CN217157322U

CN217157322U - Film box counting mechanism and wafer cleaning equipment

Info

Publication number: CN217157322U
Application number: CN202123287374.0U
Authority: CN
Inventors: 龚泽熙; 李雄朋; 庄海云
Original assignee: Chuang Wei Electronics Changzhou Co ltd
Current assignee: Chuang Wei Electronics Changzhou Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-08-09
Anticipated expiration: 2031-12-24

Abstract

The utility model discloses a wafer box number piece mechanism and wafer cleaning equipment, wherein the mechanism is counted to the wafer box, include: the wafer box comprises a material platform and a wafer box body, wherein the material platform is arranged on the wafer box body, and a plurality of wafer grooves are formed in the wafer box body at intervals; the positioning piece is arranged on the material platform and is provided with a positioning structure which is in one-to-one correspondence with the wafer grooves; a scanning device, comprising: the counting sensor, the positioning sensor and the power mechanism for driving the counting sensor and the positioning sensor to synchronously move; the positioning sensors scan the positioning structures one by one to determine the corresponding positions of the scanning device and the wafer groove, and the counting sensors scan the wafer groove one by one to determine whether wafers exist. The wafer box counting mechanism and the wafer cleaning equipment adopt simple sensors and driving structures thereof, solve the problem of structural reliability of the existing wafer sensor and greatly save equipment cost, are accurate in counting and positioning of the wafers, high in reliability, few in repair, low in failure rate and cost, and are particularly suitable for the wafer counting operation of the feeding and discharging device of the wafer groove type semiconductor wet cleaning equipment.

Description

Film box counting mechanism and wafer cleaning equipment

Technical Field

The utility model relates to a slot type wet process cleaning equipment especially relates to a piece box number piece mechanism and wafer processing equipment suitable for unloader on semiconductor wafer cleaning equipment.

Background

In the existing semiconductor wafer groove type wet cleaning equipment, an upper feeding device and a lower feeding device usually use a wafer counting mechanism to count and position wafers in a wafer groove, a core part of the upper feeding device and the lower feeding device generally adopt a Mapping Sensor special for the wafers as a wafer counting Sensor, the Sensor is high in price, and when the Sensor is used for detecting a single wafer, the tail end of a tape ruler similar to a comb has the risk of being knocked off, so that the Sensor is scrapped after the tail end of a belt tooth is broken, the reliability of the equipment is reduced, and the use and maintenance cost of the equipment is increased.

Therefore, how to improve the reliability of the sensors of the several mechanisms of the conventional semiconductor wafer cleaning equipment and reduce the equipment cost thereof is a technical problem to be solved in the field.

SUMMERY OF THE UTILITY MODEL

In order to solve the defects existing in the prior art, the utility model provides a wafer box number piece mechanism and wafer processing equipment suitable for unloader on semiconductor wafer cleaning equipment.

The utility model adopts the technical scheme that a sheet box number piece mechanism is provided, include:

the wafer box comprises a material platform and a wafer box body, wherein the material platform is arranged on the wafer box body, and a plurality of wafer grooves are formed in the wafer box body at intervals;

the positioning piece is arranged on the material platform and is provided with a positioning structure which is in one-to-one correspondence with the wafer grooves;

a scanning device, comprising: the counting sensor, the positioning sensor and the power mechanism for driving the counting sensor and the positioning sensor to synchronously move;

the positioning sensors scan the positioning structures one by one to determine the corresponding positions of the scanning device and the wafer groove, and the counting sensors scan the wafer groove one by one to determine whether wafers exist.

Furthermore, each wafer groove penetrates through the bottom of the wafer box, and the material platform is provided with an opening for exposing the wafer groove; the counting sensor includes: locate the first correlation radio eye of spool box top, locate the second correlation radio eye of opening below, first correlation radio eye aligns from top to bottom and passes through wafer groove and opening and mutually support and send or receive the signal.

