2 inches, and heating system passes through the thermal resistance feedback, by PLC system control heating voltage, stabilizes at constant temperature state, and heat preservation system keeps warm to the test wire with insulation material, reduces the heat exchange with atmospheric environment, guarantees the heat stability of test wire.
When the initial value of the carrier gas is tested, the carrier gas flows out of the carrier gas steel cylinder 1, is decompressed to 0.2MPa through a first valve (pressure reducing valve) 21, is adjusted to X sccm through a mass flow controller 3 controlled by a PLC system 2, then sequentially passes through a fourth valve 24, a mass flow meter 6 controlled by a PLC system two 7, a sixth valve 26, a pressure controller 10 controlled by a PLC system three 11, a ninth valve 29 and a tenth valve 20, and finally is pumped away by a vacuum pump 13; a set of stable flow data is obtained by the mass flow meter 6.
When the active steel cylinder is tested, carrier gas flows out of the carrier gas steel cylinder 1, is decompressed to 0.2MPa through a first valve (pressure reducing valve) 21, is adjusted to Xsccm through a mass flow controller 3 controlled by a PLC system 2, then sequentially passes through a second valve 22, a third valve 23, a mass flow meter 6 controlled by a PLC system two 7, a fifth valve 25, a seventh valve 27, an eighth valve 28, a pressure controller 10 controlled by a PLC system three 11, a ninth valve 29 and a tenth valve 20, is finally pumped away by a vacuum pump 13, source steam is collected into a steam collecting bottle 8, a group of stable flow data is obtained by the mass flow meter 6, and the flow value of the source steam is obtained by subtracting the initial value of the carrier gas.
Example 1
The stability of the vapors from the trimethyl gallium cylinder was tested as shown in FIG. 1. A1000 mL standard steel cylinder was charged with 500g of 6N pure trimethylgallium for testing. The carrier gas is 6N argon gas with purity, the Pressure is reduced to 0.2MPa through a gas reducing valve, the flow of the carrier gas is controlled to be 1000sccm through an argon MFC with the model of S600 manufactured by HORIBA company, the temperature of a water bath kettle is kept to be 5 +/-0.1 ℃, a collecting bottle and a cold trap are cooled by liquid nitrogen, and the vacuum degree of a system is controlled to be 800torr through a Pressure Controller (PC). By the vapor pressure equation for trimethyl gallium: lg P (mmHg) 8.07-1703/T (K) having a vapor pressure P10 at 5 ℃ (8.07-1703/278) ＝10 1.944 When the ideal gas state equation PV is nRT, the range of the amount of trimethyl gallium blown out at the theoretical aeration time of 120 minutes can be obtained, and the MFM shows a real-time curve, and the blowing concentration of trimethyl gallium is stable.
Example 2
As shown in fig. 1, the influence of a trimethylindium standard steel cylinder and a modified steel cylinder on trimethylindium vapor is tested, wherein trimethylindium is a commonly used MO source and is a white solid at normal temperature, and the vapor concentration of the solid MO source is related to various factors, such as the particle size of the solid, the particle accumulation form, the passing path of a carrier gas, the temperature and the hardening condition of the particles, so that the raw material concentration of the solid source is difficult to control and stabilize; once the concentration of raw materials is reduced, the microstructure of the compound semiconductor layer of the prepared chip is inconsistent, and finally a lot of defective products are generated, so that the filling container is continuously improved. 500mL standard cylinder and 5A00 mL modified cylinder was charged with 300g of 6N pure trimethylindium for testing. The carrier gas selects 6N-purity nitrogen, the pressure is reduced to 0.2MPa through a gas reducing valve, the carrier gas flow is controlled to be 800sccm through a nitrogen MFC with the model number S600 of HORIBA company, the temperature of a water bath is constant to be 30 +/-0.1 ℃, a collecting bottle and a cold trap are cooled by liquid nitrogen, meanwhile, all pipelines at the rear section of the MFC, including pipelines connected with the collecting bottle and the cold trap, need to be heated, the heating temperature is 45-50 ℃, and the vacuum degree of a system is controlled to be 800torr through a PC. By vapor pressure equation of trimethylindium: log P (mmHg) 10.52-3014/T (K), vapor pressure P10 at 30 ℃ (10.52-3014/303) ＝10 0.573 The theoretical aeration time 120 minutes yields a range of the amount of trimethyl indium blown out, based on the ideal gas state equation PV of nRT, of 0.497KPa (mmHg). MFM shows that trimethyl indium filled in the improved steel cylinder can blow out more stable steam, the service life of the steel cylinder is longer, the use of downstream customers is facilitated, and the improvement purpose is achieved.
