CN217210357U

CN217210357U - Diffusion furnace door protection device

Info

Publication number: CN217210357U
Application number: CN202220224112.5U
Authority: CN
Inventors: 赵海军; 孟庆昌
Original assignee: Qingdao Haitongda Microelectronics Co ltd
Current assignee: Qingdao Haitongda Microelectronics Co ltd
Priority date: 2022-01-27
Filing date: 2022-01-27
Publication date: 2022-08-16
Anticipated expiration: 2032-01-27

Abstract

The utility model relates to a diffusion furnace technical field provides a diffusion furnace gate protector, including diffusion furnace body, lid, adjustment mechanism and seal assembly, the lid is installed on the furnace gate on the diffusion furnace body, the furnace gate inner wall is provided with sealing ring, the surface mounting of diffusion furnace body has articulated elements and retaining member. The utility model discloses a seal with closing plate and the sealing ring on the lid compress tightly, lock the lid through the retaining member, make the spring of reference column surface mounting play sealed effect to the closing plate effect to the blast pipe is installed at the furnace gate top, can discharge high temperature gas when opening, reduce the potential safety hazard of using; through rotating the regulating wheel, can make the screw rod rotate to make the connecting gear drive the rack motion, remove the cardboard, slide the sliding tray that the cardboard was seted up in the mounting panel inner chamber, thereby adjust the cardboard, further improve the leakproofness of lid to the furnace gate.

Description

Diffusion furnace gate protector

Technical Field

The utility model belongs to the technical field of the diffusion furnace, especially, relate to a diffusion furnace gate protector.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like. The furnace door is an important component for closing the furnace body to create a proper working environment, and has higher requirement on sealing property.

In the use of diffusion furnace, be in the high temperature in the diffusion furnace, at the in-process of opening the furnace gate, the high temperature in the stove can emerge from the furnace gate, poses the threat to user's safety, and in the in-process that the diffusion furnace used, there is higher requirement in the leakproofness of furnace gate position, if furnace gate department leakproofness is not strong, also can pose the threat to user's safety.

However, the high-temperature operation environment in the furnace body of the existing diffusion furnace easily causes the over-high temperature of the furnace door, easily causes the deformation and aging of a sealing element, influences the sealing effect, does not have the measure of protecting the high-temperature gas in the furnace when the furnace door is opened, and easily causes the potential safety hazard when the furnace door is opened, so that the sealing effect of the furnace door of the diffusion furnace needs to be enhanced, and the high-temperature gas which appears when the furnace door is opened is treated, thereby achieving the protection effect on a user.

SUMMERY OF THE UTILITY MODEL

Based on the above background, the utility model aims at providing a diffusion furnace gate protector can improve the sealed effect of furnace gate, guarantees the security of operation to gas to the high temperature discharges, reduces the threat to the user when opening the door.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a diffusion furnace door protection device comprises a diffusion furnace body, a cover body, an adjusting mechanism and a sealing assembly, wherein the cover body is installed on a furnace door on the diffusion furnace body;

the adjusting machine also comprises an adjusting rod and a connecting gear, the connecting gear is arranged on the surface of the adjusting rod, and the adjusting rod is rotatably arranged on the mounting plate;

the sealing assembly is characterized by further comprising a positioning column, wherein a baffle is installed at one end of the positioning column, and the positioning column is installed in the installation plate through the baffle.

The adjusting mechanism further comprises a clamping plate and a rack, the rack is installed on the surface of the clamping plate, a sliding groove is formed in the installing plate, and the surface of the clamping plate is connected with the sliding groove in a sliding mode.

The adjusting wheel is installed to the one end of adjusting the pole, the adjusting wheel is installed in a protection section of thick bamboo, the surface mounting of lid has a protection section of thick bamboo.

The inner wall of the furnace door is provided with a clamping groove, and the surface of the clamping plate is movably inserted into the inner wall of the clamping groove.

The surface mounting of lid has the locating piece, the lid passes through the locating piece to be connected with the articulated elements, the retaining member is connected to one side of lid.

The sealing assembly further comprises a sealing plate, the sealing plate is installed at one end of the positioning column, and the sealing plate is connected with the mounting plate through the positioning column.

The surface mounting of reference column has the spring, the closing plate is connected to the one end of spring, the surface and the sealing ring of closing plate are connected.

The surface mounting of protection section of thick bamboo has the pull rod, the surface mounting of lid has inlet tube and drain pipe, the surface mounting of furnace gate has the blast pipe.

The utility model discloses following beneficial effect has:

1. the utility model discloses a design of sealing washer and seal assembly isotructure, through passing through the articulated elements with the lid and installing on the furnace gate, gland plate on with the lid compresses tightly with the sealing washer of furnace gate inner wall sealed, lock the lid through the retaining member, and simultaneously, make reference column surface mounting's spring act on the closing plate, play sealed effect, and install the mounting panel surface in the furnace gate, be provided with the sealing layer, can further improve sealed effect, and the blast pipe is installed at the furnace gate top, can be when opening, discharge high-temperature gas, reduce the potential safety hazard of using.