Furthermore, the positioning part adopts a positioning ruler strip, and the positioning structure is a plurality of positioning notches arranged on the positioning ruler strip at intervals;

the positioning sensor includes: the scanning groove comprises a first opposite-shooting groove wall and a second opposite-shooting groove wall which are oppositely arranged, the first opposite-shooting wall and the second opposite-shooting wall are connected into a whole through a groove bottom to form the scanning groove, the positioning ruler strip is arranged between the first opposite-shooting groove wall and the second opposite-shooting groove wall, and the first opposite-shooting groove wall and the second opposite-shooting groove wall are matched with each other to send or receive signals.

Preferably, the wafer box is arranged at the top end of the material platform, the positioning piece is horizontally arranged below the material platform, and the plurality of positioning structures are aligned to the plurality of wafer grooves in the vertical direction one by one.

Further, the scanning device further comprises:

the connecting piece of vertical setting, the upper end of connecting piece is located to first pair radio-frequency eye, and the lower extreme of connecting piece is located to the registration sensor, and the connecting piece middle part just is located between first pair radio-frequency eye and the registration sensor is located to the second pair radio-frequency eye.

Further, the positioning sensor further includes: and the fine adjustment structure is used for finely adjusting the positioning ruler strip along the horizontal direction so as to calibrate the alignment between the positioning ruler strip and the wafer groove.

Furthermore, the power mechanism comprises a mounting seat vertically arranged below the material platform, a driving unit and a transmission structure, wherein the driving unit and the transmission structure are arranged on the mounting seat, the driving unit is used for driving a moving part of the transmission structure to move horizontally, and the connecting piece is arranged on the moving part.

Preferably, the driving unit adopts a cylinder unit, the transmission structure comprises a piston rod of the cylinder unit and a guide rail arranged on the mounting seat, the moving part is mounted at the tail end of the piston rod, and the moving part is mounted on the guide rail through a guide groove.

Further, still include:

install in the stopper of material bench portion, this stopper is equipped with the spacing groove, and spool box bottom is equipped with the spacing muscle with spacing groove assorted.

The utility model also provides a wafer cleaning equipment, including loading attachment and unloader, loading attachment and/or unloader have adopted foretell piece box several mechanism.

Compared with the prior art, the utility model provides a piece box number piece mechanism and wafer cleaning equipment has following beneficial effect: the utility model discloses a simple sensor and drive structure have solved the problem of current wafer sensor structural reliability to can save equipment cost by a wide margin, several counts and fix a position accurate and the reliability high, reprocess few, fault rate and with low costs, especially be suitable for the brilliant unloader's of unloading several operations on wafer slot type semiconductor wet cleaning equipment.

Drawings

The invention is explained in more detail below with reference to exemplary embodiments and the accompanying drawings, in which:

FIG. 1 is a schematic view of an overall assembly structure of a tablet counting mechanism of a tablet cassette according to the present invention;

FIG. 2 is a schematic view of the front view assembly structure of the film counting mechanism of the middle film box of the present invention;

FIG. 3 is a schematic view of the top view assembly structure of the tablet counting mechanism of the tablet cassette of the present invention;

FIG. 4 is a schematic view of the overall assembly structure of the tablet counting mechanism of the tablet cassette of the present invention;

FIG. 5 is a third schematic view of the overall assembly structure of the tablet counting mechanism of the tablet cassette of the present invention;

FIG. 6 is a schematic view of a partial explosion structure of the film counting mechanism of the middle film box of the present invention;

fig. 7 is a schematic view of a partially assembled structure of the cassette counting mechanism of fig. 6.

Wherein, the main marks in the figure are:

1. a material platform; 11. an opening; 12. a yielding groove; 2. a sheet cassette; 21. a wafer groove; 22. limiting ribs; 3. a positioning member; 31. a positioning structure; 4. a counting sensor; 41. a first opposed-firing eye; 42. a second opposed-firing eye; 5. a positioning sensor; 51. a main body; 52. scanning the slot; 521. a first correlation slot wall; 522. a second correlation slot wall; 6. a power mechanism; 61. a mounting seat; 62. a drive unit; 63. a transmission structure; 631. a guide rail; 7. a connecting member; 71. a signal amplifier; 8. a moving member; 81. a guide groove; 9. a limiting block; 91. a limiting groove.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

Thus, a feature indicated in this specification will serve to explain one of the features of an embodiment of the invention, and not to imply that every embodiment of the invention must have the described feature. Further, it should be noted that this specification describes many features. Although some features may be combined to show a possible system design, these features may also be used in other combinations not explicitly described. Thus, the combinations illustrated are not intended to be limiting unless otherwise specified.

