CN217332226U - Nondestructive testing system for radio frequency loss - Google Patents
Nondestructive testing system for radio frequency loss Download PDFInfo
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- CN217332226U CN217332226U CN202221161651.5U CN202221161651U CN217332226U CN 217332226 U CN217332226 U CN 217332226U CN 202221161651 U CN202221161651 U CN 202221161651U CN 217332226 U CN217332226 U CN 217332226U
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Abstract
The application discloses a nondestructive testing system for radio frequency loss, wherein a microwave transmitting device comprises a microwave transmitter, a microwave modulator and a microwave focalizer which are sequentially arranged, and microwaves emitted by the microwave transmitter are irradiated to a sample to be detected on a sample table through the microwave modulator and the microwave focalizer; the detection wave transmitting device comprises a detection wave transmitter, a detection wave modulator and a detection wave focalizer which are sequentially arranged, and detection waves emitted by the detection wave transmitter are irradiated to a sample to be detected through the detection wave modulator and the detection wave focalizer; the optical signal emitted by the probe wave irradiated on the sample to be detected is converted into an electrical signal through the optical receiving device, and the measuring device detects the sample to be detected according to the electrical signal. The detection mode in this application has non-contact and lossless characteristics, avoids processing into the traditional destructive inspection that carries out the radio frequency loss detection again behind the device to piezoelectric film material, reduces time and economic cost, improves research and development production efficiency.
Description
Technical Field
The application relates to the technical field of radio frequency loss detection, in particular to a nondestructive detection system for radio frequency loss.
Background
With the rapid commercialization of fifth generation (5G) communication technology around the world, the market demand for Radio Frequency (RF) filter elements of the 5G band is rapidly increasing. Piezoelectric film based acoustic resonators/filters are one of the effective solutions to achieve high performance radio frequency filter elements.
The absorption loss of the piezoelectric film is one of the main factors limiting the development of high-end filters or radio frequency devices, and affects the acoustic wave modulation efficiency of the film. Especially at the second, third or higher harmonics, even very weak absorption losses are sufficient to cause catastrophic destruction of the thin-film element. At present, the piezoelectric thin film material is generally required to be cut and processed into devices, and then the radio frequency loss detection is carried out, wherein the detection mode belongs to destructive inspection.
After the piezoelectric film is subjected to destructive inspection, the inspected sample completely loses the original use value, so that the economic cost of research and production is increased. Moreover, the piezoelectric film is processed into a device, so that the detection period is longer, the time cost is increased, and the research and production progress is seriously influenced. Therefore, it is desirable to provide a nondestructive testing method for piezoelectric thin film materials.
SUMMERY OF THE UTILITY MODEL
The application provides a nondestructive test system of radio frequency loss to solve among the prior art detection mode of piezoelectric film and make the economic cost of research and production increase, and detect the longer technical problem of cycle.
In order to solve the technical problem, the embodiment of the application discloses the following technical scheme:
the embodiment of the application discloses nondestructive test system of radio frequency loss, nondestructive test system includes: microwave emitter, probe emitter, light receiving arrangement, measuring device and sample platform, wherein:
the microwave transmitting device comprises a microwave transmitter, a microwave modulator and a microwave focuser which are arranged in sequence, and microwaves emitted by the microwave transmitter are irradiated to a sample to be detected on the sample stage through the microwave modulator and the microwave focuser;
the detection wave transmitting device comprises a detection wave transmitter, a detection wave modulator and a detection wave focalizer which are sequentially arranged, and detection waves emitted by the detection wave transmitter are irradiated to the sample to be detected through the detection wave modulator and the detection wave focalizer;
the optical signal emitted by the probe wave irradiating the sample to be detected is converted into an electrical signal through the optical receiving device, and the electrical signal is transmitted to the measuring device, so that the measuring device detects the sample to be detected according to the electrical signal.
Optionally, in the above nondestructive testing system for radio frequency loss, the light receiving device includes a reflected light receiving device, and the reflected light receiving device includes a reflected light focuser, a reflected light filter, and a reflected light receiver;
reflected light signals reflected by the detection waves irradiated on the surface of the sample to be detected sequentially enter the reflected light focalizer, the reflected light filter and the reflected light receiver, wherein the reflected light focalizer is used for focusing the reflected light, the reflected light filter is used for filtering scattered parts in the reflected light, and the reflected light receiver is used for converting the reflected light into electric signals.
