CN217182152U - Manipulator transmission device for transmitting wafer and transmission device - Google Patents
Manipulator transmission device for transmitting wafer and transmission device Download PDFInfo
- Publication number
- CN217182152U CN217182152U CN202220117233.XU CN202220117233U CN217182152U CN 217182152 U CN217182152 U CN 217182152U CN 202220117233 U CN202220117233 U CN 202220117233U CN 217182152 U CN217182152 U CN 217182152U
- Authority
- CN
- China
- Prior art keywords
- gear
- rack
- transmission
- robot
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Manipulator (AREA)
Abstract
The utility model discloses a manipulator transmission for transmitting wafer, transmission includes: fixing a track; the sliding piece is connected to the fixed rail and can slide back and forth along the extending direction of the fixed rail; one end of the mechanical arm is fixedly connected with the sliding part through a connecting fixed seat, the other end of the mechanical arm is formed into a shape like Contraband, and the opening end of the other end is far away from the connecting fixed seat and used for supporting and placing the wafer; the rack is arranged on one side, facing the first gear, of the connecting fixing seat, and the first gear and the rack are in meshed transmission so as to drive the rack to move. According to the utility model discloses a manipulator transmission for transmitting wafer combines together through the manipulator and the gear drive of conveying wafer, can simplify the structure, and the motion transmission is reliable and stable more.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor technology and specifically relates to a manipulator transmission and transmission for transmitting wafer.
Background
With the increasing prominence of the semiconductor position, the automation of the semiconductor industry becomes a necessary trend. The wafer is used as a core part in the semiconductor field, the wafer placing and taking are required before and after etching, due to the increase of the productivity and the higher temperature of the etched wafer, an automatic device is required to operate the wafer placing and taking, and the mechanical arm is used for conveying the wafer to realize the series of steps.
In the field of semiconductor equipment, a general manipulator transmission mechanism comprises a manipulator, a slide rail guide mechanism, a driving mechanism, a transmission mechanism, a sensor and other parts. In the related art, a steel belt driving mechanism is connected with a motor, a slide rail guiding device is connected with a manipulator to enable the manipulator to move along the guide direction of the slide rail, the steel belt driving mechanism is connected with the middle part of the manipulator, and the steel belt is connected with a driving wheel and a driven wheel under the driving of the motor to drive the manipulator to move horizontally.
The structure can cause the phenomena of steel belt loosening, belt falling and slipping after long-time operation. And the transmission mechanism has the advantages of large number of parts, complex structure, high assembly difficulty, high required precision, high cost of processing parts and large occupied space.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least.
Therefore, the utility model provides a manipulator transmission for transmitting wafer, manipulator transmission's simple structure, motion are reliable and stable.
The utility model also provides a manipulator transmission who has above-mentioned manipulator transmission for transmitting the wafer.
According to the utility model discloses a manipulator transmission for transmitting wafer of first aspect, transmission includes: fixing a track; the sliding piece is connected to the fixed rail and can slide back and forth along the extending direction of the fixed rail; one end of the mechanical arm is fixedly connected with the sliding part through a connecting fixed seat, the other end of the mechanical arm is formed into a shape like Contraband, and the opening end of the other end is far away from the connecting fixed seat and used for supporting and placing the wafer; the rack is arranged on one side, facing the first gear, of the connecting fixing seat, and the first gear and the rack are in meshed transmission so as to drive the rack to move.
According to the utility model discloses a manipulator transmission for transmitting wafer combines together through the manipulator and the gear drive of conveying wafer, can simplify the structure for the motion transmission is more stable, reliable.
According to the utility model discloses an embodiment, manipulator transmission still includes: the second gear is positioned on the other side of the connecting fixed seat, the rack is arranged on the other side of the connecting fixed seat facing the second gear, and the second gear is matched with the rack; a take-up device coupled to the second gear to take up the second gear.
According to an optional example of the present invention, the tightening device comprises: the bolt is matched and connected with the thread stop block to tighten the second gear.
According to another embodiment of the present invention, the sliding member is slidably fitted over the fixed rail.
According to the utility model discloses a still another embodiment connect the edge of fixing base the both ends of trapped orbit extending direction all are equipped with the boss, the boss with the rack is fixed continuous.
Furthermore, one ends, far away from each other, of the two reinforcing blocks are provided with anti-collision blocks.
