CN217222866U - Semi-automatic pickling installation - Google Patents
Semi-automatic pickling installation Download PDFInfo
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- CN217222866U CN217222866U CN202221001521.5U CN202221001521U CN217222866U CN 217222866 U CN217222866 U CN 217222866U CN 202221001521 U CN202221001521 U CN 202221001521U CN 217222866 U CN217222866 U CN 217222866U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a semi-automatic pickling equipment, including descaling bath, flowing back valve, three way connection, fluid-discharge tube, roll hanger, the below of descaling bath is provided with semi-automatic elevating gear, the top lateral wall of descaling bath is provided with the overflow hole, and the periphery at descaling bath top is provided with the ring channel, and the outside of descaling bath is provided with the exhaust column, and the lateral wall of ring channel is provided with the hole of airing exhaust that is linked together with the exhaust column lower extreme, and the tank bottom of ring channel is provided with the flowing back hole that is linked together with the fluid-discharge tube upper end. The semi-automatic pickling equipment starts to rotate, etch and clean the semiconductor quartz and silicon materials carried by the hanger in the pickling tank, so that the efficiency is high, and the etching and cleaning effects are good; the ground clearance of the pickling tank can be adjusted at any time according to the height difference of workers, the operation of the workers is facilitated, the safety is high, and the implementation effect is good.
Description
Technical Field
The utility model relates to a semi-automatic pickling equipment belongs to the cleaning equipment technical field of the quartzy, silicon material surface sculpture of semiconductor.
Background
After the machining of the silicon material of the semiconductor part is finished, wet pickling etching is needed, the wet etching is a technology for soaking an etched material in corrosive liquid for corrosion, the wet etching is an isotropic etching method, and a chemical reaction process is utilized to remove a thin film material, usually SiO, in a region to be etched 2 Wet etching techniques are used, sometimes also for metallic aluminum. The surface etching cleaning, especially the acid cleaning, of semiconductor quartz and silicon materials is generally carried out by using a groove body, pouring etching acid liquor into the groove body, taking parts by a clamp by a worker to clean in the groove body, taking out the parts after the etching is finished, and putting the parts into a DI water tank. After rinsing with DI water for 10 minutes, the parts were placed in a drying oven for drying.
The prior art has the following disadvantages:
1. manual cleaning is adopted, so that the cleaning effect is good when the quantity is small; with the increase of the capacity, the etching quantity is continuously increased, the etching frequency is increased, a worker can be tired after keeping one action, the quality of the etched product is difficult to guarantee, and the consistency of the appearance cannot meet the requirement.
2. Although the air exhaust system is provided, workers wear the 3M full-face protective clothing, but the distances between the workers with different heights and the tank body are different, so that the air exhaust system is not suitable for the workers with all the heights.
3. In the acid-washing etching process, the rotation times of the hanger cannot be accurately controlled, and the product cleaning consistency is different due to the fact that the rotation times cannot be accurately controlled.
SUMMERY OF THE UTILITY MODEL
The utility model provides a semi-automatic pickling installation to the not enough of prior art existence, concrete technical scheme as follows:
a semi-automatic pickling device comprises a pickling tank and a liquid discharge valve, wherein a liquid discharge port communicated with an input end of the liquid discharge valve is arranged at the bottom of the pickling tank, the semi-automatic pickling device further comprises a three-way joint and a liquid discharge pipe, an overflow hole is formed in the side wall of the top of the pickling tank, an annular groove is formed in the periphery of the top of the pickling tank, and an inner cavity of the pickling tank is communicated with an inner cavity of the annular groove through the overflow hole; an exhaust pipe is arranged outside the pickling tank, an exhaust hole communicated with the lower end of the exhaust pipe is formed in the side wall of the annular groove, a liquid discharge hole communicated with the upper end of a liquid discharge pipe is formed in the bottom of the annular groove, the lower end of the liquid discharge pipe is communicated with a first joint of a three-way joint, and a second joint of the three-way joint is communicated with the output end of a liquid discharge valve.
