CN217323395U - Device for recovering micro silicon powder produced by polycrystalline silicon reduction furnace - Google Patents
Device for recovering micro silicon powder produced by polycrystalline silicon reduction furnace Download PDFInfo
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- CN217323395U CN217323395U CN202221317153.5U CN202221317153U CN217323395U CN 217323395 U CN217323395 U CN 217323395U CN 202221317153 U CN202221317153 U CN 202221317153U CN 217323395 U CN217323395 U CN 217323395U
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Abstract
The utility model relates to the technical field of polysilicon production, in particular to a device for recovering micro silicon powder produced by a polysilicon reduction furnace, which comprises a sedimentation filter, a silicon powder dryer and a gas phase chlorosilane condenser; the sedimentation filter is provided with a feeding hole; the top of the sedimentation filter is provided with a clear liquid outlet; the top of the sedimentation filter is provided with a backwashing inlet; the backwashing inlet is communicated with the clear liquid outlet; the top of the sedimentation filter is provided with a gas inlet I; the material inlet of the silicon powder dryer is communicated with the deposited material outlet of the sedimentation filter through a first pipeline; the silicon powder dryer is provided with a silicon material outlet; a second gas inlet is formed in the silicon powder dryer; the silicon powder dryer is provided with a gas phase outlet; the input port of the gas-phase chlorosilane condenser is communicated with a gas-phase outlet of the silicon powder dryer through a second pipeline; the output port of the gas phase chlorosilane condenser is connected with a collecting tank. Adopt the utility model discloses can realize filtering the recovery to the little silica flour in the recovery material of reduction.
Description
Technical Field
The utility model relates to a polycrystalline silicon production technical field especially relates to a device for retrieving little silica flour that polycrystalline silicon reduction furnace produced.
Background
In the process of producing the polycrystalline silicon by the improved Siemens method, a large amount of amorphous silica fume is inevitably generated in the process of producing the polycrystalline silicon rod by the vapor deposition method in a reduction furnace, the silica fume is not attached to the silicon rod but enters a tail gas recovery system along with reduction tail gas, the reduction tail gas is cooled to become liquid chlorosilane, a large amount of silica fume is mixed in the liquid chlorosilane, and the liquid chlorosilane is sent into a rectification storage tank and a rectification tower for separation treatment by a pump.
In the prior art, the micro silicon powder in the reduction and recovery material is not recovered, so that the loss of the raw material silicon powder is increased; meanwhile, the micro silicon powder is continuously deposited in the heat exchange equipment, so that the heat exchange efficiency is influenced, and the continuous abrasion on a pump, a pipeline and equipment in the conveying process influences the continuous and stable production of the rectifying device.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a device for retrieving little silica flour that polycrystalline silicon reduction furnace produced, main aim at retrieves the little silica flour in the material to the reduction and filters, reduces raw materials consumption, eliminates the adverse effect of little silica flour to rectification system equipment simultaneously, guarantees that the stable high-efficient long period of operation of rectification system.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides a device for recovering micro silicon powder produced by a polysilicon reduction furnace, which comprises a sedimentation filter, a silicon powder dryer and a gas phase chlorosilane condenser;
the filter screen in the sedimentation filter can be disassembled;
the settling filter is provided with a feed inlet for inputting a reduction reclaimed material containing micro silicon powder;
the top of the sedimentation filter is provided with a clear liquid outlet; a clear liquid pipeline is connected to the clear liquid outlet; a first control valve is arranged on the clear liquid outlet;
the top of the sedimentation filter is provided with a backwashing inlet; the backwashing inlet is communicated with the clear liquid outlet; a control valve II is arranged on the backwashing inlet;
the top of the sedimentation filter is provided with a first gas inlet for introducing inert gas; the first gas inlet is communicated with the backwashing inlet; a third control valve is arranged on the first gas inlet;
the material inlet of the silicon powder dryer is communicated with the deposited material outlet of the sedimentation filter through a first pipeline;
the silicon powder dryer is provided with a steam medium inlet for introducing steam;
the silicon powder dryer is provided with a steam medium outlet for outputting steam;
the silicon powder dryer is provided with a silicon material outlet;
the silicon powder dryer is provided with a second gas inlet for introducing inert gas;
the silicon powder dryer is provided with a gas phase outlet; a control valve IV is arranged on the gas phase outlet;
an input port of the gas-phase chlorosilane condenser is communicated with a gas-phase outlet of the silicon powder dryer through a second pipeline;
the gas phase chlorosilane condenser is provided with a cold medium inlet for introducing a cooling medium;
the gas phase chlorosilane condenser is provided with a cooling medium outlet for flowing out of a cooling medium;
and the output port of the gas phase chlorosilane condenser is connected with a collecting tank.
