CN217279095U - Microscope - Google Patents

Abstract

A microscope includes a frame; the lens module is arranged on the lens bracket; the light source module is arranged on the mirror bracket and used for emitting illumination light beams to the lens module; the imaging module is used for imaging the light rays from the lens module; and the optical path refraction component receives the imaging light beam from the lens module and guides the imaging light beam to the imaging module, and the imaging light beam is guided by the optical path refraction component to generate at least one deflection. The space occupied by the light path in the incident direction is effectively reduced, and therefore the overall space utilization rate of the microscope is improved.

Description

Microscope

Technical Field

The application relates to the technical field of optical equipment, in particular to a microscope.

Background

With the rapid development of the information industry, the processing and inspection fields of semiconductor wafers have been greatly developed. In the detection process of the wafer, the probe disc is required to perform a probe pointing operation on the PAD on the wafer so as to realize accurate conduction between the probe and the PAD on the wafer, thereby testing the performance of the wafer. In the detection process, the positions of the probe and the PAD are usually required to be aligned with high precision, so as to prepare for the point contact of the probe and the PAD.

In the existing wafer detection field, because the number of probes on a probe disc is large and the size of the probes is small, a microscope is usually adopted to detect the positions of the probes and the appearance shapes of the probes so as to ensure that the overall structure of the probes is complete and the probes can be accurately conducted with PAD point needles. However, because the probe is small in size, it needs to be observed and imaged by a microscope, and the imaging light beam is reflected by the probe to the microscope lens and then emitted to the imaging surface through the imaging lens. However, the focal length between the imaging lens and the imaging plane inside the microscope is usually long, which results in a large space from the microscope lens to the imaging plane of the camera, and the overall space utilization rate is not high.

Therefore, the existing microscope for detecting the position of the probe usually has the problems of large volume and low utilization rate of the whole structure space.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem of low space utilization rate of the whole structure of the microscope in the prior art,

the microscope provided by the application adopts the following scheme:

a microscope comprising a frame; the lens module is arranged on the mirror bracket; the light source module is arranged on the lens bracket and is used for emitting illumination light beams to the lens module; the imaging module is used for imaging the light rays from the lens module; and the optical path refraction component receives the imaging light beam from the lens module and guides the imaging light beam to the imaging module, and the imaging light beam is guided by the optical path refraction component to generate at least one deflection.

Through adopting above-mentioned scheme, the illuminating beam that the light source subassembly sent shines on the probe that is located the camera lens module top, and the probe sends the illuminating beam for the image development light beam, and the image development light beam can be along inside the camera lens optical axis direction directive microscope to via the formation of image module with this image development light beam formation of image. Among the traditional technical scheme, because the camera lens that the video picture light beam set up by vertical direction is certain to this imaging module's focus, the light path stroke of video picture light beam is certain promptly, leads to the shared microscope inner space of this vertical direction's video picture light beam stroke great, leads to microscope overall structure low-usage. In this application technical scheme, after this video picture light beam takes place the deflection at least once for this video picture light beam's light path is buckled and is gone forward, and the inside vertical direction space of the shared microscope of light path that this phenomenon light beam formed has obtained showing and has reduced, has promoted this microscope whole space utilization.

Optionally, the lens module includes a high power lens and a low power lens, the axes of the high power lens and the axis of the low power lens are both arranged along a vertical direction, and the high power lens and the low power lens are arranged in parallel in a horizontal direction.

By adopting the scheme, the microscope is provided with the low-power lens and the high-power lens, the low-power lens of the microscope has a large visual field and a large depth of field, the overall positions and the layout of all probes in a certain area can be initially measured, and the efficiency is high; the high-power lens has small visual field and small depth of field, can accurately position the needle point of the probe, is adaptive to the extremely fine size of the needle point, and effectively ensures the test precision of the probe.