Optionally, in the above nondestructive testing system for radio frequency loss, the light receiving device further includes a transmitted light receiving device, and the transmitted light receiving device includes a transmitted light focuser, a transmitted light filter, and a transmitted light receiver;
the transmitted light signals transmitted from the detection waves irradiated to the interior of the sample to be detected sequentially enter the transmitted light focalizer, the transmitted light filter and the transmitted light receiver, wherein the transmitted light focalizer is used for focusing the transmitted light, the transmitted light filter is used for filtering a scattering part in the transmitted light, and the transmitted light receiver is used for converting the transmitted light into an electric signal.
Optionally, in the above-mentioned radio frequency loss nondestructive testing system, the nondestructive testing system further includes: the device comprises an initial signal extraction device and a stable signal extraction device, wherein the initial signal extraction device is respectively in communication connection with a reflected light receiver, a transmitted light receiver and a measuring device, the stable signal extraction device is respectively in communication connection with the reflected light receiver, the transmitted light receiver and the measuring device, the initial signal extraction device is used for acquiring and amplifying signals received by the light receiving device when microwaves are irradiated to the upper surface of a sample to be detected to be transmitted out from the lower surface of the sample to be detected, and the stable signal extraction device is used for acquiring and amplifying signals received by the light receiving device after the microwaves are transmitted out from the lower surface of the sample to be detected.
Optionally, in the nondestructive testing system for radio frequency loss, the time precision of the detection by the initial signal extraction device is femtosecond, and the time precision of the detection by the stable signal extraction device is millisecond.
Optionally, in the nondestructive testing system for radio frequency loss, the emission port of the microwave emitter is disposed right above the surface of the sample to be tested, so that the microwave emitted by the microwave emitter vertically irradiates the surface of the sample to be tested, and the emission port of the probe wave emitter is disposed obliquely above the surface of the sample to be tested, so that the probe wave emitted by the probe wave emitter obliquely irradiates the surface of the sample to be tested.
Optionally, in the nondestructive testing system for radio frequency loss, an area of a probe wave spot formed by irradiating the probe wave onto the sample to be tested is greater than or equal to an area of a microwave spot formed by irradiating the microwave onto the sample to be tested.
Optionally, in the nondestructive testing system for radio frequency loss, the frequency range of the microwave is 1.5-10 GHz.
Optionally, in the nondestructive testing system for radio frequency loss, the sample to be tested is a single-layer structure thin film or a multilayer structure thin film, and the single-layer structure thin film or the multilayer structure thin film is used for preparing a filter or a resonator.
Optionally, in the nondestructive testing system for radio frequency loss, the probe wave is a laser.
Compared with the prior art, the beneficial effect of this application is:
the application provides a nondestructive test system of radio frequency loss, through microwave emitter and detection wave emitter respectively to waiting to detect sample transmission microwave and detection wave on the sample platform. The microwave emitted by the microwave emitter is irradiated to a sample to be detected through the microwave modulator and the microwave focuser in sequence, the surface of the sample to be detected generates thermal deformation through the irradiation of the microwave, and for the piezoelectric thin film material, the absorption loss generated in the state of second harmonic, third harmonic or higher harmonic when the piezoelectric thin film material is processed into a device can be simulated through the irradiation of the microwave on the piezoelectric thin film material. The detection wave emitted by the detection wave emitter irradiates to a sample to be detected through the detection wave modulator and the detection wave focuser in sequence. The propagation direction of the detection wave on the sample to be detected is changed due to thermal deformation generated by the sample to be detected, the light receiving device is used for receiving the light signal emitted by the detection wave irradiating the sample to be detected, and the light signal is converted into an electrical signal. And finally, analyzing the electrical signals by using a measuring device so as to detect the sample to be detected. The detection mode in this application has non-contact and harmless characteristics, has avoided processing into the traditional destructive inspection that the radio frequency loss detected again after the device to piezoelectric film material, has reduced time and economic cost, has improved research and development production efficiency.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic diagram of a basic structure of a nondestructive testing system for radio frequency loss according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a basic structure of a sample to be detected according to an embodiment of the present invention;
description of the reference numerals: 1. a microwave emitting device; 11. a microwave emitter; 12. a microwave modulator; 13. a microwave focuser; 2. a probe wave transmitting device; 21. a probe wave transmitter; 22. a probe wave modulator; 23. a probe wave focuser; 3. a measuring device; 4. a sample stage; 5. a sample to be detected; 51. a first surface; 52. a second surface; 53. a third surface; 54. a fourth surface; 6. a reflected light receiving device; 61. a reflected light focuser; 62. a reflected light filter; 63. a reflected light receiver; 7. a transmitted light receiving device; 71. a transmitted light focuser; 72. a transmitted light filter; 73. a transmitted light receiver; 8. an initial signal extraction device; 9. and a stable signal extraction device.
