CN217312895U - Stirrer capable of stirring uniformly and efficiently - Google Patents

Stirrer capable of stirring uniformly and efficiently Download PDF

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Publication number
CN217312895U
CN217312895U CN202220093522.0U CN202220093522U CN217312895U CN 217312895 U CN217312895 U CN 217312895U CN 202220093522 U CN202220093522 U CN 202220093522U CN 217312895 U CN217312895 U CN 217312895U
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fixedly connected
stirring
agitator
gear
agitator body
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杨银广
王志斌
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Dalian Siwei Sealing Equipment Co ltd
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Dalian Siwei Sealing Equipment Co ltd
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Abstract

本实用新型公开了一种高效搅拌均匀的搅拌器,包括搅拌器本体,所述搅拌器本体外侧壁固定连接有支撑板,所述支撑板底部固定连接有两对支撑腿,所述搅拌器本体上端面固定连接有第一电机,第一电机输出端带动搅拌主轴转动,在主齿轮和副齿轮的作用下,使副轴转动,搅拌主轴与搅拌副轴上均安装有若干搅拌叶,将搅拌器本体内的原料充分搅拌,转动环转动带动连接架转动,使刮板沿着搅拌器本体内部面移动,将内壁面上的附着原料刮掉,防止因为原料附着造成搅拌不充分,还可以使出料口排料时,可以更加干净的将搅拌器本体内的原料排净,给人们带来方便。

Figure 202220093522

The utility model discloses a stirrer with high efficiency and uniform stirring, which comprises a stirrer body, a support plate is fixedly connected to the outer side wall of the agitator body, and two pairs of support legs are fixedly connected to the bottom of the support plate. The upper end face is fixedly connected with a first motor, and the output end of the first motor drives the stirring main shaft to rotate, and under the action of the main gear and the auxiliary gear, the auxiliary shaft rotates. The raw materials in the agitator body are fully stirred, and the rotation of the rotating ring drives the connecting frame to rotate, so that the scraper moves along the inner surface of the agitator body, scraping off the adhering raw materials on the inner wall surface, preventing insufficient stirring due to the adhesion of raw materials, and also making the When the material is discharged from the discharge port, the raw materials in the mixer body can be discharged more cleanly, which brings convenience to people.

Figure 202220093522

Description

一种高效搅拌均匀的搅拌器A high-efficiency stirrer

技术领域technical field

本实用新型涉及搅拌器技术领域,具体为一种高效搅拌均匀的搅拌器。The utility model relates to the technical field of stirrers, in particular to a stirrer with high efficiency and uniform stirring.

背景技术Background technique

使液体、气体介质强迫对流并均匀混合的器件。搅拌器的类型、尺寸及转速,对搅拌功率在总体流动和湍流脉动之间的分配都有影响。一般说来,涡轮式搅拌器的功率分配对湍流脉动有利,而旋桨式搅拌器对总体流动有利。对于同一类型的搅拌器来说,在功率消耗相同的条件下,大直径、低转速的搅拌器,功率主要消耗于总体流动,有利于宏观混合。小直径、高转速的搅拌器,功率主要消耗于湍流脉动,有利于微观混合。搅拌器的放大是与工艺过程有关的复杂问题,只能通过逐级经验放大,根据取得的放大判据,外推至工业规模。A device for forced convection and uniform mixing of liquid and gaseous media. Stirrer type, size, and rotational speed all affect the distribution of stirring power between bulk flow and turbulent pulsation. In general, the power distribution of a turbine agitator is favorable for turbulent pulsation, while a propeller agitator is favorable for bulk flow. For the same type of agitator, under the condition of the same power consumption, the power of the agitator with large diameter and low speed is mainly consumed in the overall flow, which is conducive to macro mixing. Small-diameter, high-speed agitator, the power is mainly consumed by turbulent pulsation, which is conducive to micro-mixing. The scale-up of agitators is a complex issue related to the technological process, and can only be scaled up by experience step by step, and extrapolated to an industrial scale according to the scale-up criteria obtained.

