CN217384187U - Detection tool and detection device for quartz boat - Google Patents

Abstract

The utility model discloses a quartz boat is with examining utensil and detection device. Wherein, should examine utensil includes: a main body provided with a plurality of detection teeth arranged in parallel at intervals in a front-rear direction as a thickness direction, the detection teeth all having the same thickness, and the detection teeth respectively having: a first detection part provided on the left side of the lower side of the main body; a second detection part disposed on the right side of the lower part; a third detection part arranged on the upper side of the left side part of the main body; and a fourth detection part disposed on an upper side of a right side part of the main body. The utility model discloses a quartz boat is with examining utensil can improve the detection efficiency to the quartz boat.

Description

Detection tool and detection device for quartz boat

Technical Field

The utility model relates to a check out test set technical field especially relates to quartz boat is with examining utensil and detection device.

Background

Tooling, fixtures, etc. for production are typically required to maintain a high degree of consistency. For example, in the production of solar cells, quartz boats for loading silicon wafers are used. The quartz boat is provided with a plurality of clamping grooves which are used for containing silicon wafers and are uniformly distributed along the length direction of the quartz boat. The silicon wafer is usually inserted into a slot (also called a blade) of a quartz boat by a robot or the like. In the case of deviation of the size of the clamping groove, the insertion failure may be caused, and the silicon wafer is broken. Therefore, the positional accuracy and consistency of the notches of the quartz boat are required to be very high.

Therefore, before the quartz boat is used, the accuracy of the slots of the quartz boat needs to be detected. In the prior art, the precision of the quartz boat is usually detected by a three-coordinate measuring instrument, and the efficiency is very low. In addition, since the quartz boat is used in a very large amount and the three-coordinate measuring machine has low detection efficiency, only spot inspection is usually performed. This may result in the use of quartz boats at the production site that are not of satisfactory precision.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the prior art problem to a certain extent at least. Therefore, the utility model provides a quartz boat is with examining utensil can improve the detection efficiency to the quartz boat. Furthermore, the utility model discloses the detection device who has this quartz boat with examining utensil is still provided.

According to the utility model discloses utensil is examined with examining to quartzy boat of first aspect, include: a main body provided with a plurality of detection teeth arranged in parallel at intervals in a front-rear direction as a thickness direction, the detection teeth all having the same thickness, and the detection teeth respectively having: a first detection part provided on the left side of the lower side of the main body; a second detection part disposed on the right side of the lower part; a third detection part arranged on the upper side of the left side part of the main body; and a fourth detection part disposed on an upper side of a right side part of the main body.

According to the utility model discloses quartzy boat of first aspect is with examining utensil has following beneficial effect: the detection efficiency of the quartz boat can be improved.

In some embodiments, the plurality of detection teeth are uniformly arranged in the front-rear direction.

In some embodiments, the detection teeth have a thickness of 0.5mm or more and 0.6mm or less.

In some embodiments, the distance between the rear surface of one said detection tooth and the rear surface of another said detection tooth in front thereof is 3.14mm or more and 3.16mm or less; or 2.37mm to 2.39 mm; alternatively, the thickness is 2.71mm to 2.73 mm.

In some embodiments, a distance between a left side surface of the third detection part and a right side surface of the fourth detection part is 165.9mm or more and 166.1mm or less; alternatively, 181.9mm or more and 182.1mm or less; or 209.9mm or more and 210.1mm or less.

In some embodiments, the number of detection teeth is 10 or more.

In some embodiments, the lower surface of the first detecting portion and the lower surface of the second detecting portion of one detecting tooth respectively protrude downward from the lower surface of the first detecting portion and the lower surface of the second detecting portion of another detecting tooth behind the detecting tooth.

In some embodiments, the detection teeth cover the whole lower portion in the left-right direction, and cover the whole left portion and the whole right portion in the up-down direction, respectively.

According to the utility model discloses detection device of second aspect includes: and a mounting base provided with a first guide portion that moves in the vertical direction, the first guide portion being mounted with any one of the above-described jigs for a quartz boat.

According to the utility model discloses detection device of second aspect has following beneficial effect: the detection efficiency of the quartz boat can be improved.

