CN217210960U - Water temperature and water flow monitoring device for silicon epitaxy equipment - Google Patents
Water temperature and water flow monitoring device for silicon epitaxy equipment Download PDFInfo
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- CN217210960U CN217210960U CN202220299026.0U CN202220299026U CN217210960U CN 217210960 U CN217210960 U CN 217210960U CN 202220299026 U CN202220299026 U CN 202220299026U CN 217210960 U CN217210960 U CN 217210960U
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Abstract
The utility model relates to a silicon epitaxy process technology field just discloses a silicon epitaxy equips temperature rivers monitoring device, including the sensor main part, the sensor main part is digital flow and temperature integral type sensor, sensor main part one side level is provided with the pipeline, be provided with the connecting pipe between sensor main part and the pipeline. According to the water temperature and water flow monitoring device for the silicon epitaxial equipment, digital flow and temperature integrated sensors are additionally arranged on all branches, so that the reaction is sensitive and reliable, the cooling water flow and temperature of each branch in the actual process can be monitored in real time on line, and reliable data support is provided for the improvement of equipment and process; the digital flow and temperature integrated sensor is small in size, can be installed in a limited space, does not need to change the arrangement of a water pipe of original equipment, and does not influence the cooling effect; the pipeline does not need to be replaced, and the installation is convenient; the connecting pipe is matched with pipelines with different sizes by using the connecting mechanism, so that the operations of cutting, punching and the like are not needed on site, and the construction is convenient.
Description
Technical Field
The utility model relates to a silicon epitaxy process technology field specifically is a silicon epitaxy equips temperature rivers monitoring device.
Background
The prior water channel of the silicon epitaxial equipment only has total flow monitoring, and does not have flow monitoring of each branch, the flow of the tested branch needs manual testing of one branch, the operation is complex, and real-time online monitoring cannot be realized, the prior water channel only has total inflow and return water temperature monitoring (pointer type water temperature meter), the temperature response is not sensitive enough, the water temperature of each branch cannot be monitored, a mechanical float pointer type flow meter and a pointer type water temperature meter are only added on a front flange and a rear flange of partial equipment, and the mechanical float type flow meter has the defects that a float pointer is blocked, the actual flow cannot be accurately reflected, and the like, so the water temperature and flow monitoring device of the silicon epitaxial equipment is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a temperature rivers monitoring device is equipped in silicon epitaxy to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a water temperature and water flow monitoring device for silicon epitaxial equipment comprises a sensor main body, wherein the sensor main body is a digital flow and temperature integrated sensor, a pipeline is horizontally arranged on one side of the sensor main body, a connecting pipe is arranged between the sensor main body and the pipeline, the left end of the connecting pipe is connected with the pipeline through a connecting mechanism, and the right end of the connecting pipe is fixedly connected with one end of the sensor main body in a through manner;
the connecting mechanism comprises a first connecting cylinder, a limiting ring, a sealing sleeve, a second connecting cylinder, a clamping cavity, an extrusion piece, a clamping plate, a metal elastic sheet, a bolt and an auxiliary strip, wherein the first connecting cylinder is horizontally arranged between the left end of the connecting pipe and the right end of the pipeline, the left end face of the first connecting cylinder is communicated with the connecting pipe, the left end of the connecting pipe is communicated with the right end of the first connecting cylinder and extends to the inside of the first connecting cylinder, the right end of the pipeline extends to the inside of the first connecting cylinder, the sealing sleeve is horizontally and fixedly arranged on the side face of the left end of the connecting pipe and communicated with the inside of the connecting pipe, the second connecting cylinder is fixedly arranged on the outer surface of the pipeline, the right end of the second connecting cylinder is communicated with the connecting cylinder, and the right end of the second connecting cylinder extends to the inside of the first connecting cylinder.
Preferably, the connecting tube is linear or L-shaped.
Preferably, the fixed cover of spacing ring is established on the connecting pipe left end surface, spacing ring surface and a connecting cylinder inner wall sliding connection, the spacing ring side sets up with a connecting cylinder inner wall joint each other.
