CN217324267U - Magnetic bar structure with adjustable height - Google Patents

Magnetic bar structure with adjustable height Download PDF

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Publication number
CN217324267U
CN217324267U CN202123428574.3U CN202123428574U CN217324267U CN 217324267 U CN217324267 U CN 217324267U CN 202123428574 U CN202123428574 U CN 202123428574U CN 217324267 U CN217324267 U CN 217324267U
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China
Prior art keywords
fixed block
magnetic rod
connecting plate
fixed
block
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Active
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CN202123428574.3U
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Chinese (zh)
Inventor
刘晓东
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Shanghai Jingpu Material Technology Co ltd
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Shanghai Jingpu Material Technology Co ltd
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Priority to CN202123428574.3U priority Critical patent/CN217324267U/en
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Abstract

The utility model discloses a bar magnet structure of adjustable height, including bar magnet, connecting seat, base and target, the bar magnet is installed on the connecting seat, be equipped with a plurality of second fixed block and third fixed block on the connecting seat, be connected with first connecting plate on the second fixed block, be connected with the second connecting plate on the third fixed block, be equipped with the first fixed block of a plurality of on the base, the one end of base is equipped with the telescopic link mounting groove, install electric telescopic handle in the telescopic link mounting groove, the movable block is installed to electric telescopic handle's one end. The magnetic rod can automatically adjust the height, has strong flexibility and strong stability, can automatically adjust the distance between the magnetic rod and a target material, and can automatically adjust the magnetic rod backwards, thereby facilitating the disassembly and assembly of the magnetic rod, having simple structure and being convenient for people to operate and use.

Description

Magnetic bar structure with adjustable height
Technical Field
The utility model relates to a magnetron sputtering coating film field specifically is a bar magnet structure of adjustable height.
Background
The cathode is required to provide an annular closed runway for magnetron sputtering coating, the magnetic rod is required to be close to the target material, the distance from the magnetic rod to the target material is sometimes required to be adjusted so as to adjust the magnetic field intensity of a process area, and when the magnetic rod is required to be installed, the magnetic target is required to be adjusted backwards so as to increase the convenience of installing the magnetic rod and provide a magnetic rod structure with adjustable height.
Disclosure of Invention
The utility model aims at the defect of prior art, provide a bar magnet structure of adjustable height to solve the problem that above-mentioned background art provided.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a bar magnet structure of adjustable height, includes bar magnet, connecting seat, base and target, the bar magnet is installed on the connecting seat, be equipped with a plurality of second fixed block and third fixed block on the connecting seat, be connected with first connecting plate on the second fixed block, be connected with the second connecting plate on the third fixed block, be equipped with the first fixed block of a plurality of on the base, the one end of base is equipped with the telescopic link mounting groove, install electric telescopic handle in the telescopic link mounting groove, the movable block is installed to electric telescopic handle's one end.
As an optimized technical scheme of the utility model, the connecting seat passes through the pin to be fixed on the bottom of bar magnet.
As a preferred technical scheme of the utility model, the one end of first connecting plate is passed through first connecting axle and bearing and is fixed on the second fixed block, the other end of first connecting plate is fixed on the movable block through second connecting axle and bearing, the movable block passes through the bolt and installs and serve at electric telescopic handle's one end.
As a preferred technical scheme of the utility model, the one end of second connecting plate is passed through first connecting axle and bearing and is fixed on the third fixed block, the other end of second connecting plate passes through the second connecting axle and the bearing is fixed on first fixed block.
As a preferred technical scheme of the utility model, electric telescopic handle passes through the bolt and installs in the telescopic link mounting groove, second fixed block and third fixed block all install on the connecting seat through the bolt, movable block and first fixed block all install on the base through the bolt.
The utility model has the advantages that: the magnetic rod can automatically adjust the height, has strong flexibility and strong stability, can automatically adjust the distance between the magnetic rod and a target material, and can automatically adjust the magnetic rod backwards, thereby facilitating the disassembly and assembly of the magnetic rod, having simple structure and being convenient for people to operate and use.
Drawings
Fig. 1 is one of the schematic structural diagrams of the present invention;
fig. 2 is a second schematic structural diagram of the present invention.
In the figure: the magnetic rod type target material fixing device comprises a magnetic rod 1, a connecting seat 2, a base 3, an electric telescopic rod 4, a movable block 5, a first fixing block 6, a second fixing block 7, a third fixing block 8, a second connecting plate 9, a first connecting shaft 10, a second connecting shaft 11, a first connecting plate 12, a pin 13, a target material 14 and a telescopic rod mounting groove 15.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the protection scope of the present invention can be clearly and clearly defined.
The embodiment is as follows: referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a bar magnet structure of adjustable height, including bar magnet 1, connecting seat 2, base 3 and target 14, bar magnet 1 is installed on connecting seat 2, be equipped with a plurality of second fixed block 7 and third fixed block 8 on the connecting seat 2, be connected with first connecting plate 12 on the second fixed block 7, be connected with second connecting plate 9 on the third fixed block 8, be equipped with the first fixed block 6 of a plurality of on the base 3, the one end of base 3 is equipped with telescopic link mounting groove 15, install electric telescopic handle 4 in the telescopic link mounting groove 15, movable block 5 is installed to electric telescopic handle 4's one end.
The connecting seat 2 is fixed on the bottom of the magnetic bar 1 through a pin 13.
One end of the first connecting plate 12 is fixed on the second fixing block 7 through the first connecting shaft 10 and the bearing, the other end of the first connecting plate 12 is fixed on the movable block 5 through the second connecting shaft 11 and the bearing, and the movable block 5 is installed at one end of the electric telescopic rod 4 through a bolt.
One end of the second connecting plate 9 is fixed on the third fixing block 8 through the first connecting shaft 10 and the bearing, and the other end of the second connecting plate 9 is fixed on the first fixing block 6 through the second connecting shaft 11 and the bearing.
Electric telescopic handle 4 passes through the bolt and installs in telescopic link mounting groove 15, and second fixed block 7 and third fixed block 8 all pass through the bolt and install on connecting seat 2, and movable block 5 and first fixed block 6 all pass through the bolt and install on base 3.
The working principle is as follows: a magnetic rod structure with adjustable height comprises a magnetic rod 1, a connecting seat 2, a base 3, an electric telescopic rod 4, a movable block 5, a first fixed block 6, a second fixed block 7, a third fixed block 8, a second connecting plate 9, a first connecting shaft 10, a second connecting shaft 11, a first connecting plate 12, a pin 13, a target material 14 and a telescopic rod mounting groove 15, wherein when the magnetic rod structure is used, the power supply of the electric telescopic rod 4 is switched on through an external power supply, the electric telescopic rod 4 is utilized to be electrified and operated so as to drive the movable block 5 to move forwards or backwards, if the movable block 5 moves forwards, the movable block 5 can drive the first connecting plate 12 to move from the horizontal direction to the vertical direction so as to drive the second connecting plate 9 to move from the horizontal direction to the vertical direction, so that the distance between the connecting seat 2 and the base 3 is adjusted, the magnetic rod 1 is close to the target material 14, and when the magnetic rod 1 needs to be far away from the target material 14, only need withdraw movable block 5 through electric telescopic handle 4 to let first connecting plate 12 and second connecting plate 9 adjust to the horizontal direction from vertical direction, thereby let bar magnet 1 remove to left side slope, let bar magnet 1 keep away from target 14, also conveniently carry out the dismouting to bar magnet 1.
The magnetic rod can automatically adjust the height, has strong flexibility and strong stability, can automatically adjust the distance between the magnetic rod and a target material, and can automatically adjust the magnetic rod backwards, thereby facilitating the disassembly and the assembly of the magnetic rod, having simple structure and being convenient for people to operate and use.
The above embodiments only represent several embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.

