CN217246862U

CN217246862U - Liquid waste treatment device for nitrogen trifluoride preparation

Info

Publication number: CN217246862U
Application number: CN202220262888.6U
Authority: CN
Inventors: 邱世杰; 纪振红; 武建鹏; 耿思瑶; 王蒙蒙; 郑阳光; 武鑫腾; 王赏照
Original assignee: Peric Special Gases Co Ltd
Current assignee: Peric Special Gases Co Ltd
Priority date: 2022-02-09
Filing date: 2022-02-09
Publication date: 2022-08-23
Anticipated expiration: 2032-02-09

Abstract

The utility model provides a nitrogen trifluoride preparation is with liquid waste material processing apparatus, retrieve the jar including HF, HF retrieves and is provided with the waste liquid import on the jar, the waste liquid import respectively with the waste liquid export intercommunication of cooler and cold trap, HF retrieves the top of jar and is provided with first nitrogen gas intercommunication mouth, HF retrieves the side of jar and is close to top department and is provided with second nitrogen gas intercommunication mouth, HF retrieves the top opposite side of jar and is provided with the evacuation mouth, HF retrieves the side of jar and is close to bottom department and has seted up nitrogen gas drain, HF retrieves the bottom of jar and is provided with HF and retrieves the mouth. The utility model discloses an in entering into HF recovery jar with the HF waste liquid of collecting in cooler and the cold trap, under the condition of cooler, cold trap intermittent type blowdown, utilize HF to retrieve the jar and with the whole receipts of liquid phase HF among cooler, the cold trap blowdown process and retrieve, realize simultaneously that HF up to standard in cooler, the cold trap blowdown tail gas discharges, both guarantee that tail gas is up to standard to discharge, accord with the environmental protection requirement, can reduce certain cost again, economical and practical.

Description

Liquid waste treatment device for nitrogen trifluoride preparation

Technical Field

The utility model belongs to the technical field of nitrogen trifluoride production waste liquid treatment device, concretely relates to liquid waste material processing apparatus is used in nitrogen trifluoride preparation.

Background

The nitrogen trifluoride electrolytic gas is an excellent plasma etching gas in the microelectronic industry, and has higher etching rate and selectivity for etching silicon and silicon nitride by adopting the mixed gas of nitrogen trifluoride, tetrafluoromethane and oxygen, and has no pollution to the surface. The reaction of hydrogen with nitrogen trifluoride is accompanied by a large instantaneous evolution of heat, which is the principle of the great use of nitrogen trifluoride in high-energy chemical lasers. At high temperatures, the reaction of nitrogen trifluoride with organic compounds is often explosive and must be handled with great care. It can also be used as a high energy fuel.

The nitrogen trifluoride electrolytic gas contains about 10% of HF, and according to the prior art, the part of HF mainly enters a comprehensive three-waste pollution discharge tower for neutralization treatment through a cooler and a cold trap pollution discharge pipeline of a NF3 electrolytic gas pre-purification section, so that the HF cannot be effectively recovered, and a large amount of resource waste is easily caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that to the not enough of above-mentioned prior art, provide a nitrogen trifluoride preparation is with liquid waste material processing apparatus to solve the problem that proposes in the above-mentioned background art.

In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides a nitrogen trifluoride preparation is with liquid waste treatment device, retrieves the jar including HF, HF retrieves and is provided with the waste liquid import on the jar, the waste liquid import communicates with the waste liquid export of cooler and cold trap respectively, HF retrieves the top of jar and is provided with first nitrogen gas intercommunication mouth, HF retrieves the side of jar and is close to top department and is provided with second nitrogen gas intercommunication mouth, HF retrieves the top opposite side of jar and is provided with the evacuation mouth, HF retrieves the side of jar and is close to bottom department and has seted up nitrogen gas drain, HF retrieves the bottom of jar and is provided with HF and retrieves the mouth.

Furthermore, a first waste discharge port is arranged at the position, close to the top end, of the HF recovery tank, and a communicating pipe communicated with the waste liquid inlet is further arranged on the first waste discharge port.

Further, the bottom end of the HF recovery tank is provided with a second waste discharge port.

Furthermore, a pressure sensor and a temperature sensor are arranged at the side end of the HF recovery tank close to the top end, and a water level sensor is also arranged at the side end of the HF recovery tank close to the bottom.