Preferably, the inner diameter of the sealing sleeve is gradually reduced from left to right, the outer side surface of the sealing sleeve is in sliding connection with the inner wall of the connecting cylinder, the right end of the pipeline extends into the sealing sleeve, and the right end surface of the pipeline is in sealing extrusion contact with the inner wall of the sealing sleeve.
Preferably, the outer surface of the right end of the connecting cylinder II is in threaded connection with the inner wall of the connecting cylinder I, a circle of anti-skidding grooves are uniformly formed in the outer surface of the right end of the connecting cylinder I along the axis of the connecting cylinder I, and the sealing sleeve is made of rubber materials.
Preferably, the inside two right-hand member positions of connecting cylinder that correspond in a connecting cylinder top have vertically seted up the joint chamber, the extrusion piece level sets up in the joint intracavity portion, sliding connection about extrusion piece side and the joint intracavity wall, the vertical fixed setting of joint board is in the extrusion piece bottom surface, the joint board bottom runs through joint intracavity portion bottom surface and extends to a connecting cylinder inside, metal shrapnel sets up in the extrusion piece below, metal shrapnel top surface and extrusion piece bottom surface extrusion contact, metal shrapnel bottom and the inside bottom surface fixed connection of joint chamber, the vertical setting in a connecting cylinder top in bolt correspondence joint chamber position, a bolt bottom screw thread run through a connecting cylinder top surface extend to joint intracavity portion and with extrusion piece top surface extrusion contact.
Preferably, the outer surface of a connecting cylinder corresponds joint board bottom level and opens and be equipped with the joint groove, the joint groove encloses into the round along two axes of a connecting cylinder and evenly sets up at the outer surface of a connecting cylinder, joint board bottom extend to joint inslot portion and with the mutual joint setting of joint inslot wall, the setting of supplementary strip along a radial vertical setting of connecting cylinder, the supplementary strip corresponds fixed the inlaying setting in a connecting cylinder left end side of joint board position.
Compared with the prior art, the beneficial effects of the utility model are that: according to the water temperature and water flow monitoring device for the silicon epitaxial equipment, digital flow and temperature integrated sensors are additionally arranged on all branches, so that the reaction is sensitive and reliable, the cooling water flow and temperature of each branch in the actual process can be monitored in real time on line, and reliable data support is provided for the improvement of equipment and process; the digital flow and temperature integrated sensor is small in size, can be installed in a limited space, does not need to change the arrangement of a water pipe of original equipment, and does not influence the cooling effect; the pipeline does not need to be replaced, and the installation is convenient; the connecting pipe is matched with pipelines with different sizes by using the connecting mechanism, so that the operations of cutting, punching and the like are not needed on site, and the construction is convenient.
Drawings
FIG. 1 is a schematic view of the overall three-dimensional structure of the present invention;
fig. 2 is a schematic front structural view of a connection mechanism according to a first embodiment of the present invention;
fig. 3 is a schematic front structural view of a connecting mechanism in a second embodiment of the present invention;
fig. 4 is a front structural sectional view of the connecting mechanism of the present invention;
fig. 5 is an enlarged view of the area a in fig. 4 according to the present invention.
