CN217173859U - Novel CVD cracking tube structure - Google Patents
Novel CVD cracking tube structure Download PDFInfo
- Publication number
- CN217173859U CN217173859U CN202123052659.6U CN202123052659U CN217173859U CN 217173859 U CN217173859 U CN 217173859U CN 202123052659 U CN202123052659 U CN 202123052659U CN 217173859 U CN217173859 U CN 217173859U
- Authority
- CN
- China
- Prior art keywords
- cracking tube
- heat pipe
- schizolysis
- diffuser plate
- tube structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a novel CVD cracking tube structure, including cracking tube body, heat pipe and diffuser plate, the heat pipe is equipped with in the cracking tube body, the opening of horizontal setting is seted up to three quarters on heat pipe upper portion, the metal material of heat conduction is adopted to the heat pipe, heat pipe inner wall interval is provided with the diffuser plate, the array is provided with the flow equalizing hole on the diffuser plate, this internal upper portion of cracking tube sets up the airflow channel of guaranteed air current. In this way, the utility model relates to an it is ingenious, can make in the pipeline temperature rise rapidly and even, guarantee the gaseous degree of consistency of powder schizolysis back simultaneously, guarantee the gas flow rate, can quick cartridge and dismantlement.
Description
Technical Field
The utility model relates to a coating film technical field especially relates to a novel CVD cracking tube structure.
Background
In the parylene (parylene) film forming process, CVD chemical vapor deposition is to introduce powder into a vacuum cavity through evaporation and cracking, the powder is deposited on the surface of a sample, the powder is heated and cracked into gas in a cracking tube, the cracking tube is tubular at present, the cracking tube is heated by a heater from the outside, the temperature of the tube wall of the cracking tube is higher than the central position of the tube inside the cracking tube, the powder is heated unevenly and is difficult to crack completely, and if air flow is slowed down, the powder has enough time to crack into gas, but the powder can be deposited on the wall of the cracking tube.
Based on the above drawbacks and shortcomings, there is a need to improve the existing technology and design a new CVD cracking tube structure.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides a novel CVD schizolysis tubular construction, and design benefit can make in the pipeline temperature rise rapidly and even, guarantees the gaseous degree of consistency in powder schizolysis back simultaneously, guarantees the gas flow rate, can quick cartridge and dismantlement.
In order to solve the technical problem, the utility model discloses a technical scheme be: the utility model provides a novel CVD schizolysis tubular construction, this kind of novel CVD schizolysis tubular construction include schizolysis pipe body, heat pipe and diffuser plate, the heat pipe is equipped with in the schizolysis pipe body, the opening of horizontal setting is seted up to three quarters on heat pipe upper portion, the heat pipe adopts the metal material of heat conduction, heat pipe inner wall interval is provided with the diffuser plate, the array is provided with the flow equalizing hole on the diffuser plate, this internal upper portion of schizolysis pipe is provided with the airflow channel who guarantees the air current.
Preferably, the aperture of the flow equalizing hole is 2-3 mm.
Preferably, the novel CVD cracking tube structure further comprises a handle, and the handle convenient to assemble and disassemble is mounted on the diffusion plate at the end part of the heat pipe.
Preferably, the two ends of the cracking tube body are provided with mounting flanges, and a circle of mounting holes are arranged on the mounting flanges in an array mode.
Compared with the prior art, the beneficial effects of the utility model are that:
design benefit can make in the pipeline temperature rise rapidly and even, guarantees the gaseous degree of consistency behind the powder schizolysis simultaneously, guarantees the gas flow rate, can quick cartridge and dismantle.
Drawings
FIG. 1 is a schematic structural diagram of a novel CVD cracking tube structure.
FIG. 2 is a schematic diagram of an expanded structure of a novel CVD cracking tube structure.
Fig. 3 is a partially enlarged view of fig. 2.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided to enable those skilled in the art to more easily understand the advantages and features of the present invention, and to make clear and definite definitions of the protection scope of the present invention.
Referring to fig. 1 to 3, an embodiment of the present invention includes:
the utility model provides a novel CVD schizolysis tubular construction, this kind of novel CVD schizolysis tubular construction includes schizolysis pipe body 1, heat pipe 2 and diffuser plate 3, heat pipe 2 is equipped with in the schizolysis pipe body 1, the opening of horizontal setting is seted up to three quarters on 2 upper portions of heat pipe, heat pipe 2 adopts the metal material of heat conduction, 2 inner wall intervals of heat pipe are provided with diffuser plate 3, the array is provided with flow equalizing hole 30 on the diffuser plate 3, upper portion in the schizolysis pipe body 1 sets up the airflow channel 10 of guaranteed air current.
The aperture of the flow equalizing hole 30 is 2-3 mm.
The novel CVD cracking tube structure also comprises a handle 4, and the handle 4 convenient for quick assembly and disassembly is arranged on the diffusion plate 3 positioned at the end part of the heat pipe 2.