Further, still include: a silicon powder rinsing bath;
and the silicon powder rinsing bath is communicated with the silicon material outlet and is used for rinsing silicon powder.
Further, still include: a clear liquid delivery pump;
the input end of the clear liquid delivery pump is communicated with the clear liquid pipeline and used for outputting clear liquid.
Further, the filter screen is a metal filter screen.
Furthermore, the mesh number of the filter screen is not less than 80 meshes.
Further, the first control valve is an electromagnetic valve;
the second control valve is an electromagnetic valve;
the third control valve is an electromagnetic valve;
and the control valve IV is an electromagnetic valve.
Further, still include: a control device;
the control device is respectively connected with the first control valve, the second control valve, the third control valve and the fourth control valve for control.
Further, a control valve V is arranged on the gas inlet II.
Further, the control valve five is an electromagnetic valve.
Further, the first gas inlet and the second gas inlet are communicated with the same gas source.
By means of the technical scheme, the device for recovering the micro silicon powder produced by the polycrystalline silicon reduction furnace at least has the following advantages:
the micro silicon powder in the reduction reclaimed material can be filtered and recycled, the raw material consumption is reduced, the adverse effect of the micro silicon powder on the rectification system equipment is eliminated, and the stable, efficient and long-period operation of the rectification system is ensured.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic view of an apparatus for recovering microsilica produced by a polysilicon reduction furnace according to an embodiment of the present invention.
Shown in the figure:
1 is a sedimentation filter, 1-1 is a feed inlet, 1-2 is a clear liquid outlet, 1-3 is a gas inlet I, 1-4 is a backwashing inlet, 1-5 is a deposition material outlet, 2 is a silicon powder dryer, 2-1 is a gas phase outlet, 2-2 is a gas inlet II, 2-3 is a steam medium inlet, 2-4 is a steam medium outlet, 3 is a gas phase chlorosilane condenser, 3-1 is a cold medium inlet, 3-2 is a cold medium outlet, 4 is a collection tank, 5 is a silicon powder rinsing tank, and 6 is a clear liquid delivery pump.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description is given to specific embodiments, structures, features and effects according to the present invention in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As shown in fig. 1, an embodiment of the present invention provides an apparatus for recovering fine silicon powder produced by a polysilicon reduction furnace, comprising a sedimentation filter 1, a silicon powder dryer 2 and a gas phase chlorosilane condenser 3;
the filter screen in the sedimentation filter 1 can be disassembled so as to be convenient for disassembly, cleaning or replacement of the filter screen. This embodiment is preferred, and the filter screen is the metal filter screen, and is durable wear-resisting, can reuse. Further preferably, the mesh number of the filter screens is not less than 80 meshes so as to adapt to the current use scene. Of course, the filter screens with different meshes can be replaced according to the use condition, the size of the sedimentation filter 1 and the size of the cross section area of the filter screens can be determined according to the actual operation flow.
The sedimentation filter 1 is provided with a feed inlet 1-1 for inputting the reduction reclaimed material containing the micro silicon powder. The top of the sedimentation filter 1 is provided with a clear liquid outlet 1-2; a clear liquid pipeline is connected to the clear liquid outlet 1-2; a first control valve is arranged on the clear liquid outlet 1-2; preferably, the first control valve is an electromagnetic valve, so as to facilitate automatic control. The filter screen prevents the micro silicon powder from flowing from the feed inlet 1-1 to the clear liquid outlet 1-2. This embodiment is preferable, further including: a clear liquid delivery pump 6; the input end of the clear liquid delivery pump 6 is communicated with the clear liquid pipeline and used for outputting clear liquid.
The top of the sedimentation filter 1 is provided with a backwashing inlet 1-4; the backwashing inlet 1-4 is communicated with the clear liquid outlet 1-2; a control valve II is arranged on the backwashing inlets 1-4; preferably, the second control valve is an electromagnetic valve, so as to facilitate automatic control.
The top of the sedimentation filter 1 is provided with a gas inlet I1-3 for introducing inert gas; the inert gas is nitrogen, so that when the filter screen is disassembled and cleaned, the nitrogen is introduced to replace dangerous gas in the sedimentation filter, and the operation danger is reduced. The first gas inlet 1-3 is communicated with the backwashing inlet 1-4; a third control valve is arranged on the first gas inlet 1-3; preferably, the third control valve is an electromagnetic valve, so as to facilitate automatic control.
