CN217369426U - Quartz tube cleaning device - Google Patents

Quartz tube cleaning device Download PDF

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Publication number
CN217369426U
CN217369426U CN202123130546.3U CN202123130546U CN217369426U CN 217369426 U CN217369426 U CN 217369426U CN 202123130546 U CN202123130546 U CN 202123130546U CN 217369426 U CN217369426 U CN 217369426U
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China
Prior art keywords
tank
cleaning
water
circulating
pickling
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CN202123130546.3U
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Chinese (zh)
Inventor
托马斯·伯格丽
李·理查
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Shougu Optoelectronics Jiangsu Co ltd
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Shougu Optoelectronics Jiangsu Co ltd
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Abstract

The utility model discloses a quartz tube cleaning device, which is provided with a pickling tank, a middle rinsing tank and a circulating water rinsing tank, wherein a processed lamp tube is firstly cleaned in the middle rinsing tank, then the tube is put into a pickling tank for hydrofluoric acid cleaning, the tube is put into an intermediate rinsing tank for rinsing after the pickling, and finally the tube is put into a circulating rinsing tank for final cleaning, the circulating rinsing tank is communicated with a purifying part through a circulating part, a power pump of the circulating part can pump clear water in the circulating rinsing tank into the purifying part for purification, the clear water is discharged back into the circulating rinsing tank through the power pump after being purified, therefore, automatic circulating filtration and purification of the cleaning water are realized in the circulating water washing tank, the cleanliness of the cleaning water in the circulating water washing tank is ensured, the washing quality of the quartz lamp tube is ensured, the cleaning water in the circulating water washing tank is prevented from being frequently replaced manually, and the processing efficiency and quality of the quartz lamp tube are improved.