Optionally, the optical path refraction assembly comprises a low-power refraction assembly and a high-power refraction assembly, the low-power refraction assembly is used for guiding the imaging beam from the low-power lens to form a low-power imaging optical path, and the high-power refraction assembly is used for guiding the imaging beam from the high-power lens to form a high-power imaging optical path; the light beam emergent direction of the high-power imaging light path is perpendicular to the light beam incident direction of the high-power imaging light path, and the light beam emergent direction of the low-power imaging light path is perpendicular to the light beam incident direction of the low-power imaging light path.

Through adopting above-mentioned scheme, high power refraction subassembly and low power refraction subassembly homoenergetic are refracted respective light path for the incident direction and the emergent direction of light are perpendicular, thereby further reduce the space that low power formation of image light path and high power formation of image light path occupy in the inside vertical direction of microscope, help further promoting space compactness.

Optionally, high power refraction subassembly includes along the preceding right speculum of high power formation of image light path setting gradually, preceding left speculum, well right speculum and back right speculum, preceding left speculum with preceding right speculum sets up side by side in the horizontal direction, well left speculum with well right speculum sets up side by side in the horizontal direction.

By adopting the scheme, the front left reflector and the reflector are arranged in parallel in the horizontal direction, and the middle left reflector and the middle right reflector are arranged in parallel in the horizontal direction, so that the light path refracts repeatedly in the horizontal direction, the space of the light rays in the horizontal direction is utilized, and the integral compactness is further improved.

Optionally, the front left reflector coincides with the projection of the middle left reflector in the vertical direction, and the front right reflector coincides with the projection of the middle right reflector and the projection of the rear right reflector in the vertical direction.

By adopting the scheme, the front left reflector and the middle left reflector are overlapped in projection in the vertical direction, and the front right reflector, the middle right reflector and the rear right reflector are overlapped in projection in the vertical direction. For convenience of understanding, the distance between the front left reflector and the front right reflector is defined as a horizontal optical path distance; when making high power formation of image light path refract between this high power refraction subassembly, horizontal light path distance coincides in this vertical direction to the installation cavity space that this high power formation of image light path occupied on the level is comparatively compact, has further promoted this microscope inner structure's compactedness.

Optionally, an annular dark field light source is arranged on the low power lens, and the annular dark field light source surrounds the low power lens and is used for emitting multi-angle light beams to the probe.

By adopting the scheme, the annular dark field light source is arranged by matching with the low-power lens, and the observation effect is poor because the field of view of the low-power lens is large but the field depth is not high, and the probe is of a three-dimensional structure. According to the technical scheme, the multi-angle light beam is emitted to the probe through the annular dark field light source, so that the observation effect of the low-power lens is effectively improved.

Optionally, the imaging module includes a low power imaging camera and a high power imaging camera, and the low power imaging camera and the high power imaging camera are arranged in a staggered manner in the vertical direction.

By adopting the scheme, in the traditional scheme, the high-power imaging camera and the low-power imaging camera are usually arranged in parallel due to the parallel arrangement of the high-power lens and the low-power lens, so that the occupied space in the width direction is large, and the space utilization rate is not high; according to the technical scheme, the high-power imaging camera and the low-power imaging camera are arranged in a staggered mode in the vertical direction, so that the occupied width direction space is further saved, and the compactness of the whole structure is improved.

Optionally, the light source assembly includes a low-power coaxial light source, a low-power beam splitter, a high-power coaxial light source, and a high-power beam splitter, where the low-power beam splitter reflects the illumination light beam from the low-power coaxial light source to the low-power lens, and the high-power beam splitter reflects the illumination light beam from the high-power coaxial light source to the high-power lens.

By adopting the scheme, the intensity of the illumination light beam emitted to the probe is reduced after the illumination light beam is refracted by the light splitting coupling mirror; if a single coaxial light source is adopted, the intensity of the illumination light beam cannot achieve a better irradiation effect after the coaxial light source is subjected to multiple losses of the low-power light splitting lens and the high-power light splitting lens. In the technical scheme, each coaxial light source corresponds to one lens by being provided with two coaxial light sources, so that the effect of light source irradiation is ensured.