公开号为CN208894041U的实用新型专利,包括搅拌器主体、搅拌轴、安装在搅拌器主体下端的支撑脚、安装在搅拌器主体上端的电动机,支撑脚安装在搅拌器主体的下端,搅拌器主体的上端设有进料口,电动机安装在搅拌器主体的上端,电动机朝下安装,电动机上设有搅拌轴,搅拌轴由电动机向下延伸至搅拌器主体内部的下端,搅拌器的上端设有多个桨叶,搅拌器主体的下端设有一个出料口,搅拌器主体的正面设有一个透明观察窗,操作简单,加料方便,搅拌均匀,搅拌效率高,但该装置不具备刮板,在排料时内壁上会有原料附着,存在排料不彻底的问题,The utility model patent with publication number CN208894041U includes agitator body, agitator shaft, support feet installed on the lower end of the agitator body, and a motor installed on the upper end of the agitator body. The support feet are installed at the lower end of the agitator body, and the The upper end is provided with a feeding port, the motor is installed on the upper end of the agitator body, the motor is installed downward, a stirring shaft is arranged on the motor, and the stirring shaft extends downward from the motor to the lower end of the agitator body. The lower end of the agitator body is provided with a discharge port, and the front of the agitator body is provided with a transparent observation window. The operation is simple, the feeding is convenient, the mixing is uniform, and the mixing efficiency is high. However, the device does not have a scraper. When discharging, there will be raw materials attached to the inner wall, and there is a problem of incomplete discharging.

实用新型内容Utility model content

针对现有技术的不足,本实用新型提供了一种高效搅拌均匀的搅拌器,解决了将内壁附着的原料刮掉,使排料彻底的问题。Aiming at the deficiencies of the prior art, the utility model provides a stirrer with high efficiency and uniform stirring, which solves the problem of scraping off the raw materials attached to the inner wall and making the material discharge completely.

为实现以上目的,本实用新型通过以下技术方案予以实现:一种高效搅拌均匀的搅拌器,包括搅拌器本体,所述搅拌器本体外侧壁固定连接有支撑板,所述支撑板底部固定连接有两对支撑腿,所述搅拌器本体上端面固定连接有第一电机,所述第一电机输出端固定连接有搅拌主轴,所述搅拌器本体内部上壁面转动连接有一对搅拌副轴,所述搅拌主轴上固定连接有主齿轮,所述搅拌副轴上固定连接有副齿轮,所述主齿轮啮合连接于所述副齿轮,所述搅拌主轴与一对所述搅拌副轴上均固定连接有若干搅拌叶。In order to achieve the above purpose, the present invention is achieved through the following technical solutions: a stirrer with high efficiency and uniform stirring, comprising a stirrer body, the outer side wall of the agitator body is fixedly connected with a support plate, and the bottom of the support plate is fixedly connected with a support plate. Two pairs of support legs, a first motor is fixedly connected to the upper end surface of the agitator body, a stirring main shaft is fixedly connected to the output end of the first motor, and a pair of stirring secondary shafts are rotatably connected to the upper wall surface of the agitator body. A main gear is fixedly connected to the stirring main shaft, an auxiliary gear is fixedly connected to the stirring auxiliary shaft, the main gear is meshed and connected to the auxiliary gear, and both the stirring main shaft and a pair of the stirring auxiliary shafts are fixedly connected. Several stirring blades.

优选的,所述搅拌器本体内设有第一隔板,所述第一隔板通过两对连接杆固定连接于所述搅拌器本体内部上壁面,所述搅拌器本体内侧壁固定连接有第二隔板,所述第一隔板与所述第二隔板相邻的端面均开设有滑槽,所述滑槽内滑动连接有滑块,一对所述滑块间固定连接有转动环,所述转动环上端面固定连接有外齿圈,所述搅拌器本体内壁面固定安装有第二电机,所述第二电机输出端固定连接有齿轮,所述齿轮啮合连接于所述外齿圈。Preferably, the agitator body is provided with a first partition, the first partition is fixedly connected to the inner upper wall of the agitator body through two pairs of connecting rods, and the inner side wall of the agitator body is fixedly connected with a first partition. Two baffles, the end faces of the first baffle and the second baffle are provided with sliding grooves, and sliding blocks are slidably connected in the sliding grooves, and a rotating ring is fixedly connected between a pair of the sliding blocks. , the upper end surface of the rotating ring is fixedly connected with an external gear ring, the inner wall surface of the agitator body is fixedly installed with a second motor, the output end of the second motor is fixedly connected with a gear, and the gear is meshed and connected to the external gear lock up.