In some embodiments, the jig for a quartz boat is mounted on the first guide portion so as to be inclined with respect to the vertical direction.

In some embodiments, the detection device further includes a base on which a second guide portion that moves in the front-rear direction is provided, and the mounting seat is mounted on the second guide portion.

Drawings

Fig. 1 is a perspective view of an embodiment of a checking fixture for a quartz boat according to a first aspect of the present invention.

Fig. 2 is a bottom view of the inspection device for a quartz boat of fig. 1.

FIG. 3 is a top view of the fixture for quartz boats of FIG. 1.

FIG. 4 is a left side view of the fixture for quartz boats of FIG. 1.

FIG. 5 is a left side view of the quartz boat fixture of FIG. 4 tilted in the vertical direction.

Fig. 6 is a perspective view of a main part of an embodiment of a detection device having the inspection device for the quartz boat of the present invention.

FIG. 7 is a schematic view of essential parts of an embodiment of the quartz boat.

Fig. 8 is a partially enlarged view of a portion a in fig. 7.

Fig. 9 is a partial enlarged view at B in fig. 8.

Detailed Description

Reference will now be made in detail to embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present embodiment, and are not to be construed as limiting the present embodiment.

In the description of the present embodiment, it should be understood that the orientation or positional relationship indicated by referring to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description of the present embodiment and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present embodiment.

In the description of the present embodiment, a plurality of the terms are one or more, a plurality of the terms are two or more, and the terms larger, smaller, larger, etc. are understood to include no essential numbers, and the terms larger, smaller, etc. are understood to include essential numbers. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present embodiment, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present embodiment by combining the specific contents of the technical solutions.

Fig. 7 is a schematic view of the essential parts of the quartz boat 500. Fig. 8 is a partially enlarged view of a portion a in fig. 7. Fig. 9 is a partial enlarged view at B in fig. 8. Referring to fig. 7 to 9, before describing the quartz boat fixture 300 (hereinafter, simply referred to as "fixture 300" for convenience of description) according to the present embodiment, a quartz boat 500 will be briefly described. The quartz boat 500 of the present embodiment may have a conventional quartz boat structure for mounting a silicon wafer (not shown) as a substrate of a solar cell, for example. Specifically, the quartz boat 500 includes two lower support rods 501 for supporting silicon wafers, and a left restraining rod 502 and a right restraining rod 503 disposed above the lower support rods 501. The quartz boat 500 is provided with a plurality of groups of slots 504 for accommodating silicon wafers, which are uniformly arranged in the front-back direction. Specifically, one silicon wafer is held by a plurality of holding grooves 504, and the plurality of holding grooves 504 include lower holding grooves 504a provided in the two lower support rods 501, left holding grooves 504b provided in the left regulating rod 502, and right holding grooves (not shown) provided in the right regulating rod 503. The inspection device 300 of the present embodiment is used to detect the position accuracy, consistency, and the like of the card slots 504, so as to ensure that the card slots 504 meet the production requirements.

Fig. 1 to 5 are schematic views of various angles of the inspection tool 300 for a quartz boat. Referring to fig. 1 to 4, a gauge 300 for a quartz boat according to embodiment 1 includes: a main body 301, the main body 301 being provided with a plurality of detection teeth 302 arranged in parallel at intervals in the front-rear direction as the thickness direction. The thickness of the sensing teeth 302 are all the same. And the detection teeth 302 respectively have: a first detector 303, a second detector 304, a third detector 305, and a fourth detector 306. The first detection part 303 is provided on the left side of the lower side part 301a of the main body 301. The second detection portion 304 is provided on the right side of the lower portion 301 a. The third detection portion 305 is provided on the upper side of the left side portion 301b of the main body 301. The fourth detection portion 306 is disposed on the upper side of the right side portion 301c of the main body 301.

