CN217324291U - MOCVD (metal organic chemical vapor deposition) disc supporting tool - Google Patents

Abstract

The utility model discloses an MOCVD (metal organic chemical vapor deposition) disc supporting tool, which comprises at least one layer of supporting frame, wherein the supporting frame comprises N upright columns which are arranged in a regular N-edge shape; each upright post is provided with a horizontal connecting rod, one end of each connecting rod is detachably connected to the upright post, and the other end of each connecting rod is detachably connected to a connecting piece positioned at the geometric center of the regular N-shaped polygon; each connecting rod divides the N-shaped polygonal area into N equal triangular areas, and M disc containing areas which are mutually spaced are arranged in the N triangular areas; each tray area is provided with a short supporting rod and a long supporting rod which are connected with the two connecting rods from the center to the outside; the long supporting rod is provided with two supporting pieces, the short supporting rod is provided with a supporting piece, and the three supporting pieces provide three supporting points to form a triangular structure so as to support a substrate to be processed; wherein N is a positive even number, N is more than or equal to 4, and M is N/2. The utility model discloses a MOCVD dish supports frock utilizes chemical vapor deposition stove inner tube effective space size to design for the border for place more quantity's substrate in the effective space.

Description

MOCVD (metal organic chemical vapor deposition) disc supporting tool

Technical Field

The utility model belongs to MOCVD equipment field especially relates to a MOCVD dish supports frock.

Background

Metal Organic Chemical Vapor Deposition (MOCVD) is a process that uses vapor phase reactants to react at the surface of a substrate to deliver a solid deposit on the substrate surface. With the development of the semiconductor industry, various large semiconductor substrate substrates come into production, and the innovative requirements are higher and higher when the large semiconductor substrate is matched with the tool design for surface chemical vapor deposition.

During production, a substrate to be coated is placed in a chemical vapor deposition reaction furnace through the support of the support tool, and a coating is formed on the surface of the substrate to be coated through deposition of gas reaction, so that the design of the support tool is particularly important for the quality and quantity of the production of the coated substrate. The existing tool for supporting and placing the substrate can only support and place a single substrate, and the existing tool for supporting and placing the substrate has the problem of uneven deposition on two sides of the existing tool caused by the influence on the flow direction of air flow.

SUMMERY OF THE UTILITY MODEL

The utility model provides a MOCVD dish supports frock aims at solving the problem that current frock exists.

In order to solve the technical problem, the MOCVD plate supporting tool provided by the utility model comprises at least one layer of supporting frame, wherein the supporting frame comprises N upright columns which are arranged in a regular N-edge shape; each upright post is provided with a horizontal connecting rod, one end of each connecting rod is detachably connected to the upright post, and the other end of each connecting rod is detachably connected to a connecting piece positioned at the geometric center of the regular N-shaped polygon; each connecting rod divides the N-shaped polygonal area into N equal triangular areas, and M disc containing areas which are arranged at intervals are arranged in the N triangular areas; each loading panel is provided with a short supporting rod and a long supporting rod which are connected with the two connecting rods from the center to the outside; the long supporting rod is provided with two supporting pieces, the short supporting rod is provided with a supporting piece, and the three supporting pieces provide three supporting points to form a triangular structure so as to support a substrate to be processed; wherein N is a positive even number, N is more than or equal to 4, and M is N/2.

Further, the utility model discloses a support frock includes the multilayer the support frame, upper and lower adjacent two the concatenation can be dismantled to the stand, in the adjacent two-layer support frame in concatenation back the crisscross distribution in sabot district.

Furthermore, the head end and the tail end of each upright post are respectively provided with a threaded blind hole, and the two upright posts which are adjacent up and down are detachably connected by means of the matching of a stud and the threaded blind holes.

Furthermore, at least one intermediate column is connected between the two vertically adjacent upright columns, threaded blind holes are formed in the head end and the tail end of each intermediate column, and the intermediate columns are detachably connected between the two upright columns by means of matching of the studs and the threaded blind holes.

Furthermore, the connecting piece is star type connecting piece, star type connecting piece includes N and connects the branch, every be equipped with the connection screw on connecting the branch, with the help of the cooperation of bolt and screw, connecting rod detachably is connected with corresponding connection branch.