According to the further optimization of the technical scheme, the notch of the pickling tank is provided with a tank cover, and the tank cover is hinged to the notch of the pickling tank.
Above-mentioned technical scheme's further optimization, the below of descaling bath is provided with semi-automatic lifting device, semi-automatic lifting device includes backing plate, pneumatic cylinder of fixed mounting below the descaling bath, is located the bottom plate of backing plate below, sets up many guide arms between backing plate and bottom plate, the lower extreme and the bottom plate fixed connection of guide arm, the face of backing plate is provided with the spacing hole that supplies the activity of guide arm upper end, the pneumatic cylinder sets up between backing plate and bottom plate, the jar seat and the bottom plate fixed connection of pneumatic cylinder, it is articulated through setting up the hinge between the piston rod of pneumatic cylinder and the backing plate.
Above-mentioned technical scheme's further optimization, semi-automatic lifting device still includes stop device, stop device includes that the cross section is limiting plate, riser, the bolted connection spare of L shape, the limiting plate includes the horizontal segment, is located the perpendicular section of horizontal segment below, the bolted connection spare includes bolt and nut, riser and perpendicular section all are equidistant be provided with bolt assorted through-hole, the horizontal segment sets up the top at the backing plate, the lower extreme and the bottom plate fixed connection of riser.
In a further optimization of the technical scheme, the semi-automatic pickling equipment further comprises a rolling hanger, wherein the rolling hanger comprises a hanger, a hanger seat for mounting the hanger, a gear reduction motor, a first gear fixedly mounted at the output end of the gear reduction motor, a second gear externally meshed with the first gear, a third gear, a fourth gear externally meshed with the third gear, a fifth gear externally meshed with the fourth gear, a sixth gear externally meshed with the fifth gear, and a driving shaft for connecting the second gear with the third gear, the center of the hanging tool is provided with a rotating shaft, the cross section of the hanging tool seat is U-shaped, the rotating shaft is rotationally connected with the hanging tool seat, the sixth gear is fixedly connected with the end part of the rotating shaft, the wheel axle of the fifth gear is rotatably connected with the outer wall of the hanging tool seat, and the wheel shaft of the fourth gear is rotationally connected with the outer wall of the hanger seat, and the driving shaft is rotationally connected with the hanger seat.
The semi-automatic pickling equipment starts to rotate, etch and clean the semiconductor quartz and silicon materials carried by the hanger in the pickling tank, so that the efficiency is high, and the etching and cleaning effects are good; the height from the ground of the pickling tank can be adjusted at any time according to the height difference of workers, the operation of the workers is facilitated, the safety is high, and the implementation effect is good.
Drawings
FIG. 1 is a schematic structural view of a semi-automatic pickling apparatus according to the present invention;
FIG. 2 is a schematic structural view of the semi-automatic pickling apparatus of the present invention without a semi-automatic lifting device;
fig. 3 is a schematic structural view (side view state) of the rolling hanger of the present invention;
fig. 4 is a schematic structural diagram (front view state) of the rolling hanger of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example 1
As shown in fig. 1, the semi-automatic pickling apparatus includes a pickling tank 10 and a drain valve 16, wherein a drain port communicated with an input end of the drain valve 16 is arranged at a tank bottom of the pickling tank 10, the drain valve 16 and a hanger 40 are all existing pickling apparatuses, semiconductor quartz and silicon materials are all placed at the hanger 40, the hanger 40 carries the semiconductor quartz and silicon materials and then is placed inside the pickling tank 10, and etching acid liquor is poured into the pickling tank 10 to etch and clean surfaces of the semiconductor quartz and silicon materials. The etching acid solution in the pickling tank 10 can be drained by opening the drain valve 16.
