CN217324272U - Substrate clamping device of forward-inclined coating production line - Google Patents
Substrate clamping device of forward-inclined coating production line Download PDFInfo
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- CN217324272U CN217324272U CN202220453145.7U CN202220453145U CN217324272U CN 217324272 U CN217324272 U CN 217324272U CN 202220453145 U CN202220453145 U CN 202220453145U CN 217324272 U CN217324272 U CN 217324272U
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Abstract
The utility model provides a substrate clamping device of formula of inclining forward coating production line, including locating substrate frame fixed frame all around, locating piece and hinge formula elastic fixture on the fixed frame, hinge formula elastic fixture include with substrate frame fixed connection the fixed block, with the fixed block rotate the movable block of connection and locate the movable block with between the fixed block and be used for with movable block elasticity compress tightly in elastic component on the fixed frame. The above structure is adopted in the utility model, during the clamping, open the movable block earlier, then arrange the coating film substrate in on the fixed frame, release the movable block again, compress tightly the movable block on the coating film substrate that is located fixed frame under the elastic action of elastic component this moment to press from both sides the coating film substrate tightly, its clamping is effectual, is applicable to the coating film production line of the formula that inclines forward very much.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the coating film production line and specifically relates to a substrate clamping device of formula coating film production line that leans forward.
[ background of the invention ]
In order to better coat a coated substrate in the whole process flow of coating in the vacuum coating industry, a substrate clamping device is usually added for clamping and positioning. For some coating substrates with larger sizes, the coating production line is generally made to be forward inclined, the substrate frame is also in a forward inclined state when the coating substrates are transported in the production line, the conventional substrate clamping device is generally only suitable for a vertical production line, if the conventional substrate clamping device is applied to the forward inclined coating production line, the clamping effect is poor, and in addition, the conventional substrate clamping device needs to be matched with manpower to clamp the substrates, and the automation degree is not high.
[ Utility model ] content
The to-be-solved technical problem of the utility model is to provide a substrate clamping device of formula of inclining forward coating production line that the clamping is effectual and adaptable automatic clamping.
The purpose of the utility model is realized like this:
the utility model provides a substrate clamping device of formula of leaning forward coating production line, is including locating substrate frame fixed frame all around, locating piece and hinge formula elastic fixture on the fixed frame, hinge formula elastic fixture include with substrate frame fixed connection's fixed block, with the movable block that the fixed block rotates to be connected with locate between the movable block and the fixed block and be used for with the movable block elasticity compresses tightly in the elastic component on the fixed frame.
The above structure is adopted in the utility model, during the clamping, open the movable block earlier, then arrange the coating film substrate in on the fixed frame, release the movable block again, compress tightly the movable block on the coating film substrate that is located fixed frame under the elastic action of elastic component this moment to press from both sides the coating film substrate tightly, its clamping is effectual, is applicable to the coating film production line of the formula that inclines forward very much.
The substrate clamping device for the forward-inclined coating production line further comprises a pushing assembly arranged on the side portion of the material rack, the pushing assembly comprises a fixing frame, a pushing driving piece arranged on the fixing frame and a pushing rod arranged on the output end of the pushing driving piece, and a through hole for the pushing rod to pass through is formed in the corresponding position of the hinge type elastic clamp of the fixing frame. The pushing assembly is matched with the clamping manipulator, so that the automatic clamping of the coated substrate can be realized, and the automatic clamping is adapted.
According to the substrate clamping device of the forward-inclined coating production line, the left side and the right side of the fixed frame are respectively provided with three hinge type elastic clamps, correspondingly, the two groups of pushing assemblies are respectively arranged at the left side and the right side of the material rack, and each pushing assembly is provided with three pushing driving pieces, so that the clamping effect is further ensured.
According to the substrate clamping device of the forward-inclined coating production line, each hinge type elastic clamp comprises two elastic parts, and the elastic parts adopt torsional springs, so that the clamping effect is improved.
According to the substrate clamping device of the forward-inclined coating production line, the upper edge and the two sides of the fixed frame are respectively provided with 5 positioning blocks, and the lower edge of the fixed frame is provided with the slot, so that the positioning effect of the fixed frame on a coated substrate is ensured.
[ description of the drawings ]
The following detailed description of embodiments of the present invention is provided with reference to the accompanying drawings, in which:
fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention when a coated substrate is mounted;
FIG. 3 is a reference view of the present invention in a use state in cooperation with the pushing assembly;
fig. 4 is a second reference view of the present invention in a use state with the pushing assembly.
[ detailed description ] embodiments
A substrate clamping device of a forward-inclined coating production line comprises a fixed frame 1 arranged on the periphery of a substrate frame 10, a positioning block 2 arranged on the fixed frame 1 and a hinge type elastic clamp 3, wherein the hinge type elastic clamp 3 comprises a fixed block 31 fixedly connected with the substrate frame 10, a movable block 32 rotatably connected with the fixed block 31 and an elastic part 33 arranged between the movable block 32 and the fixed block 31 and used for elastically pressing the movable block 32 on the fixed frame 1.