To sum up, the present application includes at least the following beneficial technical effects:

1. the space utilization is high: among the traditional technical scheme, because the camera lens that the video picture light beam set up by vertical direction is certain to this imaging module's focus, the light path stroke of video picture light beam is certain promptly, leads to the shared microscope inner space of this vertical direction's video picture light beam stroke great, leads to microscope overall structure low-usage. In the technical scheme of the application, after the imaging light beam is deflected for at least one time, the light path of the imaging light beam is bent and moved forward, the space in the vertical direction inside the microscope occupied by the light path formed by the light beam is obviously reduced, and the integral space utilization rate of the microscope is improved;

2. efficiency and precision are better: the microscope is provided with the low-power lens and the high-power lens, the low-power lens of the microscope has a large visual field and small depth of field, the overall positions and the layout of all probes in a certain area can be initially measured, and the efficiency is high; the high-power lens has a small visual field and a large depth of field, can accurately position the needle point of the probe, is suitable for the extremely fine size of the needle point, and effectively ensures the test precision of the probe;

3. the front left reflector and the middle left reflector are overlapped in projection in the vertical direction, and the front right reflector, the middle right reflector and the rear right reflector are overlapped in projection in the vertical direction. For convenience of understanding, the distance between the front left reflector and the front right reflector is defined as a horizontal optical path distance; when making high power formation of image light path refract between this high power refraction subassembly, horizontal light path distance coincides in this vertical direction to the installation cavity space that this high power formation of image light path occupied on the level is comparatively compact, has further promoted this microscope inner structure's compactedness.

Drawings

FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present application;

fig. 2 is a schematic view of an overall structure of the mirror holder cover plate according to the embodiment of the present invention;

description of reference numerals:

1. a frame; 11. a box body; 12. a cover plate; 13. a mounting surface; 14. installing a chamber; 15. high power fixed focal cylinder lens; 16. low power fixed focal cylinder lens; 17. a mounting seat; 171. a base; 172. an installation table; 1721. a mounting wall; 1722. an LED point light source; 18. reducing the material space;

2. a lens module; 21. a high power lens; 22. a low power lens;

3. a light source module; 31. a high power coaxial light source; 32. a high power beam splitting lens; 33. a low power coaxial light source; 34. a low power beam splitting lens;

4. an imaging module; 41. a high power imaging camera; 42. a low power imaging camera;

5. an optical path refracting component; 51. a high power refractive element; 511. a front right reflector; 512. a front left reflector; 513. a middle left reflector; 514. a middle right reflector; 515. a rear right reflector; 516. a front mounting frame; 517. a middle mounting rack; 518. a rear mounting frame; 52. a low power refractive element; 521. a low power mirror.

Detailed Description

The present application will be described in further detail below with reference to the accompanying drawings.

The embodiment of the application discloses a microscope.

Referring to fig. 1 and 2, a microscope includes: the probe comprises a lens frame 1, a lens module 2, a light source module 3, an imaging module 4 and a light path refraction component 5, wherein the light source module 3 emits an illumination light beam to the lens module 2, and the illumination light beam penetrates through the lens module 2 and illuminates a probe to be detected so as to facilitate observation; imaging beam that the probe reflected back to lens module 2 jets into imaging module 4 through the guide of light path refraction subassembly 5, and imaging beam takes place at least once the deflection under the guide of light path refraction subassembly 5 to thereby practice thrift imaging beam in the shared space of vertical direction through the deflection of light path.

Referring to fig. 1, in the following description, for ease of understanding, there are defined a longitudinal direction L, a lateral direction W, and a height direction H, which is a direction perpendicular to the longitudinal direction L and the lateral direction W; the height direction H is divided into a positive direction H1 and a negative direction H2. The frame 1 is a substantially tetragonal housing structure, the frame 1 includes a case 11 and a cover 12, the case 11 further includes a mounting surface 13, and the mounting surface 13 extends along a height direction H and a longitudinal direction L. The box body 11 is provided with a box body 11 opening at one side of the transverse direction L of the mounting surface 13, the cover plate 12 is detachably covered on the box body 11 opening through a plurality of screws, and a mounting cavity 14 is formed between the cover plate 12 and the mounting surface 13 inside the box body 11.

Referring to fig. 1, a lens module 2 is mounted on an end surface of the box body 11 in the height direction H positive direction H1, the lens module 2 includes a high power lens 21 and a low power lens 22, and the high power lens 21 and the low power lens 22 are arranged in parallel in the longitudinal direction L; in the embodiment of the present application, the optical axes of the high power lens 21 and the low power lens 22 are both arranged along the height direction H, and in the actual working condition, the height direction H is a vertical direction, so as to observe the probe above the lens module 2 in the vertical direction; meanwhile, the longitudinal direction L in the embodiment of the present application is a horizontal direction, so that the high power lens 21 and the low power lens 22 are arranged in parallel in the horizontal direction. The high-power lens 21 and the low-power lens 22 are arranged in parallel, the low-power lens 22 is aligned to the overall layout position of the probe for initial measurement, and the high-power lens 21 is aligned to the probe for fine measurement of the appearance and the height of the probe tip.

Referring to fig. 1, the macro lens 21 and the macro lens 22 each have an outer end facing the probe to be tested and an inner end facing the mounting chamber 14 inside the case 11 along the height direction H. The case 11 has a first screw hole and a second screw hole formed therethrough on an end surface thereof in the height direction H positive direction H1, the first screw hole being configured to be screwed into an inner end of the high power lens 21, and the second screw hole being configured to be screwed into an inner end of the low power lens 22.

The optical path refracting component 5 includes a high power refracting component 51 for guiding the imaging beam incident from the high power lens 21, the light source module 3 includes a high power coaxial light source 31 for emitting the illumination beam to the inner end of the high power lens 21 and a high power beam splitting lens 32, the high power beam splitting lens 32 is located below the high power lens 21, and a 45-degree included angle is formed between the high power beam splitting lens 32 and the height direction H. The high power coaxial light source 31 and the high power lens 21 are located on the same side of the high power beam splitting lens 32, and the high power coaxial light source 31 is configured to emit an illumination light beam toward the high power beam splitting lens 32; the high power splitting mirror 32 reflects the illumination light beam emitted from the high power coaxial light source 31 so that the illumination light beam is directed toward the probe through the high power lens 21 in the height direction H positive direction H1. In the embodiment of the present application, the high power splitting lens 32 is installed on the high power splitting frame, the high power splitting frame is fixedly installed on the installation surface 13 of the installation box, and the high power coaxial light source 31 is located on one side of the high power splitting lens 32 in the longitudinal direction L. It should be noted that the illumination beam is reflected by the probe under test to form a display beam, which can be received and imaged by the imaging module 4.

A high power fixed focal cylinder lens 15 is also fixedly arranged on the mounting surface 13 of the mounting box, and the high power fixed focal cylinder lens 15 is positioned on one side of the high power beam splitting lens 32 in the H negative direction H2 in the height direction H; so that the image beam passes through the high power lens 21 along the optical axis of the high power lens 21 by the probe, passes through the beam splitter and is received by the high power fixed focal length lens 15.