优选的,所述转动环下壁面固定连接有连接架,所述连接架远离所述转动环的一端固定连接有刮板。Preferably, a connecting frame is fixedly connected to the lower wall of the rotating ring, and a scraper is fixedly connected to one end of the connecting frame away from the rotating ring.

优选的,所述搅拌器本体一侧壁开设有进料口,所述搅拌器本体底部开设有出料口。Preferably, a feed port is provided on a side wall of the agitator body, and a discharge port is provided at the bottom of the agitator body.

优选的,所述搅拌器本体外侧壁下端开设有观察窗。Preferably, an observation window is provided at the lower end of the outer side wall of the agitator body.

有益效果beneficial effect

本实用新型提供了一种高效搅拌均匀的搅拌器,具备以下有益效果:本装置结构紧凑,第一电机输出端带动搅拌主轴转动,在主齿轮和副齿轮的作用下,使副轴转动,搅拌主轴与搅拌副轴上均安装有若干搅拌叶,将搅拌器本体内的原料充分搅拌,第一隔板、第二隔板和转动环可以防止原料在搅拌时向上飞溅,造成第二电机损坏,第二电机带动齿轮转动,在齿条的作用下,使转动环在第一隔板与第二隔板间转动,转动环转动带动连接架转动,使刮板沿着搅拌器本体内部面移动,将内壁面上的附着原料刮掉,防止因为原料附着造成搅拌不充分,还可以使出料口排料时,可以更加干净的将搅拌器本体内的原料排净,给人们带来方便。The utility model provides a high-efficiency stirring agitator, which has the following beneficial effects: the device has a compact structure, and the output end of the first motor drives the stirring main shaft to rotate, and under the action of the main gear and the auxiliary gear, the auxiliary shaft is rotated, and the stirring is performed. A number of stirring blades are installed on the main shaft and the stirring sub-shaft to fully stir the raw materials in the stirrer body. The first partition, the second partition and the rotating ring can prevent the raw materials from splashing upward during stirring, causing damage to the second motor. The second motor drives the gear to rotate. Under the action of the rack, the rotating ring rotates between the first baffle and the second baffle, and the rotating ring rotates to drive the connecting frame to rotate, so that the scraper moves along the inner surface of the agitator body. Scrape off the adhering raw materials on the inner wall surface to prevent insufficient stirring due to the adhesion of raw materials, and also make the raw materials in the mixer body more cleanly drained when the material is discharged from the discharge port, which brings convenience to people.

附图说明Description of drawings

图1为本实用新型的主视剖视结构示意图。FIG. 1 is a schematic view of the front sectional structure of the utility model.

图2为本实用新型的主视结构示意图。FIG. 2 is a schematic view of the front structure of the utility model.

图3为本实用新型图1的A部放大结构示意图。FIG. 3 is an enlarged structural schematic diagram of part A of FIG. 1 of the present invention.

图中:1、搅拌器本体;2、支撑板;3、支撑腿;4、第一电机;5、搅拌主轴;6、搅拌副轴;7、主齿轮;8、副齿轮;9、搅拌叶;10、第一隔板;11、连接杆;12、滑槽;13、滑块;14、转动环;15、外齿圈;16、第二电机;17、齿轮;18、连接架;19、刮板;20、进料口;21、出料口;22、观察窗;23、第二隔板。In the figure: 1. Agitator body; 2. Supporting plate; 3. Supporting legs; 4. First motor; 5. Stirring main shaft; 6. Stirring auxiliary shaft; 7. Main gear; ; 10, the first partition plate; 11, the connecting rod; 12, the chute; 13, the slider; 14, the rotating ring; 15, the outer ring gear; 16, the second motor; 17, the gear; 18, the connecting frame; 19 , scraper; 20, feed port; 21, discharge port; 22, observation window; 23, second partition.

具体实施方式Detailed ways

下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the implementations. example. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

请参阅图1-3,一种高效搅拌均匀的搅拌器,包括搅拌器本体1,所述搅拌器本体1外侧壁固定连接有支撑板2,所述支撑板2底部固定连接有两对支撑腿3,所述搅拌器本体1上端面固定连接有第一电机4,所述第一电机4输出端固定连接有搅拌主轴5,所述搅拌器本体1内部上壁面转动连接有一对搅拌副轴6,所述搅拌主轴5上固定连接有主齿轮7,所述搅拌副轴6上固定连接有副齿轮8,所述主齿轮7啮合连接于所述副齿轮8,所述搅拌主轴5与一对所述搅拌副轴6上均固定连接有若干搅拌叶9,所述搅拌器本体1内设有第一隔板10,所述第一隔板10通过两对连接杆11固定连接于所述搅拌器本体1内部上壁面,所述搅拌器本体1内侧壁固定连接有第二隔板23,所述第一隔板10与所述第二隔板23相邻的端面均开设有滑槽12,所述滑槽12内滑动连接有滑块13,一对所述滑块13间固定连接有转动环14,所述转动环14上端面固定连接有外齿圈15,所述搅拌器本体1内壁面固定安装有第二电机16,所述第二电机16输出端固定连接有齿轮17,所述齿轮17啮合连接于所述外齿圈15,所述转动环14下壁面固定连接有连接架18,所述连接架18远离所述转动环14的一端固定连接有刮板19,所述搅拌器本体1一侧壁开设有进料口20,所述搅拌器本体1底部开设有出料口21,所述搅拌器本体1外侧壁下端开设有观察窗22。Please refer to FIGS. 1-3 , a stirrer with high efficiency and uniform stirring includes a stirrer body 1 , a support plate 2 is fixedly connected to the outer side wall of the agitator body 1 , and two pairs of support legs are fixedly connected to the bottom of the support plate 2 3. The first motor 4 is fixedly connected to the upper end surface of the agitator body 1, the output end of the first motor 4 is fixedly connected to the stirring spindle 5, and the upper wall surface of the agitator body 1 is rotatably connected with a pair of stirring auxiliary shafts 6. , a main gear 7 is fixedly connected to the stirring main shaft 5, a secondary gear 8 is fixedly connected to the stirring secondary shaft 6, the main gear 7 is meshed and connected to the secondary gear 8, and the stirring main shaft 5 is connected to a pair of A plurality of stirring blades 9 are fixedly connected to the stirring sub-shaft 6 , and a first partition 10 is arranged in the stirring body 1 , and the first partition 10 is fixedly connected to the stirring through two pairs of connecting rods 11 . The inner upper wall surface of the agitator body 1, the inner side wall of the agitator body 1 is fixedly connected with a second partition plate 23, and the end surfaces adjacent to the first partition plate 10 and the second partition plate 23 are provided with chute 12. A sliding block 13 is slidably connected in the chute 12 , a rotating ring 14 is fixedly connected between a pair of the sliding blocks 13 , and an outer gear ring 15 is fixedly connected to the upper end surface of the rotating ring 14 . A second motor 16 is fixedly installed on the wall, a gear 17 is fixedly connected to the output end of the second motor 16 , and the gear 17 is meshed and connected to the outer ring gear 15 , and a connecting frame 18 is fixedly connected to the lower wall of the rotating ring 14 One end of the connecting frame 18 away from the rotating ring 14 is fixedly connected with a scraper 19, a side wall of the agitator body 1 is provided with a feeding port 20, and the bottom of the agitator body 1 is provided with a discharging port 21 , the lower end of the outer side wall of the agitator body 1 is provided with an observation window 22 .