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
At present, when a performance test of radio frequency loss is performed, a piezoelectric thin film material is generally required to be cut, processed into a device, and then correspondingly detected. The detection mode belongs to destructive inspection, and the original use value of the inspected sample is completely lost, so that the economic cost of research and production is increased. Moreover, the piezoelectric film is processed into a device, so that the detection period is longer, the time cost is increased, and the research and production progress is seriously influenced. In view of the above, the present application provides a nondestructive testing system for radio frequency loss in some embodiments.
For ease of understanding, the principles involved in the present application are first described below.
According to the method, the microwave irradiates the surface of the sample to be detected, the microwave has good penetrability, when the microwave penetrates into a medium, as the microwave energy and the medium have certain interaction, the microwave frequency of 2450MHz is taken as an example, molecules of the medium generate 24 hundred million vibration per second, the molecules of the medium generate friction with each other, the temperature of the medium is increased, the inside and the outside of the medium material are heated almost simultaneously, the heat source state of a formed body is formed, and the surface of the sample to be detected generates thermal deformation. The detection wave irradiates the surface of the sample to be detected, which generates thermal deformation, so that the propagation direction of the reflection wave or the transmission wave of the detection wave is changed due to the thermal deformation generated on the surface of the sample to be detected. The absorption information of the surface of the sample to be detected is obtained through the reflected detection wave above the upper surface of the sample to be detected, and the absorption information of the interior of the sample to be detected is obtained through the transmitted detection wave on the lower surface of the sample to be detected. The larger the absorption on the surface or inside of the sample to be detected is, the larger the detected heat absorption signal is, the absorption value is in direct proportion to the radio frequency loss of the sample to be detected, and the larger the absorption value is, the larger the radio frequency loss of the sample to be detected is.
The nondestructive testing system for radio frequency loss in the present application is described below with reference to the accompanying drawings.
Referring to fig. 1, a basic structure diagram of a nondestructive testing system for radio frequency loss according to an embodiment of the present invention is shown. Referring to fig. 1, the nondestructive testing system in the present application includes: a microwave emitting device 1, a probe wave emitting device 2, a light receiving device, a measuring device 3 and a sample stage 4. Wherein, a sample 5 to be detected is placed on the sample stage 4, and the sample 5 to be detected can be a material for preparing a filter or a resonator. The microwave emitting device 1 is used for emitting microwaves, and the microwaves act on the sample 5 to be detected so as to thermally deform the sample 5 to be detected. The probe wave emitting device 2 is used for emitting probe waves, and the probe waves are also acted on the sample 5 to be detected. Due to the thermal deformation generated by the sample 5 to be detected, the propagation direction of the detection wave on the sample 5 to be detected is changed, and the light receiving device is used for receiving the light signal emitted by the detection wave irradiated to the sample to be detected and converting the light signal into an electrical signal. The measuring device can receive the electrical signal and analyze the electrical signal to detect the sample to be detected.
In some embodiments, the microwave transmitting device 1 includes a microwave transmitter 11, a microwave modulator 12, and a microwave focuser 13, which are sequentially arranged, and microwaves emitted by the microwave transmitter 11 pass through the microwave modulator 12 and the microwave focuser 13 and irradiate the sample 5 to be detected on the sample stage 4, so as to form a microwave spot on the sample 5 to be detected. The microwave emitter 11 is used for emitting microwaves capable of simulating the sample 5 to be detected under the action of second harmonic, third harmonic or higher harmonic, so that the sample 5 to be detected is thermally deformed. The microwave modulator 12 is used to modulate the microwave power or frequency such that the microwaves impinging on the sample 5 to be detected are in the frequency range 1.5-10 GHz. The microwave focuser 13 is used for focusing microwaves on the sample 5 to be detected, so as to heat the sample 5 to be detected, and form a periodically fluctuating thermal packet.