The semi-automatic pickling equipment further comprises a three-way joint 17 and a liquid discharge pipe 15, overflow holes 14 are formed in the side wall of the top of the pickling tank 10, an annular groove 13 is formed in the periphery of the top of the pickling tank 10, and the inner cavity of the pickling tank 10 is communicated with the inner cavity of the annular groove 13 through the overflow holes 14; an exhaust pipe 18 is arranged outside the pickling tank 10, an exhaust hole communicated with the lower end of the exhaust pipe 18 is formed in the side wall of the annular groove 13, a liquid discharge hole communicated with the upper end of the liquid discharge pipe 15 is formed in the bottom of the annular groove 13, the lower end of the liquid discharge pipe 15 is communicated with a first joint of the three-way joint 17, and a second joint of the three-way joint 17 is communicated with the output end of the liquid discharge valve 16.
Firstly, a liquid inlet hole can be arranged on the side wall of the pickling tank 10, the liquid inlet hole is externally connected with a liquid inlet pipe, etching acid liquid can be continuously input into the pickling tank 10 through the liquid inlet pipe, the etching acid liquid in the pickling tank 10 can enter the annular groove 13 through the overflow hole 14, and then the etching acid liquid is discharged to a designated area through the liquid discharge pipe 15. The third of the three-way joints 17 communicates with the waste liquid tank. The upper end of the exhaust pipe 18 is connected with the exhaust fan, so that the volatile acid mist above the inside of the pickling tank 10 can be continuously exhausted, the working environment of workers is obviously improved, and the safety is improved.
Example 2
In order to further improve the safety of the surrounding environment of workers, the notch of the pickling tank 10 is provided with a tank cover 12, and the tank cover 12 is hinged with the notch of the pickling tank 10. The safety during operation can be further improved by closing the opening of the pickling tank 10 by covering the tank cover 12.
Example 3
As shown in fig. 1, the below of descaling bath 10 is provided with semi-automatic lifting device, semi-automatic lifting device includes backing plate 31, pneumatic cylinder 32 of fixed mounting in descaling bath 10 below, is located backing plate 31 below bottom plate 34, sets up many guide arms 35 between backing plate 31 and bottom plate 34, the lower extreme and the bottom plate 34 fixed connection of guide arm 35, the face of backing plate 31 is provided with the spacing hole that supplies the activity of guide arm 35 upper end, pneumatic cylinder 32 sets up between backing plate 31 and bottom plate 34, the jar seat and the bottom plate 34 fixed connection of pneumatic cylinder 32, it is articulated through setting up hinge 33 between the piston rod of pneumatic cylinder 32 and the backing plate 31.
When the hydraulic cylinder 32 starts working, the piston rod of the hydraulic cylinder 32 extends, so that the backing plate 31 is lifted, and the height of the pickling tank 10 from the ground is adjusted. The guide rod 35 is arranged to ensure that the backing plate 31 and the pickling tank 10 move vertically up and down in the lifting process. The hinge 33 is used for hinging, thereby effectively avoiding the defects caused by hard connection between the piston rod of the hydraulic cylinder 32 and the backing plate 31.
Example 4
Semi-automatic lifting device still includes stop device, stop device includes that the cross section is limiting plate 51, riser 52, the bolted connection piece 53 of L shape, limiting plate 51 includes the horizontal segment, is located the vertical section of horizontal segment below, bolted connection piece 53 includes bolt and nut, riser 52 and vertical section all are equidistant be provided with bolt assorted through-hole 55, the horizontal segment sets up the top at backing plate 31, the lower extreme and the bottom plate 34 fixed connection of riser 52.
The ground clearance of the pickling tank 10 is measured in advance, the ground clearance of the transverse section is calculated, then the relative position between the vertical plate 52 and the vertical section is adjusted, the through hole in the vertical plate 52 and the through hole in the vertical section are aligned with each other, then the through hole is penetrated through the bolt and then the through hole is in threaded connection with the nut, and therefore the bolt connecting piece 53 can be used for installing and fixing the limiting plate 51 and the vertical plate 52. Wherein, the distance between two adjacent through holes 55 can be set to 3-5cm, so that the final height of the pickling tank 10 from the ground can be conveniently adjusted.