The principles of the present invention will be described in detail below with reference to the accompanying fig. 1-7 and examples.

Referring to fig. 1-7, the present invention provides a film cassette counting mechanism, comprising: the material platform 1, the material platform 1 is preferably a rectangular plate arranged horizontally, can also adopt the round plate or flat plate of other shapes to replace; the wafer box 2 is arranged on the material platform 1, the wafer box 2 is preferably a rectangular box body with an opening 11 at the top, and a plurality of wafer grooves 21 are continuously arranged in the box body at intervals; the positioning piece 3 is arranged on the material platform 1, and the positioning piece 3 is provided with positioning structures 31 which correspond to the wafer grooves 21 one by one; in this embodiment, the method further includes: the limiting block 9 is arranged at the top of the material table 1, the limiting block 9 is provided with a limiting groove 91, and the bottom of the sheet box 2 is provided with a limiting rib 22 matched with the limiting groove 91; preferably, four limit blocks 9 are arranged at the top of the material table 1 and respectively correspond to four corners of the bottom of the rectangular sheet box 2. In this embodiment, the positioning member 3 is a positioning rule, the main body 51 of the positioning rule is a horizontally extending vertical plate, the positioning structure 31 is a plurality of positioning notches continuously arranged on the positioning rule at intervals along the axial direction of the positioning rack, that is, along the horizontal direction, and each positioning notch is located between adjacent positioning teeth.

Referring to fig. 1 and 4-7, the film box counting mechanism of the present invention further includes: a scanning device, in this embodiment, comprising: the counting sensor 4, the positioning sensor 5 and the power mechanism 6 for driving the counting sensor 4 and the positioning sensor 5 to synchronously move; the power mechanism 6 synchronously drives the positioning sensor 5 to scan the positioning structures 31 one by one to determine the corresponding positions of the scanning device and the wafer slot 21, and the counting sensor 4 scans the wafer slot 21 one by one to determine whether wafers exist.

In the embodiment, each wafer groove 21 penetrates through the bottom of the wafer box 2, and the material platform 1 is provided with an opening 11 for exposing the wafer groove 21; the count sensor 4 includes: a first pair of radio eyes 41 arranged above the film box 2 and a second pair of radio eyes 42 arranged below the opening 11, namely, the opening 11 is positioned between the first pair of radio eyes 41 and the second pair of radio eyes 42; the first and

second radio eyes

41 and 42 are aligned up and down on a vertical plane parallel to the wafer slot 21, and they transmit or receive signals through the wafer slot 21 and the opening 11 in cooperation with each other; in this embodiment, the signal is a laser signal, and in other embodiments, an infrared signal may be used instead of the laser signal.

Referring to fig. 1-7, in the present embodiment, the positioning sensor 5 includes: the scanning groove 52 comprises a first opposite shooting groove wall 521 and a second opposite shooting groove wall 522 which are oppositely arranged, the first opposite shooting wall and the second opposite shooting wall are connected into the scanning groove 52 through the groove bottom, the positioning ruler strip is arranged between the first opposite shooting groove wall 521 and the second opposite shooting groove wall 522, and the first opposite shooting groove wall 521 and the second opposite shooting groove wall 522 are matched with each other to send or receive signals; in this embodiment, the signal is a laser signal, and in other embodiments, an infrared signal may be used instead of the laser signal.