Description

Quartz tube belt cleaning device
Technical Field
The utility model relates to a fluorescent tube production facility technical field especially relates to a quartz capsule belt cleaning device.
Background
In the production process of the lamp, the quartz lamp tube is cleaned, and the high-quality lamp can be produced only by the clean quartz lamp tube. The quartz lamp tube is firstly cleaned in acid bath in hydrofluoric acid, and then cleaned in purified water bath after the acid bath cleaning is finished, so that the clean quartz lamp tube can be obtained, and the clean lamp tube is provided for subsequent processing. The quartz lamp tube cleaned in the acid bath is placed in the water bath for cleaning, a small amount of hydrofluoric acid residues enter the purified water along with the lamp tube, the cleanliness of the purified water is affected, when the production capacity of the lamp tube is large, the acidic residues can quickly pollute the purified water, the quality of the water bath is affected, and therefore the purified water needs to be replaced regularly.
The work load of regular purified water replacement is large and tedious, and the lamp processing period can be influenced in serious cases, so that a quartz tube cleaning device is needed, the purified water replacement frequency can be reduced, and the quartz tube cleaning effect is improved.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a quartz capsule belt cleaning device, this device can realize that the pure water automatic cycle filters cleanly, has improved quartz lamp tube machining efficiency and quality.
In order to achieve the above purpose, the utility model provides a following technical scheme:
a quartz tube cleaning device comprises a cleaning part, a supporting part, a circulating part and a purifying part; the cleaning part comprises a plurality of cleaning tanks, and at least one cleaning tank is a pickling tank for placing pickling media; at least one cleaning tank is a circulating water washing tank, cleaning water is placed in the circulating water washing tank, the circulating water washing tank is connected with the purifying part through the circulating part, the cleaning water in the circulating water washing tank is conveyed to the purifying part through the circulating part, and the cleaning water in the circulating water washing tank is purified by the purifying part and then conveyed back to the circulating water washing tank through the circulating part; at least one cleaning tank is an intermediate rinsing tank, and cleaning water is placed in the intermediate rinsing tank; the supporting part supports and protects the cleaning part.
As a further aspect of the present invention: the bottom of the right side of the pickling tank is provided with a first drainage port, pickling media in the pickling tank can be naturally drained to an external collecting and processing device through the first drainage port, the top of the left side of the pickling tank is provided with a first water inlet, the first water inlet is connected with an external cleaning water supply device, and the first water inlet provides a cleaning water source for the pickling tank; a second drain outlet is formed in the bottom of the right side of the middle rinsing bath, the second drain outlet can naturally drain the rinsing medium in the middle rinsing bath to an external collecting and processing device, a second water inlet is formed in the top of the left side of the middle rinsing bath, the second water inlet is connected with an external cleaning water supply device, and the second water inlet provides a cleaning water source for the middle rinsing bath; the circulating water washtrough right side bottom is equipped with the third escape orifice, the third escape orifice can with the washing medium discharges through the pipeline in the circulating water washtrough the inside purification that purifies of purification portion, circulating water washtrough left side top is equipped with the third inlet port, the third inlet port is connected with outside clean water providing device, the third inlet port does the circulating water washtrough provides clean water source, the third inlet port simultaneously pass through the pipeline with the circulation portion is connected, the circulation portion passes through the clean water after will purifying the third inlet port is carried back inside the circulating water washtrough.
As a further aspect of the present invention: the purification portion is including sealed purification tank and purification media, purification tank purify the water inlet pass through the pipeline with the circulation water wash tank third escape orifice is connected, purification tank purify the delivery port pass through the pipeline with the circulation portion is connected, purification media deposit in inside the purification tank.
As a further aspect of the present invention: circulation portion includes the power pump, power pump one end pass through the pipeline with the purifying tank purifies the delivery port and connects, the power pump other end pass through the pipeline with circulating water washtrough third intake is connected, the power pump can with the inside purified cleaning water of purifying tank pass through the pipeline with the third intake is carried back inside the circulating water washtrough.