Imaging module 4 includes high power formation of image camera 41, and light path refraction subassembly 5 includes high power refraction subassembly 51, and this high power refraction subassembly 51 guides the image beam and forms high power formation of image light path, and the light beam incident direction of this high power formation of image light path is towards high power fixed focus lens, and light beam emergent direction is towards high power formation of image camera 41. Specifically, the high power refraction component 51 sequentially comprises a front right reflector 511, a front left reflector 512, a middle left reflector 513, a middle right reflector 514 and a rear right reflector 515 along a high power imaging optical path, a front mounting frame 516 is fixedly mounted on the mounting surface 13 of the mounting box, and the front left reflector 512 and the front right reflector 511 are mounted on the front mounting frame 516 in parallel in the longitudinal direction L; a middle mounting rack 517 is fixedly mounted on the mounting surface 13 of the mounting box, the middle mounting rack 517 is positioned on one side of the positive direction H1 of the height direction H of the front mounting rack 516, and the middle left reflector 513 and the middle right reflector 514 are mounted on the middle mounting rack 517 in parallel in the longitudinal direction L; a rear mount 518 is fixedly attached to the mounting surface 13 of the mounting box, and a rear right mirror 515 is attached to the rear right mount and positioned on one side of the center right mirror 514 in the direction H2 minus the height direction H. In this embodiment, front right reflector 511, front left reflector 512, middle left reflector 513, middle right reflector 514 and back right reflector 515 are planar reflectors which are plate-shaped structures, and the high-power light path channel avoiding the high-power imaging light path is formed inside the front mounting frame 516, the middle mounting frame 517 and the back mounting frame 518.

The front right reflector 511 is arranged in parallel with the high power beam splitting lens 32 to receive the imaging beam from the high power fixed focal cylinder lens 15 and reflect the imaging beam to the front left reflector 512 to guide the high power imaging optical path to form a first deflection; the middle left reflector 513 is arranged perpendicular to the front left reflector 512, and the imaging light beam is deflected to the middle left reflector 513 by the front left reflector 512 and then deflected to the middle right reflector 514 again to guide the high-power imaging light path to form a second deflection and a third deflection; the rear right reflector 515 is arranged perpendicular to the middle right reflector 514, and the imaging light beam is deflected to the rear right reflector 515 by the middle right reflector 514 and then deflected again to the light incident end of the high power imaging camera 41, so as to guide the high power imaging light path to form a fourth deflection and a fifth deflection. The longitudinal direction L defines a positive direction L1 and a negative direction L2, the incident direction of the image beam on the front right reflector 511 along the height direction H2 is the incident direction of the high power imaging optical path, and the incident end of the image beam on the high power imaging camera 41 along the longitudinal direction L positive direction L1 is the emergent direction of the high power imaging optical path, so that the beam emergent direction of the high power imaging optical path is perpendicular to the beam incident direction. In the embodiment of the present application, the imaging light beam is guided by the high power light path refraction component 5 to form five times of deflection and then enter the high power imaging camera 41, which is beneficial to reducing the space of the installation cavity 14 occupied by the high power light path in the height direction H, and improving the compactness of the whole structure.

In the embodiment of the present application, the projections of the front left reflector 512 and the middle left reflector 513 in the vertical direction, that is, in the height direction H coincide, and the projections of the front right reflector 511, the middle right reflector 514, and the rear right reflector 515 in the vertical direction, that is, in the height direction H coincide, so that the space of the installation chamber 14 occupied by the high power optical path refraction component 5 in the longitudinal direction L is relatively compact.

