CN217224119U - One-order clamping tool for shell of photoetching machine - Google Patents
One-order clamping tool for shell of photoetching machine Download PDFInfo
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- CN217224119U CN217224119U CN202120770968.8U CN202120770968U CN217224119U CN 217224119 U CN217224119 U CN 217224119U CN 202120770968 U CN202120770968 U CN 202120770968U CN 217224119 U CN217224119 U CN 217224119U
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- clamping
- stud
- abutting
- positioning
- photoetching machine
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Abstract
The utility model discloses a tight frock of photoetching machine shell preface clamp, including the frock base, be equipped with on the frock base and press from both sides tightly to lean on the subassembly and press from both sides tight locating component, press from both sides tightly to lean on all to be equipped with the double-screw bolt clamping piece on subassembly and the tight locating component of clamp. The utility model discloses according to the shape of photoetching machine shell well, designed the tight frock of a preface clamp that can the perfect tight photoetching machine shell of clamp, simple structure and the tight process of clamp are swift rapidly.
Description
Technical Field
The utility model relates to a tight frock of photoetching machine shell preface clamp.
Background
Lithography machine (Mask Aligner) also known as: a mask alignment exposure machine, an exposure system, a photolithography system, etc., are core equipment for manufacturing a chip. It adopts the technique similar to photo development to print the fine pattern on the mask plate on the silicon wafer by the exposure of light. A plurality of holes on the shell of the photoetching machine need to be processed, and the current processing tool is unreasonable in design and cannot meet the processing work after clamping.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome the defect that exists among the prior art, provide a tight frock of photoetching machine shell preface clamp, according to the shape of photoetching machine shell well, designed can perfectly press from both sides tight frock of a preface clamp of tight photoetching machine shell, simple structure and the tight process of clamp are swift rapidly.
In order to achieve the above object, the technical scheme of the utility model is to design a tight frock of photoetching machine shell preface clamp, including the frock base, be equipped with on the frock base and press from both sides tightly to lean on the subassembly and press from both sides tight locating component, press from both sides tightly to lean on the subassembly and press from both sides tight locating component on all be equipped with the double-screw bolt clamping piece. The clamping support component and the clamping positioning component are matched in a clamping mode, so that clamping firmness can be guaranteed, the photoetching machine shell is located at a correct position to be machined under the action of supporting and positioning limiting, and the precision of machining holes is guaranteed.
The further technical scheme is that two clamping abutting components and two clamping positioning components are respectively arranged and are sequentially arranged at four corners of a base plate of a shell of the photoetching machine; the two clamping abutting assemblies and the two clamping positioning assemblies are arranged along the length direction of the bottom plate of the photoetching machine shell; one side of the tooling base, which is close to the connecting line of the two clamping and positioning components, is provided with a propping and positioning block. One side of the tooling base, which is close to the connecting line of the two clamping and positioning components, is provided with a backer which is abutted against the positioning block and used as a workpiece to be processed, so that the position of the workpiece to be processed is ensured.
The further technical scheme is that the clamping abutting component comprises a seat plate fixedly arranged on the tooling base, the stud clamping piece comprises a cylinder fixedly arranged on the seat plate, a pin is arranged on the cylinder in a sliding mode, a clamping block is fixedly arranged at the top end of the pin, a through hole used for a stud to pass through is formed in the middle of the clamping block, and a threaded hole matched with the stud is formed in the seat plate.
The further technical scheme is that an angle steel is fixedly arranged on one side of the seat plate, which is positioned on the cylinder, a threaded hole is formed in the angle steel, the angle steel is matched with the threaded hole and is abutted against the stud, and the abutted stud is abutted against the side face of the bottom plate of the photoetching machine shell.
The further technical proposal is that a flat-head stud is connected with the seat plate at the bottom surface of the bottom plate of the shell of the photoetching machine through threads. The extending height of the flat-head stud can be adjusted according to the condition of a workpiece to be machined by arranging the plurality of flat-head studs so as to ensure that the shell of the photoetching machine is horizontal when being placed.