The two ends of the cracking tube body 1 are provided with mounting flanges 11, and a circle of mounting holes 12 are formed in the mounting flanges 11 in an array mode.
The utility model relates to a novel CVD cracking tube structure during operation, when partial powder material passes through cracking tube body 1, cracking tube body 1 is not full of the state this moment, the powder material has certain quality, can flow from the instant heating pipe 2 of the lower part in cracking tube body 1, heat pipe 2 contacts with cracking tube body 1, heat conduction through heat pipe 2 makes the temperature rise rapidly and evenly in the pipeline, the powder material fully cracks and is the gaseous state, the gaseous state after cracking passes through diffusion plate 3 layer upon layer, guarantee the gaseous degree of consistency after the powder material cracks, airflow channel 10 guarantees the air current, if heat pipe 2 and diffusion plate 3 occupy the whole cracking tube body 1 inner chamber, can block and influence the air current; when the cracking tube body 1 is filled with powder, the principle of the powder on the lower part is the same as that of the powder on the upper part, the powder on the upper part is close to the inner wall of the cracking tube body 1, the heat conduction distance is far away from the end, the temperature of the airflow channel 10 is high, and the powder has the same quality as that of the powder and can be fully cracked to be in a gaseous state.
The utility model relates to a novel CVD schizolysis tubular construction, design benefit can make the interior temperature of pipeline rise rapidly and even, guarantees the gaseous degree of consistency of powder schizolysis back simultaneously, guarantees the gas flow rate, can quick cartridge and dismantlement.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (4)
1. A novel CVD cracking tube structure is characterized in that: this kind of novel CVD schizolysis tubular construction includes schizolysis pipe body, heat pipe and diffuser plate, the heat pipe is equipped with in the schizolysis pipe body, the opening of horizontal setting is seted up to three quarters department on heat pipe upper portion, the heat pipe adopts the metal material of heat conduction, heat pipe inner wall interval is provided with the diffuser plate, the array is provided with the flow equalizing hole on the diffuser plate, this internal upper portion of schizolysis pipe sets up the airflow channel who guarantees the air current.
2. A novel CVD cracking tube structure according to claim 1, wherein: the aperture of the flow equalizing hole is 2-3 mm.
3. A novel CVD cracking tube structure according to claim 1, wherein: the diffusion plate is positioned at the end part of the heat pipe, and the handle convenient to assemble and disassemble is arranged on the diffusion plate.
4. A novel CVD cracking tube structure according to claim 1, wherein: the cracking tube is characterized in that mounting flanges are arranged at two ends of the cracking tube body, and a circle of mounting holes are formed in the mounting flanges in an array mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123052659.6U CN217173859U (en) | 2021-12-07 | 2021-12-07 | Novel CVD cracking tube structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123052659.6U CN217173859U (en) | 2021-12-07 | 2021-12-07 | Novel CVD cracking tube structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217173859U true CN217173859U (en) | 2022-08-12 |
Family
ID=82714122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123052659.6U Active CN217173859U (en) | 2021-12-07 | 2021-12-07 | Novel CVD cracking tube structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217173859U (en) |
-
2021
- 2021-12-07 CN CN202123052659.6U patent/CN217173859U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207688127U (en) | The burner of infrared radiation | |
| CN217173859U (en) | Novel CVD cracking tube structure | |
| CN207831686U (en) | Mixed water pot and gas heater | |
| WO2018166065A1 (en) | Gas distribution structure, burner and gas hob | |
| CN2389289Y (en) | Gas infrared ray burner | |
| CN210261955U (en) | High-temperature vapor deposition furnace body structure | |
| CN215403833U (en) | Nozzle and glass tempering furnace with same | |
| CN203778739U (en) | Mould heating device | |
| CN104805417B (en) | Reaction chamber for PECVD (plasma enhance chemical vapor deposition) film deposition | |
| CN203823758U (en) | Beam type burner | |
| WO2010127556A1 (en) | Stove flame guide device and manufacturing method thereof | |
| CN211505328U (en) | Inert gas separation device | |
| CN219010451U (en) | Wafer vapor deposition device | |
| CN206073683U (en) | Gas Forced Mixing heater in heating furnace | |
| CN207163238U (en) | A kind of water-cooling furnace cover of electric furnace | |
| CN206944157U (en) | Burner and gas kitchen ranges | |
| CN102531362B (en) | Vacuum sintering furnace for manufacturing vacuum glass | |
| CN205763670U (en) | Precoated sand core dedicated drying device | |
| CN210293820U (en) | Energy-saving condensation-preventing sampling probe rod | |
| CN216591840U (en) | Self-service gasification cooking utensils of alcohol group liquid fuel | |
| CN210772161U (en) | Combined fire grate segment structure | |
| CN209116360U (en) | A kind of carbon baking furnace cross wall flue plugboard | |
| CN208632509U (en) | A kind of New Type Material PCR plate | |
| CN211650241U (en) | Lower burner structure | |
| CN107345662A (en) | Burner and gas kitchen ranges |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |