CN217206772U

CN217206772U - Evacuating device and degumming machine

Info

Publication number: CN217206772U
Application number: CN202123321946.2U
Authority: CN
Inventors: 朱成好
Original assignee: Advanced Materials Technology and Engineering Inc
Current assignee: Wuxi Yiwen Microelectronics Technology Co ltd
Priority date: 2021-12-27
Filing date: 2021-12-27
Publication date: 2022-08-16
Anticipated expiration: 2031-12-27

Abstract

The application belongs to the technical field of semiconductor processing, and in particular relates to a vacuumizing device and a degumming machine. This evacuating device includes vacuum pump, isolating valve and butterfly valve, and the isolating valve is provided with the first pumping channel that has openable, and the first pumping channel and the reaction chamber intercommunication of isolating valve, butterfly valve are provided with aperture adjustable second pumping channel, and the both ends of the second pumping channel of butterfly valve communicate with the first pumping channel of isolating valve and the input of vacuum pump respectively. The evacuating device that this application adopted, the main component wherein adopts the isolating valve of single channel to and have aperture adjustable butterfly valve, effectively reduce cost, and the isolating valve of single channel has the characteristics of few fault point, and changes the maintenance, in order to reduce the maintenance cost, has fine practicality.

Description

Evacuating device and degumming machine

Technical Field

The application belongs to the technical field of semiconductor processing, and in particular relates to a vacuumizing device and a degumming machine.

Background

In a resist stripping apparatus used in the semiconductor industry, a reaction chamber needs to be vacuumized to keep the inside of the reaction chamber in a vacuum state.

In the prior art, the vacuumizing device applied to the reaction cavity of the photoresist remover is expensive and has higher maintenance cost.

Therefore, improvements in the prior art are needed.

Disclosure of Invention

In order to solve the technical problem, the application provides an evacuating device and a degumming machine, which aim at solving the technical problems that the evacuating device in the prior art is expensive in price and high in maintenance cost to a certain extent.

The technical scheme of the application is as follows:

in one aspect, the present application provides a vacuum pumping apparatus, which is characterized in that the vacuum pumping apparatus comprises:

a vacuum pump;

the isolation valve is provided with a first air exhaust channel which can be opened and closed, and the first air exhaust channel of the isolation valve is communicated with the reaction cavity;

the butterfly valve, the butterfly valve is provided with aperture adjustable second bleed passage, the second bleed passage's of butterfly valve both ends respectively with the first bleed passage of isolating valve and the input intercommunication of vacuum pump.

Preferably, the isolation valve is a pneumatic vacuum isolation valve.

In some embodiments, the butterfly valve comprises:

a valve seat provided with a through circular passage configured as the second pumping passage,

the gate plate is rotatably arranged in the passage to adjust the opening degree of the passage.

In some embodiments, the butterfly valve further comprises:

the motor is arranged on the valve seat;

the actuating lever, the edge of actuating lever the radial setting of passageway, the one end of actuating lever is rotationally connected on the inside wall of passageway, the other end of actuating lever passes the inside wall of passageway, the other end of actuating lever with the output shaft of motor, the fixed suit of flashboard is in on the actuating lever.

In some embodiments, the butterfly valve further comprises:

the controller is arranged on the valve seat and electrically connected with the motor, and the controller can receive instructions to control the motor to rotate so as to adjust the opening degree of the channel.

On the other hand, this application still provides a remove machine of glue, and its special character lies in, it includes reaction chamber and above-mentioned evacuating device to remove the machine of glue, evacuating device's isolation valve's first inlet channel with the reaction chamber intercommunication.

The beneficial effect of this application includes at least:

the application provides a degumming machine, because it includes reaction chamber and evacuating device, because evacuating device's isolating valve is provided with and has open closed first pump-off passageway, the first pump-off passageway and the reaction chamber intercommunication of isolating valve, the butterfly valve is provided with aperture adjustable second pump-off passageway, the both ends of the second pump-off passageway of butterfly valve communicate with the first pump-off passageway of isolating valve and the input of vacuum pump respectively, from atmospheric pressure evacuation to background pressure in-process at the reaction chamber, the first pump-off passageway of steerable isolating valve is opened all the time, the small angle is opened only at the first time to the second pump-off passageway of butterfly valve, it is slower with the pumping speed of control vacuum pump, treat that the cavity takes out when about 75Torr in lower vacuum, the second pump-off passageway of butterfly valve is opened entirely, open quick pump-off mode until background pressure.

The evacuating device that this application adopted, the main component wherein adopts the isolating valve of single channel to and have aperture adjustable butterfly valve, effectively reduce cost, and the isolating valve of single channel has the characteristics of few fault point, and changes the maintenance, in order to reduce the maintenance cost, has fine practicality.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic diagram of a vacuum extractor in the development process of the applicant;

FIG. 2 is a schematic structural diagram of a vacuum extractor according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of the butterfly valve in fig. 2.

Reference numerals are as follows:

100-vacuum valve, 200-reactor, 300-butterfly valve, 310-valve seat, 320-gate, 330-channel, 400-isolation valve.

Detailed Description

The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.

It should be noted that all the directional indications in the embodiments of the present application are only used for explaining the relative position relationship, the motion condition, and the like between the components in a certain posture, and if the certain posture is changed, the directional indication is changed correspondingly.

The following disclosure provides many different embodiments or examples for implementing different features of the application. To simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Further, the present application may repeat reference numerals and/or reference letters in the various examples for simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or arrangements discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize the application of other processes and/or the use of other materials.

In the prior art, a vacuumizing device of the degumming machine mainly adopts a vacuum pump. Fig. 1 is a schematic structural diagram of a vacuum-pumping device in the research and development process of the applicant. With reference to fig. 1, the vacuum pump 100 is communicated with the inside of the reaction chamber 200 through a pipeline, the pipeline is provided with a butterfly valve 300 and an isolation valve 400 having two paths of slow pumping and fast pumping, the isolation valve 400 and the butterfly valve 300 are sequentially arranged from the reaction chamber 200 to the vacuum pump 100, in actual implementation, in order to avoid instant overload and rapid cavity pressure vibration at the beginning of the vacuum pump, the slow pumping and then fast pumping are required, that is, in the process of pumping the reaction chamber, the butterfly valve 300 is always fully opened, the isolation valve 400 opens the path of slow pumping (Soft pumping) first, when the chamber pressure in the reaction chamber 200 is pumped from atmospheric pressure to a lower vacuum pressure of about 75Torr, the path of fast pumping (Rough pumping) is opened until the vacuum pumping reaches the background pressure, and the process can be automatically controlled by one key through a software program.

In use, the applicant finds that the isolating valve with the slow pumping passage and the fast pumping passage is expensive, and a sealing ring and a corrugated pipe in the valve body are easy to break, so that the maintenance cost is high, and therefore, the isolating valve needs to be improved.

Based on this, this application embodiment provides an evacuating device and degumming machine, aims at solving above-mentioned evacuating device price more expensive to a certain extent at least to and the high technical problem of maintenance cost.

Fig. 2 is a schematic structural diagram of the evacuation apparatus of the embodiment of the present application, and with reference to fig. 2, the evacuation apparatus includes a vacuum pump 100, an isolation valve 400 and a butterfly valve 300, wherein the isolation valve 400 is provided with a first pumping channel capable of being opened and closed, the first pumping channel of the isolation valve 400 is communicated with the reaction chamber 200, and the butterfly valve 300 is provided with a second pumping channel with an adjustable opening degree, and two ends of the second pumping channel of the butterfly valve 300 are respectively communicated with the first pumping channel of the isolation valve 400 and the input end of the vacuum pump 100.

Preferably, the isolation valve of the embodiment of the present application may be a pneumatic vacuum isolation valve, that is, the isolation valve is controlled pneumatically, which has the characteristic of corresponding rapidity. Of course, in other embodiments, the isolation valve may also be controlled by electromagnetic, etc., and the embodiments of the present application are not limited herein.