2. The utility model discloses a mounting panel and adjustment mechanism isotructure's design through rotating a protection section of thick bamboo inner chamber, installs the regulating wheel on adjusting the pole, can make the screw rod rotate to it is rotatory to drive the connection gear, because of connecting gear and rack toothing and connecting, can remove the cardboard of installing the rack, slides the cardboard in the sliding tray that the mounting panel inner chamber was seted up, thereby adjusts the cardboard, further improves the leakproofness of lid to the furnace gate, strengthens its protective effect.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

Fig. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the furnace door structure of the present invention;

FIG. 3 is a schematic view of the sealing plate structure of the present invention;

fig. 4 is a schematic view of the structure of the clamping plate of the present invention.

The reference numbers illustrate:

1. a diffusion furnace body; 2. a furnace door; 3. an articulation member; 4. positioning blocks; 5. a locking member; 6. an exhaust pipe; 7. a sealing retainer ring; 8. a card slot; 9. a cover body; 10. a protective cylinder; 11. a pull rod; 12. a water inlet pipe; 13. a drain pipe; 14. mounting a plate; 15. an adjustment wheel; 16. adjusting a rod; 17. a connecting gear; 18. clamping a plate; 19. a rack; 20. a sliding groove; 21. a sealing plate; 22. a positioning column; 23. a spring; 24. a limiting ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front, rear … …) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

Example 1

Referring to fig. 1, 2 and 3, the diffusion furnace door protection device comprises a diffusion furnace body 1, a cover body 9, an adjusting mechanism and a sealing assembly, wherein the cover body 9 is installed on a furnace door 2 on the diffusion furnace body 1, a sealing retainer ring 7 is arranged on the inner wall of the furnace door 2, an articulated element 3 and a locking member 5 are installed on the surface of the diffusion furnace body 1, a protection cylinder 10 is installed on the surface of one side of the cover body 9, an installation plate 14 is installed on the other side of the cover body 9, and a limiting ring 24 is installed on the surface of the installation plate 14, so that the sealing effect of the installation plate 14 can be improved.

Wherein, the sealing retainer ring 7 is used for improving the sealed effect of lid 9, reduces the potential safety hazard that the device used, and articulated elements 3 is the subassembly of carrying out the installation to lid 9, can conveniently open the closure to lid 9, and retaining member 5 plays the effect of locking lid 9 for compelling the formula handle, and articulated elements 3 and the concrete structural connection relation of retaining member 5 can refer to among the prior art.

The surface of the cover body 9 is provided with a water inlet pipe 12 and a water outlet pipe 13, and the surface of the furnace door 2 is provided with an exhaust pipe 6. The surface mounting of lid 9 has locating piece 4, and lid 9 is connected with articulated elements 3 through locating piece 4, and retaining member 5 is connected to one side of lid 9.

Specifically, inlet tube 12 and drain pipe 13 are the subassembly that carries out circulating water cooling to lid 9, and the inner chamber of lid 9 is the screw pipeline, and inlet tube 12 and drain pipe 13 are connected respectively to the pipeline both ends, and inlet tube 12 and the external water source of drain pipe 13 and water pipe can reduce the temperature of lid 9, prevent that the high temperature from accelerating the sealing member ageing.

The sealing assembly further comprises a positioning column 22, a baffle is installed at one end of the positioning column 22, the positioning column 22 is installed on the installation plate 14 through the baffle, the sealing assembly further comprises a sealing plate 21, the sealing plate 21 is installed at one end of the positioning column 22, and the sealing plate 21 is connected with the installation plate 14 through the positioning column 22. The surface of the positioning column 22 is provided with a spring 23, one end of the spring 23 is connected with the sealing plate 21, and the surface of the sealing plate 21 is connected with the sealing retainer ring 7.

In summary, the following steps: through installing lid 9 on furnace gate 2 through articulated elements 3, the closing plate 21 on the lid 9 compresses tightly with the sealing ring 7 of furnace gate 2 inner wall and seals, lock lid 9 through retaining member 5, simultaneously, make reference column 22 surface mounting's spring 23 act on closing plate 21, play sealed effect, and install the mounting panel 14 surface in furnace gate 2, be provided with the sealing layer, can further improve sealed effect, and blast pipe 6 is installed at furnace gate 2 top, can be when opening, discharge high-temperature gas, reduce the potential safety hazard of using.

