CN217214738U - Novel quartz boat workbench matched with diffusion furnace - Google Patents
Novel quartz boat workbench matched with diffusion furnace Download PDFInfo
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- CN217214738U CN217214738U CN202220330240.8U CN202220330240U CN217214738U CN 217214738 U CN217214738 U CN 217214738U CN 202220330240 U CN202220330240 U CN 202220330240U CN 217214738 U CN217214738 U CN 217214738U
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- quartz boat
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- fixedly connected
- diffusion furnace
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a quartz boat technical field, and disclose a novel quartz boat workstation is used in diffusion furnace supporting, solved current quartz boat and placed it through quartz boat workstation, and the distance between the thing platform baffle is fixed on the quartz boat workstation, and the quartz boat of different specifications needs different workstations to place, is not convenient for the problem of actual use, it includes the supporting seat, the top fixedly connected with curb plate of supporting seat, the top fixedly connected with roof of curb plate, one side of curb plate is equipped with a plurality of quartz boat and places the board, and one side of curb plate is seted up two first recesses, and one side inner wall of first recess has seted up a plurality of draw-in grooves, and one side of quartz boat and place the board is equipped with two movable blocks, and movable block and quartz boat place the board and pass through the slip unit connection; the quartz boat can be placed according to the requirement, the distance between the two adjacent quartz boats is adjusted, and the quartz boats can be conveniently stored.
Description
Technical Field
The utility model belongs to the technical field of the quartz boat, specifically be a novel supporting quartz boat workstation of using of diffusion furnace.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.
The boat used for bearing the battery plate needs to be used in the diffusion furnace, because the boat which is made of quartz is the best choice for diffusion because the boat needs to have the characteristics of high temperature resistance and corrosion resistance, and the quartz boat plays a very important role in the diffusion field.
The quartz boat of current places it through the quartz boat workstation, and the distance between the thing platform baffle is fixed on the quartz boat workstation, and the quartz boat of different specifications needs the different workstations to place, the in-service use of being not convenient for.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned condition, for overcoming prior art's defect, the utility model provides a novel supporting quartz boat workstation of using of diffusion furnace, the effectual problem of having solved among the above-mentioned background art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a novel supporting quartz boat workstation of using of diffusion furnace, which comprises a supporting seat, the top fixedly connected with curb plate of supporting seat, the top fixedly connected with roof of curb plate, one side of curb plate is equipped with a plurality of quartz boats and places the board, two first recesses have been seted up to one side of curb plate, a plurality of draw-in grooves have been seted up to one side inner wall of first recess, one side that the board was placed to the quartz boat is equipped with two movable blocks, the board is placed through the slip unit connection to movable block and quartz boat, the equal fixedly connected with fixture block in one side that two movable blocks are close to mutually, be equipped with the limiting plate in the first recess, the second recess has been seted up to one side inner wall of first recess, be equipped with the locating component with limiting plate matched with on the curb plate.
As a preferred real-time scheme of a supporting quartz boat workstation of novel diffusion furnace, wherein, locating component includes two connecting plates that set up in the second recess, the both sides of curb plate all are equipped with the backup pad, one end of connecting plate and one side fixed connection of limiting plate, the other end of connecting plate runs through one side inner wall of second recess, and one side fixed connection of one end of connecting plate and backup pad, be equipped with on the curb plate with backup pad matched with block the unit.
As a preferred real-time scheme of a supporting quartz boat workstation of novel diffusion furnace, wherein, block the unit including setting up in the baffle of backup pad one side, the bottom of backup pad is equipped with the fixed plate, one side of fixed plate and one side fixed connection of curb plate, the baffle runs through the fixed plate, the bottom fixedly connected with fly leaf of baffle, the top of fly leaf and the bottom of fixed plate are passed through extension spring and are connected.
As a preferred real-time scheme of supporting quartz boat workstation of novel diffusion furnace, wherein, one side of baffle contacts with one side of backup pad, and one side fixedly connected with pull ring of limiting plate is kept away from to the backup pad.
As a preferred real-time scheme of a supporting quartz boat workstation of novel diffusion furnace, wherein, the movable block is located first recess, and the fixture block is located the draw-in groove, one side of limiting plate contacts with one side of movable block.