According to the inspection tool 300 of the embodiment, the detection efficiency of the quartz boat 500 can be improved. Specifically, by providing the main body 301 and providing the main body 301 with a plurality of detection teeth 302 arranged in parallel at intervals in the front-rear direction, which is the thickness direction, it is possible to use these detection teeth 302 in a manner simulating, for example, silicon wafers placed on the quartz boat 500. Further, since the detection teeth 302 include the first detection part 303 and the second detection part 304 provided on the lower side part 301a of the main body 301, respectively, it is possible to simulate the position where the silicon wafer is placed on the quartz boat 500, and further, since the detection teeth 302 include the third detection part 305 and the fourth detection part 306 provided on the left side part 301b and the right side part 301c of the main body 301, it is possible to simulate the position where the silicon wafer is restricted by the quartz boat 500 in the left-right direction. Thus, the inspection device 300 for a quartz boat according to the present embodiment can simulate a plurality of silicon wafers inserted into the wafer as a whole, and thus can easily detect, for example, the positional accuracy, the consistency, and the like of the card slots 504 of the quartz boat 500, without detecting the processing accuracy of the quartz boat 500 by, for example, a coordinate measuring machine, and can greatly improve the detection efficiency of the quartz boat 500.

The gauge 300 according to the present embodiment may be formed, for example, by machining using a material having high hardness and wear resistance. Examples of the material of the fixture 300 include: bearing steel, 45 steel, stainless steel, and the like. The surface hardness (for example, the front surface and the rear surface) of the detection tooth 302 may be set to, for example, 32HRC or more and 60HRC or less by heat treatment such as quenching, and the surface hardness of the detection tooth 302 may be set to 48HRC or more and 53HRC or less in consideration of the service life and the difficulty in implementing the process.

In some embodiments, in order to easily machine the detection tooth 302 and improve the machining accuracy of the detection tooth 302, the detection tooth 302 covers the entire lower portion 301a in the left-right direction, and covers the entire left portion 301b and the entire right portion 301c in the up-down direction, respectively. Specifically, for example, the gauge 300 has a rectangular parallelepiped block shape as a whole. The detection teeth 302 are integrally formed on the main body 301. For example, the detection teeth 302 may be formed by removing material by machining such as a slow-running wire. When a substantially U-shaped groove is cut out from the lower portion of the body 301 so as to pass through the body 301 in the left-right direction by passing through the slow wire, the lower portion of the body 301, which is not cut out, forms the lower portion of the detection tooth 302.

In the lower portion of the detection tooth 302, a first detection part 303 located on the left side of the lower side part 301a of the main body 301 and a second detection part 304 located on the right side of the lower side part 301a of the main body 301 serve as portions of the detection tooth 302 for detecting the lower notch 504a of the lower support rod 501 of the quartz boat 500. When the inspection tool 300 is used for inspection, the first detection part 303 and the second detection part 304 of the detection tooth 302 are respectively inserted into the lower clamping grooves 504a of the lower support rods 501 positioned on the left and right sides of the quartz boat 500. However, in the present embodiment, since the detection teeth 302 are integrally formed by, for example, slow-running (in this case, the detection teeth 302 cover the entire lower portion 301a of the main body 301 in the left-right direction), it is possible to improve the consistency (for example, consistency in thickness, parallelism, flatness, and the like) of the first detection portion 303 and the second detection portion 304 of the detection teeth 302, and further improve the detection accuracy of the detection teeth 302.

Similarly, a left portion and a right portion of the detection tooth 302 are processed by, for example, slow-running (in this case, the detection tooth 302 covers the entire left portion 301b and the entire right portion 301c of the main body 301 in the vertical direction). Thus, the first detection portion 303 of the detection tooth 302 positioned on the left side of the lower portion 301a of the main body 301 and the third detection portion 305 positioned on the upper side of the left portion 301b of the main body 301 can be improved in consistency, and the second detection portion 304 of the detection tooth 302 positioned on the right side of the lower portion 301a of the main body 301 and the fourth detection portion 306 positioned on the upper side of the right portion 301c of the main body 301 can be improved in consistency.

In addition, since the first detection unit 303, the second detection unit 304, the third detection unit 305, and the fourth detection unit 306 are provided as part of the detection teeth 302 at different positions, the following description will be mainly given of detecting the entire detection teeth 302, and if necessary, the detection units at the corresponding positions will be referred to.