The further technical scheme is that a stud clamping piece on the clamping and positioning assembly is arranged on the abutting positioning block, and a threaded hole matched with a stud of the stud clamping piece is formed in the abutting positioning block; the two ends of the abutting positioning block are provided with square positioning bodies along the length direction of the photoetching machine shell, the two ends of the abutting positioning block are also provided with limiting columns along the width direction of the photoetching machine shell, and the stud is positioned between the square positioning bodies and the limiting columns.
The technical scheme is that a transverse column is fixedly arranged on the side surface abutted against the positioning block, a clamping plate is arranged on the transverse column in a sliding mode, a through hole for a stud to penetrate through is formed in the middle of the clamping plate, and a threaded hole matched with the stud is formed in the side surface abutted against the positioning block.
The further technical scheme is that a raised square limiting body is arranged in the middle of the abutting positioning block, and an abutting stud is connected to the square limiting body in a threaded manner.
The utility model has the advantages and the beneficial effects that: according to the shape of the shell of the photoetching machine, a clamping tool capable of perfectly clamping the shell of the photoetching machine is designed, the structure is simple, and the clamping process is rapid and quick. The clamping support component is matched with the clamping positioning component in a clamping mode, so that the clamping is firm, the photoetching machine shell is located at a correct position to be machined through the support and positioning limiting effects, and the hole machining precision is guaranteed. One side of the tooling base, which is close to the connecting line of the two clamping and positioning components, is provided with a backer which is abutted against the positioning block and is used as a workpiece to be processed, so that the position of the workpiece to be processed is ensured. The extending height of the flat-head stud can be adjusted according to the condition of a workpiece to be machined by arranging the plurality of flat-head studs so as to ensure that the shell of the photoetching machine is horizontal when being placed.
Drawings
FIG. 1 is a schematic diagram of a lithography machine housing clamping tool according to the present invention;
FIG. 2 is a schematic view of FIG. 1 with the outer cover removed.
In the figure: 1. a tooling base; 2. abutting against the positioning block; 3. a seat plate; 4. a cylinder; 5. a pin; 6. a clamping block; 7. a stud; 8. a through hole; 9. angle steel; 10. abutting against the stud; 11. a lithography machine housing bottom plate; 12. a flat head stud; 13. a square positioning body; 14. a limiting column; 15. a transverse column; 16. a clamping plate; 17. a square limiting body.
Detailed Description
The following description will further describe embodiments of the present invention with reference to the accompanying drawings and examples. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
As shown in fig. 1-2, the utility model relates to a lithography machine shell preface presss from both sides tight frock, including fixture base 1, be equipped with on fixture base 1 and press from both sides tightly to lean on the subassembly and press from both sides tight locating component, press from both sides tightly to lean on the subassembly and press from both sides tight locating component on all be equipped with double-screw bolt 7 clamping piece. Two clamping abutting assemblies and two clamping positioning assemblies are respectively arranged and are sequentially arranged at four corners of a bottom plate 11 of the photoetching machine shell; the two clamping abutting assemblies and the two clamping positioning assemblies are arranged along the length direction of the bottom plate 11 of the photoetching machine shell; one side of the tooling base 1, which is close to the connecting line of the two clamping and positioning components, is provided with a propping and positioning block 2. The clamping abutting component comprises a seat plate 3 fixedly arranged on the tooling base 1, a clamping piece 7 of the stud comprises a cylinder 4 fixedly arranged on the seat plate 3, a pin 5 is arranged on the cylinder 4 in a sliding mode, a clamping block 6 is fixedly arranged at the top end of the pin 5, a through hole 8 used for the stud 7 to penetrate through is formed in the middle of the clamping block 6, and a threaded hole matched with the stud 7 is formed in the seat plate 3. An angle steel 9 is fixedly arranged on one side of the column 4 on the seat plate 3, a threaded hole is formed in the angle steel 9, the angle steel is matched with the threaded hole and abuts against a stud 10, and the abutting stud 10 abuts against the side face of a bottom plate 11 of a photoetching machine shell. A flat head stud 12 is connected with the base plate 3 at the bottom surface of the bottom plate 11 of the photoetching machine shell in a threaded manner. A stud 7 clamping piece on the clamping and positioning assembly is arranged on the abutting positioning block 2, and a threaded hole matched with the stud 7 of the stud 7 clamping piece is formed in the abutting positioning block 2; two ends of the abutting