Example 3
As shown in fig. 1, the test line for testing the vapor stability of the active cylinder tests the optimum structure of a new metallocene magnesium cylinder, which is solid at room temperature and has a lower vapor pressure than trimethylindium, as well as trimethylindium. Magnesium dicocene is generally used as a P-type dopant for GaN layers, and when used, has a carrier concentration of 2 xe in the carrier gas 18 The carrier concentration of a bottle of product is reduced at the beginning of 6 months, the service life of the bottle of product is reached at the time of 12 months, if the service life of the bottle of product is prolonged, a great amount of time and labor can be saved for a using unit, and the safety risk is reduced. The use of a vessel which allows the carrier gas to travel along the longest path and which has the greatest contact with the magnesium metallocene is one solution to the problem of insufficient magnesium metallocene vapour. A modified steel cylinder contains 4 or 6 independent trays, the total filling amount of the magnesium cyclopentadienyl is 300g, the magnesium cyclopentadienyl is averagely loaded on the trays, and a 4-layer structure or a 6-layer structure is researched and selected through the test line. The carrier gas is 6N nitrogen, and is reduced to 0.2MPa by gas pressure reducing valve and then passes through nitrogen MF (MF) of HORIBA company, model S600C, controlling the carrier gas flow to be 1000sccm, keeping the temperature of the water bath at 30 +/-0.1 ℃, cooling the collection bottle and the cold trap by using liquid nitrogen, simultaneously heating all pipelines at the rear section of the MFC, including pipelines connected with the collection bottle and the cold trap, wherein the heating temperature is 45 ℃, and controlling the vacuum degree of the system to be 400torr by using a PC. By the vapor pressure equation for magnesium metallocenes: log P (mmHg) 10.0-3372/T (K), and its vapor pressure P is 10 at 30 deg.C (10-3372/303) ＝10 -1.13 When the ideal gas state equation PV is nRT, the amount of magnesium diclometer blown out at a theoretical aeration time of 300 minutes can be obtained with 0.074(mmHg) of 9.86 Pa. In actual tests, the amount of the metallocene-type magnesium blown out from the 4-layer structure steel cylinder was equivalent to that blown out from the 6-layer structure steel cylinder. In order to verify the effect of the steel cylinder, the hardening of the metallocene magnesium crystal is closer to the actual condition, the experimental period is 24 months, the steel cylinder is continuously heated at constant temperature, a blowing experiment is carried out every 25 days of a month, MFM shows that the contribution of the steel cylinders with two structures to the metallocene magnesium is basically consistent due to the fact that the blown steam curves of the metallocene magnesium filled with the two structures are basically consistent, and the steel cylinders with 4-layer structures are finally selected for filling the metallocene magnesium in consideration of the processing cost and the subpackaging workload.
To sum up, the utility model discloses testing arrangement structural design is succinct, adopts the mode of nimble collocation, adapts to a large amount of all kinds of air source steel bottles on the market, MFC through the matching of gas kind, and the air current is adjusted to quantitative carrier gas flow, and active steel bottle is arranged in the water bath, is heated constant temperature at a certain temperature range, opens and close through changing the valve, controls the direction of carrier gas, and source steam and carrier gas obtain real-time flow data after passing through MFM, and source steam is cooled off in the receiving flask.