The material inlet of the silicon powder dryer 2 is communicated with the deposited material outlet 1-5 of the sedimentation filter 1 through a first pipeline so as to convey deposited silicon powder to the silicon powder dryer 2; the silicon powder dryer 2 is provided with a steam medium inlet 2-3 for introducing steam; the silicon powder dryer 2 is provided with a steam medium outlet 2-4 for steam output so as to provide heating steam for the silicon powder dryer 2. The silicon powder dryer 2 is provided with a silicon material outlet to output dried silicon powder. Preferably, an embodiment of the present invention provides an apparatus for recovering microsilica produced by a polysilicon reduction furnace, further comprising: a silicon powder rinsing bath 5; and the silicon powder rinsing tank 5 is communicated with the silicon material outlet and is used for rinsing the silicon powder.
The silicon powder dryer 2 is provided with a second gas inlet 2-2 for introducing inert gas; in this embodiment, preferably, a fifth control valve is disposed on the second gas inlet 2-2 for controlling the on-off of the second gas inlet 2-2. Preferably, the control valve five is an electromagnetic valve so as to facilitate automatic control.
The silicon powder dryer 2 is provided with a gas phase outlet 2-1; a fourth control valve is arranged on the gas phase outlet 2-1; preferably, the fourth control valve is an electromagnetic valve, so as to facilitate automatic control.
An input port of the gas-phase chlorosilane condenser 3 is communicated with a gas-phase outlet 2-1 of the silicon powder dryer 2 through a second pipeline; a cold medium inlet 3-1 is arranged on the gas phase chlorosilane condenser 3 and is used for introducing a cooling medium; a cold medium outlet 3-2 is arranged on the gas phase chlorosilane condenser 3 and is used for cooling medium to flow out;
the output port of the gas phase chlorosilane condenser 3 is connected with a collecting tank 4.
The utility model discloses a device for retrieving little silica flour that polycrystalline silicon reduction furnace produced that an embodiment provided can realize filtering the recovery to the little silica flour in the reduction reclaimed materials, reduces raw materials consumption, eliminates little silica flour simultaneously to the adverse effect of rectification system equipment, guarantees the stable high-efficient long-period operation of rectification system.
As a preferred aspect of the above embodiment, an apparatus for recovering fine silicon powder produced by a polysilicon reduction furnace according to an embodiment of the present invention further includes: a control device; the control device is respectively connected with the first control valve, the second control valve, the third control valve and the fourth control valve for control.
Preferably, the first gas inlet 1-3 and the second gas inlet 2-2 are connected to the same gas source to provide inert gas. Preferably, the inert gas is nitrogen.
The liquid reduction recovery material containing the micro silicon powder enters a sedimentation filter 1 through a feeding hole 1-1, the micro silicon powder in the reduction recovery material is naturally deposited at the bottom of the sedimentation filter 1, the silicon powder is intercepted through a filter screen, most of the micro silicon powder is removed from the liquid chlorosilane passing through the filter screen, the clear liquid chlorosilane is discharged from a clear liquid outlet 1-2 at the top of the sedimentation filter 1, and the flow speed in the sedimentation filter 1 is controlled to be about 0.2m/s for ensuring the deposition of the micro silicon powder; the chlorosilane clear liquid is conveyed into a rectification system through a clear liquid conveying pump 6. After a period of operation, a large amount of the sediment filter 1 collects at the bottomThe micro silicon powder is pumped into a chlorosilane clear liquid through a backwashing inlet 1-4 to backwash the filter screen, and is discharged into a silicon powder dryer 2 through a sediment outlet 1-5 at the bottom of the sedimentation filter 1; controlling the pressure of the backwashing clear liquid at 2-4 kg/cm 2 Until the cleaning is completed. The mixture of the slurry chlorosilane and the micro silicon powder entering the silicon powder dryer 2 is dried by low-pressure steam introduced into the silicon powder dryer 2, and the gas-phase chlorosilane enters the gas-phase chlorosilane condenser 3 through a gas-phase outlet 2-1 at the top of the silicon powder dryer 2 and is condensed by the gas-phase chlorosilane condenser 3 and then enters the collection tank 4 for recovery. And the micro silicon powder at the bottom of the silicon powder dryer 2 is pumped into nitrogen through a gas inlet II 2-2 to be pressurized, and then is discharged into a silicon powder rinsing tank 5 to be rinsed and recovered.
The device for recovering the micro silicon powder produced by the polycrystalline silicon reduction furnace, which is provided by one embodiment of the utility model, can be connected in the existing tail gas recovery system and can be connected between a reduction recovered material storage tank and a delivery pump; the device for recovering the micro silicon powder produced by the polysilicon reduction furnace, which is provided by one embodiment of the utility model, can be additionally provided with two sets, and the micro silicon powder can be switched to use back and forth during operation, and the content of the micro silicon powder is about 0.1 percent in terms of 120 tons/hour of the recovered materials; the utility model discloses a device for retrieving little silica flour that polycrystalline silicon reduction furnace produced that an embodiment provided, about 100kg of little silica flour of recoverable production every hour, better solution simultaneously the rectifying column reboiler by little silica flour jam scale deposit, pipeline equipment etc. by little silica flour scour wear's problem, guaranteed rectifying device's safety and stability, long period running.