As a preferred real-time scheme of a supporting quartz boat workstation of using of novel diffusion furnace, wherein, the slip unit is including setting up in the slider of movable block one side, one side of slider and one side fixed connection of movable block, and two spouts have been seted up to one side that the board was placed to the quartz boat, and the slider is located the spout, and the cross section of spout and slider is T shape structure.
As a preferred real-time scheme of supporting quartz boat workstation of novel diffusion furnace, wherein, the top fixedly connected with handle of movable block, the bottom of supporting seat are equipped with a plurality of supporting shoes, and the bottom of supporting shoe is equipped with the gyro wheel.
The utility model discloses following beneficial effect has:
1. through the design of the side plates, the quartz boat placing plate, the first groove, the clamping grooves, the movable block, the clamping block, the limiting plate and the sliding unit, the movable block can stably move relative to the quartz boat placing plate through the matching of the sliding groove and the sliding block, the height of the quartz boat placing plate is adjusted, the movable block is further driven to be inserted into the first groove, the clamping block is further inserted into the corresponding clamping groove through the movement of the movable block, the height of the quartz boat placing plate is further limited, and the height of the quartz boat placing plate is similarly adjusted according to the specification of the quartz boat, so that the clamping block on the quartz boat placing plate is further inserted into the corresponding clamping groove, the installation of the quartz boat placing plate is completed, the limiting plate is further driven to move, the limiting plate is in contact with the movable block, the positions of the limiting movable block and the clamping block of the limiting plate are controlled, the clamping block is prevented from being separated from the corresponding clamping groove, and the limitation on the position of the quartz boat placing plate can be completed, the distance between two adjacent quartz boat placing plates can be adjusted according to the specification of the quartz boat to be placed, so that the quartz boat can be conveniently stored;
2. through the curb plate, the limiting plate, second recess and locating component's design, move down through drive fly leaf and baffle, make the baffle no longer be located one side of backup pad, extension spring is in tensile state, remove the injecing to the backup pad position, keep away from the curb plate through the drive backup pad and remove, make the limiting plate remove to the second recess in, can remove the injecing to movable block and fixture block position, make the movable block can drive the fixture block and break away from the draw-in groove, remove the fixed of placing the board to the quartz boat, and then the board removal is placed to the quartz boat of drive, make the movable block break away from first recess, can accomplish dismantling that the quartz boat placed the board.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of the side plate of the present invention;
fig. 3 is a schematic structural diagram of the limiting plate of the present invention;
FIG. 4 is a schematic structural view of the quartz boat holding plate of the present invention;
fig. 5 is a partially enlarged schematic view of a portion a in fig. 1.
In the figure: 1. a supporting base; 2. a side plate; 3. a top plate; 4. a quartz boat placing plate; 5. a first groove; 6. a card slot; 7. a movable block; 8. a clamping block; 9. a limiting plate; 10. a second groove; 11. a support plate; 12. a connecting plate; 13. a baffle plate; 14. a movable plate; 15. an extension spring; 16. a pull ring; 17. a fixing plate; 18. a chute; 19. a slider; 20. a handle; 21. a support block; 22. and a roller.
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Example one
By figure 1 to 5, the utility model discloses a supporting seat 1, supporting seat 1's top fixedly connected with curb plate 2, curb plate 2's top fixedly connected with roof 3, one side of curb plate 2 is equipped with a plurality of quartz boats and places board 4, two first recesses 5 have been seted up to one side of curb plate 2, a plurality of draw-in grooves 6 have been seted up to one side inner wall of first recess 5, one side that board 4 was placed to the quartz boat is equipped with two movable blocks 7, movable block 7 and quartz boat are placed board 4 and are connected through the slip unit, the equal fixedly connected with fixture block 8 in one side that two movable blocks 7 are close to mutually, be equipped with limiting plate 9 in the first recess 5, second recess 10 has been seted up to one side inner wall of first recess 5, be equipped with on the curb plate 2 with limiting plate 9 matched with locating component.