Example 2

Referring to fig. 1 and 4, the adjusting machine further includes an adjusting lever 16 and a connecting gear 17, the connecting gear 17 is mounted on a surface of the adjusting lever 16, and the adjusting lever 16 is rotatably mounted on the mounting plate 14. The adjusting mechanism further comprises a clamping plate 18 and a rack 19, the rack 19 is installed on the surface of the clamping plate 18, a sliding groove 20 is formed in the installing plate 14, and the surface of the clamping plate 18 is connected with the sliding groove 20 in a sliding mode. Adjusting wheel 15 is installed to the one end of adjusting pole 16, and adjusting wheel 15 installs in a protection section of thick bamboo 10, and the surface mounting of lid 9 has a protection section of thick bamboo 10, and draw-in groove 8 has been seted up to the inner wall of furnace gate 2, and draw-in groove 8 inner walls are pegged graft in the surface activity of cardboard 18, and the surface mounting of a protection section of thick bamboo 10 has pull rod 11, and a protection section of thick bamboo 10 is the subassembly that is used for installing pull rod 11 to carry out the guard action to adjusting wheel 15.

Through the cardboard 18 of slidable mounting on mounting panel 14, can strengthen the sealed effect of lid 9 to furnace door 2, guarantee the sealing performance of lid 9, reduce the potential safety hazard of user in the use, rack 19 and connecting gear 17 are the coupling assembling that cardboard 18 position was adjusted, can stretch out cardboard 18 and fix a position the position of lid 9, improve the leakproofness, and can just open furnace door 2 and use, adjust pole 16 and be the subassembly that controls the regulation to connecting gear 17.

Through rotating the inner chamber of the protective cylinder 10, the adjusting wheel 15 arranged on the adjusting rod 16 can enable the adjusting rod 16 to rotate, so that the connecting gear 17 is driven to rotate, the clamping plate 18 provided with the rack 19 can be moved due to the meshing connection of the connecting gear 17 and the rack 19, the clamping plate 18 slides in the sliding groove 20 formed in the inner chamber of the mounting plate 14, the clamping plate 18 is adjusted, the sealing performance of the cover body 9 on the furnace door 2 is further improved, and the protective effect of the furnace door is enhanced.

Of course, the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and the changes, modifications, additions or substitutions made by those skilled in the art within the scope of the present invention should also belong to the protection scope of the present invention.

Claims

1. The utility model provides a diffusion furnace gate protector, includes diffusion furnace body (1), lid (9), adjustment mechanism and seal assembly, its characterized in that: the furnace door structure is characterized in that the cover body (9) is installed on a furnace door (2) on a diffusion furnace body (1), a sealing retainer ring (7) is arranged on the inner wall of the furnace door (2), an articulated piece (3) and a locking piece (5) are installed on the surface of the diffusion furnace body (1), a protective cylinder (10) is installed on the surface of one side of the cover body (9), and an installation plate (14) is installed on the other side of the cover body (9);

the adjusting machine also comprises an adjusting rod (16) and a connecting gear (17), wherein the connecting gear (17) is arranged on the surface of the adjusting rod (16), and the adjusting rod (16) is rotatably arranged on the mounting plate (14);

the sealing assembly further comprises a positioning column (22), a baffle is installed at one end of the positioning column (22), and the positioning column (22) is installed in the installation plate (14) through the baffle.

2. The diffusion furnace door guard according to claim 1, wherein: the adjusting mechanism further comprises a clamping plate (18) and a rack (19), the rack (19) is installed on the surface of the clamping plate (18), a sliding groove (20) is formed in the mounting plate (14), and the surface of the clamping plate (18) is connected with the sliding groove (20) in a sliding mode.

3. The diffusion furnace door protector as claimed in claim 2, wherein: the adjusting device is characterized in that an adjusting wheel (15) is installed at one end of the adjusting rod (16), the adjusting wheel (15) is installed in the protective cylinder (10), and the protective cylinder (10) is installed on the surface of the cover body (9).

4. The diffusion furnace door protector as claimed in claim 3, wherein: the inner wall of the furnace door (2) is provided with a clamping groove (8), and the surface of the clamping plate (18) is movably inserted into the inner wall of the clamping groove (8).

5. The diffusion furnace door guard according to claim 1, wherein: the surface mounting of lid (9) has locating piece (4), lid (9) are connected with articulated elements (3) through locating piece (4), retaining member (5) are connected to one side of lid (9).

6. The diffusion furnace door guard according to claim 1, wherein: the sealing assembly further comprises a sealing plate (21), the sealing plate (21) is installed at one end of the positioning column (22), and the sealing plate (21) is connected with the installation plate (14) through the positioning column (22).

7. The diffusion furnace door guard according to claim 6, wherein: the surface of the positioning column (22) is provided with a spring (23), one end of the spring (23) is connected with a sealing plate (21), and the surface of the sealing plate (21) is connected with a sealing retainer ring (7).

8. The diffusion furnace door guard according to claim 1, wherein: the surface mounting of protection section of thick bamboo (10) has pull rod (11), the surface mounting of lid (9) has inlet tube (12) and drain pipe (13), the surface mounting of furnace gate (2) has blast pipe (6).