In some embodiments, the probe wave emitting device 2 includes a probe wave emitter 21, a probe wave modulator 22, and a probe wave focuser 23, which are arranged in sequence, and the probe wave emitted from the probe wave emitter 21 passes through the probe wave modulator 22 and the probe wave focuser 23 and irradiates the sample 5 to be detected. The probe wave emitter 21 is configured to provide a probe wave to form a probe wave spot on the sample 5 to be detected, where the probe wave may be a laser, and may be, for example, 532nm, 633nm, 1550nm, 3.8 μm, 1064nm, 1319nm, or the like. The probe wave modulator 22 is used to modulate the intensity or frequency of the probe wave. The detection wave focalizer 23 is configured to focus the detection wave onto the sample 5 to be detected, so that a coincidence area exists between a detection wave spot and a microwave spot on the sample 5 to be detected.
In some embodiments, the area of the probe wave spot formed by irradiating the probe wave onto the sample 5 to be detected is greater than or equal to the area of the microwave spot formed by irradiating the microwave onto the sample 5 to be detected.
In some embodiments, the microwave emitted from the microwave emitter 11 may be irradiated onto the surface of the sample 5 to be detected in a vertical manner, and the probe wave emitted from the probe wave emitter 21 may be irradiated onto the surface of the sample 5 to be detected in an inclined manner.
In some embodiments, the probe wave emitted by the probe wave emitter 21 acts on the area where the sample 5 to be detected is thermally deformed, and reflects or transmits on the surface of the sample 5 to be detected, generating reflected light and transmitted light. The absorption information of the surface of the sample 5 to be detected can be obtained through the reflected light, and the absorption information is further used for detecting the condition of the absorption defects of the surface of the sample 5 to be detected. The absorption information inside the sample 5 to be detected can be obtained through the transmitted light, and then the absorption information is used for detecting the condition of the absorption defect in the sample 5 to be detected. It should be noted that, when detecting the absorption defect on the surface of the sample 5 to be detected, the selected detection wave only needs to be capable of generating reflection on the surface of the sample 5 to be detected; when detecting absorption defects inside the sample 5 to be detected, the selected detection wave needs to be capable of penetrating through the sample 5 to be detected, and is incident into the sample from the upper surface of the sample 5 to be detected and is transmitted out from the lower surface of the sample 5 to be detected.
In some embodiments, the light receiving means comprises reflected light receiving means 6 when only reflected light needs to be received and detected, i.e. only absorption defects on the surface of the sample 5 to be inspected are detected.
In some embodiments, the light receiving means comprises a transmitted light receiving means 7 only when it is necessary to receive and detect only transmitted light, i.e. only absorption defects inside the sample 5 to be inspected.
In some embodiments, the light receiving means includes a reflected light receiving means 6 and a transmitted light receiving means 7 when the purpose is to receive and detect reflected light and transmitted light, respectively, i.e., to detect both surface and internal absorption defects of the sample 5 to be inspected.
In some embodiments, the reflected light receiving device 6 includes a reflected light focuser 61, a reflected light filter 62, and a reflected light receiver 63. The reflected light signals reflected by the probe waves irradiated on the surface of the sample 5 to be detected sequentially enter the reflected light focalizer 61, the reflected light filter 62 and the reflected light receiver 63. The reflected light focalizer 61 is used for focusing the reflected light, and when the reflected light is weaker, the signal intensity of the reflected light can be remarkably improved through the reflected light focalizer 61, and the detection sensitivity can be improved. Since the received reflected light will scatter on the surface of the sample 5 to be measured, and this part of the energy will affect the accuracy of the final measurement result if it enters the reflected light receiver 63, the scattered part of the reflected light can be filtered out by the reflected light filter 62, so as to improve the accuracy of the final measurement result. The reflected light receiver 63 is used for receiving the intensity change of the reflected light of the thermal deformation area of the sample 5 to be detected and converting the intensity change into an electrical signal which can be identified by the measuring device 3.