In the figure: the sensor comprises a sensor body 1, a pipeline 2, a connecting pipe 3, a connecting mechanism 4, a first connecting barrel 401, an anti-skidding groove 402, a limiting ring 403, a sealing sleeve 404, a second connecting barrel 405, a clamping groove 406, a clamping cavity 407, an extrusion sheet 408, a clamping plate 409, a metal elastic sheet 410, a bolt 411 and an auxiliary strip 412.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution:
the first embodiment is as follows:
a water temperature and water flow monitoring device of silicon epitaxial equipment comprises a sensor main body 1, wherein the sensor main body 1 is a digital flow and temperature integrated sensor, a pipeline 2 is horizontally arranged on one side of the sensor main body 1, a connecting pipe 3 is arranged between the sensor main body 1 and the pipeline 2, the connecting pipe 3 is linear in shape, the left end of the connecting pipe 3 is connected with the pipeline 2 through a connecting mechanism 4, and the right end of the connecting pipe 3 is fixedly communicated with one end of the sensor main body 1;
the connecting mechanism 4 comprises a first connecting cylinder 401, a limiting ring 403, a sealing sleeve 404, a second connecting cylinder 405, a clamping cavity 407, an extrusion piece 408, a clamping plate 409, a metal spring piece 410, a bolt 411 and an auxiliary strip 412, wherein the first connecting cylinder 401 is horizontally arranged between the left end of the connecting pipe 3 and the right end of the pipeline 2, the left end surface of the first connecting cylinder 401 is arranged in a through manner, the left end of the connecting pipe 3 penetrates through the right side surface of the first connecting cylinder 401 and extends into the first connecting cylinder 401, the right end of the pipeline 2 extends into the first connecting cylinder 401, the sealing sleeve 404 is horizontally and fixedly arranged on the left end side surface of the connecting pipe 3 and is arranged in a through manner with the inside of the connecting pipe 3, the second connecting cylinder 405 is fixedly arranged on the outer surface of the pipeline 2, the right end of the second connecting cylinder 405 is arranged in a through manner, the right end of the second connecting cylinder 405 extends into the first connecting cylinder 401, the limiting ring 403 is fixedly arranged on the left end surface of the connecting pipe 3, the outer surface of the limiting ring 403 is connected with the inner wall of the first connecting cylinder 401 in a sliding manner, the side surface of the limiting ring 403 and the inner wall of the first connecting cylinder 401 are mutually clamped and arranged, the inner diameter of the sealing sleeve 404 is gradually reduced from left to right, the outer side surface of the sealing sleeve 404 is in sliding connection with the inner wall of the first connecting cylinder 401, the right end of the pipeline 2 extends into the sealing sleeve 404, the right end surface of the pipeline 2 is in sealing and extruding contact with the inner wall of the sealing sleeve 404, the outer surface of the right end of the second connecting cylinder 405 is in threaded connection with the inner wall of the first connecting cylinder 401, the outer surface of the right end of the first connecting cylinder 401 is encircled into a circle along the axis of the first connecting cylinder 401, anti-skidding grooves 402 are uniformly formed in the circle, and the sealing sleeve 404 is made of rubber materials;
a clamping cavity 407 is vertically formed in the top end of the first connecting cylinder 401 corresponding to the right end of the second connecting cylinder 405, the extrusion piece 408 is horizontally arranged in the clamping cavity 407, the side surface of the extrusion piece 408 is vertically and slidably connected with the inner wall of the clamping cavity 407, the clamping plate 409 is vertically and fixedly arranged on the bottom surface of the extrusion piece 408, the bottom end of the clamping plate 409 penetrates through the bottom surface of the clamping cavity 407 and extends into the first connecting cylinder 401, the metal spring piece 410 is arranged below the extrusion piece 408, the top surface of the metal spring piece 410 is in pressing contact with the bottom surface of the extrusion piece 408, the bottom end of the metal spring piece 410 is fixedly connected with the bottom surface of the clamping cavity 407, the bolt 411 is vertically arranged above the first connecting cylinder 401 corresponding to the clamping cavity 407, the bottom end thread of the bolt 411 penetrates through the top surface of the first connecting cylinder 401 and extends into the clamping cavity 407 and is in pressing contact with the top surface of the extrusion piece 408, a clamping groove 406 is horizontally formed in the outer surface of the second connecting cylinder 405 corresponding to the bottom end of the clamping plate 409, the clamping groove 406 is uniformly arranged on the outer surface of the second connecting cylinder 405 along the axis of the second connecting cylinder 405, the bottom end of the clamping plate 409 extends into the clamping groove 406 and is clamped with the inner wall of the clamping groove 406, the auxiliary strip 412 is vertically arranged along the radial direction of the first connecting cylinder 401, and the auxiliary strip 412 is fixedly embedded on the left end side face of the first connecting cylinder 401 corresponding to the position of the clamping plate 409.
