CN217230958U

CN217230958U - Anti-corrosion overheating-proof electrolytic cell for producing nitrogen trifluoride

Info

Publication number: CN217230958U
Application number: CN202220254165.1U
Authority: CN
Inventors: 崔同超; 郭宏; 薛宇; 苗彦军; 吴凯; 栾海宁; 马雷
Original assignee: Wulancha Bunanda Microelectronic Materials Co ltd
Current assignee: Nanda Optoelectronics Ulanqab Co ltd
Priority date: 2022-02-09
Filing date: 2022-02-09
Publication date: 2022-08-19
Anticipated expiration: 2032-02-09

Abstract

The utility model belongs to the technical field of nitrogen trifluoride production equipment, in particular to an anti-corrosion overheating-proof electrolytic cell for producing nitrogen trifluoride, which comprises a cell body and a sealing cover, wherein the cell body is divided into an anode gas chamber at the upper part and a cathode gas chamber at the lower part by a skirtboard, and PFA coatings are respectively coated on the inner wall of the cell body and the inner surface of the sealing cover; a plurality of groups of cooling coils are arranged in the tank body, each group of cooling coils is arranged in an S-shaped longitudinal direction, and a cooling jacket is arranged outside the tank body. A prevent overheated electrolysis trough for producing nitrogen trifluoride's anticorrosion, through reasonable structural design and corrosion-resistant material's selection, can improve electrolysis efficiency, improve the problem that nitrogen trifluoride conversion rate reduces, improve nitrogen trifluoride's under the same productivity output to extension cell body life cycle can bring good economic benefits for the enterprise.

Description

Anti-corrosion overheating-proof electrolytic cell for producing nitrogen trifluoride

Technical Field

The utility model relates to an anti-corrosion overheating-prevention electrolytic cell for producing nitrogen trifluoride, belonging to the technical field of nitrogen trifluoride production equipment.

Background

Nitrogen trifluoride is an excellent plasma etching gas in the microelectronics industry, and the demand of nitrogen trifluoride is increasing with the development of nanotechnology and the large-scale development of the electronics industry. The nitrogen trifluoride preparation electrolytic bath body adopts the alloy material greatly, and after the electrolytic bath runs for a long time, the corrosion phenomenon of the bath body can occur, so that metal ion impurities in electrolyte are too much, the normal running of the electrolytic process is influenced, the temperature of the electrolytic bath is continuously increased, the reaction of a nickel anode plate is further aggravated, the volatilization amount of hydrogen fluoride is increased, the electrolyte proportioning is damaged, the content of fluorine ions is reduced, and the yield of nitrogen trifluoride is reduced. Solutions to this problem exist in the prior art, but none are very effective.

SUMMERY OF THE UTILITY MODEL

According to the not enough among the above prior art, the utility model discloses the technical problem who solves is: the defects of the prior art are overcome, the corrosion-resistant overheating-resistant electrolytic cell for producing nitrogen trifluoride is provided, the corrosion resistance of the cell body is effectively improved, and the reduction of the product yield caused by overhigh reaction temperature can be well prevented.

The utility model discloses an anti-corrosion overheating-proof electrolytic cell for producing nitrogen trifluoride, including cell body and closing cap, the apron board divides the cell body into an upper anode gas chamber and a lower cathode gas chamber, the inner wall of the cell body and the inner surface of the closing cap are both coated with PFA coating; a plurality of groups of cooling coils are arranged in the tank body, each group of cooling coils is arranged in an S-shaped longitudinal direction, and a cooling jacket is arranged outside the tank body.

The utility model discloses cell body inner wall and closing cap internal surface all scribble the PFA coating, can make cell body life cycle prolong greatly, avoid the production of electrolysis residue, improve the quality of electrolyte, improve the problem that nitrogen trifluoride conversion reduces, improve the output of nitrogen trifluoride under the same productivity. The plurality of groups of cooling coil pipes are arranged in the tank body, and the cooling jacket is arranged outside the tank body, so that the temperature control effect is good, the reaction overheating is prevented, and the electrolysis efficiency is improved.

Wherein, a water inlet and a water return opening are arranged on the side surface of the cooling jacket, and the water return opening is higher than the water inlet.

In order to facilitate the discharge of internal circulating water during shutdown, a water outlet is also arranged at the bottom of the cooling jacket.

In order to ensure that the cooling jacket can be filled with circulating water all the time and improve the cooling effect, the water inlet flow is slightly larger than the water return flow, so that an overflow port is arranged at the top of the cooling jacket to discharge redundant water flow and balance pressure.

Overflow mouth quantity be a plurality of, a plurality of overflow mouths are evenly arranged along the cooling jacket top, the assurance that can be better presss from both sides the jacket and is full of, prevent to press from both sides the interior production air blind spot of cover.