According to the utility model discloses a still another embodiment, the other end of keeping away from of manipulator the connection fixing base forms into fretwork piece.
According to the utility model discloses a further embodiment, manipulator transmission still includes: the driving piece is connected with the first gear to drive the first gear to rotate, and the driving piece is located below the fixed track.
According to the utility model discloses transmission device of second aspect includes: the manipulator transmission device for transmitting the wafer in the embodiment; the cavity the orientation of cavity robotic arm's one end is equipped with the opening, through first gear with the rack cooperation can drive robotic arm slides between retrieving the position and the extended position, works as in when retrieving the position, transmission is located in the cavity, works as in when the extended position, robotic arm passes the opening just stretches out outside the cavity.
Further, the cavity comprises a body and a cavity cover, the body and the cavity cover are connected through a hinge, and a driving piece connected with the first gear is located outside the cavity.
According to the utility model discloses a transmission device is provided with as any one kind as first aspect manipulator transmission for transmitting wafer, transmission device is the same with foretell manipulator transmission for transmitting wafer for the advantage that prior art has, no longer gives unnecessary details here.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic view of a part of a robot transmission device for transmitting a wafer according to an embodiment of the present invention;
FIG. 2 is an exploded view of the structure of FIG. 1;
fig. 3 is a schematic view of a transfer device according to an embodiment of the present invention;
FIG. 4 is an enlarged view of portion A of FIG. 3;
fig. 5 is an exploded view of the related structure of a second gear of an embodiment of the present invention;
fig. 6 is a perspective view of a transfer device according to an embodiment of the present invention;
fig. 7 is an exploded view of a first gear and cavity according to an embodiment of the present invention;
fig. 8 is a schematic view of a first state of a transmission device according to an embodiment of the present invention;
fig. 9 is a schematic diagram of a second state of the transmission device according to the embodiment of the present invention.
Reference numerals:
a transmission device 100, a wafer 200,
The fixed rail 10, the sliding part 20, the mechanical arm 30, the opening end 31, the connecting fixed seat 32, the reinforcing block 321, the anti-collision block 322, the rack 33, the first gear 40, the second gear 50, the bolt 51, the thread stop block 52, the elastic retainer ring 53, the connecting shaft 54, the bearing 55, the connecting rod 53, the connecting rod,
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
A robot actuator for transferring a wafer 200 according to an embodiment of the first aspect of the present invention is described below with reference to fig. 1 to 9.
As shown in fig. 1 and 2, according to the robot transmission device for transmitting a wafer 200 of the embodiment of the present invention, the transmission device includes: fixed rail 10, slider 20, robot arm 30, rack 33, and first gear 40.
Specifically, the sliding member 20 is connected to the fixed rail 10, and the sliding member 20 can slide back and forth along the extending direction (the front and back direction shown in fig. 1) of the fixed rail 10, one end (the back end shown in fig. 1) of the robot 30 is fixedly connected to the sliding member 20 through the connecting holder 32, the other end (the front end shown in fig. 1) of the robot 30 is formed in a shape of "Contraband", and the open end 31 of the other end is disposed away from the connecting holder 32, which is used for supporting and placing the wafer 200.
Further, the first gear 40 is located on one side (the left side as shown in fig. 1) of the connecting fixing seat 32, a rack 33 is disposed on one side of the connecting fixing seat 32 facing the first gear 40, and the first gear 40 and the rack 33 are engaged to drive the rack 33 to move, so as to drive the connecting fixing seat 32 and the robot arm 30 to slide.
According to the utility model discloses a manipulator transmission for transmitting wafer 200 combines together through the manipulator and the gear drive of conveying wafer 200, can simplify the structure for the motion transmission is more stable, reliable.
According to the utility model discloses an embodiment, manipulator transmission still includes: the second gear 50 and the tightening device are positioned on the second gear 50 connected with the other side (the right side shown in figure 1) of the fixed seat 32, a rack 33 is arranged on the other side, facing the second gear 50, of the connected fixed seat 32, the second gear 50 is matched with the rack 33, so that the second gear 50 and the rack 33 form bidirectional stress, the stress of the transmission system in the motion process is maintained to be uniform, the tightening device is connected with the second gear 50 to tighten the second gear 50, and the gear rack 33 can run more stably. Wherein the bearing 55 and the second gear 50 are concentrically fixed and then fixed to the connecting shaft 54 by the circlip 53, and the free rotation of the second gear 50 can be realized by the above fixing manner.