The test line can basically test all liquid and solid precursors, and can use the same steel cylinder to compare the quality of MO sources with different purities; the same MO source can be used for testing the quality of the structure of the steel cylinder; the steel cylinder can be used for testing the steam performance of the newly developed MO source; the selection range is much larger than the complete equipment.
The utility model discloses testing arrangement easily dismantles, and is with low costs, and the input is little, does not receive the field control, and portability is strong.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Claims (8)
1. A testing arrangement for testing active steel bottle steam stability, its characterized in that: the carrier gas steel bottle (1) is connected with the mass flow controller (3), the mass flow controller (3) is respectively connected with the mass flow meter (6) and the active steel bottle (4), the active steel bottle (4) is arranged in the water bath (5), the active steel bottle (4) is connected with the mass flow meter (6), the mass flow meter (6) is respectively connected with the pressure controller (10) and the steam collecting bottle (8), the steam collecting bottle (8) is connected with the pressure controller (10), the pressure controller (10) is connected with the cold trap (12), and the cold trap (12) is connected with the vacuum pump (13).
2. The testing device for testing the vapor stability of an active steel cylinder according to claim 1, wherein: a first valve (21) is arranged on a connecting pipeline between the carrier gas steel cylinder (1) and the mass flow controller (3), a second valve (22) is arranged on a connecting pipeline between the mass flow controller (3) and the active steel cylinder (4), a third valve (23) is arranged on a connecting pipeline between the active steel cylinder (4) and the mass flow meter (6), a fourth valve (24) is arranged on a connecting pipeline between the mass flow controller (3) and the mass flow meter (6), a fifth valve (25) and a seventh valve (27) are arranged on a connecting pipeline between the mass flow meter (6) and the steam collecting bottle (8), an eighth valve (28) is arranged on a connecting pipeline between the steam collecting bottle (8) and the pressure controller (10), a sixth valve (26) is arranged on a connecting pipeline between the mass flow meter (6) and the pressure controller (10), and a ninth valve (29) is arranged on a connecting pipeline between the pressure controller (10) and the cold trap (12), a valve ten (20) is arranged on a connecting pipeline between the cold trap (12) and the vacuum pump (13).
3. The testing device for testing the vapor stability of an active steel cylinder according to claim 1, wherein: the PLC system (2) for reading the instantaneous flow and the accumulated flow and setting the mass flow controller (3) is electrically connected with the mass flow controller (3).
4. The test apparatus for testing vapor stability of an active cylinder according to claim 1, wherein: and a PLC system II (7) used for reading the instantaneous flow and the accumulated flow and setting the mass flow controller (3) is electrically connected with the mass flow meter (6).
5. The testing device for testing the vapor stability of an active steel cylinder according to claim 1, wherein: and the PLC system III (11) is electrically connected with the pressure controller (10).
6. The test apparatus for testing vapor stability of an active steel cylinder according to claim 1 or 2, wherein: the volume of the steam collecting bottle (8) is 1.5 times of that of the active steel bottle (4), a Dewar filled with liquid nitrogen is arranged outside the steam collecting bottle, steam is blown out of the active steel bottle (4), real-time flow data is obtained after the steam and carrier gas pass through the mass flow meter (6), and the steam is cooled into the steam collecting bottle (8).
7. The test apparatus for testing vapor stability of an active steel cylinder according to claim 1 or 2, wherein: the steam collecting bottle (8) and the cold trap (12) are both arranged in a liquid nitrogen cooling system.
8. The testing device for testing the vapor stability of an active steel cylinder according to claim 1, wherein: the steam collecting bottle (8) is connected with a blowout source collecting tank (9).
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| CN202221189368.3U CN217384362U (en) | 2022-05-17 | 2022-05-17 | Testing device for testing steam stability of active steel cylinder |
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| CN202221189368.3U CN217384362U (en) | 2022-05-17 | 2022-05-17 | Testing device for testing steam stability of active steel cylinder |
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