Further, the utility model discloses a support frock is including the bilayer the support frame, every layer the support frame includes six stand, six the stand is regular hexagon shape and arranges, each the connecting rod divides the hexagonal region into six triangle areas that equal, six be equipped with the dress panel area that three interval of each other set up in the triangle area.

Furthermore, triangular mounting holes are formed in the side walls of the stand columns, the connecting rods are triangular prism rod pieces, and the connecting rods are inserted into the stand columns through the triangular mounting holes.

Furthermore, the supporting part is of a needle-shaped structure and comprises a columnar lower half part and a conical upper half part; the lower half part of the supporting piece is inserted in the pin hole of the long supporting rod or the short supporting rod.

Furthermore, the upright post, the connecting rod, the long supporting rod, the short supporting rod, the supporting piece and the middle post are all parts made of isostatic pressing graphite materials.

Further, the bolt, the stud and the star-shaped connecting piece are all parts made of carbon-carbon composite materials.

The MOCVD disc supporting tool adopts a regular polygon frame structure, and the effective space size of the inner cylinder of the chemical vapor deposition furnace is fully utilized as the boundary design, so that more substrates are placed in the effective space; and the substrates to be processed are supported by the three supporting points through the interval arrangement of the tray loading areas, so that the uniformity of the air field around each substrate during processing can be ensured. Adopt the utility model discloses a support frock and process the substrate in the chemical vapor deposition stove and can improve machining efficiency greatly and improve processingquality.

Drawings

In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

Fig. 1 is a perspective view of an embodiment of the MOCVD plate support tool of the present invention;

FIG. 2 is a top view of the MOCVD disk support tool shown in FIG. 1;

FIG. 3 is a diagram illustrating the use of the MOCVD disk support tool shown in FIG. 1;

FIG. 4 is a schematic assembly diagram of a column and a middle column in the MOCVD disk support tool shown in FIG. 1;

FIG. 5 is a schematic diagram of the connecting rod and the connecting piece in the MOCVD disk support tool shown in FIG. 1;

fig. 6 is a schematic view illustrating the assembly of the support member and the long support rod in the MOCVD tool support shown in fig. 1.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The directional terms in the present invention, such as "up", "down", "front", "back", "left", "right", "inner", "outer", "center", etc., refer to the directions of the attached drawings only. Accordingly, the directional terms used are used for describing and understanding the present invention, and are not used for limiting the present invention. Further, in the drawings, structures that are similar or identical are denoted by the same reference numerals.

Referring to fig. 1 to 3, the overall structure and the operation status of an embodiment of the MOCVD equipment support tool of the present invention are shown. As shown in the figures, the MOCVD equipment support tool of the utility model comprises at least one layer of support frame, wherein the support frame comprises N upright posts 110 which are arranged in a regular N-edge shape; each upright post is provided with a horizontal connecting rod 120, one end of each connecting rod 120 is detachably connected to the upright post 110, and the other end of each connecting rod 120 is detachably connected to the connecting piece 100 positioned at the geometric center of the N-shaped polygon, so that a star-shaped support frame is formed; a general chemical vapor deposition furnace is of a cylindrical structure, and the space in the furnace can be utilized to the maximum extent by the regular N-edge structure. In addition, each of the links 120 divides an inner region of the N-sided polygon into N equal triangular regions, of which there are M spaced apart sabot regions 150; in this embodiment, N is 6, M is N/2 is 3, that is, the columns are distributed in a regular hexagon shape, and the connecting rod 120 divides the regular hexagon into six triangular regions, in which three spaced tray regions 150 are provided; it should be understood that the value of N may also be 4, 8, 10, or other positive and even numbers, and may be set according to the actual size of the substrate or the size of the space in the furnace.

