CN217330366U - Cooling liquid supply device and temperature control system - Google Patents
Cooling liquid supply device and temperature control system Download PDFInfo
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- CN217330366U CN217330366U CN202220722364.0U CN202220722364U CN217330366U CN 217330366 U CN217330366 U CN 217330366U CN 202220722364 U CN202220722364 U CN 202220722364U CN 217330366 U CN217330366 U CN 217330366U
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Abstract
The utility model provides a coolant liquid feeding device, include: a first liquid container for providing a cooling liquid which can be recycled; a second liquid container for storing the recyclable coolant; one end of the first transfusion pipeline is communicated with the first liquid container, the other end of the first transfusion pipeline is communicated with the second liquid container, and the first transfusion pipeline is configured as follows: when the liquid level of the first liquid container is lower than a first preset value, the cooling liquid in the second liquid container is conveyed into the first liquid container through the first liquid conveying pipeline. The utility model discloses set up the second liquid container, provided the coolant liquid for process equipment through first liquid container, for first liquid container fluid infusion through the second liquid container to reduce required number of times of affirmation and the latency of process equipment end communication when first liquid container needs the fluid infusion. And the second liquid container is used for replenishing and storing the cooling liquid which can be recycled in time, which is equivalent to that a buffer area is additionally arranged for the temperature control system, so that the liquid supplementing efficiency is improved.
Description
Technical Field
The present disclosure relates to semiconductor manufacturing technologies, and particularly to a cooling liquid supply device and a temperature control system for semiconductor manufacturing.
Background
The semiconductor manufacturing process needs to be performed at a preset and relatively strict temperature, and a certain amount of cooling needs to be provided to offset the heat load during the process (e.g., the heat generated by the semiconductor processing reaction chamber and the liquid crystal panel processing reaction chamber) while maintaining the required temperature.
In the prior art, a temperature control system is used as an auxiliary device for semiconductor manufacturing, and a refrigeration system, a circulation pipeline and a water storage device are generally used for providing cooling liquid to accurately control output temperature, so as to ensure that manufacturing of wafers or liquid crystal panels and the like is performed at a temperature meeting technological requirements.
However, the prior art generally includes only one coolant storage tank, which is in communication with the refrigeration system and the process equipment to form a circulation loop, and during the operation of the temperature control equipment, the circulating liquid in the circulation pipeline is gradually reduced, and a liquid needs to be replenished in time. When the circulating liquid is reduced and needs to be supplemented, a command needs to be sent to the etching process equipment end every time the liquid is supplemented, and the liquid supplementing efficiency is low. In the production process of wafers, liquid crystal panels and the like, liquid in the circulating liquid tank overflows and leaks when being replenished with liquid, so that great influence is caused.
SUMMERY OF THE UTILITY MODEL
In view of at least one of the drawbacks of the prior art, the present invention provides a coolant supply device, comprising:
a first liquid container for providing a cooling liquid which can be recycled;
a second liquid container for storing the recyclable coolant;
one end of the first transfusion pipeline is communicated with the first liquid container, the other end of the first transfusion pipeline is communicated with the second liquid container, and the first transfusion pipeline is configured as follows:
when the liquid level of the first liquid container is lower than a first preset value, the cooling liquid in the second liquid container is conveyed into the first liquid container through the first liquid conveying pipeline.
According to an aspect of the present invention, the coolant supply device further includes:
one end of the second liquid conveying pipeline is communicated with the second liquid container, the other end of the second liquid conveying pipeline is communicated with a process equipment end, and the second liquid conveying pipeline is configured into a structure that:
and when the liquid level of the second liquid container is lower than a second preset value, conveying cooling liquid from a process equipment end to the second liquid container through the second liquid conveying pipeline.
According to an aspect of the present invention, the coolant supply device further includes:
the first electromagnetic valve is arranged on the first infusion pipeline and used for communicating or cutting off the first infusion pipeline;
the second electromagnetic valve is arranged on the second infusion pipeline and used for communicating or cutting off the second infusion pipeline;
and the control unit is in communication connection with the first electromagnetic valve and the second electromagnetic valve and is used for controlling the opening or closing of the first electromagnetic valve and the second electromagnetic valve.