When the backing plate 31 is driven by the hydraulic cylinder 32 to be lifted upwards and then is limited by the limiting plate 51, the ground clearance of the pickling tank 10 is finally controlled.
Generally, workers in a workshop are relatively fixed, and if the workers change due to reasons such as work change and the like, a new worker with a large height difference from the original worker is replaced; for workers with different heights, the height of the pickling tank 10 from the ground can be adjusted through a semi-automatic lifting device, so that the working difficulty of the workers is obviously reduced.
Example 5
The accessible is at the oil inlet department installation electromagnetism check valve of pneumatic cylinder 32, and when starting the oil pump, the oil pump is for pneumatic cylinder 32 oil feed, and electromagnetism check valve starts this moment, prevents pneumatic cylinder 32 oil return, just also guarantees that descaling bath 10 can be at the assigned height.
The opening and closing of the electromagnetic one-way valve can be controlled by installing a proximity switch or a travel switch. When the backing plate 31 touches the transverse section, the proximity switch or the travel switch is closed, the electromagnetic one-way valve is started, and oil return can be prevented. The opening and closing of the oil pump can be controlled by installing an electromagnetic relay, and when the proximity switch or the travel switch is closed, the closing of the oil pump is controlled by the electromagnetic relay. Due to the arrangement of the electromagnetic check valve, the ground clearance of the backing plate 31 can be ensured even if the oil pump is closed.
Example 6
As shown in fig. 1-4, the semi-automatic pickling equipment further includes a rolling rack 20, the rolling rack 20 includes a rack 40, a rack seat 26 for mounting the rack 40, a gear reduction motor 21, a first gear 29 fixedly mounted at an output end of the gear reduction motor 21, a second gear 27 externally engaged with the first gear 29, a third gear 25, a fourth gear 24 externally engaged with the third gear 25, a fifth gear 23 externally engaged with the fourth gear 24, a sixth gear 22 externally engaged with the fifth gear 23, and a driving shaft 28 for connecting the second gear 27 and the third gear 25, a rotating shaft is disposed in a center of the rack 40, a cross section of the rack seat 26 is U-shaped, the rotating shaft is rotatably connected with the rack seat 26, the sixth gear 22 is fixedly connected with an end of the rotating shaft, a wheel shaft of the fifth gear 23 is rotatably connected with an outer wall of the rack seat 26, the axle of the fourth gear 24 is rotatably connected to the outer wall of the rack holder 26, and the driving shaft 28 is rotatably connected to the rack holder 26.
The transmission speed of the gear reduction motor 21 is 20/min, the gear reduction motor 21 drives the second gear 27 to rotate through the first gear 29, the third gear 25 is driven to rotate through the driving shaft 28, the third gear 25 sequentially drives the fourth gear 24, the fifth gear 23 and the sixth gear 22 to rotate, the sixth gear 22 can drive the hanger 40 to rotate through the rotating shaft, the semiconductor quartz and silicon materials carried at the hanger 40 start rotating in the pickling tank 10, the specific number of rotating turns is according to the technological requirements of products, and the equipment stops after the process set time is reached.
In the above embodiment, the semi-automatic pickling equipment can start the operations of rotating, etching and cleaning the semiconductor quartz and silicon materials carried by the hanger 40 in the pickling tank 10, and the cleaning effect is higher than the efficiency of manual cleaning and good in etching and cleaning effects; the ground clearance of the pickling tank 10 can be adjusted at any time according to the height difference of workers, the operation of the workers is facilitated, the safety is high, and the implementation effect is good.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. The utility model provides a semi-automatic pickling installation, includes descaling bath (10), flowing back valve (16), the tank bottom of descaling bath (10) is provided with the leakage fluid dram that is linked together with flowing back valve (16) input, its characterized in that: the pickling tank is characterized by further comprising a three-way joint (17) and a liquid discharge pipe (15), overflow holes (14) are formed in the side wall of the top of the pickling tank (10), an annular groove (13) is formed in the periphery of the top of the pickling tank (10), and the inner cavity of the pickling tank (10) is communicated with the inner cavity of the annular groove (13) through the overflow holes (14); the outside of descaling bath (10) is provided with exhaust column (18), the lateral wall of ring channel (13) is provided with the hole of airing exhaust that is linked together with exhaust column (18) lower extreme, the tank bottom of ring channel (13) is provided with the outage that is linked together with fluid-discharge tube (15) upper end, the lower extreme of fluid-discharge tube (15) and the first joint intercommunication of three way connection (17), the second joint and flowing back valve (16) output intercommunication of three way connection (17).