In some embodiments, the transmitted light receiving device 7 includes a transmitted light focuser 71, a transmitted light filter 72, and a transmitted light receiver 73. The transmitted light signal transmitted by the probe wave irradiated to the interior of the sample 5 to be detected sequentially enters the transmitted light focalizer 71, the transmitted light filter 72 and the transmitted light receiver 73. The transmitted light focalizer 71 is used for focusing the transmitted light, so as to improve the intensity of the transmitted light and improve the detection sensitivity. Since the received transmitted light will scatter at the surface of the sample 5 to be measured, and this part of the energy will affect the accuracy of the final measurement result if it also enters the transmitted light receiver 73, the scattered part of the transmitted light can be filtered out by the transmitted light filter 72 to improve the accuracy of the final measurement result. The transmitted light receiver 73 is used for receiving the intensity change of the transmitted light on the lower surface of the sample 5 to be detected and converting the intensity change into an electrical signal which can be identified by the measuring device 3.
In some embodiments, the sample 5 to be tested is a material that can be used to make filters or resonators. The structure of the sample 5 to be detected may be a single-layer structure film or a multilayer structure film without being limited. The single-layer structure film may be Lithium Niobate (LN), Lithium Tantalate (LT), zinc oxide (ZnO), aluminum nitride, quartz, germanium, ceramic, lithium tetraborate, potassium titanyl phosphate, silicon, rubidium titanyl phosphate, gallium arsenide, or the like. The multilayer structure film may be two, three or four layers, and may be, for example, LN/SiO depending on the product design 2 /Si、LN/SiO 2 /p-Si/Si、LN/Si、SiO 2 /Si、SiO 2 /p-Si/Si、LN/SiO 2 /SiC, LN/quartz, etc.
Taking a three-layer structure film of a piezoelectric thin film layer/an isolation layer/a substrate, which are sequentially stacked, as an example, the material of the piezoelectric thin film layer may be lithium niobate, lithium tantalate, zinc oxide, aluminum nitride, quartz, germanium, ceramic, lithium tetraborate, potassium titanyl phosphate, rubidium titanyl phosphate, gallium arsenide, or the like, the material of the isolation layer may be silicon dioxide, silicon nitride, silicon oxynitride, or the like, and the material of the substrate may be lithium niobate, lithium tantalate, silicon, quartz, silicon carbide, germanium, or the like.
The nondestructive testing system for radio frequency loss of the present application can be used for simulating and detecting the absorption loss generated in the state of the second harmonic, the third harmonic or higher harmonic of the above-described single-layer structure thin film or multilayer structure thin film, and can also be used for simulating and detecting the absorption loss generated in the state of the intermediate structure (for example) of the above-described multilayer structure thin film in the preparation process, in the state of the second harmonic, the third harmonic or higher harmonic. For example, the multilayer structure film is LN/SiO laminated in this order 2 Si, intermediate structure silicon substrate or laminated SiO in preparation thereof 2 the/Si can also be used as a sample to be tested for detection.
The above-described rf loss nondestructive testing system is described below with reference to several specific examples.
Example 1: and (5) carrying out surface absorption detection on the sample to be detected 5.
The sample 5 to be detected is selected from lithium niobate/silicon dioxide/silicon (LN/SiO) with a secondary laminated structure 2 and/Si), the thicknesses of the layers are 400nm, 2 mu m and 0.5mm in sequence. The microwave emitter 11 emits microwaves, the microwave modulator 12 adjusts the frequency of the microwaves to 2GHz, the microwaves are focused by the microwave focuser 13 and then vertically injected onto the surface of the lithium niobate thin film layer of the sample 5 to be detected to form microwave spots, and the surface of the lithium niobate generates thermal deformation due to microwave irradiation to form bulges. The detection wave emitter 21 emits laser, the detection wave modulator 22 adjusts the wavelength of the laser to 633nm, and the laser is focused by the detection wave focuser 23 and then obliquely enters the sample 5 to be detected and irradiates the surface of the lithium niobate thin film layer to form a detection wave spot. The microwave light spot on the surface of the lithium niobate thin film layer coincides with the light spot of the detection wave, the reflected light of the detection wave on the upper surface of the lithium niobate thin film layer is incident into the reflected light receiving device 6, and the absorption signal on the upper surface of the lithium niobate thin film layer is obtained through signal conversion and amplification processing. Finally, the absorption signal is received and evaluated by the measuring device 3.