In order to realize automatic clamping of the coated substrate 100 so as to adapt to automatic clamping, the substrate clamping device of the forward-inclined coating production line further comprises a pushing assembly 4 arranged on the side part of the material rack 20, the pushing assembly 4 comprises a fixed frame 41, a pushing driving part 42 arranged on the fixed frame 41 and a pushing rod 43 arranged on the output end of the pushing driving part 42, and the fixed frame 1 is provided with a through hole 11 for the pushing rod 43 to pass through at the corresponding position of the hinge type elastic clamp 3.
In order to further ensure the clamping effect, the left side and the right side of the fixed frame 1 are respectively provided with three hinge type elastic clamps 3, correspondingly, two groups of pushing assemblies 4 are respectively arranged at the left side and the right side of the material rack 20, and each pushing assembly 4 is provided with three pushing driving pieces 42.
In order to improve the clamping effect, each hinge type elastic clamp 3 comprises two elastic pieces 33, and each elastic piece 33 adopts a torsion spring.
In order to ensure the positioning effect of the fixed frame 1 on the coated substrate 100, the upper edge and two sides of the fixed frame 1 are respectively provided with 5 positioning blocks 2, and the lower edge of the fixed frame 1 is provided with a slot 12.
The utility model discloses when being applied to last piece (material loading), earlier be located the work or material rest 20 of piece on substrate frame 10, then top push driving piece 42 (preferred cylinder) drive ejector pin 43 releases forward and penetrates perforation 11, thereby push away movable block 32, clamping machine hand grabs the non-coating film face of coating film substrate 100 and adjusts the position to the fixed frame 1 of substrate frame 10 afterwards, insert in slot 12 below coating film substrate 100, other trilateral location through locating piece 2, push away driving piece 42 drive ejector pin 43 and return afterwards and contract, compress tightly movable block 32 on the coating film substrate 100 that is located fixed frame 1 this moment under the elastic action of elastic component 33, thereby press from both sides coating film substrate 100 tightly, clamping machine hand release coating film substrate 100 and put aside this moment. The coated substrate 100 and the substrate holder 10 are then moved together into a coating chamber for coating. After coating, the substrate frame 10 reaches a specific substrate unloading position, the clamping robot adjusts the position, the gripper grips the non-coated surface of the substrate 100, the substrate is not moved, then the pushing driving piece 42 drives the pushing rod 43 to push forwards and penetrate the through hole 11, so that the movable block 32 is pushed open to release the substrate 100, at the moment, the clamping robot grips the substrate 100 through the gripper and moves the substrate away, then the pushing driving piece 42 drives the pushing rod 43 to retract, and the movable block 32 resets. In the process, automatic control is realized through the matching with the clamping robot.
Claims (5)
1. The utility model provides a substrate clamping device of formula of leaning forward coating production line, its characterized in that is including locating substrate frame (10) fixed frame (1) all around, locating piece (2) and hinge formula elastic fixture (3) on fixed frame (1), hinge formula elastic fixture (3) including with substrate frame (10) fixed connection fixed block (31), with fixed block (31) rotate movable block (32) of being connected and locate movable block (32) and be used for with between fixed block (31) movable block (32) elasticity compress tightly in elastic component (33) on fixed frame (1).
2. The substrate clamping device of the forward-inclined coating production line according to claim 1, further comprising a pushing assembly (4) disposed at a side of the rack (20), wherein the pushing assembly (4) comprises a fixing frame (41), a pushing driving member (42) disposed on the fixing frame (41), and a pushing rod (43) disposed at an output end of the pushing driving member (42), and the fixing frame (1) is provided with a through hole (11) at a corresponding position of the hinge-type elastic clamp (3) for the pushing rod (43) to pass through.
3. The substrate clamping device of the forward-inclined coating production line according to claim 2, wherein three hinge-type elastic clamps (3) are respectively arranged on the left side and the right side of the fixed frame (1), correspondingly, two groups of pushing assemblies (4) are respectively arranged on the left side and the right side of the material rest (20), and each pushing assembly (4) has three pushing driving members (42).
4. The substrate clamping device of the forward-tilting coating production line according to any one of claims 1 to 3, characterized in that each of the hinged elastic clamps (3) comprises two elastic members (33), and the elastic members (33) are torsion springs.
5. The substrate clamping device of the forward-inclined coating production line according to claim 1, wherein 5 positioning blocks (2) are arranged on the upper side and two sides of the fixed frame (1), and the lower side of the fixed frame (1) is provided with a slot (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220453145.7U CN217324272U (en) | 2022-03-03 | 2022-03-03 | Substrate clamping device of forward-inclined coating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220453145.7U CN217324272U (en) | 2022-03-03 | 2022-03-03 | Substrate clamping device of forward-inclined coating production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217324272U true CN217324272U (en) | 2022-08-30 |
Family
ID=82999684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220453145.7U Active CN217324272U (en) | 2022-03-03 | 2022-03-03 | Substrate clamping device of forward-inclined coating production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217324272U (en) |
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2022
- 2022-03-03 CN CN202220453145.7U patent/CN217324272U/en active Active
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| GR01 | Patent grant | ||
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| CP02 | Change in the address of a patent holder |
Address after: Building 4, Haiyin Technology Industrial Park, No.1 Industrial Avenue, Banfu Community, Banfu Town, Zhongshan City, Guangdong Province, 528400 Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 528400 No.3, niuchangling, Shenwan village, Banfu Town, Zhongshan City, Guangdong Province (block 301, 1st floor) Patentee before: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. |