As a preferred embodiment, the wafer box 2 is arranged at the top end of the material table 1, the positioning member 3 is horizontally arranged below the material table 1, and the plurality of positioning structures 31 are aligned to the plurality of wafer grooves 21 one by one in the vertical direction; in other embodiments, the positioning member 3 may be disposed on the side or above the material table 1. In this embodiment, the scanning apparatus further includes: the connecting piece 7 is vertically arranged, and the connecting piece 7 preferably adopts a connecting rod or a connecting plate; the first pair of radio eyes 41 are arranged at the upper end of the connecting piece 7, and the material platform 1 is provided with a yielding groove 12 for the connecting piece 7 to pass through in the vertical direction; the positioning sensor 5 is arranged at the lower end of the connecting piece 7, the material platform 1 is arranged between the first radio eye 41 and the second radio eye 42, and the second radio eye 42 is arranged in the middle of the connecting piece 7 and is positioned between the first radio eye 41 and the positioning sensor 5.

Referring to fig. 1-7, in the present embodiment, the power mechanism 6 includes a mounting base 61 vertically disposed below the material table 1, a driving unit 62 and a transmission structure 63 disposed on the mounting base 61, the driving unit 62 is configured to drive the moving member 8 of the transmission structure 63 to move along a horizontal direction parallel to the receding slot 12 of the material table 1, and the connecting member 7 is mounted on the moving member 8 and moves along with the moving member 8. As a preferred embodiment, the driving unit 62 is a cylinder unit, the transmission structure 63 includes a piston rod of the cylinder unit and a guide rail 631 arranged on the mounting seat 61 and parallel to the relief groove 12 of the material table 1, the moving member 8 is mounted at the end of the piston rod, and the moving member 8 is mounted on the guide rail 631 through the guide groove 81; in other embodiments, the driving unit 62 may also be a motor, an oil cylinder or an electric cylinder, and the transmission structure 63 may be replaced by a rack-and-pinion, a synchronous pulley or a lead screw nut.

As a preferred embodiment, the positioning sensor 5 further comprises: a fine-tuning structure (not shown in the figure) for fine-tuning the positioning rule strip along the horizontal direction to calibrate the alignment between the positioning rule strip and the wafer slot 21, wherein the fine-tuning structure can be a waist-shaped hole which is arranged on the mounting seat 61 and is arranged along the horizontal direction, and the positioning rule strip is matched with the waist-shaped hole through a bolt to realize fine tuning of the positioning rack along the horizontal direction so as to realize alignment calibration between the positioning rule strip and the wafer slot 21.

The utility model also provides a wafer cleaning equipment, including loading attachment and unloader (not shown in the figure), loading attachment and/or unloader have adopted foretell spool box number piece mechanism, and spool box number piece mechanism begins the operation of counting after 2 location of spool box are in place on conveying spool box 2 to its station through the automatic assembly line equipment of front end. As an embodiment, further comprising: the signal amplifier 71 is preferably arranged at the lower end of the connecting piece 7, and the signal amplifier 71 is arranged at the upper end of the connecting piece 7 and is used for transmitting the signal of the counting sensor 4 from the upper end of the connecting piece 7 to the lower end of the connecting piece 7 through electric connection, and the signal is amplified by the signal amplifier 71 and then transmitted to an industrial personal computer (not shown in the figure) of the feeding device or the blanking device.

The utility model provides a film box counting mechanism's theory of operation as follows:

the power mechanism 6 drives the connecting piece 7, the connecting piece 7 drives the first pair of radio eyes 41 positioned above the wafer groove 21 and the second pair of radio eyes 42 positioned below the wafer groove 21 to scan the wafer groove 21 one by one, and synchronously drives the scanning groove 52 of the positioning sensor 5 to scan the positioning notch (positioned between adjacent positioning teeth) corresponding to each wafer groove 21 one by one;