Further, each of the holding panels 150 is provided with a short strut 140 and a long strut 130 connected to the two connecting rods 110 from the center to the outside; two supporting pieces 131 are arranged on the long supporting rod 130, one supporting piece 131 is arranged on the short supporting rod 140, and three supporting points are provided by the supporting pieces 131 to form a triangular structure for stably supporting the substrate. Specifically, the short strut 140 is disposed near the center of the star-shaped support frame, two ends of the short strut 140 are erected on the two connecting rods 120 and are fixedly connected with the connecting rods 120, and the support member 131 is disposed in the middle of the short strut 140. The long supporting rod 130 is disposed at a position close to the upright 110, two ends of the long supporting rod 130 are erected on the two connecting rods 120 and are fixedly connected with the connecting rods 120, the two supporting pieces 131 of the long supporting rod 130 are disposed at intervals, and a connecting line of the two supporting pieces 131 and the supporting piece 131 on the short supporting rod 140 is substantially in an equilateral triangle shape. Preferably, the supporting member 131 is a needle-like structure including an upper half 1311 having a conical shape and a lower half 1312 having a cylindrical shape. As shown in fig. 6, in the present embodiment, the lower half 1312 of the supporting member 131 is cylindrical, the long strut 130 and the short strut 140 are provided with corresponding pin holes 132, and the lower half 1312 of the supporting member 131 is inserted into the pin holes 132 of the long strut 130 and the short strut 140. Based on the design of the needle-like structure of the support 131, the contact surface between the support 131 and the substrate 151 can be minimized, thereby maximizing the contact area of the substrate 151 with the gas field.

As shown in fig. 4, in the utility model discloses in each stand 110 all can be through the arbitrary built-up connection in head and tail both ends each other, can build multilayer support frame after connecting the combination, as shown in fig. 1 to fig. 3, the support frock of this embodiment includes double-deck support frame to form a plurality of adjacent two-layer vertical staggered distribution dress panel 150, also, a plurality of the same one deck dress panel 150 interval distribution, upper and lower two-layer dress panel 150 staggered distribution, and then can place more quantity's substrate according to the effective space of chemical vapor deposition stove, and guarantee the homogeneity of gaseous field around each substrate of vapor deposition simultaneously. In this embodiment, the first end and the last end of each of the upright columns 110 are provided with a blind threaded hole 112, and the upright columns 110 are connected by a stud 114, it can be understood that the upright columns 110 may be connected by other detachable connection methods, such as interference fit, mortise and tenon connection, and the like. In other embodiments of this embodiment, as shown in fig. 4, a middle pillar 111 is further connected between each of the vertical pillars 110, the shape of the middle pillar 111 is the same as that of the vertical pillar 110, and a through hole is not completely formed in a sidewall of the middle pillar 111. The connection mode of the middle column 111 and the upright column 110 is the same as that of the upright column 110, that is, a threaded blind hole 112 with the same structure is also arranged, and the connection between the middle column 111 and the upright column 110 is realized through a stud 114. In other embodiments, two adjacent vertical columns 110 may also be connected by a plurality of middle columns 111, the middle columns 111 are arranged to increase the distance between the upper and lower layers of support frames, and the specific number of connections may be selected according to actual needs. Through the design of stand 110 and intermediate column 111, can conveniently carry out freely the concatenation, realize supporting frock structure's diversified selection.

In this embodiment, the connecting member 100 is a star-shaped connecting member as shown in fig. 5, and the star-shaped connecting member includes N connecting branches 102 extending outward in the radial direction. In the present embodiment, the star-shaped connection comprises six connection branches 102, corresponding to the regular hexagon presented by the uprights. Each connecting branch 102 is provided with at least two connecting screw holes 101, one end of each connecting rod 120 is connected with the upright post 110, the other end of each connecting rod 120 is provided with a connecting rod screw hole 121 corresponding to the connecting screw hole 101, and by means of matching of the bolts 122 with the connecting screw holes 101 and the connecting rod screw holes 121, the six connecting branches of the star-shaped connecting piece are respectively connected with the six connecting rods 120, so that the stability of the connecting structure is higher, and the included angle among the connecting rods 120 is ensured to be consistent to the maximum extent.

Preferably, the connecting rod 120 has a triangular prism structure, a triangular through hole 113 corresponding to the connecting rod 120 is formed in the upright post 110, and one end of the connecting rod 120 is inserted into the triangular through hole 113 and connected to the upright post 110; it will be appreciated that the connecting rod and the upright may be connected by other detachable connecting structures, such as bolts.