Example two
On the basis of the first embodiment, as shown in fig. 1, 3 and 5, the positioning assembly includes two connecting plates 12 disposed in the second groove 10, supporting plates 11 are disposed on both sides of the side plate 2, one end of each connecting plate 12 is fixedly connected to one side of the corresponding limiting plate 9, the other end of each connecting plate 12 penetrates through an inner wall of one side of the second groove 10, one end of each connecting plate 12 is fixedly connected to one side of the corresponding supporting plate 11, a blocking unit matched with the corresponding supporting plate 11 is disposed on the corresponding side plate 2, the blocking unit includes a blocking plate 13 disposed on one side of the corresponding supporting plate 11, a fixing plate 17 is disposed at the bottom of the corresponding supporting plate 11, one side of the fixing plate 17 is fixedly connected to one side of the corresponding side plate 2, the corresponding blocking plate 13 penetrates through the fixing plate 17, a movable plate 14 is fixedly connected to the bottom of the corresponding blocking plate 13, the top of the movable plate 14 is connected to the bottom of the corresponding fixing plate 17 through a tension spring 15, one side of the corresponding blocking plate 13 is in contact with one side of the corresponding supporting plate 11, one side fixedly connected with pull ring 16 of limiting plate 9 is kept away from to backup pad 11, move down through drive fly leaf 14 and baffle 13, make baffle 13 no longer be located one side of backup pad 11, extension spring 15 is in tensile state, remove the injecion to backup pad 11 position, keep away from curb plate 2 through drive backup pad 11 and remove, make limiting plate 9 remove to in the second recess 10, can remove the injecion to movable block 7 and fixture block 8 position, make movable block 7 can drive fixture block 8 and break away from draw-in groove 6, remove and place the fixed of board 4 to the quartz boat, and then drive quartz boat and place board 4 and remove, make movable block 7 break away from first recess 5, can accomplish dismantling that the quartz boat placed board 4.
EXAMPLE III
On the basis of embodiment one, by figure 1, figure 4 and figure 5 give, movable block 7 is located first recess 5, fixture block 8 is located draw-in groove 6, one side of limiting plate 9 contacts with one side of movable block 7, the slip unit is including setting up in slider 19 of movable block 7 one side, one side of slider 19 and one side fixed connection of movable block 7, two spouts 18 have been seted up to one side that board 4 was placed to the quartz boat, slider 19 is located spout 18, spout 18 and slider 19's cross section is the T shape structure, cooperation through spout 18 and slider 19, make the smooth removal of board 4 is placed to the relative quartz boat of movable block 7, adjust the height that board 4 was placed to the quartz boat, and then drive movable block 7 inserts in first recess 5, move through drive movable block 7, make fixture block 8 insert in the draw-in groove 6 that corresponds, and then spacing quartz boat places the height of board 4.
Example four
On the basis of the first embodiment, as shown in fig. 1 and 4, a handle 20 is fixedly connected to the top of the movable block 7, a plurality of supporting blocks 21 are arranged at the bottom of the supporting seat 1, rollers 22 are arranged at the bottoms of the supporting blocks 21, the movable block 7 is conveniently driven to move through the arranged handle 20, and the whole device is conveniently driven to move through the matching of the supporting blocks 21 and the rollers 22.
The working principle is as follows: during operation, the movable block 7 is stably moved relative to the quartz boat placing plate 4 by matching the sliding groove 18 and the sliding block 19, the height of the quartz boat placing plate 4 is adjusted, the movable block 7 is driven to be inserted into the first groove 5, the movable block 7 is driven to move, the clamping block 8 is inserted into the corresponding clamping groove 6, the height of the quartz boat placing plate 4 is limited, similarly, the heights of other quartz boat placing plates 4 are adjusted according to the specifications of quartz boats, the clamping block 8 on the quartz boat placing plate 4 is inserted into the corresponding clamping groove 6, the quartz boat placing plate 4 is installed, the limiting plate 9 is driven to move, the limiting plate 9 is contacted with the movable block 7, the positions of the movable block 7 and the clamping block 8 are limited by the limiting plate 9, the clamping block 8 is prevented from being separated from the corresponding clamping groove 6, limitation on the position of the quartz boat placing plate 4 can be completed, and the movable plate 14 and the baffle 13 are driven to move downwards, make baffle 13 no longer be located one side of backup pad 11, extension spring 15 is in tensile state, remove the injecing to backup pad 11 position, keep away from 2 removals of curb plate through drive backup pad 11, make limiting plate 9 remove to in the second recess 10, can remove the injecing to movable block 7 and fixture block 8 position, make movable block 7 can drive fixture block 8 and break away from draw-in groove 6, remove and place the fixed of board 4 to the quartz boat, and then drive quartz boat and place board 4 and remove, make movable block 7 break away from first recess 5, can accomplish dismantling that the quartz boat placed board 4.