实施例:首先将原料由进料口20放入,此时启动第一电机4,第一电机4输出端带动搅拌主轴5转动,搅拌主轴5上固定连接有主齿轮7,在主齿轮7转动带动两侧啮合连接的副齿轮8转动,副齿轮8转动带动搅拌副轴6转动,搅拌主轴5和搅拌副轴6上均错位安装有若干搅拌叶9,在搅拌叶9的作用下将搅拌器本体1内的原料进行搅拌,启动第二电机16,第二电机16输出端带动齿轮17转动,齿轮17转动带动外齿圈15转动,使转动环14在滑槽12和滑块13的作用下转动,转动环14转动带动连接架18移动,使连接架18一端固定连接的刮板19移动,搅拌器本体1为圆柱形,所以刮板19沿着搅拌器本体1内侧壁移动,将搅拌器本体1内侧壁上附着的原料刮掉,使原料搅拌的更加充分,搅拌器本体1侧壁上开设有观察窗22,可以实时观察内部原料的搅拌情况,搅拌器本体1底部开设有出料口21,可以将搅拌好的原料排出,给人们带来方便。Embodiment: first put the raw material into the feed port 20, start the first motor 4 at this time, the output end of the first motor 4 drives the stirring spindle 5 to rotate, and the stirring spindle 5 is fixedly connected with the main gear 7, and the main gear 7 rotates. The auxiliary gears 8 meshed on both sides are driven to rotate, and the rotation of the auxiliary gears 8 drives the rotation of the stirring auxiliary shaft 6. A number of stirring blades 9 are installed on the stirring main shaft 5 and the stirring auxiliary shaft 6. The raw materials in the main body 1 are stirred, the second motor 16 is started, the output end of the second motor 16 drives the gear 17 to rotate, and the rotation of the gear 17 drives the outer ring gear 15 to rotate, so that the rotating ring 14 is under the action of the chute 12 and the slider 13 Rotation, the rotating ring 14 rotates to drive the connecting frame 18 to move, so that the scraper 19 fixedly connected at one end of the connecting frame 18 moves, the stirrer body 1 is cylindrical, so the scraper 19 moves along the inner side wall of the stirrer The raw materials attached to the inner side wall of the main body 1 are scraped off, so that the raw materials can be stirred more fully. There is an observation window 22 on the side wall of the agitator main body 1, which can observe the stirring of the internal raw materials in real time. The bottom of the agitator main body 1 is provided with a discharge port. 21. The stirred raw materials can be discharged, which brings convenience to people.

需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下。由语句“包括一个......限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素”。It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any relationship between these entities or operations. any such actual relationship or sequence exists. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass a non-exclusive inclusion such that a process, method, article or device that includes a list of elements includes not only those elements, but also includes not explicitly listed or other elements inherent to such a process, method, article or apparatus. without more restrictions. An element defined by the phrase "comprising an... does not preclude the presence of additional identical elements in a process, method, article or apparatus comprising said element".

尽管已经示出和描述了本实用新型的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本实用新型的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes and modifications can be made to these embodiments without departing from the principles and spirit of the present invention , alternatives and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

Claims (5)