The light path refracting component 5 includes a low power refracting component 52 for guiding the imaging light beam incident from the low power lens 22, the light source module 3 includes a low power coaxial light source 33 and a low power beam splitter lens 34 for emitting the illumination light beam to the inner end of the low power lens 22, the low power beam splitter lens 34 is positioned below the low power lens 22, and a 45-degree included angle is formed between the low power beam splitter lens 34 and the height direction H, the low power beam splitter lens 34 and the high power beam splitter lens 32 are arranged in parallel, and the low power beam splitter lens 34 is positioned on one side of the high power coaxial light source 31 in the longitudinal direction L positive direction L1. The low power coaxial light source 33 is located on the side of the low power beam splitter 34 in the positive direction L1 of the longitudinal direction L, and the low power coaxial light source 33 and the low power lens 22 are located on the same side of the low power beam splitter 34, the low power coaxial light source 33 is configured to emit an illumination light beam toward the low power beam splitter 34, and the low power beam splitter 34 reflects the illumination light beam emitted by the low power coaxial light source 33 so that the illumination light beam passes through the low power lens 22 in the positive direction H1 of the height direction H toward the probe. A low power fixed focal cylinder lens 16 is also fixedly arranged on the mounting surface 13 of the mounting box, and the low power fixed focal cylinder lens 16 is positioned on one side of the low power beam splitting lens 34 in the H negative direction H2 in the height direction; so that the image beam passes through the low power lens 22 along the optical axis of the low power lens 22 by the probe, passes through the beam splitter and is received by the low power focusing lens 16. The mounting structure of the low power splitting lens 34 is similar to that of the high power splitting lens 32, and the mounting structure of the low power fixed focal length telescope 16 is similar to that of the high power fixed focal length telescope 15, which will not be described herein.

The imaging module 4 includes the low power imaging camera 42, and the optical path refraction component 5 includes the low power refraction component 52, and this low power refraction component 52 guides the image-forming light beam to form the low power imaging light path, and the light beam incident direction of this low power imaging light path is towards the low power fixed focus lens, and the light beam emergent direction is towards the low power imaging camera 42. This low power refraction subassembly 52 includes low power speculum 521, this low power speculum 521 and low power beam splitting lens 34 parallel arrangement to make low power speculum 521 be 45 degrees contained angles with direction of height H, low power speculum 521 passes through low power mounting bracket fixed mounting on the installation face 13 of mounting box, and this low power mounting bracket is inside to be offered and dodge the low power light path passageway in low power formation of image light path. The low power imaging light path enters the low power reflecting mirror 521 through the low power fixed focal length mirror 16 to generate a first deflection, and then enters the light entrance end of the low power imaging camera 42. The low power imaging camera 42 is located on one side of the low power reflector 521 in the positive direction L1 of the longitudinal direction L, the imaging light beam enters the low power reflector 521 along the negative direction H2 as the incident direction of the low power imaging light path, and the light entering end of the imaging light beam entering the low power imaging camera 42 along the positive direction L1 of the longitudinal direction L is the emergent direction of the low power imaging light path, so that the light beam emergent direction of the low power imaging light path is perpendicular to the light beam incident direction. It should be noted that in the embodiment of the present application, the low power imaging camera 42 and the high power imaging camera 41 are disposed in a staggered manner in the vertical direction, i.e., the height direction H, so as to further ensure the structural compactness inside the installation chamber 14. The box body 11 is provided with a material reducing space 18 at one side of the positive direction L1 of the longitudinal direction L of the low-power coaxial light source 33, and the material reducing space 18 is constructed to enable the side of the box body 11 at the low-power coaxial light source 33 to be in an L-shaped structure, so that the structure compactness inside the mounting chamber 14 is further improved.

The mounting box is fixedly provided with a mounting seat 17 on the end surface of the height direction H positive direction H1, the mounting seat 17 comprises a base 171 and a mounting platform 172, the base 171 is fixedly mounted on the mounting box through bolts, and the mounting platform 172 surrounds the outer end of the low power lens 22. A plurality of LED point light sources 1722 are arranged on the mounting stage 172 in a surrounding manner, so that the annular dark field light source is arranged around the macro lens 22; the plurality of point light sources emit surrounding multi-angle illuminating light beams to the probe, the LED point light sources 1722 are obliquely arranged with the height direction H, the plurality of LED point light sources 1722 face to the same light condensation point, and the light condensation potential is located on the optical axis of the low-power imaging lens. The mounting base 172 is provided with a mounting wall 1721 for mounting the LED point light source 1722, the mounting wall 1721 is gradually narrowed along the negative direction H2 of the height direction H, the mounting wall 1721 is configured to be a slope for mounting the LED point light source 1722 in a fitting mode, and a lamp holder of the LED point light source 1722 penetrates through the mounting wall 1721 and faces a light condensation point.

The implementation principle of the microscope in the embodiment of the application is as follows: the low-power lens 22 and the high-power lens 21 are arranged, the low-power imaging light path is guided by the low-power refraction component 52 and deflected to generate primary deflection, and the high-power imaging light path is guided by the high-power deflection component to generate quintic deflection, so that the mounting space inside the microscope mounting box is fully utilized, and the compactness and the space utilization rate of the whole structure are ensured. Moreover, the low-power lens 22 and the high-power lens 21 can be respectively aligned with the probes to respectively carry out initial measurement and accurate measurement on the probes, so that the test efficiency is ensured, and meanwhile, the test precision of the probes is effectively ensured.

The embodiments of the present invention are preferred embodiments of the present application, and the protection scope of the present application is not limited thereby, wherein like parts are denoted by like reference numerals. Therefore, the method comprises the following steps: equivalent changes in structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. A microscope, comprising:

a frame (1);

the lens module (2) is arranged on the mirror bracket (1);

the light source module (3) is arranged on the mirror bracket (1) and is used for emitting illumination light beams to the lens module (2);

the imaging module (4) is used for imaging the light rays from the lens module (2);

and the optical path refraction component (5) receives the imaging light beam from the lens module (2) and guides the imaging light beam to the imaging module (4), and the imaging light beam is guided by the optical path refraction component (5) to generate at least one deflection.

2. A microscope according to claim 1, characterized in that the lens module (2) comprises a high power lens (21) and a low power lens (22), the axes of the high power lens (21) and the low power lens (22) are arranged along the vertical direction, and the high power lens (21) and the low power lens (22) are arranged in parallel in the horizontal direction.

3. A microscope according to claim 2 wherein the optical path refracting assembly (5) comprises a low power refracting assembly (52) and a high power refracting assembly (51), the low power refracting assembly (52) being configured to direct the imaging beam from the low power lens (22) into a low power imaging optical path and the high power refracting assembly (51) being configured to direct the imaging beam from the high power lens (21) into a high power imaging optical path; the light beam emergent direction of the high-power imaging light path is perpendicular to the light beam incident direction, and the light beam emergent direction of the low-power imaging light path is perpendicular to the light beam incident direction.

4. A microscope as claimed in claim 3 characterised in that the high power refraction assembly (51) comprises a front right mirror (511), a front left mirror (512), a middle left mirror (513), a middle right mirror (514) and a rear right mirror (515) arranged in sequence along the high power imaging optical path, the front left mirror (512) and the front right mirror (511) are horizontally juxtaposed, and the middle left mirror (513) and the middle right mirror (514) are horizontally juxtaposed.

5. A microscope as claimed in claim 4, characterised in that the front left mirror (512) coincides with the projection of the middle left mirror (513) in the vertical direction and the front right mirror (511) coincides with the projection of the middle right mirror (514) and the rear right mirror (515) in the vertical direction.

6. A microscope according to claim 2 wherein the macro lens (22) is provided with an annular dark field light source arranged around the macro lens (22) for emitting a multi-angle beam of light to the probe.

7. A microscope according to claim 1, characterized in that the imaging module (4) comprises a low power imaging camera (42) and a high power imaging camera (41), the low power imaging camera (42) and the high power imaging camera (41) being vertically displaced.

8. A microscope according to claim 2, wherein the light source module (3) comprises a low power coaxial light source (33), a low power splitting lens (34), a high power coaxial light source (31) and a high power splitting lens (32), the low power splitting lens (34) reflects the illumination light beam from the low power coaxial light source (33) to the low power lens (22), and the high power splitting lens (32) reflects the illumination light beam from the high power coaxial light source (31) to the high power lens (21).

Images