Example two:
a water temperature and water flow monitoring device for silicon epitaxial equipment comprises a sensor main body 1, wherein the sensor main body 1 is a digital flow and temperature integrated sensor, a pipeline 2 is horizontally arranged on one side of the sensor main body 1, a connecting pipe 3 is arranged between the sensor main body 1 and the pipeline 2, the connecting pipe 3 is L-shaped, the left end of the connecting pipe 3 is connected with the pipeline 2 through a connecting mechanism 4, and the right end of the connecting pipe 3 is fixedly communicated with one end of the sensor main body 1;
the connecting mechanism 4 comprises a first connecting cylinder 401, a limiting ring 403, a sealing sleeve 404, a second connecting cylinder 405, a clamping cavity 407, an extrusion piece 408, a clamping plate 409, a metal spring piece 410, a bolt 411 and an auxiliary strip 412, wherein the first connecting cylinder 401 is horizontally arranged between the left end of the connecting pipe 3 and the right end of the pipeline 2, the left end surface of the first connecting cylinder 401 is arranged in a through manner, the left end of the connecting pipe 3 penetrates through the right side surface of the first connecting cylinder 401 and extends into the first connecting cylinder 401, the right end of the pipeline 2 extends into the first connecting cylinder 401, the sealing sleeve 404 is horizontally and fixedly arranged on the left end side surface of the connecting pipe 3 and is arranged in a through manner with the inside of the connecting pipe 3, the second connecting cylinder 405 is fixedly arranged on the outer surface of the pipeline 2, the right end of the second connecting cylinder 405 is arranged in a through manner, the right end of the second connecting cylinder 405 extends into the first connecting cylinder 401, the limiting ring 403 is fixedly arranged on the left end surface of the connecting pipe 3, the outer surface of the limiting ring 403 is connected with the inner wall of the first connecting cylinder 401 in a sliding manner, the side surface of a limiting ring 403 and the inner wall of a first connecting cylinder 401 are mutually clamped and arranged, the inner diameter of a sealing sleeve 404 is gradually reduced from left to right, the outer side surface of the sealing sleeve 404 is in sliding connection with the inner wall of the first connecting cylinder 401, the right end of a pipeline 2 extends into the sealing sleeve 404, the right end surface of the pipeline 2 is in sealing and extruding contact with the inner wall of the sealing sleeve 404, the outer surface of the right end of a second connecting cylinder 405 is in threaded connection with the inner wall of the first connecting cylinder 401, the outer surface of the right end of the first connecting cylinder 401 encloses a circle along the axis of the first connecting cylinder 401 and is uniformly provided with anti-skidding grooves 402, the sealing sleeve 404 is made of rubber materials, digital flow and temperature integrated sensors are additionally arranged on each branch, the response is sensitive and reliable, the cooling water flow and temperature of each branch in the actual process can be monitored in real time on line, and reliable data support is provided for the improvement of equipment and the process; the digital flow and temperature integrated sensor is small in size, can be installed in a limited space, does not need to change the arrangement of a water pipe of original equipment, and does not influence the cooling effect; the pipeline does not need to be replaced, and the installation is convenient; the connecting mechanism 4 is utilized to enable the connecting pipe 3 to be matched with the pipelines 2 with different sizes, so that the operations of cutting, punching and the like are not needed on site, and the construction is convenient;
a clamping cavity 407 is vertically formed in the top end of the first connecting cylinder 401 corresponding to the right end of the second connecting cylinder 405, the extrusion piece 408 is horizontally arranged in the clamping cavity 407, the side surface of the extrusion piece 408 is vertically and slidably connected with the inner wall of the clamping cavity 407, the clamping plate 409 is vertically and fixedly arranged on the bottom surface of the extrusion piece 408, the bottom end of the clamping plate 409 penetrates through the bottom surface of the clamping cavity 407 and extends into the first connecting cylinder 401, the metal spring piece 410 is arranged below the extrusion piece 408, the top surface of the metal spring piece 410 is in pressing contact with the bottom surface of the extrusion piece 408, the bottom end of the metal spring piece 410 is fixedly connected with the bottom surface