2. The semi-automatic pickling apparatus according to claim 1, wherein: the pickling tank is characterized in that a tank cover (12) is arranged on the tank opening of the pickling tank (10), and the tank cover (12) is hinged to the tank opening of the pickling tank (10).
3. The semi-automatic pickling equipment according to claim 1, characterized in that: the below of descaling bath (10) is provided with semi-automatic elevating gear, semi-automatic elevating gear includes backing plate (31), pneumatic cylinder (32) of fixed mounting in descaling bath (10) below, is located bottom plate (34) of backing plate (31) below, sets up many guide arms (35) between backing plate (31) and bottom plate (34), the lower extreme and bottom plate (34) fixed connection of guide arm (35), the face of backing plate (31) is provided with the spacing hole that supplies guide arm (35) upper end activity, pneumatic cylinder (32) set up between backing plate (31) and bottom plate (34), the jar seat and bottom plate (34) fixed connection of pneumatic cylinder (32), it is articulated through setting up hinge (33) between the piston rod of pneumatic cylinder (32) and backing plate (31).
4. The semi-automatic pickling plant according to claim 3, characterized in that: semi-automatic lifting device still includes stop device, stop device includes limiting plate (51), riser (52), bolted connection (53) that the cross section is L shape, limiting plate (51) include horizontal segment, are located the vertical section of horizontal segment below, bolted connection (53) include bolt and nut, riser (52) and vertical section all are equidistant be provided with bolt assorted through-hole (55), the horizontal segment sets up the top at backing plate (31), the lower extreme and bottom plate (34) fixed connection of riser (52).
5. The semi-automatic pickling apparatus according to claim 1, wherein: the rolling rack comprises a rack (40), a rack seat (26) for mounting the rack (40), a gear reduction motor (21), a first gear (29) fixedly mounted at the output end of the gear reduction motor (21), a second gear (27) externally meshed with the first gear (29), a third gear (25), a fourth gear (24) externally meshed with the third gear (25), a fifth gear (23) externally meshed with the fourth gear (24), a sixth gear (22) externally meshed with the fifth gear (23), and a driving shaft (28) for connecting the second gear (27) with the third gear (25), wherein a rotating shaft is arranged in the center of the rack (40), the cross section of the rack seat (26) is U-shaped, the rotating shaft is rotatably connected with the rack seat (26), and the sixth gear (22) is fixedly connected with the end part of the rotating shaft, the wheel axle of the fifth gear (23) is rotationally connected with the outer wall of the hanger seat (26), the wheel axle of the fourth gear (24) is rotationally connected with the outer wall of the hanger seat (26), and the driving shaft (28) is rotationally connected with the hanger seat (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221001521.5U CN217222866U (en) | 2022-04-27 | 2022-04-27 | Semi-automatic pickling installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221001521.5U CN217222866U (en) | 2022-04-27 | 2022-04-27 | Semi-automatic pickling installation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217222866U true CN217222866U (en) | 2022-08-19 |
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ID=82821145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221001521.5U Active CN217222866U (en) | 2022-04-27 | 2022-04-27 | Semi-automatic pickling installation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217222866U (en) |
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2022
- 2022-04-27 CN CN202221001521.5U patent/CN217222866U/en active Active
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