As a further aspect of the present invention: the supporting part comprises a supporting frame convenient for operation and a protective cover with a protective effect, the supporting frame is arranged at the bottom of the cleaning part, the protective cover is arranged around the cleaning part, and a recovery bottom plate for preventing liquid from dropping to the floor is arranged at the bottom of the protective cover.
As a further aspect of the present invention: and a fourth discharge port is formed in the bottom of one side of the recovery bottom plate, and the fourth discharge port can collect the liquid flowing into the recovery bottom plate to an external recovery processing device.
As a further aspect of the present invention: and a sealing cover plate is arranged at the top of each cleaning tank, and a cover plate groove capable of placing the sealing cover plate is arranged between the two cleaning tanks.
As a further aspect of the present invention: the top of each sealing cover plate is provided with a cover plate handle, the sealing cover plate positioned in the middle of the cleaning device is provided with a front cover plate handle and a rear cover plate handle, and the sealing cover plate positioned in the non-middle of the cleaning device is provided with one cover plate handle.
As a further aspect of the present invention: the cover plate handle positioned on the sealing cover plate at the non-middle part of the cleaning device is arranged at a position far away from the operation end.
As a further aspect of the present invention: the cleaning device is provided with one pickling tank, one intermediate rinsing tank and one circulating rinsing tank.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the cleaning device is provided with a pickling tank, an intermediate rinsing tank, a circulating rinsing tank, the processed lamp tube is firstly cleaned in the intermediate rinsing tank, then the pickling tank is put in for hydrofluoric acid cleaning, the intermediate rinsing tank is put in for rinsing after pickling is completed, the lamp tube is finally put in for circulating rinsing tank for final cleaning, the circulating rinsing tank is communicated with the purifying part through a circulating part, a power pump of the circulating part can pump clean water in the circulating rinsing tank into the purifying part for purification, the clean water is discharged back to the circulating rinsing tank through the power pump after being purified, therefore, automatic circulating filtering and purification of the clean water are realized in the circulating rinsing tank, the cleanliness of the clean water in the circulating rinsing tank is ensured, the rinsing quality of the quartz lamp tube is ensured, the manual frequent replacement of the clean water in the circulating rinsing tank is avoided, and the processing efficiency and quality of the quartz lamp tube are improved.
2. The bottom of the pickling tank and the middle rinsing tank is provided with a drain outlet, so that polluted hydrofluoric acid and clean water can be easily drained, emptied and removed of precipitates, and the water inlet is convenient for supplementing water and cleaning in the rinsing tank.
3. The sealing cover plate is arranged above each cleaning tank, so that liquid in the cleaning tanks can be effectively protected from being polluted, and the health of workers can be protected; the cover plate groove arranged between the cleaning grooves can facilitate the placement of the sealing cover plate, and a worker can conveniently place the sealing cover plate after opening the sealing cover plate; the top of the sealing cover plate is provided with a cover plate handle, so that the sealing cover plate can be conveniently placed.
4. The bottom of the protective cover is provided with a recovery bottom plate for preventing liquid from falling to the floor, the bottom of one side of the recovery bottom plate is provided with a drain outlet, the drain outlet can collect the liquid flowing into the recovery bottom plate to an external recovery processing device, the acidic liquid is recovered to the maximum extent, and the acidic substance pollution is prevented.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
fig. 1 is a front view of the quartz tube cleaning device of the present invention.
Fig. 2 is a top view of the quartz tube cleaning device of the present invention.
Fig. 3 is a right side view of the quartz tube cleaning device of the present invention.
Fig. 4 is a schematic diagram of a cleaning tank and a sealing cover structure of the quartz tube cleaning device of the present invention.
Notations for reference numerals: 1. a cleaning section; 2. a support portion; 3. a circulating part; 4. a purification section; 10. a cleaning tank; 101. a pickling tank; 102. an intermediate rinsing bath; 103. a circulating water washing tank; 11. a first drain port; 12. a first water inlet; 13. a second drain opening; 14. a second water inlet; 15. a third drain opening; 16. a third water inlet; 21. a support frame; 22. a protective cover; 23. recovering the bottom plate; 24. a fourth drain port; 25. sealing the cover plate; 26. a cover plate groove; 27. a cover plate handle; 31. a power pump; 41. a purification tank; 42. a purification medium; 43. purifying the water inlet; 44. purifying a water outlet;