According to an optional example of the present invention, the tightening mechanism includes a bolt 51 and a thread stopper 52, the bolt 51 and the thread stopper 52 are engaged with each other to tighten the second gear 50, so as to allow the second gear 50 to be better engaged with the rack 33, and the bolt 51 and the thread stopper 52 are utilized to form the tightening mechanism, so that the positions of the second gear 50 and the rack 33 can be better adjusted during the installation process, and the loosening of the driven gear mechanism can be prevented.
According to the utility model discloses a another embodiment, slider 20 slidable ground cover is established on trapped orbit 10, and the cooperation is more reliable for slider 20 is difficult for breaking away from trapped orbit 10.
According to the utility model discloses a still another embodiment, all be equipped with the boss 321 at the both ends of connecting fixing base 32 along trapped orbit 10 extending direction, boss 321 and rack 33 are fixed continuous, can guarantee that rack 33 is more firm at the removal in-process, the transmission's of increase stability.
Further, the ends of the two reinforcing blocks 321 away from each other are provided with anti-collision blocks 322, which can prevent the cavity 60 from being damaged when the reinforcing blocks are moved to the extreme positions.
According to the utility model discloses a still another embodiment, the other end of keeping away from of manipulator and connecting fixing base 32 forms to the fretwork piece, can alleviate robotic arm 30's structural weight, realizes the lightweight design of structure.
According to the utility model discloses a further embodiment, manipulator transmission still includes: and a driving member connected to the first gear 40 for driving the first gear 40 to rotate, the driving member being located below the fixed rail 10. The driving part comprises a motor 72, the first gear 40 is fixed at the upper end of the magnetic fluid rotating shaft 73, the magnetic fluid rotating shaft 73 is connected with the motor 72 through a connecting seat 70 and a coupler 71, and the motor 72 drives the first gear 40 to rotate forward and backward through forward and backward rotation.
According to the present invention, the transmission device 100 of the second aspect comprises: the robot driving device for transferring the wafer 200 according to the above embodiment; the cavity 60 is provided with an opening at an end of the cavity 60 facing the robot arm 30, the robot arm 30 can be driven to slide between a retracted position and an extended position by the cooperation of the first gear 40 and the rack 33, the transmission device is located in the cavity 60 when the robot arm is in the retracted position, and the robot arm 30 passes through the opening and extends out of the cavity 60 when the robot arm is in the extended position. The robot actuator is fixed to the chamber by bolts 51.
Further, the cavity 60 includes a body 61 and a cavity cover 62, the body 61 and the cavity cover 62 are connected by a hinge, and the driving member connected to the first gear 40 is located outside the cavity 60.
The utility model discloses transmission device 100 includes: cavity cover 62, body 61, robot transmission, sensor device 80. The cavity cover 62 and the body 61 are connected by a hinge, and a sealing ring is arranged on the contact surface of the cavity cover 62 and the body 61 to form an open-close closed space, so that the vacuum environment in the cavity 60 can be realized. The manipulator transmission device is fixed in the body 61, the manipulator transmission device can realize the movement of the manipulator along the guide direction of the fixed slide rail, the first gear 40 is fixed in the body 61 and is not limited to a specific position, and can be determined according to the movement stroke of the sliding part 20, the second gear 50 is fixed at the other side of the fixed slide rail and synchronously runs with the first gear 40, the second gear 50 can make the transmission of the manipulator under the working state more stable, wherein the first gear 40 and the second gear 50 (driven wheels) are matched with the rack 33 connected with the fixed seat 32, and the manipulator transmission device can drive the sliding part 20 to move when working, thereby realizing the back and forth movement of the manipulator. Sensor means 80 are provided on the side walls of the chamber 60 near the ends for precise control of the robot's stroke and initial and final positions. Compared with the prior art, the device for driving and transmitting the wafer by the gear has high reliability and stable structure, and does not slip or drop the belt.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A robot actuator for transferring wafers, the actuator comprising:
fixing a track;
the sliding piece is connected to the fixed rail and can slide back and forth along the extending direction of the fixed rail;
one end of the mechanical arm is fixedly connected with the sliding part through a connecting fixed seat, the other end of the mechanical arm is formed into a shape like Contraband, and the opening end of the other end is far away from the connecting fixed seat and used for supporting and placing the wafer;
the rack is arranged on one side, facing the first gear, of the connecting fixing seat, and the first gear and the rack are in meshed transmission so as to drive the rack to move.