Example 2: the internal absorption of the sample 5 to be tested is measured.
The sample 5 to be detected is selected to have a structure of single-layer lithium tantalate and a thickness of 0.425 mm. The microwave emitter 11 emits microwaves, the microwave modulator 12 adjusts the frequency of the microwaves to 3GHz, the microwaves are focused by the microwave focuser 13 and then vertically injected to the surface of the lithium tantalate to form microwave spots, and the surface of the lithium niobate generates thermal deformation due to microwave irradiation to form bulges. The detection wave emitter 21 emits laser, the detection wave modulator 22 adjusts the wavelength of the laser to 633nm, the laser is obliquely incident to the surface of the lithium tantalate after being focused by the detection wave focuser 23 to form a detection wave spot, the microwave spot on the surface of the lithium tantalate is overlapped with the detection wave spot, the transmission light of the detection wave on the lower surface of the lithium tantalate is incident to the transmission light receiving device 7, and the absorption signal inside the lithium tantalate is obtained through signal conversion and amplification processing. Finally, the absorption signal is received and evaluated by the measuring device 3.
Example 3: the internal absorption of the sample 5 to be tested is measured.
The sample 5 to be detected is selected from lithium niobate/silicon dioxide/silicon (LN/SiO) with a secondary laminated structure 2 Si), thickness of each layerThe particle size was 400nm, 2 μm, 0.5 mm. The microwave emitter 11 emits microwaves, the microwave modulator 12 adjusts the frequency of the microwaves to 2GHz, the microwaves are focused by the microwave focuser 13 and then vertically injected onto the surface of the lithium niobate thin film layer to form microwave spots, and the surface of the lithium niobate generates thermal deformation due to microwave irradiation to form bulges. The probe wave emitter 21 emits laser, and the probe wave modulator 22 adjusts the wavelength of the laser to 1550nm, and here, because the substrate in the sample 5 to be detected is monocrystalline silicon, the laser of 633nm cannot be transmitted into the silicon layer and is transmitted out, the laser of 1550nm which can be transmitted into the silicon is selected. The microwave light spot is focused by the probe wave focalizer 23 and then obliquely emitted to the surface of the lithium niobate thin film layer to form a probe wave light spot, and the microwave light spot on the surface of the lithium niobate thin film layer is superposed with the probe wave light spot. The reflected light of the probe wave on the upper surface of the lithium niobate thin film layer is incident into the reflected light receiving device 6, and the absorption signal of the upper surface of the lithium niobate thin film layer is obtained through signal conversion and amplification processing. The transmitted light of the detection wave on the lower surface of the lithium tantalate is incident into the transmitted light receiving device 7, and the absorption signal in the lithium tantalate is obtained through signal conversion and amplification processing. Finally, the absorption signal is received and evaluated by the measuring device 3.
In some embodiments, the non-destructive inspection system further comprises: the device comprises an initial signal extraction device 8 and a stable signal extraction device 9, wherein the initial signal extraction device 8 is respectively in communication connection with the reflected light receiver 63, the transmitted light receiver 73 and the measurement device 3, the stable signal extraction device 9 is respectively in communication connection with the reflected light receiver 63, the transmitted light receiver 73 and the measurement device 3, the initial signal extraction device 8 is used for acquiring and amplifying signals received by the light receiving device when microwaves are irradiated to the upper surface of the sample 5 to be detected to be transmitted out from the lower surface of the sample 5 to be detected, and the stable signal extraction device 9 is used for acquiring and amplifying signals received by the light receiving device after the microwaves are transmitted out from the lower surface of the sample 5 to be detected.
Fig. 2 is a schematic diagram of a basic structure of a sample to be detected according to an embodiment of the present invention. As shown in FIG. 2, a sample 5 to be examined was a lithium niobate layer/a silica layer/a silicon substrate (LN/SiO) laminated in this order 2 /Si) isFor example, the sample 5 to be tested has a first surface 51, a second surface 52, a third surface 53 and a fourth surface 54. Firstly, the emission port of the microwave emitter 11 and the emission port of the probe wave emitter 21 are adjusted so that the probe wave spot and the microwave spot coincide on the surface of the sample 5 to be detected. Then, the probe wave emitted from the probe wave emitter 21 is controlled to sequentially enter the probe wave modulator 22 and the probe wave focuser 23, and to irradiate the LN surface, i.e., the first surface 51, of the sample 5 to be detected. Finally, the microwave emitted from the microwave emitter 11 is controlled to be emitted into the microwave modulator 12 and the microwave focuser 13 in sequence, and is irradiated onto the first surface 51 of the sample 5 to be detected. Finally, the microwaves penetrate out from the first surface 51 to the second surface 52, from the second surface 52 to the third surface 53, from the third surface 53 to the fourth surface 54, in sequence, of the sample 5 to be detected.