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
It should be noted that all directional indicators (such as up, down, left, right, front, and back) in the embodiments are only used to explain the relative position relationship between the components in a specific posture (as shown in the drawings), the motion situation, and the like, and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the embodiments are only used for description purposes, do not particularly refer to an order or sequential meaning, and do not limit the present invention, but merely distinguish components or operations described in the same technical terms, and are not understood to indicate or imply relative importance or implicitly indicate the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
For a further understanding of the contents, features and effects of the present invention, the following embodiments will be illustrated in detail in conjunction with the accompanying drawings:
as shown in fig. 1-4:
the quartz tube cleaning device comprises a cleaning part 1, a supporting part 2, a circulating part 3 and a purifying part 4.
The cleaning part 1 comprises a plurality of cleaning tanks 10, at least one cleaning tank 10 is a pickling tank 101 for placing pickling media such as hydrofluoric acid; at least one cleaning tank 10 is a circulating water cleaning tank 103, at least one cleaning tank 10 is an intermediate water cleaning tank 102, and cleaning water is placed in the intermediate water cleaning tank 102. As shown in FIG. 2, three washing tanks 10, a pickling tank 101, an intermediate washing tank 102 and a circulating water washing tank 103 may be provided.
Clean water is placed in the circulating water washing tank 103, the circulating water washing tank 103 is connected with the purifying part 4 through the circulating part 3, the circulating part 3 conveys the clean water in the circulating water washing tank 103 to the purifying part 4, the purifying part 4 conveys the clean water in the circulating water washing tank 103 back to the circulating water washing tank 103 through the circulating part 3 after purifying, and the self-circulation purification of the clean water in the circulating water washing tank 103 is realized.
The support portion 2 supports and protects the cleaning portion 1.
Pickling bath 101 right side bottom is equipped with first drainage outlet 11, and first drainage outlet 11 can be discharged outside collection processing apparatus with pickling medium nature in the pickling bath 101, and pickling bath 101 left side top is equipped with first water inlet 12, and first water inlet 12 provides the device with the external cleaning water and is connected, and first water inlet 12 provides clean water source for pickling bath 101, and clean water source can wash the purification to pickling bath 101.
A second discharge port 13 is arranged at the bottom of the right side of the middle rinsing bath 102, the second discharge port 13 can naturally discharge the rinsing medium in the middle rinsing bath 102 to an external collecting and processing device, a second water inlet 14 is arranged at the top of the left side of the middle rinsing bath 102, the second water inlet 14 is connected with an external cleaning water supply device, and the second water inlet 14 provides a cleaning water source for the middle rinsing bath 102; the quartz lamp tubes are firstly subjected to primary washing in the intermediate washing tank 102 and then enter the pickling tank 101 for pickling, the pickled quartz lamp tubes enter the intermediate washing tank 102 again for washing, the water in the intermediate washing tank 102 is polluted quickly, and the cleaning efficiency of the intermediate washing tank 102 can be improved by the second drain outlet 13 and the second water inlet 14.
The bottom of circulating water washing tank 103 right side is equipped with third escape orifice 15, third escape orifice 15 can discharge the washing medium in circulating water washing tank 103 through the pipeline and purify inside the 4 purification portions of purification, circulating water washing tank 103 left side top is equipped with third inlet port 16, third inlet port 16 is connected with outside clean water providing device, third inlet port 16 provides clean water source for circulating water washing tank 103, third inlet port 16 passes through the pipeline and is connected with circulation portion 3 simultaneously, circulation portion 3 carries the clean water after purifying back to inside circulating water washing tank 103 through third inlet port 16.
Purification portion 4 is including sealed purifying tank 41 and purification media 42, and purification media 42 can be the ion resin exchange column, and purifying tank 41 purifies water inlet 43 and is connected with third escape orifice 15 of circulating water washtrough 103 through the pipeline, and purifying tank 41 purifies delivery port 44 and is connected with circulation portion 3 through the pipeline, and purification media 42 is deposited inside purifying tank 41, and the inside clear water of circulating water washtrough 103 gets into behind purifying tank 41, and the ion resin exchange column purifies.