In some embodiments, in order to more accurately detect the consistency of the card slots 504 of the quartz boat 500, the plurality of detection teeth 302 of the main body 301 of the inspection tool 300 are uniformly arranged in the front-rear direction. Specifically, for example, when a plurality of the chucking grooves 504 of the quartz boat 500 are uniformly provided in the front-rear direction, the inspection tools 300 are also uniformly arranged in the front-rear direction at the same pitch or at an integral multiple pitch as the chucking grooves 504 of the quartz boat 500 to be inspected. Therefore, the check tool 300 can more accurately detect the consistency of the clamping grooves 504 of the quartz boat 500.

The number of the detection teeth 302 is not particularly limited, and may be determined according to the number of silicon wafers actually gripped by the robot at one time, for example. In some embodiments, in order to detect the position accuracy and consistency of more slots 504 of the quartz boat 500 as much as possible, the number of the detection teeth 302 may be more than 10, and more preferably more than 15. In order to reduce the processing cost, the number of the detection teeth 302 may be 25 or less, and more preferably 20 or less.

With continued reference to FIG. 2, in some embodiments, to more accurately simulate silicon wafers inserted into the quartz boat 500, the thickness S1 of the detection teeth 302 may be set appropriately according to the thickness of the silicon wafers, for example, in the case where the silicon wafers have a thickness of 0.5mm, the thickness S1 of the detection teeth 302 may be 0.5mm or more and 0.6mm or less. Specifically, the detection tooth 302 has a rectangular shape as a whole in cross section at each detection position, and the distance between the front surface and the rear surface of the detection tooth 302 (i.e., the thickness S1) is 0.5mm or more and 0.6mm or less. By setting the thickness of the detection teeth 302 to be 0.5mm or more and 0.6mm or less, not only can the silicon wafer inserted into the quartz boat 500 be accurately simulated, but also the detection teeth 302 can be more easily processed since a certain allowable processing error range is set.

Further, in some embodiments, in order to more accurately simulate a case where a plurality of silicon wafers are simultaneously loaded on the quartz boat 500, the distance S2 between the rear surface (or front surface) of one detection tooth 302 and the rear surface (or front surface) of another detection tooth 302 in front thereof is 3.14mm or more and 3.16mm or less; or 2.37mm to 2.39 mm; alternatively, the thickness is 2.71mm to 2.73 mm.

Specifically, taking a 210mm silicon wafer as an example, the distance between the clamping grooves 504 of the quartz boat 500 for placing the 210mm silicon wafer is, for example, 3.15mm, and in the process of inserting the silicon wafer, the robot arm also grasps a plurality of silicon wafers at a distance of, for example, 3.15mm between each silicon wafer. In this case, the distance S2 between the detection teeth 302 of the inspection tool 300 is set to 3.14mm or more and 3.16mm or less, so that the distance between at least some of the pockets 504 of the quartz boat 500 in the front-rear direction can be accurately detected, and it can be confirmed whether the positional accuracy and the uniformity of the pockets 504 of the quartz boat 500 meet the requirements. In order to further accurately detect the machining accuracy of the notch 504 of the quartz boat 500, the distance S2 between the detection teeth 302 of the fixture 300 may be 3.145mm to 3.155mm (i.e., 3.15 ± 0.005 mm).

In the case of detecting the distance between the pockets 504 of the quartz boat 500 on which the 166mm silicon wafers are placed, the distance S2 between the detection teeth 302 may be 2.37mm or more and 2.39mm or less, and more preferably 2.375mm or more and 2.385mm or less.

In the case of detecting the distance between the slots 504 of the quartz boat 500 on which the 182mm silicon wafers are placed, the distance S2 between the detection teeth 302 may be 2.71mm or more and 2.73mm or less, and more preferably 2.715mm or more and 2.725mm or less. Alternatively, in some embodiments, when the distance between the slots 504 of the quartz boat 500 for placing 182mm silicon wafers is to be measured, the distance between the measuring teeth 302 may be 2.37mm or more and 2.39mm or less, and more preferably, 2.375mm or more and 2.385mm or less.