positioning block 2 are provided with square positioning bodies 13 along the length direction of the photoetching machine shell (the square positioning body 13 at one end abuts against the photoetching machine shell, the square positioning body 13 at the other end is in threaded connection with the abutting stud 10, the distance between the two square positioning bodies 13 is larger than the length of the photoetching machine shell), two ends of the abutting positioning block 2 are also provided with limiting columns 14 along the width direction of the photoetching machine shell, and the stud 7 is positioned between the square positioning bodies 13 and the limiting columns 14. A transverse column 15 is fixedly arranged on the side surface abutting against the positioning block 2, a clamping plate 16 is arranged on the transverse column 15 in a sliding mode, a through hole 8 for the stud 7 to penetrate through is formed in the middle of the clamping plate 16, and a threaded hole matched with the stud 7 is formed in the side surface abutting against the positioning block 2. The middle part of the abutting positioning block 2 is provided with a raised square limiting body 17, and the square limiting body 17 is in threaded connection with the abutting stud 10.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the technical principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. The photoetching machine shell first-order clamping tool is characterized by comprising a tool base, wherein a clamping abutting component and a clamping positioning component are arranged on the tool base, stud clamping pieces are respectively arranged on the clamping abutting component and the clamping positioning component, two clamping abutting components and two clamping positioning components are respectively arranged, and the two clamping abutting components and two clamping positioning components are sequentially arranged at four corners of a bottom plate of a photoetching machine shell; the two clamping abutting assemblies and the two clamping positioning assemblies are arranged along the length direction of the bottom plate of the photoetching machine shell; the tool base is provided with a propping positioning block at one side close to the connecting line of the two clamping and positioning components, the clamping and propping components comprise a seat plate fixedly arranged on the tool base, a stud clamping piece comprises a cylinder fixedly arranged on the seat plate, a pin is arranged on the cylinder in a sliding manner, a clamping block is fixedly arranged at the top end of the pin, a through hole for a stud to pass through is arranged in the middle of the clamping block, a threaded hole matched with the stud is arranged on the seat plate, a stud clamping piece on the clamping and positioning component is arranged on the propping positioning block, and the propping positioning block is provided with a threaded hole matched with the stud of the stud clamping piece; the two ends of the abutting positioning block are provided with square positioning bodies along the length direction of the photoetching machine shell, the two ends of the abutting positioning block are also provided with limiting columns along the width direction of the photoetching machine shell, and the stud is positioned between the square positioning bodies and the limiting columns.
2. The lithography machine housing in-sequence clamping tool according to claim 1, wherein an angle steel is fixedly arranged on one side of the column on the seat plate, a threaded hole is arranged on the angle steel, an abutting stud is adapted to the threaded hole, and the abutting stud abuts against the side surface of the bottom plate of the lithography machine housing.
3. The lithography machine housing in-sequence clamping tool according to claim 2, wherein a flat-head stud is screwed on the seat plate at the bottom surface of the bottom plate of the lithography machine housing.
4. The lithography machine shell in-sequence clamping tool according to claim 3, wherein a transverse column is fixedly arranged on the side surface abutting against the positioning block, a clamping plate is slidably arranged on the transverse column, a through hole for a stud to pass through is formed in the middle of the clamping plate, and a threaded hole matched with the stud is formed in the side surface abutting against the positioning block.
5. The first clamping tool for the shell of the lithography machine according to claim 4, wherein a raised square limiting body is arranged in the middle of the abutting positioning block, and an abutting stud is connected to the square limiting body in a threaded manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120770968.8U CN217224119U (en) | 2021-04-15 | 2021-04-15 | One-order clamping tool for shell of photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120770968.8U CN217224119U (en) | 2021-04-15 | 2021-04-15 | One-order clamping tool for shell of photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217224119U true CN217224119U (en) | 2022-08-19 |
Family
ID=82817429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120770968.8U Active CN217224119U (en) | 2021-04-15 | 2021-04-15 | One-order clamping tool for shell of photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217224119U (en) |
-
2021
- 2021-04-15 CN CN202120770968.8U patent/CN217224119U/en active Active
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