Fig. 3 is a schematic structural diagram of the butterfly valve in fig. 2, and referring to fig. 3, a butterfly valve 300 according to an embodiment of the present invention includes a valve seat 310 and a shutter plate 320, wherein a through circular passage 330 is disposed on the valve seat 310, the passage 330 can be configured as the second pumping passage, the shutter plate 320 is rotatably disposed in the passage 300, the cross-sectional dimensions of the shutter plate 320 and the passage 330 are matched, and the opening of the passage 330 can be adjusted by changing the rotation angle of the shutter plate 320.

Referring to fig. 3, the butterfly valve 300 of the embodiment of the present application further includes a motor (not shown) disposed on the valve seat 310 and disposed along the radial direction of the passage 330, and a driving rod (not shown) having one end rotatably connected to the inner sidewall of the passage 330 and the other end penetrating the inner sidewall of the passage and connected to the output shaft of the motor, wherein the gate plate 320 is fixedly sleeved on the driving rod. The driving rod can be driven to rotate by controlling the rotation of the motor, so that the gate plate 320 can be driven to rotate, the rotation angle of the gate plate 320 can be changed, and the purpose of adjusting the opening degree of the channel 330 can be achieved.

Further, the butterfly valve 300 of the embodiment of the present application further includes a controller (not shown), the controller is disposed on the valve seat 310, and the controller is electrically connected to the motor, and the controller can receive a command to control the motor to rotate, so as to achieve the purpose of adjusting the opening of the passage 330.

In the process of vacuumizing the reaction cavity from atmospheric pressure to background pressure, the controller can receive an instruction to control the second air exhaust channel of the butterfly valve 300 to be opened only by a small angle at the initial time to control the pumping speed of the vacuum pump to be slower, when the cavity is pumped to the low vacuum of about 75Torr, the controller receives the instruction to fully open the second air exhaust channel of the butterfly valve, and the quick-pumping mode is started until the background pressure

The motor and controller of the butterfly valve 300 of the embodiments of the subject application may both be integrated within the valve seat 310 to ensure the integrity of the butterfly valve 300.

On the other hand, this application embodiment still provides a remove machine of glue, this remove machine of glue includes reaction chamber and above-mentioned evacuating device, wherein, evacuating device's isolation valve 400's first inlet channel and reaction chamber 200 intercommunication, in the reaction chamber from atmospheric pressure evacuation to background pressure in-process, the first bleed passage of steerable isolation valve 400 is opened all the time, the second bleed passage of butterfly valve 300 is just opened the small angle at first, it is slower with the pumping speed of control vacuum pump, treat that the cavity takes out when about 75Torr of lower vacuum, the second bleed passage with the butterfly valve is opened entirely, open fast mode of taking out until background pressure.

In the embodiment of the present application, the pipeline for communicating the isolation valve 400 and the reaction chamber 200, the pipeline for communicating the isolation valve 400 and the butterfly valve 300, and the pipeline for communicating the butterfly valve 300 and the vacuum pump 100 may be made of rigid materials, so that the isolation valve 400, the butterfly valve 300, and the vacuum pump 100 may be integrated on the reaction chamber 200.

The evacuating device that this application embodiment adopted, the main member wherein adopts the isolating valve of single channel to and have aperture adjustable butterfly valve, effectively reduce cost, and the isolating valve of single channel has the characteristics of few fault point, and changes the maintenance, with reduction maintenance cost, has fine practicality.

While the preferred embodiments of the present application have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the present application.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims

1. An evacuation device, comprising:

a vacuum pump;

2. The evacuation device of claim 1, wherein the isolation valve is a pneumatic vacuum isolation valve.

3. The evacuation device of claim 1, wherein the butterfly valve comprises:

4. The evacuation device of claim 3, wherein the butterfly valve further comprises:

the motor is arranged on the valve seat;

5. The evacuation device of claim 4, wherein the butterfly valve further comprises:

6. A degumming machine, characterized in that the degumming machine comprises a reaction chamber and the vacuum pumping device of any one of claims 1-5, wherein the first air inlet channel of the isolation valve of the vacuum pumping device is communicated with the reaction chamber.