In addition, because the temperature in the furnace is high during the chemical vapor deposition, in this embodiment, the upright 110, the connecting rod 120, the long strut 130, the short strut 140, the supporting member 131, and the middle column 111 are all preferably made of high temperature resistant and non-deformable isostatic graphite material; in order to avoid assembling angle deviation, the bolt 122, the stud 114 and the connecting piece 100 are all made of high-strength carbon-carbon composite materials.

The utility model makes full use of the effective space size of the inner cylinder of the chemical vapor deposition furnace as the boundary design, and can place more substrates in the effective space through a supporting tool with a multi-layer regular polygon structure which can be freely assembled and disassembled; the distribution structure design of the assembled disc regions in a staggered manner at intervals transversely and longitudinally can further ensure the uniformity of a vapor deposition thermal field; in addition, the tool can also adapt to substrates with different excircle sizes. Adopt the utility model discloses a support frock and process the substrate in the chemical vapor deposition stove and can improve machining efficiency greatly and improve processingquality.

It is to be understood that the present invention has been described with reference to certain embodiments and that various changes or equivalents may be substituted for elements thereof without departing from the spirit and scope of the invention as defined by the appended claims. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of the present application are intended to be covered by the present invention.

Claims (10)

1. The utility model provides a frock is supported to MOCVD dish which characterized in that: the device comprises at least one layer of support frame, wherein the support frame comprises N upright posts which are arranged in a regular N-edge shape; each upright post is provided with a horizontal connecting rod, one end of each connecting rod is detachably connected to the upright post, and the other end of each connecting rod is detachably connected to a connecting piece positioned at the geometric center of the regular N-shaped polygon; each connecting rod divides the N-shaped polygonal area into N equal triangular areas, and M disc containing areas which are arranged at intervals are arranged in the N triangular areas; each loading panel is provided with a short supporting rod and a long supporting rod which are connected with the two connecting rods from the center to the outside; the long supporting rod is provided with two supporting pieces, the short supporting rod is provided with a supporting piece, and the three supporting pieces provide three supporting points to form a triangular structure so as to support a substrate to be processed; wherein N is a positive even number, N is more than or equal to 4, and M is N/2.

2. The MOCVD disk support tool according to claim 1, wherein: the tray loading device comprises a plurality of layers of support frames, wherein two vertical adjacent columns are detachably spliced, and tray loading areas in two adjacent layers of support frames are distributed in a staggered mode after splicing.

3. The MOCVD disc support tool according to claim 2, wherein: the head end and the tail end of each upright post are respectively provided with a threaded blind hole, and the two upright posts which are adjacent up and down are detachably connected by means of the matching of a stud and the threaded blind holes.

4. The MOCVD disk support tool according to claim 3, wherein: at least one intermediate column is further connected between the two vertically adjacent upright columns, threaded blind holes are also formed in the head end and the tail end of each intermediate column, and the intermediate columns are detachably connected between the two upright columns by means of matching of studs and the threaded blind holes.

5. The MOCVD disk support tool according to claim 4, wherein: the connecting piece is star type connecting piece, star type connecting piece includes N connection branches, every be equipped with the connection screw on the connection branch, with the help of the cooperation of bolt and screw, connecting rod detachably is connected with corresponding connection branch.

6. The MOCVD disk support tool according to claim 5, wherein: including the bilayer the support frame, every layer the support frame includes six the stand, six the stand is regular hexagon shape and arranges, each the connecting rod divides the hexagonal region into six triangle districts that equal, six be equipped with the dress disk region that three interval set up each other in the triangle district.

7. The MOCVD disc support tool according to claim 1, wherein: the side wall of the upright post is provided with a triangular mounting hole, the connecting rod is a triangular prism rod piece, and the connecting rod is inserted into the upright post through the triangular mounting hole.

8. The MOCVD disk support tool according to claim 1, wherein: the supporting piece is of a needle-shaped structure and comprises a columnar lower half part and a conical upper half part; the lower half part of the supporting piece is inserted in the pin hole of the long supporting rod or the short supporting rod.

9. The MOCVD disk support tool according to claim 4, wherein: the upright post, the connecting rod, the long supporting rod, the short supporting rod, the supporting piece and the middle post are all parts made of isostatic pressing graphite materials.

10. The MOCVD disk support tool according to claim 5, wherein: the bolt, the stud and the star-shaped connecting piece are all parts made of carbon-carbon composite materials.

Images