According to an aspect of the present invention, the coolant supply device further includes:
the first liquid level sensor is arranged in the first liquid container and used for detecting the liquid level of the first liquid container;
the second liquid level sensor is arranged in the second liquid container and used for detecting the liquid level of the second liquid container;
wherein the control unit is communicatively coupled to the first level sensor and the second level sensor and configured to:
and controlling the first electromagnetic valve and the second electromagnetic valve to be opened or closed according to detection signals of the first liquid level sensor and the second liquid level sensor.
According to an aspect of the invention, wherein the control unit is further configured to:
and when the liquid level of the second liquid container is lower than the second preset value, sending a liquid supplementing request signal to the process equipment end.
According to an aspect of the present invention, the coolant supply device further includes:
the first manual valve is arranged on the first infusion pipeline and is configured to be communicated or cut off the first infusion pipeline through manual operation;
and the second manual valve is arranged on the second infusion pipeline and is configured to be communicated or cut off the second infusion pipeline through manual operation.
The utility model also provides a temperature control system, include:
the refrigeration device comprises a refrigeration assembly and an evaporator, and the refrigeration assembly and a heat absorption passage of the evaporator form a refrigeration loop;
the cooling liquid supply apparatus as described above, wherein the first liquid container is in communication with the heat release circuit of the evaporator, the process equipment, and forms a circulation circuit of the cooling liquid.
According to an aspect of the present invention, the temperature control system further comprises:
the circulating liquid outlet pressure sensor, the temperature sensor and the flow sensor are arranged on a passage communicated with the first liquid container and the process equipment and are used for detecting the pressure, the temperature and the flow of the cooling liquid flowing out of the first liquid container in real time;
the liquid supplementing pipeline inlet pressure sensor, the temperature sensor and the flow sensor are arranged on a passage communicated with the second liquid container and the main equipment and are used for detecting the pressure, the temperature and the flow of cooling liquid flowing from the main equipment to the second liquid container in real time;
the circulating liquid inlet temperature sensor is arranged on a passage communicated with the process equipment and the refrigerating device and used for detecting the temperature of the cooling liquid flowing out of the process equipment in real time;
and the water tank inlet temperature sensor is arranged on a passage communicated with the first liquid container and used for detecting the temperature of the cooling liquid flowing into the first liquid container from the refrigerating device in real time.
According to an aspect of the present invention, the temperature control system further comprises:
the pump body is arranged on a passage of the first liquid container communicated with the process equipment and is used for driving cooling liquid to circulate in the circulating loop;
and the heater is arranged on a passage of the first liquid container communicated with the process equipment and is used for adjusting the temperature of the cooling liquid flowing out of the refrigerating device.
According to the utility model discloses an aspect, temperature control system further includes the control unit, wherein circulation liquid outlet pressure sensor, temperature sensor, flow sensor, fluid infusion pipeline entry pressure sensor, temperature sensor, flow sensor, circulation liquid entry temperature sensor, water tank entry temperature sensor, all with the control unit communication connection to with real-time detection signal send to the control unit.
The utility model provides an add technical scheme of second liquid container is linked together through first liquid container and process equipment, refrigerating plant, forms circulation circuit, provides the coolant liquid for process equipment by first liquid container, is first liquid container fluid infusion through second liquid container to when reducing first liquid container and need the fluid infusion confirm number of times and latency with process equipment end communication. And the second liquid container is used for replenishing and storing the cooling liquid which can be recycled in time, which is equivalent to that a buffer area is additionally arranged for the temperature control system, so that the liquid supplementing efficiency is improved.