Furthermore, the first nitrogen communicating port is connected with a nitrogen purging mechanism, and the second nitrogen communicating port is communicated with a cold nitrogen tank.

Compared with the prior art, the utility model has the following advantage:

the utility model discloses a in getting into HF recovery tank with the HF waste liquid that collects in cooler and the cold trap, can send nitrogen gas and pressurization processing to HF recovery tank through first nitrogen gas intercommunication mouth and second nitrogen gas intercommunication mouth, utilize the evacuation mouth to carry out vacuum pumping treatment, the side of HF recovery tank 1 is close to bottom department and is seted up nitrogen gas drain, utilize nitrogen gas drain to carry out the nitrogen gas processing, in using, the HF waste liquid that collects in cooler and the cold trap gets into HF recovery tank, collect most HF liquid to the equipment in, through water level sensor monitoring HF collection volume in the HF recovery tank, when reaching appointed liquid level, can carry out cold nitrogen gas pressurization through second nitrogen gas intercommunication mouth, and open HF recovery mouth's valve, the below HF is retrieved, and recycles to the electrolysis trough, the cooler, gaseous phase blowdown component in cold trap and the HF recovery tank, accessible first waste discharge port gets into comprehensive three wastes discharge tower and handles, liquid phase blowdown component in the HF recovery tank, accessible second exhaust outlet gets into to synthesize among the three wastes blowdown tower and handles, under the condition of cooler, cold-trap intermittent type blowdown, utilizes HF recovery tank to collect the whole recoveries of cooler, the liquid phase HF among the cold-trap blowdown process, realizes simultaneously that HF in cooler, the cold-trap blowdown tail gas is up to standard to discharge, has both guaranteed that tail gas is up to standard to discharge, accords with the environmental protection requirement, can reduce certain cost again, economical and practical.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

description of reference numerals:

1-HF recovery tank; 2-a cooler; 3-cold trap; 4-a first nitrogen communication port; 5-a second nitrogen communicating port; 6-water level sensor; 7-a first reject outlet; 8-a vacuum-pumping port; 9-a communicating tube; 10-a pressure sensor; 11-a temperature sensor; 12-nitrogen vent; 13-a second reject outlet; 14-HF recovery port.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

As shown in fig. 1, the utility model provides a technical solution: the utility model provides a nitrogen trifluoride preparation is with liquid waste material processing apparatus, includes that HF retrieves jar 1, HF retrieves and is provided with the waste liquid import on jar 1, the waste liquid import communicates with the waste liquid export of cooler 2 and cold trap 3 respectively, and the HF waste liquid that collects in with cooler 2 and cold trap 3 enters into HF and retrieves jar 1.

The top of HF recovery tank 1 is provided with first nitrogen gas intercommunication mouth 4, the side of HF recovery tank 1 is close to top department and is provided with second nitrogen gas intercommunication mouth 5, all is provided with the control valve on first nitrogen gas intercommunication mouth 4 and the second nitrogen gas intercommunication mouth 5, first nitrogen gas intercommunication mouth 4 is connected with nitrogen gas purging mechanism, second nitrogen gas intercommunication mouth 5 intercommunication has cold nitrogen gas jar, can send nitrogen gas and pressure boost to HF recovery tank 1 through first nitrogen gas intercommunication mouth 4 and second nitrogen gas intercommunication mouth 5 and handle.

The other side of the top end of the HF recovery tank 1 is provided with a vacuum pumping port 8,

the vacuum port 8 is used for vacuum treatment.

And a nitrogen vent 12 is formed at the position, close to the bottom, of the side end of the HF recovery tank 1, and nitrogen discharge treatment is performed by using the nitrogen vent 12.

The bottom end of the HF recovery tank 1 is provided with an HF recovery port 14 for recovering HF.

The system is characterized in that a first waste discharge port 7 is formed in the position, close to the top end, of the HF recovery tank 1, a communicating pipe 9 communicated with a waste liquid inlet is further arranged on the first waste discharge port 7, a second waste discharge port 13 is formed in the bottom end of the HF recovery tank 1, gas-phase pollution discharge components in the HF recovery tank 1 can enter the comprehensive three-waste pollution discharge tower through the first waste discharge port 7 to be treated, and liquid-phase pollution discharge components in the HF recovery tank 1 can enter the comprehensive three-waste pollution discharge tower through the second waste discharge port 13 to be treated.

And a pressure sensor 10 and a temperature sensor 11 are arranged at the side end of the HF recovery tank 1 close to the top end and are used for respectively detecting the pressure and temperature information in the HF recovery tank 1.

And a water level sensor 6 is also arranged at the position, close to the bottom, of the side end of the HF recovery tank 1 and used for detecting liquid level information in the HF recovery tank 1.

During the use, the HF waste liquid that collects in cooler 2 and the cold trap 3 enters into HF and retrieves jar 1, collects most HF liquid to equipment in, retrieves jar 1 interior HF collection volume through water level inductor 6 monitoring HF, when reaching appointed liquid level, accessible second nitrogen gas intercommunication mouth 5 carries out cold nitrogen pressure boost to open the valve of HF retrieval mouth, the HF of below is retrieved, and retrieval and utilization to the electrolysis trough.

The gas phase sewage components in the cooler 2, the cold trap 3 and the HF recovery tank 1 can enter the comprehensive three-waste sewage tower through the first waste discharge port 7 for treatment, and the liquid phase sewage components in the HF recovery tank 1 can enter the comprehensive three-waste sewage tower through the second waste discharge port 13 for treatment.

In the use, the temperature is the normal atmospheric temperature in the HF recovery jar 1, and the pressure is the ordinary pressure under the normal collection state, and HF waste liquid extrusion stage: 0 to 0.15 MPa;

liquid level: and (3) normally collecting HF waste liquid: 0 ~ 2500mm, the extrusion of HF waste liquid is reminded: 2500-3000 mm.

Under the condition of intermittent blowdown of the cooler 2 and the cold trap 3, the HF recovery tank is utilized to collect and recover all liquid-phase HF in the blowdown process of the cooler 2 and the cold trap 3, and meanwhile, the standard emission of HF in the blowdown tail gas of the cooler 2 and the cold trap 3 is realized. The material balance of the electrolytic gas in the pretreatment working section is calculated according to 8000 tons of NF3 produced per year, about 375 tons of HF can be recovered by HF recovery treatment per year, over 525 tons of quick lime is saved, and the recovered anhydrous HF can be recycled to the production of NF3 electrolytic gas, and the HF content in tail gas is reduced to below 2 ppm. Both guaranteed that tail gas is up to standard discharges, accord with the environmental protection requirement, can reduce certain cost again, economical and practical.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A liquid waste treatment device for nitrogen trifluoride preparation is characterized in that: retrieve jar (1) including HF, HF is retrieved and is provided with the waste liquid import on jar (1), the waste liquid import communicates with the waste liquid export of cooler (2) and cold trap (3) respectively, HF retrieves the top of jar (1) and is provided with first nitrogen gas intercommunication mouth (4), HF retrieves the side of jar (1) and is close to top department and is provided with second nitrogen gas intercommunication mouth (5), HF retrieves the top opposite side of jar (1) and is provided with evacuation mouth (8), HF retrieves the side of jar (1) and is close to bottom department and has seted up nitrogen gas drain (12), HF retrieves the bottom of jar (1) and is provided with HF and retrieves mouth (14).

2. The apparatus for liquid waste treatment for nitrogen trifluoride preparation according to claim 1, wherein the HF recovery tank (1) is provided with a first waste discharge port (7) near a top end thereof, and the first waste discharge port (7) is further provided with a communicating pipe (9) communicating with a waste liquid inlet.

3. The apparatus for liquid waste treatment for nitrogen trifluoride preparation according to claim 1, wherein the bottom end of the HF recovery tank (1) is provided with a second waste discharge port (13).

4. The liquid waste treatment apparatus for nitrogen trifluoride preparation according to claim 1, wherein a pressure sensor (10) and a temperature sensor (11) are provided at a side end of the HF recovery tank (1) near the top end, and a water level sensor (6) is further provided at a side end of the HF recovery tank (1) near the bottom end.

5. The apparatus for treating liquid waste for nitrogen trifluoride preparation according to claim 1, wherein a nitrogen purge mechanism is connected to the first nitrogen communication port (4), and the second nitrogen communication port (5) is connected to a cold nitrogen tank.