The outer surface of the cooling coil is covered with a chloroprene rubber layer, so that the cooling coil has good heat resistance and corrosion resistance.

Compared with the prior art, the utility model beneficial effect who has is:

a prevent overheated electrolysis trough for producing nitrogen trifluoride's anticorrosion, through reasonable structural design and corrosion-resistant material's selection, can improve electrolysis efficiency, improve the problem that nitrogen trifluoride conversion rate reduces, improve nitrogen trifluoride's under the same productivity output to extension cell body life cycle can bring good economic benefits for the enterprise.

Drawings

FIG. 1 is a schematic view of the present invention;

fig. 2 is a schematic diagram of a cooling coil.

In the figure: a tank body 1; an apron board 2; an anode gas chamber 3; a cathode gas chamber 4; a cooling coil 5; a cooling jacket 6; a water inlet 7; a water return port 8; a water discharge port 9; an overflow port 10; and a cover 11.

Detailed Description

The present invention will be further described with reference to the following specific examples. The use and purpose of these exemplary embodiments are to illustrate the invention, not to limit the scope of the invention in any way, and not to limit the scope of the invention in any way.

As shown in figures 1-2, an overheated electrolysis trough is prevented in anticorrosion for producing nitrogen trifluoride, including cell body 1 and closing cap 11, skirtboard 2 separates cell body 1 for the anode gas room 3 on upper portion and the cathode gas room 4 of lower part, 1 inner wall of cell body and 11 internal surfaces of closing cap all scribble the PFA coating, can make cell body life cycle prolong greatly, avoid electrolysis residue's production, improve the quality of electrolyte, improve the problem of nitrogen trifluoride conversion reduction, improve the output of nitrogen trifluoride under the same productivity.

A plurality of groups of cooling coils 5 are arranged in the tank body 1, each group of cooling coils 5 is arranged in an S-shaped longitudinal direction, and a chloroprene rubber layer covers the outer surface of each cooling coil 5, so that the tank body has good heat resistance and corrosion resistance.

A cooling jacket 6 is arranged outside the tank body 1, a water inlet 7 and a water return port 8 are arranged on the side surface of the cooling jacket 6, and the water return port 8 is higher than the water inlet 7. The bottom of the cooling jacket 6 is provided with a water outlet 9 for discharging the internal circulating water when the machine is stopped.

In order to guarantee that the circulating water can be full of the cooling jacket often, improve the cooling effect, set up the inflow and slightly be greater than the return water flow, consequently be equipped with a plurality of overflow mouths at cooling jacket top, a plurality of overflow mouths are evenly arranged along cooling jacket top, and the unnecessary rivers of discharge, the assurance that can be better presss from both sides the jacket and is full of, prevents to press from both sides the interior production air dead zone of cover to can balanced pressure.

The utility model discloses the control by temperature change is effectual, can prevent to react overheated, improves electrolysis efficiency.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An anti-corrosion and anti-overheating electrolytic cell for producing nitrogen trifluoride, comprising a cell body (1) and a cover (11), wherein a skirt (2) separates the cell body (1) into an upper anode gas chamber (3) and a lower cathode gas chamber (4), characterized in that: the inner wall of the tank body (1) and the inner surface of the sealing cover (11) are coated with PFA coatings; a plurality of groups of cooling coils (5) are arranged in the tank body (1), each group of cooling coils (5) is arranged in an S-shaped longitudinal direction, and a cooling jacket (6) is arranged outside the tank body (1).

2. The corrosion-and overheating-preventing electrolytic cell for nitrogen trifluoride production according to claim 1, characterized in that: the side surface of the cooling jacket (6) is provided with a water inlet (7) and a water return port (8), and the water return port (8) is higher than the water inlet (7).

3. The corrosion-and overheating-preventing electrolytic cell for nitrogen trifluoride production according to claim 2, characterized in that: the bottom of the cooling jacket (6) is also provided with a water outlet (9).

4. The corrosion-resistant overheating-proof electrolytic cell for nitrogen trifluoride production according to claim 2 or 3, characterized in that: the top of the cooling jacket (6) is provided with an overflow port (10).

5. The corrosion-resistant overheating-proof electrolytic cell for the production of nitrogen trifluoride according to claim 4 wherein: the number of the overflow ports (10) is a plurality, and the overflow ports (10) are uniformly distributed along the top of the cooling jacket (6).

6. The corrosion-and overheating-preventing electrolytic cell for nitrogen trifluoride production according to claim 1, characterized in that: the outer surface of the cooling coil (5) is covered with a chloroprene rubber layer.