Wherein, when the microwave reaches the fourth surface 54 from the first surface 51 of the sample 5 to be detected, the signal of the change of the reflection and transmission light of the probe wave caused is the initial signal, and the partial signal is obtained by the initial signal extraction device 8. Specifically, when the microwave enters from the first surface 51 of the sample 5 to be detected and reaches the second surface 52, the reflected light or transmitted light of the probe wave acquired by the initial signal extraction means 8 is a change in the reflected or transmitted signal of the probe wave caused by a surface change of the lithium niobate layer caused by the microwave, and thus surface or internal absorption loss information Q1 caused by the lithium niobate layer is acquired. When the microwave enters from the first surface 51 of the sample 5 to be detected and reaches the third surface 53, the reflected light or transmitted light of the probe wave obtained by the initial signal extraction means is the change of the reflected or projected signal of the probe wave caused by the surface change of the lithium niobate layer and the silica layer caused by the microwave, and thus the information Q2 of the absorption loss of the surface or the inside caused by the cooperation of the lithium niobate layer and the silica layer is obtained. Here, by calculating the difference between Q2 and Q1, information Q3 on the absorption loss of the surface or inside caused by the silicon dioxide layer can be obtained. By analogy, the information Q4 of the absorption loss at the surface or inside caused by the silicon substrate can be acquired.
In addition, when the microwave penetrates out of the fourth surface 54 of the sample 5 to be detected, the signal of the change of the reflected and transmitted light of the probe wave caused is a steady signal, and the partial signal is acquired by the steady signal extraction device 9.
In some embodiments, the initial signal extraction device 8 requires that the time precision of detection is relatively precise, and the time precision of detection may be femtosecond. The time accuracy of the detection required by the stable signal extraction means 9 may be lower than the time accuracy of the detection required by the initial signal extraction means 8, and the time accuracy of the detection may be milliseconds.
In the nondestructive testing mode of radio frequency loss, absorption loss generated in a state of second harmonic, third harmonic or higher harmonic when the sample 5 to be tested is processed into a device is simulated by adopting a mode of irradiating the surface of the sample 5 to be tested with microwaves. The surface absorption or in-vivo absorption defect distribution of the sample to be detected is detected accurately, quickly and in real time, and the method has great significance in improving the preparation process of the sample to be detected and the performance of products. The nondestructive testing mode has the advantages of being non-contact and nondestructive, the traditional destructive mode that radio frequency loss detection is carried out after the nondestructive testing mode is processed into a device is avoided, time and economic cost are reduced, and research and development production efficiency is improved.
Since the above embodiments are all described by referring to and combining with other embodiments, the same portions are provided between different embodiments, and the same and similar portions between the various embodiments in this specification may be referred to each other. And will not be described in detail herein.
It is noted that, in this specification, relational terms such as "first" and "second," and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a circuit structure, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such circuit structure, article, or apparatus. Without further limitation, the presence of an element identified by the phrase "comprising an … …" does not exclude the presence of other like elements in a circuit structure, article or device comprising the element.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
The above-described embodiments of the present application do not limit the scope of the present application.
Claims (10)
1. A nondestructive testing system for radio frequency loss, said nondestructive testing system comprising: microwave emitter (1), probe wave emitter (2), light receiver, measuring device (3) and sample platform (4), wherein:
the microwave transmitting device (1) comprises a microwave transmitter (11), a microwave modulator (12) and a microwave focalizer (13) which are sequentially arranged, and microwaves emitted by the microwave transmitter (11) irradiate a sample (5) to be detected on the sample table (4) through the microwave modulator (12) and the microwave focalizer (13);
the detection wave transmitting device (2) comprises a detection wave transmitter (21), a detection wave modulator (22) and a detection wave focalizer (23) which are sequentially arranged, and detection waves emitted by the detection wave transmitter (21) irradiate the sample (5) to be detected through the detection wave modulator (22) and the detection wave focalizer (23);
the optical signal emitted by the probe wave irradiating the sample (5) to be detected is converted into an electrical signal through the light receiving device, and the electrical signal is transmitted to the measuring device (3), so that the measuring device (3) detects the sample (5) to be detected according to the electrical signal.