2. The robot actuator for transferring wafers of claim 1, further comprising:
the second gear is positioned on the other side of the connecting fixed seat, the rack is arranged on the other side of the connecting fixed seat facing the second gear, and the second gear is matched with the rack;
a take-up device coupled to the second gear to take up the second gear.
3. The robot actuator for transferring wafers of claim 2, wherein the take-up device comprises: the bolt and the thread stop block are matched and connected to tighten the second gear.
4. The robot actuator of claim 1, wherein the sliding member is slidably disposed on the fixed rail.
5. The robot transmission device for transferring wafers as claimed in claim 1, wherein a reinforcing block is provided at each of two ends of the connecting holder along the extending direction of the fixing rail, and the reinforcing block is fixedly connected to the rack.
6. The robot transmission device for transferring wafers as claimed in claim 5, wherein the reinforcing blocks are provided with anti-collision blocks at ends thereof which are far away from each other.
7. The robot transmission device for transmitting wafers as claimed in claim 1, wherein the other end of the robot away from the connecting holder is formed as a hollow.
8. The robot actuator for transferring wafers of claim 1, further comprising: the driving piece is connected with the first gear to drive the first gear to rotate, and the driving piece is located below the fixed track.
9. A transmission apparatus, comprising:
the robot actuator for transferring wafers of any one of claims 1-8;
the cavity the orientation of cavity robotic arm's one end is equipped with the opening, through first gear with the rack cooperation can drive robotic arm slides between retrieving the position and the extended position, works as in when retrieving the position, transmission is located in the cavity, works as in when the extended position, robotic arm passes the opening just stretches out outside the cavity.
10. The transfer device of claim 9, wherein the chamber comprises a body and a cover, the body and cover being connected by a hinge, the drive member connected to the first gear being located outside the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220117233.XU CN217182152U (en) | 2022-01-17 | 2022-01-17 | Manipulator transmission device for transmitting wafer and transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220117233.XU CN217182152U (en) | 2022-01-17 | 2022-01-17 | Manipulator transmission device for transmitting wafer and transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217182152U true CN217182152U (en) | 2022-08-12 |
Family
ID=82734970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220117233.XU Active CN217182152U (en) | 2022-01-17 | 2022-01-17 | Manipulator transmission device for transmitting wafer and transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217182152U (en) |
-
2022
- 2022-01-17 CN CN202220117233.XU patent/CN217182152U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5765983A (en) | Robot handling apparatus | |
| US7784324B2 (en) | Workpiece gripper arrangement for automatic tool change operations | |
| US6968725B2 (en) | Flexible transporting apparatus for presses | |
| CN102655963B (en) | Conveying device | |
| CN101459101B (en) | Automatic conveying device for turnover type wafer | |
| EP1679174A1 (en) | Formed article taking-out apparatus and forming machine | |
| EP1706561A1 (en) | Trolley and parking system using the same | |
| CN209785901U (en) | Press from both sides manipulator device of getting wafer box | |
| CN101459100B (en) | Automatic conveying device for compact wafer | |
| CN217182152U (en) | Manipulator transmission device for transmitting wafer and transmission device | |
| CN111071361A (en) | Single-degree-of-freedom scissor-fork-driven wall-climbing robot | |
| CN101465309A (en) | Translational overturn type automatic conveying device for silicon wafer | |
| CN112320684B (en) | Battery taking and placing device and battery replacing station | |
| US20190217463A1 (en) | Robotic dolly transfer systems having floating couplings | |
| JP2004106105A (en) | Delivery robot | |
| CN209777559U (en) | positioning mechanism for conveying tray and assembly production line | |
| US20040102858A1 (en) | Soft-touch gripping mechanism for flat objects | |
| CN114368596B (en) | Conveying device for automobile parts | |
| CN116190306A (en) | Wafer transfer equipment | |
| CN110349879B (en) | Manipulator transmission mechanism, transmission cavity and semiconductor processing equipment | |
| CN219586174U (en) | Bidirectional cage type carrier transfer device | |
| CN201374322Y (en) | Translating and overturning type wafer automatic conveying device | |
| CN220842344U (en) | Bearing assembly and AGV trolley | |
| US5127787A (en) | Lift and carry mechanism and method | |
| CN116200717A (en) | Bidirectional cage type carrier transfer device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |