CN217289103U

CN217289103U - Wax platform is glued in special use of semiconductor silicon boat and quartz boat processing

Info

Publication number: CN217289103U
Application number: CN202220142496.6U
Authority: CN
Inventors: 曹小荣; 许晓靖; 曹凌峰
Original assignee: Hangzhou Teos Semiconductor Equipment Manufacturing Co ltd
Current assignee: Quzhou Teos Semiconductor Equipment Manufacturing Co ltd
Priority date: 2022-01-19
Filing date: 2022-01-19
Publication date: 2022-08-26
Anticipated expiration: 2032-01-19

Abstract

The utility model relates to a glue wax platform technical field, specifically speaking relates to a special glue wax platform of semiconductor silicon boat and quartz boat processing, including the support frame and install the heating panel at the support frame top, the heating panel includes upper casing, lower casing and heating pipe, lower casing fixed connection is at the support frame top, and upper casing slides and locates on the lower casing, and the heating pipe is fixed to be installed inside the lower casing, one side fixed connection of lower casing has the curb plate, the curb plate is close to upper casing one side and has seted up the draw-in groove, upper casing is close to curb plate one side and has set firmly the fixture block with draw-in groove looks adaptation; the utility model discloses a wax collection box, including heating panel, support frame, heating panel, the equal fixed connection baffle box in the left and right sides of heating panel, both sides all are equipped with the collection wax box of dismantling the connection with the support frame around the heating panel, can not make melting wax flow everywhere all be, can collect the wax after melting and carry out recycle, resources are saved.

Description

Wax platform is glued in special use of semiconductor silicon boat and quartz boat processing

Technical Field

The utility model relates to a glue wax platform technical field, specifically speaking relates to a special wax platform that glues of semiconductor silicon boat and quartz boat processing.

Background

The surfaces of the semiconductor silicon boat and the quartz boat are generally required to be adhered with a layer of wax during production and processing, and the waterproof performance, the high temperature resistance and other performances of the semiconductor silicon boat and the quartz boat can be enhanced after the surfaces of the semiconductor silicon boat and the quartz boat are adhered with the wax; however, the currently used wax-sticking platform does not have a function of collecting the wax after being heated and melted, and the wax melted on the wax-sticking platform is easy to flow everywhere, which not only causes the waste of the wax, but also easily pollutes the wax-sticking platform, so that improvement is needed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a special wax platform that glues of semiconductor silicon boat and quartz boat processing to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a wax sticking platform special for processing a semiconductor silicon boat and a quartz boat comprises a support frame and a heating panel arranged at the top of the support frame, wherein the heating panel comprises an upper shell, a lower shell and a heating pipe; the wax collecting box detachably connected with the supporting frame is arranged on each of the front side and the rear side of the heating panel, the guide chute is fixedly connected to the left side and the right side of the heating panel, and two ends of the guide chute are respectively located above the two wax collecting boxes on the front side and the rear side of the heating panel.

Preferably, the outer side wall of the lower shell is fixedly connected with a guide block, and the guide block is perpendicular to the side plate; the inner side wall of the upper shell is provided with a guide groove, and the guide block is connected with the guide groove in a sliding manner; the clamping block is in clamping fit with the clamping groove.

Preferably, a handle is fixedly connected to one side of the upper shell, which is far away from the side plate.

Preferably, the handle is made of rubber.

Preferably, the equal fixedly connected with threaded rod in both sides around the support frame, the through-hole has been seted up to the one side that collection wax box is close to the support frame, still including connecting the cap, the one end that the support frame was kept away from to the threaded rod passes the through-hole and is connected cap threaded connection.

Preferably, the support frame is fixedly provided with a storage box.

Preferably, the inner wall of the lower shell is fixedly connected with a temperature sensor and further comprises a controller, and the temperature sensor and the heating pipe are electrically connected to the controller.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the wax-sticking platform special for processing the semiconductor silicon boat and the quartz boat has the advantages that the wax collecting box can directly collect wax flowing out of the front side and the rear side of the upper shell through the arrangement of the wax collecting box and the material guide groove; wax flowing out of the left side and the right side of the upper shell flows into the material guide grooves firstly, and then is guided into the wax collecting box through the material guide grooves to be collected; the melted wax can not flow everywhere, and can be collected for recycling, so that resources are saved.

2. This special wax platform that glues of semiconductor silicon boat and quartz boat processing, pulling the casing hard and making the fixture block break away from the draw-in groove, can tear down the casing from lower casing, thereby conveniently maintain or change the heating pipe, improved the practicality of device widely.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is the assembly schematic diagram of the centralized wax box and the supporting frame of the present invention.

Fig. 3 is an enlarged schematic view of a portion a in fig. 2 according to the present invention.

Fig. 4 is an assembly diagram of the upper housing and the lower housing of the present invention.

Fig. 5 is a schematic structural view of the middle and lower housing of the present invention.

Fig. 6 is a schematic structural view of the upper housing of the present invention.

The meaning of each reference number in the figures is: 1. a support frame; 20. an upper housing; 200. a guide groove; 201. a clamping block; 21. a lower housing; 210. a guide block; 22. a side plate; 220. a card slot; 23. heating a tube; 24. a handle; 3. a storage box; 4. a wax collecting box; 40. a through hole; 5. a material guide chute; 6. a distribution box; 70. a threaded rod; 71. and a connecting cap.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

In addition, in the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

The utility model provides a technical scheme:

a special wax-sticking platform for processing a semiconductor silicon boat and a quartz boat refers to fig. 1, fig. 4, fig. 5 and fig. 6, and comprises a support frame 1 and a heating panel arranged at the top of the support frame 1, wherein the heating panel comprises an upper shell 20, a lower shell 21 and a heating pipe 23, the lower shell 21 is fixedly connected to the top of the support frame 1 through bolts, and the upper shell 20 is arranged on the lower shell 21 in a sliding manner; specifically, the outer side wall of the lower shell 21 is fixedly connected with a guide block 210, and the guide block 210 is perpendicular to the side plate 22; a guide groove 200 is formed in the inner side wall of the upper shell 20, and a guide block 210 is slidably connected with the guide groove 200; the upper case 20 is pushed to be slidably moved in the lower case 21.

Referring to fig. 4-6, a side plate 22 is fixedly connected to one side of the lower casing 21, a slot 220 is formed on one side of the side plate 22 close to the upper casing 20, and a latch 201 adapted to the slot 220 is fixedly disposed on one side of the upper casing 20 close to the side plate 22; the clamping block 201 is matched with the clamping groove 220 in a clamping manner; the upper shell 20 is pushed to move towards the side plate 22, so that the clamping block 201 is clamped into the clamping groove 220, and the upper shell 20 and the lower shell 21 can be connected together; when the upper shell 20 needs to be removed, the upper shell 20 is pulled by force to separate the latch 201 from the latch slot 220.

The heating pipe 23 is fixedly arranged in the lower shell 21, when the heating pipe 23 works, the surface temperature of the upper shell 20 can be raised, and when the wax is adhered to a semiconductor silicon boat or a quartz boat, an object to be adhered with the wax is placed on the upper shell 20 to perform the wax adhering work; heating can facilitate wax melting for bonding.

The inner wall of the lower shell 21 is fixedly connected with a temperature sensor and also comprises a controller, and the temperature sensor and the heating pipe 23 are both electrically connected to the controller; the support frame 1 is also fixedly provided with a distribution box 6 through bolts, the controller is arranged in the controller, and a power supply for supplying power is also arranged in the controller; the temperature sensor can detect the heated temperature of the heating pipe 23, the temperature sensor transmits the detected temperature to the controller, and a worker can control the heating temperature of the heating pipe 23 through the controller according to the requirement of the working temperature; the wax-sticking work is convenient to carry out.

It should be noted that, the upper housing 20 can be detached from the lower housing 21 by pulling the upper housing 20 to separate the latch 201 from the latch slot 220, so that the heating tube 23 can be maintained or replaced conveniently, and the practicability of the device is greatly improved.