Further still, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, with such terms being used only to distinguish one element from another. Without departing from the scope of the exemplary embodiments. Similarly, the terms first, second, etc. do not denote any order or order, but rather the terms first, second, etc. are used to distinguish one element from another. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of drawing of description, and the concrete connection mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt prior art, and conventional model, including circuit connection adopts conventional connection mode among the prior art, does not detailed here again.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (10)
1. A device for recovering micro silicon powder generated by a polysilicon reduction furnace is characterized by comprising a sedimentation filter, a silicon powder dryer and a gas phase chlorosilane condenser;
the filter screen in the sedimentation filter can be disassembled;
the settling filter is provided with a feed inlet for inputting a reduction reclaimed material containing micro silicon powder;
the top of the sedimentation filter is provided with a clear liquid outlet; a clear liquid pipeline is connected to the clear liquid outlet; a first control valve is arranged on the clear liquid outlet;
the top of the sedimentation filter is provided with a backwashing inlet; the backwashing inlet is communicated with the clear liquid outlet; a control valve II is arranged on the backwashing inlet;
the top of the sedimentation filter is provided with a first gas inlet for introducing inert gas; the first gas inlet is communicated with the backwashing inlet; a third control valve is arranged on the first gas inlet;
the material inlet of the silicon powder dryer is communicated with the deposited material outlet of the sedimentation filter through a first pipeline;
the silicon powder dryer is provided with a steam medium inlet for introducing steam;
the silicon powder dryer is provided with a steam medium outlet for outputting steam;
the silicon powder dryer is provided with a silicon material outlet;
the silicon powder dryer is provided with a second gas inlet for introducing inert gas;
the silicon powder dryer is provided with a gas phase outlet; a control valve IV is arranged on the gas phase outlet;
an input port of the gas-phase chlorosilane condenser is communicated with a gas-phase outlet of the silicon powder dryer through a second pipeline;
the gas phase chlorosilane condenser is provided with a cold medium inlet for introducing a cooling medium;
the gas phase chlorosilane condenser is provided with a cooling medium outlet for flowing out of a cooling medium;
and the output port of the gas phase chlorosilane condenser is connected with a collecting tank.
2. The apparatus for recovering microsilica produced by a polysilicon reducing furnace according to claim 1, further comprising: a silicon powder rinsing bath;
and the silicon powder rinsing bath is communicated with the silicon material outlet and is used for rinsing silicon powder.
3. The apparatus for recovering microsilica produced by a polysilicon reducing furnace according to claim 1, further comprising: a clear liquid delivery pump;
the input end of the clear liquid delivery pump is communicated with the clear liquid pipeline and used for outputting clear liquid.
4. The apparatus for recovering microsilica produced in a polycrystalline silicon reduction furnace according to claim 1,
the filter screen is a metal filter screen.
5. The apparatus for recovering microsilica produced in a polysilicon reducing furnace according to claim 4,
the mesh number of the filter screen is not less than 80 meshes.
6. The apparatus for recovering microsilica produced in a polycrystalline silicon reduction furnace according to claim 1,
the first control valve is an electromagnetic valve;
the second control valve is an electromagnetic valve;
the third control valve is an electromagnetic valve;
and the control valve IV is an electromagnetic valve.
7. The apparatus for recovering microsilica produced in a polycrystalline silicon reduction furnace according to claim 6, further comprising: a control device;
the control device is respectively connected with the first control valve, the second control valve, the third control valve and the fourth control valve for control.
8. The apparatus for recovering microsilica produced in a polysilicon reducing furnace according to claim 1,
and a control valve V is arranged on the gas inlet II.
9. The apparatus for recovering microsilica produced in a polysilicon reducing furnace according to claim 8,
and the control valve five is an electromagnetic valve.
10. The apparatus for recovering microsilica produced in a polysilicon reducing furnace according to claim 1,
the first gas inlet and the second gas inlet are communicated with the same gas source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221317153.5U CN217323395U (en) | 2022-05-27 | 2022-05-27 | Device for recovering micro silicon powder produced by polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221317153.5U CN217323395U (en) | 2022-05-27 | 2022-05-27 | Device for recovering micro silicon powder produced by polycrystalline silicon reduction furnace |
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| Publication Number | Publication Date |
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| CN217323395U true CN217323395U (en) | 2022-08-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221317153.5U Active CN217323395U (en) | 2022-05-27 | 2022-05-27 | Device for recovering micro silicon powder produced by polycrystalline silicon reduction furnace |
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- 2022-05-27 CN CN202221317153.5U patent/CN217323395U/en active Active
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