The utility model provides a temperature control system has add the coolant liquid that second liquid container stored cyclic utilization, has improved temperature control system's operating duration, through pressure, temperature, flow sensor real-time acquisition signal, and Programmable Logic Controller (PLC) program accurate control takes place liquid and leaks outward when having avoided automatic fluid infusion. The second liquid container is communicated with the process equipment end to request liquid replenishment, so that the time for the direct communication and information confirmation of the first liquid container forming the cooling liquid circulation loop and the process equipment end is reduced, and the problem that the cooling liquid is insufficient to influence the process is avoided. The utility model provides a temperature control system, simple structure, installation convenient operation, control is nimble, and response speed is fast, long service life, and the system is reliable stable, and the noise is little.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without exceeding the protection scope of the present application.
FIG. 1 shows a coolant supply apparatus according to an embodiment of the present invention;
FIG. 2 illustrates the control unit operation of one embodiment of the present invention;
FIG. 3 illustrates a temperature control system of one embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The foregoing detailed description of the embodiments of the present application has been presented to illustrate the principles and implementations of the present application, and the description of the embodiments is only intended to facilitate the understanding of the methods and their core concepts of the present application. Meanwhile, a person skilled in the art should, according to the idea of the present application, change or modify the embodiments and applications of the present application based on the scope of the present application. In view of the above, the description should not be taken as limiting the application.
According to an embodiment of the present invention, as shown in fig. 1, the present invention provides a cooling liquid supply apparatus 100, which includes a first liquid container 110, a second liquid container 120, and a first liquid conveying pipeline 130. Wherein:
the first liquid container 110 is used to provide a cooling liquid that can be recycled. Preferably, an inlet of the first liquid container 110 is communicated with a refrigeration device, an outlet of the first liquid container 110 is communicated with process equipment (controlled equipment), the first liquid container 110, the process equipment and the refrigeration device form a circulation loop, the cooling liquid flows into the refrigeration device after being subjected to heat exchange and temperature rise in the process equipment, flows into the first liquid container 110 after being cooled by the refrigeration device, and returns to the process equipment again for temperature control after flowing out of the cooling liquid in the first liquid container 110, so as to form the circulation loop.
The second liquid container 120 is used for storing the recyclable cooling liquid.
First fluid line 130 communicates with first fluid reservoir 110 at one end and second fluid reservoir 120 at the other end, first fluid line 130 configured to:
when the liquid level of the first liquid container 110 is lower than the first preset value, the cooling liquid in the second liquid container 120 is delivered to the first liquid container 110 through the first liquid delivery pipe 130.
According to an embodiment of the present invention, the second liquid container 120 is disposed on the top of the first liquid container 110, when the liquid level of the cooling liquid in the first liquid container 110 is lower than the first preset value, the second liquid container 120 replenishes the liquid to the first liquid container 110 through the first liquid conveying pipeline 130, and the cooling liquid in the second liquid container 120 flows to the first liquid container 110 by gravity.
In another embodiment of the present invention, a pump (not shown in the figure) is disposed on the first liquid conveying pipeline 130, and when the level of the coolant in the first liquid container 110 is lower than the first preset value, the pump is started to drive the coolant in the second liquid container 120 to flow to the first liquid container 110 through the first liquid conveying pipeline 130, so as to perform liquid replenishment.
According to an embodiment of the present invention, the cooling liquid supply apparatus 100 further comprises a control unit, the control unit preferably comprises a Programmable Logic Controller (PLC), the pump body disposed on the first infusion pipeline 130 is connected to the control unit in communication, and the control unit controls the opening or closing of the pump body.
According to an embodiment of the present invention, as shown in fig. 1, the cooling liquid supply apparatus 100 further includes a second infusion pipeline 140.
One end of the second liquid conveying pipeline 140 is communicated with the second liquid container 120, and the other end is connected with a process equipment end (main equipment end), and the second liquid conveying pipeline 140 is configured as follows:
when the liquid level of the second liquid container 120 is at a second preset value, the cooling liquid is delivered from the process equipment side to the second liquid container 120 through the second liquid delivery pipe 140.