Referring to fig. 1-2, the front and rear sides of the heating panel are respectively provided with a wax collecting box 4 detachably connected to the supporting frame 1, and the melted wax on the upper casing 20 flows into the wax collecting box 4 from the front and rear sides for collection; the left side and the right side of the heating panel are both fixedly connected with a material guide groove 5, and two ends of the material guide groove 5 are respectively positioned above the two wax collecting boxes 4 on the front side and the rear side of the heating panel; the wax heated and melted on the upper shell 20 flows into the material guide grooves 5 from the left side and the right side, and is guided into the wax collecting box 4 through the material guide grooves 5 to be collected; the melted wax cannot flow everywhere, and the wax collecting box 4 can collect and recycle the melted wax, so that the resources are saved.

Referring to fig. 4, a handle 24 is fixedly connected to a side of the upper casing 20 away from the side plate 22, and the handle 24 is disposed to facilitate pulling the upper casing 20; the handle 24 is made of rubber, the rubber material has good insulating and heat-insulating properties, and when the surface temperature of the upper shell 20 is high, the handle 24 is held and the upper shell 20 is pulled without scalding hands.

Referring to fig. 3, threaded rods 70 are fixedly connected to the front side and the rear side of the support frame 1, a through hole 40 is formed in one side, close to the support frame 1, of the wax collection box 4, and a connection cap 71 is further included, one end, far away from the support frame 1, of the threaded rod 70 penetrates through the through hole 40 to be in threaded connection with the connection cap 71, and is used for fixing the wax collection box 4 on the support frame 1; the connecting cap 71 is screwed off, the wax collecting box 4 can be detached and taken down, and the wax collected in the wax collecting box 4 is convenient to clean.

Referring to fig. 1-2, a storage box 3 is fixedly mounted on the supporting frame 1; the storage box can be used for placing necessary articles, and is convenient for workers to take at any time during work.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a special wax platform that glues of semiconductor silicon boat and quartz boat processing, includes support frame (1) and installs the heating panel at support frame (1) top, its characterized in that: the heating panel comprises an upper shell (20), a lower shell (21) and a heating pipe (23), the lower shell (21) is fixedly connected to the top of the support frame (1), the upper shell (20) is slidably arranged on the lower shell (21), the heating pipe (23) is fixedly installed inside the lower shell (21), one side of the lower shell (21) is fixedly connected with a side plate (22), one side, close to the upper shell (20), of the side plate (22) is provided with a clamping groove (220), and one side, close to the side plate (22), of the upper shell (20) is fixedly provided with a clamping block (201) matched with the clamping groove (220); the wax collecting box is characterized in that wax collecting boxes (4) detachably connected with the support frame (1) are arranged on the front side and the rear side of the heating panel, guide chutes (5) are fixedly connected to the left side and the right side of the heating panel, and two ends of each guide chute (5) are located above the two wax collecting boxes (4) on the front side and the rear side of the heating panel respectively.

2. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 1, wherein: the outer side wall of the lower shell (21) is fixedly connected with a guide block (210), and the guide block (210) is perpendicular to the side plate (22); a guide groove (200) is formed in the inner side wall of the upper shell (20), and the guide block (210) is connected with the guide groove (200) in a sliding mode; the clamping block (201) is in clamping fit with the clamping groove (220).

3. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 1, wherein: and a handle (24) is fixedly connected to one side of the upper shell (20) far away from the side plate (22).

4. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 3, wherein: the handle (24) is made of rubber.

5. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 1, wherein: the utility model discloses a wax collection box, including support frame (1), the equal fixedly connected with threaded rod (70) in both sides around support frame (1), through-hole (40) have been seted up to collection wax box (4) one side that is close to support frame (1), still including connecting cap (71), the one end that support frame (1) was kept away from in threaded rod (70) passes through-hole (40) and is connected cap (71) threaded connection.

6. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 1, wherein: the support frame (1) is fixedly provided with a storage box (3).

7. The special wax-bonding platform for processing the semiconductor silicon boat and the quartz boat as claimed in claim 1, wherein: fixedly connected with temperature sensor on the inner wall of lower casing (21), still include the controller, temperature sensor and the equal electric connection of heating pipe (23) are to the controller.