2. The system for the nondestructive examination of radio frequency loss according to claim 1, characterized in that the light receiving means comprises a reflected light receiving means (6), the reflected light receiving means (6) comprising a reflected light focuser (61), a reflected light filter (62) and a reflected light receiver (63);
reflected light signals reflected by the surface of the sample to be detected (5) irradiated by the detection waves sequentially enter the reflected light focalizer (61), the reflected light filter (62) and the reflected light receiver (63), wherein the reflected light focalizer (61) is used for focusing the reflected light, the reflected light filter (62) is used for filtering out scattered parts in the reflected light, and the reflected light receiver (63) is used for converting the reflected light into electric signals.
3. The system for the non-destructive examination of radio frequency losses according to claim 1, characterized in that said light receiving means further comprise a transmitted light receiving means (7), said transmitted light receiving means (7) comprising a transmitted light focuser (71), a transmitted light filter (72) and a transmitted light receiver (73);
the transmitted light signals transmitted by the detection waves irradiated to the interior of the sample (5) to be detected sequentially enter the transmitted light focalizer (71), the transmitted light filter (72) and the transmitted light receiver (73), wherein the transmitted light focalizer (71) is used for focusing the transmitted light, the transmitted light filter (72) is used for filtering out a scattering part in the transmitted light, and the transmitted light receiver (73) is used for converting the transmitted light into an electric signal.
4. The system for nondestructive testing of radio frequency loss of claim 1, further comprising: the device comprises an initial signal extraction device (8) and a stable signal extraction device (9), wherein the initial signal extraction device (8) is respectively in communication connection with a reflected light receiver (63), a transmitted light receiver (73) and a measurement device (3), the stable signal extraction device (9) is respectively in communication connection with the reflected light receiver (63), the transmitted light receiver (73) and the measurement device (3), the initial signal extraction device (8) is used for acquiring and amplifying signals received by the light receiving device when microwaves are irradiated to the upper surface of a sample (5) to be detected to be transmitted out from the lower surface of the sample (5) to be detected, and the stable signal extraction device (9) is used for acquiring and amplifying signals received by the light receiving device after the microwaves are transmitted out from the lower surface of the sample (5) to be detected.
5. The system for nondestructive testing of radio frequency loss according to claim 4, characterized in that the time precision of detection by the initial signal extraction means (8) is femtosecond and the time precision of detection by the stationary signal extraction means (9) is millisecond.
6. The nondestructive testing system for radio frequency loss according to claim 1, wherein the emission port of the microwave emitter (11) is disposed directly above the surface of the sample (5) to be tested so that the microwave emitted from the microwave emitter (11) vertically irradiates the surface of the sample (5) to be tested, and the emission port of the probe wave emitter (21) is disposed obliquely above the surface of the sample (5) to be tested so that the probe wave emitted from the probe wave emitter (21) obliquely irradiates the surface of the sample (5) to be tested.
7. The nondestructive testing system for radio frequency loss according to claim 1, wherein the area of the probe wave spot formed by irradiating the probe wave onto the sample (5) to be tested is larger than or equal to the area of the microwave spot formed by irradiating the microwave onto the sample (5) to be tested.
8. The system for nondestructive testing of radio frequency loss according to claim 1 wherein said microwave has a frequency in the range of 1.5-10 GHz.
9. The system for the nondestructive testing of radio frequency losses according to claim 1, characterized in that the sample (5) to be tested is a single-layer structure thin film or a multilayer structure thin film, which is used for the preparation of filters or resonators.
10. The system for nondestructive testing of radio frequency loss of claim 1 wherein said probe wave is a laser.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221161651.5U CN217332226U (en) | 2022-05-13 | 2022-05-13 | Nondestructive testing system for radio frequency loss |
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| CN202221161651.5U CN217332226U (en) | 2022-05-13 | 2022-05-13 | Nondestructive testing system for radio frequency loss |
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