Of course, the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and the changes, modifications, additions or substitutions made by those skilled in the art within the scope of the present invention should also belong to the protection scope of the present invention.
Claims (7)
1. The utility model provides a novel supporting quartz boat workstation of using of diffusion furnace, includes supporting seat (1), its characterized in that: the top fixedly connected with curb plate (2) of supporting seat (1), top fixedly connected with roof (3) of curb plate (2), one side of curb plate (2) is equipped with a plurality of quartz boats and places board (4), two first recesses (5) have been seted up to one side of curb plate (2), a plurality of draw-in grooves (6) have been seted up to one side inner wall of first recess (5), one side that board (4) were placed to the quartz boat is equipped with two movable blocks (7), board (4) are placed through the slip unit connection to movable block (7) and quartz boat, the equal fixedly connected with fixture block (8) in one side that two movable blocks (7) are close to mutually, be equipped with limiting plate (9) in first recess (5), second recess (10) have been seted up to one side inner wall of first recess (5), be equipped with on curb plate (2) with limiting plate (9) matched with locating component.
2. The quartz boat table matched with the novel diffusion furnace as claimed in claim 1, wherein: locating component includes two connecting plates (12) that set up in second recess (10), and the both sides of curb plate (2) all are equipped with backup pad (11), one side fixed connection of one end and limiting plate (9) of connecting plate (12), and one side inner wall of second recess (10) is run through to the other end of connecting plate (12), and one side fixed connection of one end of connecting plate (12) and backup pad (11), is equipped with on curb plate (2) and blocks the unit with backup pad (11) matched with.
3. The quartz boat workbench matched with the novel diffusion furnace as set forth in claim 2, is characterized in that: the blocking unit comprises a baffle (13) arranged on one side of a supporting plate (11), a fixing plate (17) is arranged at the bottom of the supporting plate (11), one side of the fixing plate (17) is fixedly connected with one side of a side plate (2), the baffle (13) penetrates through the fixing plate (17), a movable plate (14) is fixedly connected to the bottom of the baffle (13), and the top of the movable plate (14) is connected with the bottom of the fixing plate (17) through a tension spring (15).
4. The quartz boat workbench matched with the novel diffusion furnace as set forth in claim 3, is characterized in that: one side of baffle (13) contacts with one side of backup pad (11), and one side fixedly connected with pull ring (16) of limiting plate (9) are kept away from in backup pad (11).
5. The quartz boat table matched with the novel diffusion furnace as claimed in claim 1, wherein: the movable block (7) is located in the first groove (5), the clamping block (8) is located in the clamping groove (6), and one side of the limiting plate (9) is in contact with one side of the movable block (7).
6. The quartz boat table matched with the novel diffusion furnace as claimed in claim 1, wherein: the sliding unit comprises a sliding block (19) arranged on one side of the movable block (7), one side of the sliding block (19) is fixedly connected with one side of the movable block (7), two sliding grooves (18) are formed in one side of the quartz boat placing plate (4), the sliding block (19) is located in the sliding grooves (18), and the cross sections of the sliding grooves (18) and the sliding block (19) are of T-shaped structures.
7. The quartz boat table matched with the novel diffusion furnace as claimed in claim 1, wherein: the top fixedly connected with handle (20) of movable block (7), the bottom of supporting seat (1) is equipped with a plurality of supporting shoes (21), and the bottom of supporting shoe (21) is equipped with gyro wheel (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220330240.8U CN217214738U (en) | 2022-02-18 | 2022-02-18 | Novel quartz boat workbench matched with diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220330240.8U CN217214738U (en) | 2022-02-18 | 2022-02-18 | Novel quartz boat workbench matched with diffusion furnace |
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| Publication Number | Publication Date |
|---|---|
| CN217214738U true CN217214738U (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220330240.8U Active CN217214738U (en) | 2022-02-18 | 2022-02-18 | Novel quartz boat workbench matched with diffusion furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117567011A (en) * | 2024-01-17 | 2024-02-20 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz boat annealing device and method thereof |
-
2022
- 2022-02-18 CN CN202220330240.8U patent/CN217214738U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117567011A (en) * | 2024-01-17 | 2024-02-20 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz boat annealing device and method thereof |
| CN117567011B (en) * | 2024-01-17 | 2024-03-22 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz boat annealing device and method thereof |
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