CN217358429U

CN217358429U - Interferometer for detecting surface of optical element

Info

Publication number: CN217358429U
Application number: CN202221040140.8U
Authority: CN
Inventors: 尤伟华
Original assignee: Suzhou Liangyan Photoelectric Co ltd
Current assignee: Suzhou Liangyan Photoelectric Co ltd
Priority date: 2022-04-29
Filing date: 2022-04-29
Publication date: 2022-09-02
Anticipated expiration: 2032-04-29

Abstract

The utility model discloses an interferometer for detecting the profile of an optical element, which comprises a fixed plate and a bearing plate, wherein the bearing plate is arranged at the top of the fixed plate; the bottom of the fixed plate is provided with an inclination angle sensor, and two sides of the fixed plate are provided with buzzers; four groups of supporting columns are installed at the bottom of the fixing plate, the supporting columns are located on the outer side of the inclination angle sensor, and flanges are installed at the bottoms of the supporting columns. The utility model discloses an inclination sensor and bee calling organ are installed to the fixed plate, and device circular telegram caster sensor detects the inclination of device, and when the inclination of device was too big, the inside electromagnetic relay switching-over of inclination sensor carries the electric energy to bee calling organ's inside, and the oscillation of its inside little plectrum of bee calling organ circular telegram back drive sends sharp-pointed sound, reminds the staff, and great slope appears in the device, needs the adjusting device position, detects the device, prevents because of the device slope, influences the device and detects the accuracy.

Description

Interferometer for detecting surface of optical element

Technical Field

The utility model relates to an interferometer technical field that optical element shape face detected the usefulness specifically is an interferometer that is used for optical element shape face to detect usefulness.

Background

With the continuous development of modern society and the continuous improvement of economic level, the manufacturing technology of domestic optical elements is also continuously developed, and in the existing manufacturing process of optical elements, in order to ensure the quality of the optical elements, an interferometer for detecting the shape of the top surface of the optical elements is needed to detect the shape of the top surface of the optical elements.

The interferometer for detecting the shape surface of the optical element in the prior art has the following defects:

1. patent document CN209945375U discloses a stable optical interferometer is just placed in portable, "including manual telescopic link and inner box, manual telescopic link's lower extreme fixed surface has the fixed block, and the inside of fixed block transversely runs through and has seted up the reservation groove to the lower extreme threaded connection of fixed block has the spring activity base, manual telescopic link's inside upper end is fixed with first pivot, and manual telescopic link is through first pivot and stable piece interconnect to the lower extreme central point that stable piece was fixed at the optical interferometer base puts, the front side of stable piece is provided with the clamping piece, the rear side surface of the inside rear side of optical interferometer base, the lower surface of roof and backplate all is fixed with the shock attenuation piece, the inner box passes through the spread groove and is connected with optical interferometer base draw-in groove. This portable just places stable optical interferometer, device internal assembly can carry out the outrigger to its self when the device of being convenient for carries the transportation, and this optical interferometer causes because of it lacks the slope and detects the part, causes in the device use, can't measure the device whether slope, and then leads to the device slope to influence the device and detect the accuracy.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an interferometer for optical element shape face detects usefulness to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: an interferometer for detecting the shape of an optical element comprises a fixed plate and a bearing disc, wherein the bearing disc is arranged at the top of the fixed plate;

the bottom of the fixed plate is provided with an inclination angle sensor, and two sides of the fixed plate are provided with buzzers;

four groups of supporting columns are installed at the bottom of the fixing plate, the supporting columns are located on the outer side of the inclination angle sensor, and flanges are installed at the bottoms of the supporting columns.

Preferably, two sets of electric telescopic rods are installed at the top of the fixing plate, and the electric telescopic rods are located on two sides of the bearing plate.

Preferably, the top end of the electric telescopic rod is provided with a servo screw rod.

Preferably, an interferometer detector is installed at the output end of the servo screw rod.

Preferably, the top of the fixed plate is provided with a connecting plate, and the connecting plate is positioned behind the bearing plate.