The utility model provides an add technical scheme of second liquid container 120 is linked together through first liquid container 110 and process equipment, refrigerating plant, forms circulation circuit, is provided the coolant liquid for process equipment by first liquid container 110, is first liquid container 110 fluid infusion through second liquid container 120 to reduce required confirmation number of times and the latency of communicating with the process equipment end when first liquid container needs the fluid infusion. And then the second liquid container 120 supplements and stores the cooling liquid which can be recycled in time, which is equivalent to that a buffer area is additionally arranged for the temperature control system, so that the liquid supplementing efficiency is improved.
According to an embodiment of the present invention, as shown in fig. 1, the cooling liquid supply apparatus 100 further includes: a first solenoid valve 131 and a second solenoid valve 141. Wherein:
the first electromagnetic valve 131 is disposed on the first infusion pipeline 130 and used for communicating or cutting off the first infusion pipeline 130; the second solenoid valve 141 is disposed on the second fluid pipeline 140 for connecting or disconnecting the second fluid pipeline 140.
The control unit (preferably, including a programmable logic controller PLC, not shown) is connected in communication with the first solenoid valve 131 and the second solenoid valve 141, and is configured to control the opening and closing of the first solenoid valve 131 and the second solenoid valve 141.
According to an embodiment of the present invention, as shown in fig. 1, the cooling liquid supply apparatus 100 further includes: a first liquid level sensor 111 and a second liquid level sensor 121. Wherein:
the first liquid level sensor 111 is disposed inside the first liquid container 110 for detecting a liquid level of the first liquid container 110; the second liquid level sensor 121 is disposed inside the second liquid container 120 for detecting a liquid level of the second liquid container 120.
The control unit is in communication connection with the first level sensor 111, the second level sensor 121, and is configured to:
the first and second electromagnetic valves 131 and 141 are controlled to open or close according to the detection signals of the first and second liquid level sensors 111 and 121.
According to an embodiment of the present invention, in the cooling liquid supply apparatus 100, the control unit is further configured to:
and when the liquid level of the second liquid container 120 is lower than a second preset value, sending a liquid supplementing request signal to the process equipment end.
Wherein the first liquid level sensor 111 and the second liquid level sensor 121 preferably comprise dual-rod sensors, which are respectively disposed in the first liquid container 110 and the second liquid container 120, and are communicatively connected with the control unit.
The first liquid level sensor 111 is configured to detect a liquid level of the cooling liquid in the first liquid container 110, and the control unit controls the first electromagnetic valve 131 to open or close based on the liquid level reported by the first liquid level sensor 111. When the first liquid level sensor 111 detects that the first liquid container 110 is at a low liquid level and needs to be replenished with cooling liquid, the control unit controls the first electromagnetic valve 131 to open, and the cooling liquid in the second liquid container 120 enters the first liquid container 110 through the first liquid conveying pipeline 130. If the liquid level of the cooling liquid in the first liquid container 110 reaches a certain height, the control unit controls the first electromagnetic valve 131 to close, so as to stop filling the first liquid container 110. Preferably, the first liquid container 110 does not stop working during the process of replenishing the first liquid container 110 with the second liquid container 120, that is, the circulation loop consisting of the first liquid container 110, the process equipment and the refrigeration device continuously works, and the circulating cooling liquid is continuously supplied to the process equipment.
The second liquid level sensor 121 is configured to detect a liquid level of the cooling liquid in the second liquid container 120, and the control unit controls the second electromagnetic valve 141 to open or close based on the liquid level reported by the second liquid level sensor 121. When the second liquid level sensor 121 detects that the second liquid container 120 is at a low liquid level and needs to be replenished with cooling liquid, the control unit controls the second electromagnetic valve 141 to open, and the cooling liquid in the tank at the process equipment end enters the second liquid container 120 through the second liquid conveying pipeline 140. If the cooling liquid in the second liquid container 120 reaches a certain height, the control unit will control the second electromagnetic valve 141 to close, so as to stop filling the second liquid container 120.
The control unit is further configured to output a fluid infusion reminding message when the water level reported by the second fluid level sensor 121 is lower than a preset threshold. That is, when the second liquid level sensor 121 detects that the cooling liquid in the second liquid container 120 is at a low liquid level, the control unit activates the communication module, sends a liquid replenishing signal to the process equipment, and starts the liquid replenishing process through multiple confirmations.