With continued reference to fig. 3, in some embodiments, the distance S3 between the left side surface of the third detection portion 305 and the right side surface of the fourth detection portion 306 is 165.9mm or more and 166.1mm or less; alternatively, 181.9mm or more and 182.1mm or less; or 209.9mm or more and 210.1mm or less. Specifically, in the quartz boat 500, the distance between the left and right slots 504b and 504b in the left-right direction is determined according to the dimensions of different specifications. Therefore, by setting the distance S3 between the left side surface of the third detector 305 and the right side surface of the fourth detector 306 to 165.9mm to 166.1mm (i.e., 166mm ± 0.1mm), it is possible to simulate a 166 mm-sized silicon wafer and to inspect the left card slot 504b and the right card slot of the quartz boat 500 on which the 166 mm-sized silicon wafer is placed. Preferably, in order to further improve the detection accuracy of the gauge 300, the distance S3 between the left side surface of the third detection portion 305 and the right side surface of the fourth detection portion 306 is 165.95mm or more and 166.05mm or less.

In the case of detecting the distance between the left and right card slots 504b and 306 of the quartz boat 500 on which the 182mm silicon wafer is placed, the distance S3 between the left surface of the third detecting unit 305 and the right surface of the fourth detecting unit 306 may be 181.9mm or more and 182.1mm or less, and more preferably 181.95mm or more and 182.05mm or less.

In the case of detecting the distance between the left and right slots 504b and 504b of the quartz boat 500 on which the silicon wafer of 210mm is placed, the distance S3 between the left surface of the third detector 305 and the right surface of the fourth detector 306 may be 209.9mm or more and 210.1mm or less, and more preferably 209.95mm or more and 210.05mm or less.

With continued reference to fig. 4 and 5, in some embodiments, in order to more accurately simulate the state of the insert, the lower surface of the first detecting portion 303 and the lower surface of the second detecting portion 304 of one detecting tooth 302 respectively protrude downward from the lower surface of the first detecting portion 303 and the lower surface of the second detecting portion 304 of another detecting tooth 302 behind the detecting tooth. Specifically, for example, in the case of inserting a silicon wafer by a robot, the entire silicon wafer is usually inserted into the slot 504 of the quartz boat 500 so as to be slightly inclined with respect to the vertical direction, and in this case, the jig 300 may be inserted into the slot 504 of the quartz boat 500 so as to be slightly inclined with respect to the vertical direction in order to more accurately simulate the state of inserting a silicon wafer. In contrast, in the present embodiment, when the gauge 300 is slightly inclined in the vertical direction, the lower surface of the first detection portion 303 of one detection tooth 302 protrudes downward from the lower surface of the first detection portion 303 of the other detection tooth 302 located behind the one detection tooth, the lower surface of the first detection portion 303 located in front and the lower surface of the second detection portion 304 located in back are substantially flush with each other (the same applies to the lower surface of the second detection portion 304). Therefore, in the state that the detection teeth 302 of the detection tool 300 are inserted into the lower clamping grooves 504a of the quartz boat 500, each detection tooth 302 is supported by the corresponding lower clamping groove 504a, and therefore the detection precision of the detection tool 300 is improved.

The length of the lower surface of the first detection portion 303 (or the second detection portion 304) of the other detection tooth 302 in which the lower surface of the first detection portion 303 (or the second detection portion 304) of the preceding detection tooth 302 protrudes downward from the latter is not particularly limited, and for example, when the angle R1 at which the gauge 300 is inclined with respect to the vertical direction is substantially 3 °, the entire lower surfaces of the first detection portions 303 (or the second detection portions 304) of all the detection teeth 302 may be located on the same plane (a dashed line extending in the horizontal direction in the drawing) including the horizontal direction and the front-rear direction.

FIG. 6 is a perspective view of a key portion of one embodiment of a detection device 200. Referring to fig. 6, the inspection tool 300 of the above embodiments can be used in the inspection apparatus 200. Specifically, the detection apparatus 200 according to embodiment 2 includes: the mount 201 is provided with a first guide portion 202 that moves in the vertical direction on the mount 201, and the jig 300 for a quartz boat described above is mounted on the first guide portion 202.

According to the detection device 200 of the present embodiment, the detection efficiency of the quartz boat 500 can be improved. Specifically, since the inspection apparatus 200 includes the inspection tool 300 provided by simulating the silicon wafers placed on the quartz boat 500, it is possible to easily detect, for example, the positional accuracy, the consistency, and the like of the card slots 504 of the quartz boat 500 without detecting the processing accuracy of the quartz boat 500 by, for example, a coordinate measuring machine, and it is possible to greatly improve the inspection efficiency of the quartz boat 500.