Preferably, a ventilation fan is installed in the connecting plate in a penetrating manner.

Preferably, a control screen is installed on the front surface of the fixing plate.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses an install inclination sensor and bee calling organ, the inclination of device circular telegram caster sensor to the device detects, when the inclination of device is too big, the inside electromagnetic relay switching-over of inclination sensor carries the electric energy to bee calling organ's inside, and the bee calling organ circular telegram back drives its inside little plectrum oscillation, sends sharp-pointed sound, reminds the staff, and great slope appears in the device, needs the adjusting device position, detects the device, prevents because of the device slope, influences the device and detects the accuracy.

2. The utility model discloses an install servo lead screw, when needs adjust the detection position of interferometer detector, can carry the electric energy to servo lead screw's inside via the control panel, the interferometer detector lateral shifting of its output installation of servo lead screw drive this moment to adjusting device's detection position improves device application scope.

3. The utility model discloses an install connecting plate and scavenger fan, via external control unit before the operative installations, carry the electric energy to the inside of scavenger fan, the scavenger fan drives the flabellum via electromagnetic effect this moment and rotates, produces suction to the air at the connecting plate back to carry the air to the top of fixed plate and blow, get rid of the dust at fixed plate top, prevent going on that the dust from influencing the device detection, improve device application scope.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the bottom connection structure of the servo screw rod of the present invention;

FIG. 3 is a schematic view of the bottom connecting portion of the fixing plate according to the present invention;

fig. 4 is a schematic view of the connecting portion at the top of the fixing plate of the present invention.

In the figure: 1. a fixing plate; 2. a carrier tray; 3. a tilt sensor; 4. a buzzer; 5. a support pillar; 6. a flange; 7. an electric telescopic rod; 8. a servo screw rod; 9. an interferometer detector; 10. a connecting plate; 11. a ventilator; 12. and (6) a control screen.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, the present invention provides an embodiment: an interferometer for detecting the shape of an optical element;

the optical component detection device comprises a fixed plate 1 and a bearing plate 2, wherein the bearing plate 2 is installed at the top of the fixed plate 1, the fixed plate 1 provides fixed points for the bearing plate 2, an inclination angle sensor 3, a buzzer 4, a support column 5, an electric telescopic rod 7, a connecting plate 10 and a control screen 12 which are installed on the outer surface of the fixed plate, the bearing plate 2 is installed at the top of the fixed plate 1, and an optical component to be detected is placed at the top of the bearing plate 2 through external force before the device is used; four groups of supporting columns 5 are arranged at the bottom of the fixed plate 1, the supporting columns 5 are positioned at the outer side of the inclination angle sensor 3, the supporting columns 5 are arranged at the bottom of the fixed plate 1 and are transmitted to supporting force in the fixed plate 1 through an external fixed plane to provide support for the whole device, a flange 6 is arranged at the bottom of the supporting columns 5, an external bolt is inserted into the flange 6 before the device is used and is connected with the external fixed plane, the fixing of the device is completed, two groups of electric telescopic rods 7 are arranged at the top of the fixed plate 1, the electric telescopic rods 7 are positioned at two sides of the bearing plate 2, when the detection height of the device needs to be adjusted, electric energy in different directions can be transmitted into the electric telescopic rods 7 through an external control part, an interferometer detector 9 indirectly connected with the top of the electric telescopic rods 7 is driven to move up and down, thereby the detection height of the device is adjusted, the interferometer detector 9 is arranged at the output end of the servo screw rod 8, after the device is electrified, the interferometer detector 9 releases light to the top of the bearing disc 2, profile detection is carried out on an optical element at the top of the bearing disc 2, detection data are transmitted to the inside of the control screen 12, the control screen 12 is installed on the front face of the fixing plate 1, when the detection data are transmitted to the inside of the control screen 12, the control screen 12 displays the detection data, a user can record profile data of the optical element, and meanwhile when the detection position of the interferometer detector 9 needs to be adjusted, electric energy can be transmitted to the inside of the servo screw rod 8 through the control screen 12.