The control unit controls the opening or closing of the first electromagnetic valve 131 and the second electromagnetic valve 141 according to the detection signals of the first liquid level sensor 111 and the second liquid level sensor 121 as shown in fig. 2:
1. setting a low liquid level target value (a first preset value) SV1 of the first liquid container 110, detecting the liquid level of the first liquid container 110 by the first liquid level sensor 111, measuring the liquid level measured value of the first liquid container 110 to be PV1, and when PV1 is less than or equal to SV1, operating by a control unit (PLC), and opening the first electromagnetic valve 131;
2. a low liquid level target value (a second preset value) SV2 of the second liquid container 120 is set, the second liquid level sensor 121 detects the liquid level of the second liquid container, the measured liquid level value of the second liquid container 120 is PV2, and when PV2 is less than or equal to SV2, the second electromagnetic valve 141 is opened through the operation of the control unit;
3. and when the PV2 is less than or equal to SV2, the communication module of the control unit sends a liquid supplementing request command to the communication module at the process equipment end.
According to an embodiment of the present invention, the cooling liquid supply apparatus 100 further includes: a first manual valve and a second manual valve. Wherein:
the first manual valve is arranged on the first infusion pipeline 130 and is configured to be communicated with or cut off the first infusion pipeline 130 through manual operation; the second manual valve is disposed on the second infusion pipeline 140 and configured to connect or disconnect the second infusion pipeline 140 through manual operation.
Manual valves are arranged on the liquid transmission pipelines, so that manual maintenance can be carried out at any time, and liquid supplementing and circulating transfusion can be carried out continuously when a Programmable Logic Controller (PLC) carries out program updating.
According to an embodiment of the present invention, as shown in fig. 3, the present invention provides a temperature control system 200 including the above-described coolant supply apparatus 100, including:
the refrigeration device 210 comprises a refrigeration component 211 and an evaporator 212, and the refrigeration component 211 and a heat absorption path of the evaporator 212 form a refrigeration circuit;
the first liquid container 110 of the cooling liquid supply apparatus 100 is connected to the heat release circuit of the evaporator 212 and the process equipment, and forms a circulation circuit of the cooling liquid.
According to an embodiment of the present invention, as shown in fig. 3, the temperature control system 200 further includes:
a circulating liquid outlet pressure sensor 221, a temperature sensor 222 and a flow sensor 223 which are arranged on a passage of the first liquid container 110 communicated with the process equipment and are used for detecting the pressure, the temperature and the flow of the cooling liquid flowing out of the first liquid container 110 in real time;
a fluid infusion line inlet pressure sensor 231, a temperature sensor 232, and a flow sensor 233, which are disposed on a passage where the second fluid container 120 communicates with the main device, and are used to detect the pressure, temperature, and flow of the cooling fluid flowing from the main device to the second fluid container 120 in real time;
a circulating liquid inlet temperature sensor 241, which is disposed on a passage of the process equipment communicating with the refrigerating device 210, for detecting the temperature of the cooling liquid flowing out of the process equipment in real time;
the tank inlet temperature sensor 251 is disposed on a path of the refrigeration apparatus 210 communicating with the first liquid container 110, and is used for detecting the temperature of the cooling liquid flowing from the refrigeration apparatus 210 into the first liquid container 110 in real time.
Preferably, the temperature control system 200 further comprises a control unit (not shown in the figure), a circulating liquid outlet pressure sensor 221, a temperature sensor 222, a flow sensor 223, a fluid replacement pipe inlet pressure sensor 231, a temperature sensor 232, a flow sensor 233, a circulating liquid inlet temperature sensor 241, a water tank inlet temperature sensor 251, which are in communication connection with the control unit and send real-time detection signals to the control unit. Wherein, the control unit preferably comprises a Programmable Logic Controller (PLC), and the temperature control system 200 achieves high-precision output of temperature, flow and pressure through the control of a Programmable Logic Controller (PLC) program and a PID algorithm. The HMI human-computer interface is used for visual display, the circulating liquid inlet temperature of the temperature control system 200 and working conditions with different temperatures are accurately controlled, so that the temperature control system can operate in a stable and reliable state, and the requirements of the wafer or panel production process are met.