1.一种高效搅拌均匀的搅拌器,包括搅拌器本体(1),所述搅拌器本体(1)外侧壁固定连接有支撑板(2),所述支撑板(2)底部固定连接有两对支撑腿(3),其特征在于,所述搅拌器本体(1)上端面固定连接有第一电机(4),所述第一电机(4)输出端固定连接有搅拌主轴(5),所述搅拌器本体(1)内部上壁面转动连接有一对搅拌副轴(6),所述搅拌主轴(5)上固定连接有主齿轮(7),所述搅拌副轴(6)上固定连接有副齿轮(8),所述主齿轮(7)啮合连接于所述副齿轮(8),所述搅拌主轴(5)与一对所述搅拌副轴(6)上均固定连接有若干搅拌叶(9)。1. A stirrer with high efficiency and uniform stirring, comprising a stirrer body (1), a support plate (2) is fixedly connected to the outer side wall of the agitator body (1), and two support plates (2) are fixedly connected to the bottom of the support plate (2). For the support leg (3), it is characterized in that a first motor (4) is fixedly connected to the upper end surface of the agitator body (1), and a stirring spindle (5) is fixedly connected to the output end of the first motor (4), A pair of stirring auxiliary shafts (6) are rotatably connected to the inner upper wall of the agitator body (1), a main gear (7) is fixedly connected to the stirring main shaft (5), and the stirring auxiliary shaft (6) is fixedly connected There is a secondary gear (8), the main gear (7) is meshed with the secondary gear (8), and a plurality of stirring shafts (5) and a pair of the stirring secondary shafts (6) are fixedly connected to each other. leaves (9). 2.根据权利要求1所述的一种高效搅拌均匀的搅拌器,其特征在于,所述搅拌器本体(1)内设有第一隔板(10),所述第一隔板(10)通过两对连接杆(11)固定连接于所述搅拌器本体(1)内部上壁面,所述搅拌器本体(1)内侧壁固定连接有第二隔板(23),所述第一隔板(10)与所述第二隔板(23)相邻的端面均开设有滑槽(12),所述滑槽(12)内滑动连接有滑块(13),一对所述滑块(13)间固定连接有转动环(14),所述转动环(14)上端面固定连接有外齿圈(15),所述搅拌器本体(1)内壁面固定安装有第二电机(16),所述第二电机(16)输出端固定连接有齿轮(17),所述齿轮(17)啮合连接于所述外齿圈(15)。2. The agitator for high-efficiency stirring uniformly according to claim 1, characterized in that, a first partition plate (10) is provided in the agitator body (1), and the first partition plate (10) Two pairs of connecting rods (11) are fixedly connected to the inner upper wall surface of the agitator body (1), and a second partition plate (23) is fixedly connected to the inner wall of the agitator body (1). The first partition plate (10) The end faces adjacent to the second partition plate (23) are provided with chute (12), and a slider (13) is slidably connected in the chute (12), and a pair of the sliders ( 13) is fixedly connected with a rotating ring (14), the upper end surface of the rotating ring (14) is fixedly connected with an outer gear ring (15), and the inner wall surface of the agitator body (1) is fixedly installed with a second motor (16) A gear (17) is fixedly connected to the output end of the second motor (16), and the gear (17) is meshed and connected to the outer ring gear (15). 3.根据权利要求2所述的一种高效搅拌均匀的搅拌器,其特征在于,所述转动环(14)下壁面固定连接有连接架(18),所述连接架(18)远离所述转动环(14)的一端固定连接有刮板(19)。3 . The high-efficiency stirrer according to claim 2 , wherein a connecting frame ( 18 ) is fixedly connected to the lower wall of the rotating ring ( 14 ), and the connecting frame ( 18 ) is far away from the A scraper (19) is fixedly connected to one end of the rotating ring (14). 4.根据权利要求1所述的一种高效搅拌均匀的搅拌器,其特征在于,所述搅拌器本体(1)一侧壁开设有进料口(20),所述搅拌器本体(1)底部开设有出料口(21)。4. A high-efficiency stirring agitator according to claim 1, characterized in that, a feeding port (20) is opened on a side wall of the agitator body (1), and the agitator body (1) The bottom is provided with a discharge port (21). 5.根据权利要求1所述的一种高效搅拌均匀的搅拌器,其特征在于,所述搅拌器本体(1)外侧壁下端开设有观察窗(22)。5 . The high-efficiency agitator for uniform stirring according to claim 1 , wherein an observation window ( 22 ) is provided at the lower end of the outer side wall of the agitator body ( 1 ). 6 .
CN202220093522.0U 2022-01-14 2022-01-14 Stirrer capable of stirring uniformly and efficiently Expired - Fee Related CN217312895U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117139287A (en) * 2022-12-29 2023-12-01 苏州珮凯科技有限公司 Regeneration method and equipment for film-containing coating component in dry etching process cavity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117139287A (en) * 2022-12-29 2023-12-01 苏州珮凯科技有限公司 Regeneration method and equipment for film-containing coating component in dry etching process cavity

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