As shown in fig. 1, 3 and 4, an interferometer for profile detection of an optical element;

including fixed plate 1 and angular transducer 3, angular transducer 3 is installed to the bottom of fixed plate 1, angular transducer 3 detects the inclination of device after the device circular telegram, when the inclination of device is too big, the inside electromagnetic relay switching-over of angular transducer 3, carry the inside to bee calling organ 4 with the electric energy, bee calling organ 4 is all installed to the both sides of fixed plate 1, the inside little plectrum oscillation of bee calling organ 4 circular telegram back drive, send sharp-pointed sound, remind the staff, great slope appears in the device, need adjusting device position, detect the device, prevent because of the device slope, influence the device and detect the accuracy.

As shown in fig. 1 and fig. 2, an interferometer for profile detection of an optical element;

including electric telescopic handle 7 and servo lead screw 8, servo lead screw 8 is installed on electric telescopic handle 7's top, and when the electric energy carried to servo lead screw 8's inside via control screen 12, servo lead screw 8 driven the interferometer detector 9 lateral shifting of its output installation to adjusting device's detection position improves device application scope.

As shown in fig. 3 and 4, an interferometer for profile detection of an optical element;

including fixed plate 1 and connecting plate 10, connecting plate 10 is installed at the top of fixed plate 1, and connecting plate 10 is located the rear that bears dish 2, connecting plate 10 is installed to the top of fixed plate 1, scavenger fan 11 for the inside installation that runs through provides the fixed point, inside of connecting plate 10 runs through installs scavenger fan 11, via external control unit before the user equipment, carry the inside to scavenger fan 11 with the electric energy, scavenger fan 11 is via electromagnetic effect this moment, drive the flabellum and rotate, produce suction to the air at the 10 backs of connecting plate, and blow the top of air transport to fixed plate 1, get rid of the dust at fixed plate 1 top, prevent going on that the dust from influencing the device detection, improve device application scope.

The working principle is as follows: insert the inside of flange 6 with external bolt at first, and be connected external bolt and external fixed plane, accomplish the fixed of device, later place the optical component who waits to detect at the top of bearing dish 2 through external force, via external control unit, carry the inside to electric telescopic handle 7 with the electric energy of equidirectional not, the interferometer detector 9 of drive electric telescopic handle 7 top indirect connection reciprocates, adjusting device's detection height, meanwhile, interferometer detector 9 releases light to the top of bearing dish 2, carry out the profile detection to the optical element who bears dish 2 top, and carry the inside to control panel 12 with the detected data, control panel 12 shows the detected data, the person of facilitating the use records optical element's profile data.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. Interferometer for optical element profile detection, comprising a fixing plate (1) and a carrier plate (2), characterized in that: the top of the fixed plate (1) is provided with a bearing disc (2); the bottom of the fixed plate (1) is provided with an inclination angle sensor (3), and two sides of the fixed plate (1) are provided with buzzers (4); four groups of supporting columns (5) are installed to the bottom of fixed plate (1), and supporting column (5) are located the outside of inclination sensor (3), flange (6) are installed to the bottom of supporting column (5).

2. An interferometer for profile detection of an optical element as claimed in claim 1, wherein: two sets of electric telescopic handle (7) are installed at the top of fixed plate (1), and electric telescopic handle (7) are located the both sides that bear dish (2).

3. An interferometer for profile detection of an optical element as claimed in claim 2, wherein: and a servo screw rod (8) is installed at the top end of the electric telescopic rod (7).

4. An interferometer for profile detection of an optical element as claimed in claim 3, wherein: and an interferometer detector (9) is arranged at the output end of the servo screw rod (8).

5. An interferometer for profile detection of an optical element as claimed in claim 1, wherein: connecting plate (10) is installed at the top of fixed plate (1), and connecting plate (10) are located the rear of bearing dish (2).

6. An interferometer for profile detection of an optical element as claimed in claim 5, wherein: and a ventilation fan (11) penetrates through the connecting plate (10).

7. An interferometer for profile detection of an optical element as claimed in claim 1, wherein: the front surface of the fixed plate (1) is provided with a control screen (12).