According to an embodiment of the present invention, as shown in fig. 3, the temperature control system 200 further includes a pump body 261 and a heater 271. Wherein:
a pump 261 is disposed in a path of the first liquid container 110 communicating with the process equipment, for driving the cooling liquid to circulate in the circulation loop.
The heater 271 is disposed on a path of the first liquid container 110 communicating with the process equipment, and is used for adjusting the temperature of the cooling liquid flowing out from the refrigerating device 210.
The temperature control system 200 is externally connected to a load (process equipment), which may cause the temperature of the inlet of the circulating liquid to rise, the refrigerating device 210 controls the temperature of the inlet of the water tank to be maintained within a certain temperature range, and the heater 271 is additionally required to balance the temperature of the cooling liquid output by the refrigerating device 210, so as to finally keep the temperature of the outlet of the circulating liquid constant. The addition of the heater 271 allows the substrate temperature of a semiconductor wafer such as a silicon wafer to be raised to a target temperature or lowered to a target temperature at a high speed, thereby shortening the manufacturing time of the semiconductor wafer, improving the accuracy of the temperature distribution in the surface of the semiconductor wafer, and making it possible to manufacture a high-quality semiconductor wafer by making the temperature distribution in the surface uniform or making the temperature distribution in each portion in the surface different.
The utility model provides a temperature control system has add the coolant liquid that second liquid container stored cyclic utilization, has improved temperature control system's operating duration, through pressure, temperature, flow sensor real-time acquisition signal, and Programmable Logic Controller (PLC) program accurate control takes place liquid and leaks outward when having avoided automatic fluid infusion. The second liquid container is communicated with the process equipment end to request liquid replenishment, so that the time for the direct communication and information confirmation of the first liquid container forming the cooling liquid circulation loop and the process equipment end is reduced, and the problem that the cooling liquid is insufficient to influence the process is avoided. The utility model provides a temperature control system, simple structure, installation convenient operation, control is nimble, and response speed is fast, long service life, and the system is reliable stable, and the noise is little.
Claims (10)
1. A coolant supply apparatus, comprising:
a first liquid container for providing a cooling liquid which can be recycled;
a second liquid container for storing the recyclable coolant;
one end of the first transfusion pipeline is communicated with the first liquid container, the other end of the first transfusion pipeline is communicated with the second liquid container, and the first transfusion pipeline is configured as follows:
when the liquid level of the first liquid container is lower than a first preset value, the cooling liquid in the second liquid container is conveyed into the first liquid container through the first liquid conveying pipeline.
2. The coolant supply apparatus according to claim 1, further comprising:
one end of the second liquid conveying pipeline is communicated with the second liquid container, the other end of the second liquid conveying pipeline is communicated with a process equipment end, and the second liquid conveying pipeline is configured into a structure that:
and when the liquid level of the second liquid container is lower than a second preset value, conveying cooling liquid from a process equipment end to the second liquid container through the second liquid conveying pipeline.
3. The coolant supply apparatus according to claim 2, further comprising:
the first electromagnetic valve is arranged on the first infusion pipeline and used for communicating or cutting off the first infusion pipeline;
the second electromagnetic valve is arranged on the second infusion pipeline and used for communicating or cutting off the second infusion pipeline;
and the control unit is in communication connection with the first electromagnetic valve and the second electromagnetic valve and is used for controlling the opening or closing of the first electromagnetic valve and the second electromagnetic valve.
4. The coolant supply apparatus according to claim 3, further comprising:
the first liquid level sensor is arranged in the first liquid container and used for detecting the liquid level of the first liquid container;
the second liquid level sensor is arranged in the second liquid container and used for detecting the liquid level of the second liquid container;
wherein the control unit is communicatively coupled to the first level sensor and the second level sensor and configured to:
and controlling the first electromagnetic valve and the second electromagnetic valve to be opened or closed according to detection signals of the first liquid level sensor and the second liquid level sensor.