The circulating part 3 comprises a power pump 31, one end of the power pump 31 is connected with a purified water outlet 44 of the purifying tank 41 through a pipeline, the other end of the power pump 31 is connected with a third water inlet 16 of the circulating water washing tank 103 through a pipeline, and the power pump 31 can convey purified cleaning water in the purifying tank 41 back to the inside of the circulating water washing tank 103 through the pipeline and the third water inlet 16.
Supporting part 2 sets up in washing portion 1 bottom including the support frame 21 that makes things convenient for the operation and the safety cover 22 that has the guard action, and support frame 21 makes things convenient for the operation, and supporting part 2 props up certain height with washing portion 1, makes things convenient for the operation, and safety cover 22 sets up around washing portion 1, prevents that polluting liquid from splashing protection staff, and protection washing portion 1 avoids destroying, and safety cover 22 bottom is equipped with the recovery bottom plate 23 that prevents liquid and drop to the floor. The bottom of one side of the recovery bottom plate 23 is provided with a fourth drain port 24, and the fourth drain port 24 can collect the liquid flowing into the recovery bottom plate 23 to an external recovery processing device.
A sealing cover plate 25 is arranged at the top of each cleaning tank 10, and a cover plate groove 26 for placing the sealing cover plate 25 is arranged between the two cleaning tanks 10. The top of each sealing cover plate 25 is provided with a cover plate handle 27, the sealing cover plate 25 positioned in the middle of the cleaning device is provided with a front cover plate handle 27 and a rear cover plate handle 27, and the sealing cover plate 25 positioned in the non-middle of the cleaning device is provided with a cover plate handle 27. A cover handle 27 on the sealing cover 25 located in a non-central portion of the cleaning device is located remote from the operating end.
The cleaning device is provided with a pickling tank 101, an intermediate rinsing tank 102 and a circulating rinsing tank 103, wherein the processed lamp tube is firstly cleaned in the intermediate rinsing tank 102, then is put into the pickling tank 101 for cleaning with hydrofluoric acid, is put into the intermediate rinsing tank 102 again for rinsing after the pickling is finished, and finally is put into the circulating rinsing tank 103 for final cleaning.
Circulation wash bowl 103 passes through circulation portion 3 and purification portion 4 intercommunication, 3 power pump 31 of circulation portion can purify the interior clear water suction of circulation wash bowl 103 purification portion 4, the clear water is purified the back and is discharged back circulation wash bowl 103 through power pump 31, so, the automatic cycle filtration purification of cleaning water has been realized in the circulation wash bowl 103, the cleanliness of cleaning water in the circulation wash bowl 103 has been guaranteed, quartz tube washing quality has been guaranteed, the interior cleaning water of manual frequent change circulation wash bowl 103 has been avoided, quartz tube machining efficiency and quality have been improved.
The bottom of the pickling tank 101 and the bottom of the intermediate rinsing tank 102 are provided with drain outlets, so that contaminated hydrofluoric acid and cleaning water can be easily drained, emptied and precipitates can be removed, and the water inlets are convenient for supplementing water and cleaning the inside of the cleaning tank 10.
The sealing cover plate 25 is arranged above each cleaning tank 10, so that liquid in the cleaning tanks can be effectively protected from being polluted, and the health of workers can be protected; the cover plate grooves 26 arranged between the cleaning tanks 10 can facilitate the placement of the sealing cover plate 25, and facilitate the placement of the sealing cover plate 25 after the sealing cover plate 25 is opened by a worker; the top of the sealing cover plate 25 is provided with a cover plate handle 27, which is convenient for placing the sealing cover plate 25.
The bottom of the protective cover 22 is provided with a recovery bottom plate 23 for preventing liquid from falling to the floor, the bottom of one side of the recovery bottom plate 23 is provided with a drain outlet, the drain outlet can collect the liquid flowing into the recovery bottom plate 23 to an external recovery processing device, the acidic liquid is recovered to the maximum extent, and the acidic substance pollution is prevented.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the present disclosure in the specification and examples. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It will be understood that the present application is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.

Claims (10)

1. A quartz tube cleaning device comprises a cleaning part (1), a supporting part (2), a circulating part (3) and a purifying part (4); the method is characterized in that: the cleaning part (1) comprises a plurality of cleaning tanks (10), and at least one cleaning tank (10) is a pickling tank (101) for placing pickling media; at least one cleaning tank (10) is a circulating water washing tank (103), cleaning water is placed in the circulating water washing tank (103), the circulating water washing tank (103) is connected with the purifying part (4) through the circulating part (3), the cleaning water in the circulating water washing tank (103) is conveyed to the purifying part (4) by the circulating part (3), and the cleaning water in the circulating water washing tank (103) is purified by the purifying part (4) and then conveyed back to the circulating water washing tank (103) through the circulating part (3); at least one cleaning tank (10) is an intermediate rinsing tank (102), and cleaning water is placed in the intermediate rinsing tank (102); the supporting part (2) supports and protects the cleaning part (1).
2. The quartz tube cleaning apparatus according to claim 1, wherein: the bottom of the right side of the pickling tank (101) is provided with a first drainage port (11), pickling media in the pickling tank (101) can be naturally drained to an external collection and treatment device through the first drainage port (11), the top of the left side of the pickling tank (101) is provided with a first water inlet (12), the first water inlet (12) is connected with an external cleaning water supply device, and the first water inlet (12) provides a cleaning water source for the pickling tank (101); a second drain outlet (13) is formed in the bottom of the right side of the middle rinsing tank (102), the second drain outlet (13) can naturally drain the rinsing medium in the middle rinsing tank (102) to an external collecting and processing device, a second water inlet (14) is formed in the top of the left side of the middle rinsing tank (102), the second water inlet (14) is connected with an external cleaning water supply device, and the second water inlet (14) provides a cleaning water source for the middle rinsing tank (102); circulation water wash bowl (103) right side bottom is equipped with third drain outlet (15), third drain outlet (15) can with washing medium discharges through the pipeline in circulation water wash bowl (103) purifying part (4) are inside to be purified, circulation water wash bowl (103) left side top is equipped with third inlet port (16), third inlet port (16) are connected with outside clean water providing device, third inlet port (16) do circulation water wash bowl (103) provide clean water source, simultaneously third inlet port (16) through the pipeline with circulation portion (3) are connected, circulation portion (3) pass through the clean water after will purifying third inlet port (16) are carried back inside circulation water wash bowl (103).
3. The quartz tube cleaning apparatus according to claim 2, wherein: purification portion (4) including sealed purification tank (41) and purification media (42), purification tank (41) purify water inlet (43) pass through the pipeline with circulation wash bowl (103) third escape orifice (15) are connected, purification tank (41) purify delivery port (44) pass through the pipeline with circulation portion (3) are connected, purification media (42) deposit in purification tank (41) are inside.
4. The quartz tube cleaning apparatus according to claim 3, wherein: circulation portion (3) include power pump (31), power pump (31) one end pass through the pipeline with purifying tank (41) purifies delivery port (44) and connects, power pump (31) other end pass through the pipeline with circulating water washing tank (103) third inlet (16) are connected, power pump (31) can with the inside clean water that is purified of purifying tank (41) pass through the pipeline with third inlet (16) carry back inside circulating water washing tank (103).
5. The quartz tube cleaning apparatus according to claim 4, wherein: supporting part (2) including support frame (21) and the safety cover (22) that have the guard action of making things convenient for the operation, support frame (21) set up in washing portion (1) bottom, safety cover (22) set up in washing portion (1) is all around, safety cover (22) bottom is equipped with recovery bottom plate (23) that prevent liquid drop to the floor.
6. The quartz tube cleaning apparatus according to claim 5, wherein: and a fourth discharge port (24) is formed in the bottom of one side of the recovery bottom plate (23), and the fourth discharge port (24) can collect the liquid flowing into the recovery bottom plate (23) to an external recovery processing device.
7. The quartz tube cleaning apparatus according to claim 6, wherein: each cleaning tank (10) is provided with a sealing cover plate (25) at the top, and a cover plate groove (26) capable of placing the sealing cover plate (25) is arranged between the two cleaning tanks (10).
8. The quartz tube cleaning apparatus according to claim 7, wherein: every sealed apron (25) top is equipped with apron handle (27), is located belt cleaning device middle part sealed apron (25) are equipped with two around being equipped with apron handle (27), are located belt cleaning device non-middle part sealed apron (25) are equipped with one apron handle (27).
9. The quartz tube cleaning apparatus according to claim 8, wherein: the cover handle (27) on the sealing cover (25) in the non-central part of the cleaning device is arranged far away from the operation end.
10. The quartz tube cleaning apparatus according to claim 9, wherein: the cleaning device is provided with one pickling tank (101), one intermediate rinsing tank (102) and one circulating rinsing tank (103).
CN202123130546.3U 2021-12-13 2021-12-13 Quartz tube cleaning device Active CN217369426U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123130546.3U CN217369426U (en) 2021-12-13 2021-12-13 Quartz tube cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123130546.3U CN217369426U (en) 2021-12-13 2021-12-13 Quartz tube cleaning device

Publications (1)

Publication Number Publication Date
CN217369426U true CN217369426U (en) 2022-09-06

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Application Number Title Priority Date Filing Date
CN202123130546.3U Active CN217369426U (en) 2021-12-13 2021-12-13 Quartz tube cleaning device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116162925A (en) * 2022-12-29 2023-05-26 浙江合特光电有限公司 Microwave device of PECVD (plasma enhanced chemical vapor deposition) equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116162925A (en) * 2022-12-29 2023-05-26 浙江合特光电有限公司 Microwave device of PECVD (plasma enhanced chemical vapor deposition) equipment

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