of the clamping cavity 407, the bolt 411 is vertically arranged above the first connecting cylinder 401 corresponding to the clamping cavity 407, the bottom end thread of the bolt 411 penetrates through the top surface of the first connecting cylinder 401 and extends into the clamping cavity 407 and is in pressing contact with the top surface of the extrusion piece 408, a clamping groove 406 is horizontally formed in the outer surface of the second connecting cylinder 405 corresponding to the bottom end of the clamping plate 409, the clamping groove 406 is uniformly arranged on the outer surface of the second connecting cylinder 405 along the axis of the second connecting cylinder 405, the bottom end of the clamping plate 409 extends into the clamping groove 406 and is mutually clamped with the inner wall of the clamping groove 406, the auxiliary strip 412 is vertically arranged along the radial direction of the first connecting cylinder 401, the auxiliary strip 412 is fixedly embedded in the left end side face of the first connecting cylinder 401 corresponding to the position of the clamping plate 409, and a digital flow and temperature integrated sensor is additionally arranged on each branch, so that the reflection is sensitive and reliable, the cooling water flow and temperature of each branch in the actual process can be monitored in real time on line, and reliable data support is provided for the improvement of equipment and the process; the digital flow and temperature integrated sensor is small in size, can be installed in a limited space, does not need to change the arrangement of a water pipe of original equipment, and does not influence the cooling effect; the pipeline does not need to be replaced, and the installation is convenient; utilize coupling mechanism 4 to make the not unidimensional pipeline 2 of connecting pipe 3 adaptation, the operation such as on-the-spot need not cutting, punches, and the construction is convenient.
When the system is used, the digital flow and temperature integrated sensor is additionally arranged on each branch, so that the system is sensitive and reliable in reflection, can monitor the cooling water flow and temperature of each branch in the actual process on line in real time, and provides reliable data support for the improvement of equipment and process; the digital flow and temperature integrated sensor has small volume, can realize installation in a limited space, does not need to change the arrangement of a water pipe of the original equipment, and does not influence the cooling effect; the pipeline does not need to be replaced, and the installation is convenient; utilize coupling mechanism 4 to make the not unidimensional pipeline 2 of connecting pipe 3 adaptation, the operation such as on-the-spot need not cutting, punches, and the construction is convenient.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a silicon epitaxy equips temperature rivers monitoring device, includes sensor main part (1), its characterized in that: the sensor comprises a sensor main body (1), a pipeline (2) is horizontally arranged on one side of the sensor main body (1), a connecting pipe (3) is arranged between the sensor main body (1) and the pipeline (2), the left end of the connecting pipe (3) is connected with the pipeline (2) through a connecting mechanism (4), and the right end of the connecting pipe (3) is fixedly connected with one end of the sensor main body (1) in a penetrating manner;
the connecting mechanism (4) comprises a first connecting cylinder (401), a limiting ring (403), a sealing sleeve (404), a second connecting cylinder (405), a clamping cavity (407), an extrusion sheet (408), a clamping plate (409), a metal elastic sheet (410), a bolt (411) and an auxiliary strip (412), wherein the first connecting cylinder (401) is horizontally arranged between the left end of the first connecting cylinder (3) and the right end of the pipeline (2), the left end surface of the first connecting cylinder (401) is arranged in a penetrating manner, the left end of the first connecting cylinder (3) penetrates through the right side surface of the first connecting cylinder (401) and extends into the first connecting cylinder (401), the right end of the pipeline (2) extends into the first connecting cylinder (401), the sealing sleeve (404) is horizontally and fixedly arranged on the left end side surface of the first connecting pipe (3) and is arranged in a penetrating manner with the inside of the connecting pipe (3), the second connecting cylinder (405) is fixedly sleeved on the outer surface of the pipeline (2), and the right end of the second connecting cylinder (405) is arranged in a penetrating manner, the right end of the second connecting cylinder (405) extends into the first connecting cylinder (401).
2. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 1, wherein: the connecting pipe (3) is linear or L-shaped.
3. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 1, wherein: spacing ring (403) fixed cover is established at connecting pipe (3) left end surface, spacing ring (403) surface and connecting cylinder one (401) inner wall sliding connection, spacing ring (403) side sets up with the mutual joint of connecting cylinder one (401) inner wall.
4. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 1, wherein: the inner diameter of the sealing sleeve (404) is gradually reduced from left to right, the outer side surface of the sealing sleeve (404) is in sliding connection with the inner wall of the connecting cylinder I (401), the right end of the pipeline (2) extends into the sealing sleeve (404), and the right end surface of the pipeline (2) is in sealing extrusion contact with the inner wall of the sealing sleeve (404).
5. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 1, wherein: the outer surface of the right end of the second connecting cylinder (405) is in threaded connection with the inner wall of the first connecting cylinder (401), the outer surface of the right end of the first connecting cylinder (401) is surrounded into a circle along the axis of the first connecting cylinder (401), anti-skid grooves (402) are uniformly formed in the circle, and the sealing sleeve (404) is made of rubber materials.
6. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 1, wherein: connecting cylinder two (405) right-hand member position vertical joint chamber (407) of having seted up is corresponded to connecting cylinder one (401) top inside, extrusion piece (408) level sets up inside joint chamber (407), sliding connection about extrusion piece (408) side and joint chamber (407) inner wall, joint plate (409) vertical fixed setting is in extrusion piece (408) bottom surface, joint plate (409) bottom is run through inside bottom surface of joint chamber (407) and is extended to inside connecting cylinder one (401), metal shrapnel (410) set up in extrusion piece (408) below, metal shrapnel (410) top surface and extrusion piece (408) bottom surface extrusion contact, metal shrapnel (410) bottom and the inside fixed connection of joint chamber (407) bottom surface, bolt (411) correspond vertical setting in connecting cylinder one (401) position, bolt (411) bottom screw thread runs through connecting cylinder one (401) top surface and extends to inside joint chamber (407) and with extrusion piece (407), (407) inside 408) The top surfaces are in pressing contact.
7. The silicon epitaxy equipment water temperature and water flow monitoring device as claimed in claim 6, wherein: the outer surface of the second connecting cylinder (405) is horizontally provided with a clamping groove (406) corresponding to the bottom end of the clamping plate (409), the clamping groove (406) surrounds a circle along the axis of the second connecting cylinder (405) and is uniformly formed in the outer surface of the second connecting cylinder (405), the bottom end of the clamping plate (409) extends into the clamping groove (406) and is clamped with the inner wall of the clamping groove (406), the auxiliary strip (412) is vertically arranged along the radial direction of the first connecting cylinder (401), and the auxiliary strip (412) is fixedly embedded in the left end side face of the first connecting cylinder (401) corresponding to the position of the clamping plate (409).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220299026.0U CN217210960U (en) | 2022-02-14 | 2022-02-14 | Water temperature and water flow monitoring device for silicon epitaxy equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220299026.0U CN217210960U (en) | 2022-02-14 | 2022-02-14 | Water temperature and water flow monitoring device for silicon epitaxy equipment |
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| Publication Number | Publication Date |
|---|---|
| CN217210960U true CN217210960U (en) | 2022-08-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220299026.0U Active CN217210960U (en) | 2022-02-14 | 2022-02-14 | Water temperature and water flow monitoring device for silicon epitaxy equipment |
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| CN (1) | CN217210960U (en) |
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Denomination of utility model: A silicon epitaxial equipment water temperature and flow monitoring device Effective date of registration: 20230816 Granted publication date: 20220816 Pledgee: The Bank of Jiangsu Limited by Share Ltd. Wuxi Helie branch Pledgor: Jiangsu aipeak Semiconductor Equipment Co.,Ltd. Registration number: Y2023980052341 |