As the first guide 202, for example, a known linear guide unit, a linear guide shaft unit, or the like can be used. The manner of moving the fixture 300 along with the first guide 202 is not particularly limited, and the fixture 300 may be moved up and down by manual operation of an operator, or the fixture 300 may be driven to move up and down by an actuator such as an air cylinder or a motor.

Referring to fig. 6 and with additional reference to fig. 5, in some embodiments, in order to more accurately simulate the insertion state of a silicon wafer, the fixture 300 may be mounted on the first guide portion 202, for example, in an inclined manner with respect to the vertical direction. The gauge 300 may be mounted on the first guide 202 in a state of being inclined by about 3 ° with respect to the vertical direction, for example.

In some embodiments, in order to detect the position accuracy of the card slots 504 at different positions of the quartz boat 500 or to adapt to quartz boats 500 with different lengths, the detection device 200 may further include a base 101, the base 101 is provided with a second guide portion 203 moving in the front-back direction, and the mounting seat 201 is mounted on the second guide portion 203. The second guide 203 may be a known linear guide assembly, linear guide shaft assembly, or the like. When the positional accuracy of the card slots 504 at different positions of the quartz boat 500 needs to be detected, the mounting base 201 on which the inspection tool 300 is mounted needs to be pushed forward and backward. Likewise, the manner in which the mount 201 is pushed is not particularly limited, and for example, the mount 201 may be moved in the front-rear direction by an actuator such as an air cylinder, a motor, or the like, as well as by manual operation by an operator.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present implementation. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present embodiments have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the embodiments, the scope of which is defined by the claims and their equivalents.

Claims (11)

1. Quartz boat is with examining utensil, its characterized in that includes:

a main body provided with a plurality of detection teeth arranged in parallel at intervals in a front-rear direction as a thickness direction, the detection teeth all having the same thickness, and the detection teeth respectively having:

a first detection part provided on the left side of the lower side of the main body;

a second detection part disposed on the right side of the lower part;

a third detection part arranged on the upper side of the left side part of the main body;

and a fourth detection part disposed on an upper side of a right side part of the main body.

2. The fixture according to claim 1, wherein the plurality of sensing teeth are arranged uniformly in a front-rear direction.

3. The inspection tool for quartz boats as defined in claim 2, wherein the thickness of the detection teeth is 0.5mm or more and 0.6mm or less.

4. The inspection tool for quartz boats according to any one of claims 1 to 3, wherein a distance between a rear surface of one of the detection teeth and a rear surface of another of the detection teeth in front thereof is 3.14mm or more and 3.16mm or less; or 2.37mm to 2.39 mm; alternatively, the thickness is 2.71mm to 2.73 mm.

5. The inspection device for quartz boats according to claim 1, wherein a distance between a left side surface of the third detection portion and a right side surface of the fourth detection portion is 165.9mm or more and 166.1mm or less; alternatively, 181.9mm or more and 182.1mm or less; or 209.9mm or more and 210.1mm or less.

6. The inspection tool for the quartz boat according to claim 1, 2, 3 or 5, wherein the number of the detection teeth is 10 or more.

7. The inspection tool for quartz boats as defined in claim 1, wherein a lower surface of the first inspection portion and a lower surface of the second inspection portion of one of the inspection teeth protrude downward from a lower surface of the first inspection portion and a lower surface of the second inspection portion of another inspection tooth that is located behind the one inspection tooth, respectively.

8. The inspection device for quartz boats as defined in claim 1, wherein the detection teeth cover the entire lower portion in a left-right direction and cover the entire left portion and the entire right portion in a top-bottom direction.

9. Detection apparatus, characterized by, includes: a mounting base provided with a first guide section that moves in the vertical direction, the first guide section being mounted with the quartz boat fixture according to any one of claims 1 to 8.

10. The detection device according to claim 9, wherein the jig for the quartz boat is mounted on the first guide portion so as to be inclined with respect to a vertical direction.

11. The detection apparatus according to claim 9 or 10, further comprising a base provided with a second guide portion that moves in the front-rear direction, the mount being mounted on the second guide portion.

Images