5. The cooling liquid supply apparatus according to claim 3 or 4, wherein the control unit is further configured to:
and when the liquid level of the second liquid container is lower than the second preset value, sending a liquid supplementing request signal to the process equipment end.
6. The coolant supply apparatus according to claim 2, further comprising:
the first manual valve is arranged on the first infusion pipeline and is configured to be communicated or cut off the first infusion pipeline through manual operation;
and the second manual valve is arranged on the second infusion pipeline and is configured to be communicated or cut off the second infusion pipeline through manual operation.
7. A temperature control system, comprising:
the refrigeration device comprises a refrigeration assembly and an evaporator, and the refrigeration assembly and a heat absorption passage of the evaporator form a refrigeration loop;
the cooling liquid supply apparatus as claimed in any one of claims 1 to 6, wherein said first liquid container is in communication with a heat-releasing circuit of said evaporator, process equipment, forming a circulation circuit of cooling liquid.
8. The temperature control system of claim 7, further comprising:
the circulating liquid outlet pressure sensor, the temperature sensor and the flow sensor are arranged on a passage communicated with the first liquid container and the process equipment and are used for detecting the pressure, the temperature and the flow of the cooling liquid flowing out of the first liquid container in real time;
the liquid supplementing pipeline inlet pressure sensor, the temperature sensor and the flow sensor are arranged on a passage communicated with the second liquid container and the main equipment and used for detecting the pressure, the temperature and the flow of cooling liquid flowing from the main equipment to the second liquid container in real time;
the circulating liquid inlet temperature sensor is arranged on a passage communicated with the process equipment and the refrigerating device and used for detecting the temperature of the cooling liquid flowing out of the process equipment in real time;
and the water tank inlet temperature sensor is arranged on a passage communicated with the first liquid container and used for detecting the temperature of the cooling liquid flowing into the first liquid container from the refrigerating device in real time.
9. The temperature control system of claim 7 or 8, further comprising:
the pump body is arranged on a passage of the first liquid container communicated with the process equipment and is used for driving cooling liquid to circulate in the circulating loop;
and the heater is arranged on a passage of the first liquid container communicated with the process equipment and is used for adjusting the temperature of the cooling liquid flowing out of the refrigerating device.
10. The temperature control system of claim 8, further comprising a control unit, wherein the circulating fluid outlet pressure sensor, the temperature sensor, the flow sensor, the fluid replacement line inlet pressure sensor, the temperature sensor, the flow sensor, the circulating fluid inlet temperature sensor, and the tank inlet temperature sensor are all in communication with the control unit and send real-time detection signals to the control unit.
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| CN202220722364.0U CN217330366U (en) | 2022-03-29 | 2022-03-29 | Cooling liquid supply device and temperature control system |
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| CN202220722364.0U CN217330366U (en) | 2022-03-29 | 2022-03-29 | Cooling liquid supply device and temperature control system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115974555A (en) * | 2022-12-22 | 2023-04-18 | 江苏宏基高新材料股份有限公司 | Isostatic pressing graphite production process |
| CN116274940A (en) * | 2023-01-16 | 2023-06-23 | 宁波博大机械有限公司 | Engine cylinder body die-casting system |
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2022
- 2022-03-29 CN CN202220722364.0U patent/CN217330366U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115974555A (en) * | 2022-12-22 | 2023-04-18 | 江苏宏基高新材料股份有限公司 | Isostatic pressing graphite production process |
| CN115974555B (en) * | 2022-12-22 | 2024-01-26 | 江苏宏基高新材料股份有限公司 | Isostatic pressing graphite production process |
| CN116274940A (en) * | 2023-01-16 | 2023-06-23 | 宁波博大机械有限公司 | Engine cylinder body die-casting system |
| CN116274940B (en) * | 2023-01-16 | 2024-06-04 | 宁波博大机械有限公司 | Engine cylinder body die-casting system |
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