Claims (5)

1. The utility model provides a bar magnet structure of adjustable height, includes bar magnet (1), connecting seat (2), base (3) and target (14), its characterized in that: install on connecting seat (2) bar magnet (1), be equipped with a plurality of second fixed block (7) and third fixed block (8) on connecting seat (2), be connected with first connecting plate (12) on second fixed block (7), be connected with second connecting plate (9) on third fixed block (8), be equipped with the first fixed block of a plurality of (6) on base (3), the one end of base (3) is equipped with telescopic link mounting groove (15), install electric telescopic handle (4) in telescopic link mounting groove (15), movable block (5) are installed to the one end of electric telescopic handle (4).
2. A height adjustable magnetic rod structure according to claim 1, wherein: the connecting seat (2) is fixed on the bottom of the magnetic rod (1) through a pin (13).
3. A height adjustable magnetic rod structure according to claim 1, wherein: one end of the first connecting plate (12) is fixed on the second fixing block (7) through a first connecting shaft (10) and a bearing, the other end of the first connecting plate (12) is fixed on the movable block (5) through a second connecting shaft (11) and a bearing, and the movable block (5) is installed at one end of the electric telescopic rod (4) through a bolt.
4. A height adjustable magnetic rod structure according to claim 1, wherein: one end of the second connecting plate (9) is fixed on the third fixing block (8) through a first connecting shaft (10) and a bearing, and the other end of the second connecting plate (9) is fixed on the first fixing block (6) through a second connecting shaft (11) and a bearing.
5. A height adjustable magnetic rod structure according to claim 1, wherein: electric telescopic handle (4) are installed in telescopic link mounting groove (15) through the bolt, second fixed block (7) and third fixed block (8) are all installed on connecting seat (2) through the bolt, movable block (5) and first fixed block (6) are all installed on base (3) through the bolt.
CN202123428574.3U 2021-12-31 2021-12-31 Magnetic bar structure with adjustable height Active CN217324267U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123428574.3U CN217324267U (en) 2021-12-31 2021-12-31 Magnetic bar structure with adjustable height

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123428574.3U CN217324267U (en) 2021-12-31 2021-12-31 Magnetic bar structure with adjustable height

Publications (1)

Publication Number Publication Date
CN217324267U true CN217324267U (en) 2022-08-30

Family

ID=82990725

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123428574.3U Active CN217324267U (en) 2021-12-31 2021-12-31 Magnetic bar structure with adjustable height

Country Status (1)

Country Link
CN (1) CN217324267U (en)

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