when the positioning sensor 5 obtains that the positioning ruler strip passes through the scanning groove 52, the number of times of generation of the correlation signals between the first correlation groove wall 521 and the second correlation groove wall 522 sequentially obtains the wafer grooves 21 at corresponding positions (when the positioning teeth pass through the scanning groove 52 in the scanning process of the positioning sensor 5, no correlation signals are generated due to being shielded, namely, no correlation signal is generated between two adjacent correlation signal generation periods in the scanning process of the positioning sensor 5; when a positioning notch passes through the scanning groove 52, a section of correlation signals is generated due to no shielding, namely, a section of correlation signal pulse is generated between two adjacent correlation signal generation periods in the scanning process of the positioning sensor 5), counts the number of the wafer grooves 21 of the cassette 2, and determines the corresponding positions of scanning devices for scanning each wafer groove 21;

synchronously with the positioning sensor 5, the counting sensor 4 calculates the total number of wafer slots 21 with missing parts in the wafer box 2 by acquiring the generation times of the correlation signals between the first correlation electric eye 41 and the second correlation electric eye 42 when the wafer box 2 passes through the first correlation electric eye and the second correlation electric eye (similarly, in the scanning process of the counting sensor 4, when a wafer or a slot wall entity is placed in the wafer slot 21, no correlation signal occurs because of being shielded; finally, by matching the synchronous (transmitted in the same time interval) pulse correlation signals obtained by the positioning sensors 5 corresponding to the pulse correlation signals obtained by each counting sensor 4, the total number of the wafer slots 21 lacking pieces can be obtained, and the wafer slot 21 of each lacking piece is located at the corresponding position of the wafer cassette 2 (i.e. located at the second wafer slot 21 from the scanning side), so as to finally position all the wafer slots 21 having the lacking pieces in the wafer cassette 2.

The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. Film box film counting mechanism, its characterized in that includes:

the wafer box comprises a material platform (1) and a wafer box (2) arranged on the material platform (1), wherein a plurality of wafer grooves (21) are formed in the wafer box (2) at intervals;

the positioning piece (3) is arranged on the material platform (1), and the positioning piece (3) is provided with positioning structures (31) which correspond to the wafer grooves (21) one by one;

a scanning device, comprising: the device comprises a counting sensor (4), a positioning sensor (5) and a power mechanism (6) for driving the counting sensor (4) and the positioning sensor (5) to synchronously move;

the positioning sensors (5) scan the positioning structures (31) one by one to determine the corresponding positions of the scanning device and the wafer groove (21), and the counting sensors (4) scan the wafer groove (21) one by one to determine whether wafers exist.

2. The cassette counting mechanism according to claim 1, wherein each wafer pocket (21) penetrates through the bottom of the cassette (2), and the material table (1) is provided with an opening (11) for exposing the wafer pocket (21); the counting sensor (4) comprises: locate first correlation shooting electric eye (41) of spool box (2) top, locate second correlation shooting electric eye (42) of opening (11) below, first correlation shooting electric eye (41) with second correlation shooting electric eye (42) are aligned from top to bottom and are passed through wafer groove (21) with opening (11) mutually support and send or accept the signal.

3. The cassette counting mechanism according to claim 1, wherein the positioning member (3) is a positioning ruler strip, and the positioning structure (31) is a plurality of positioning notches arranged at intervals on the positioning ruler strip;

the positioning sensor (5) comprises: the scanning groove (52) comprises a main body (51) and a scanning groove (52) arranged on the main body (51), the scanning groove (52) comprises a first opposite shooting groove wall (521) and a second opposite shooting groove wall (522) which are oppositely arranged, the first opposite shooting wall and the second opposite shooting wall are connected into a whole through a groove bottom to form the scanning groove (52), the positioning ruler strip is arranged between the first opposite shooting groove wall (521) and the second opposite shooting groove wall (522), and the first opposite shooting groove wall (521) and the second opposite shooting groove wall (522) are matched with each other to send or receive signals.

4. The cassette counting mechanism according to claim 1, wherein the cassette (2) is disposed at the top end of the material table (1), the positioning member (3) is horizontally disposed below the material table (1), and the plurality of positioning structures (31) are vertically aligned with the plurality of wafer grooves (21).

5. The cassette mechanism of claim 2, wherein said scanning device further comprises:

connecting piece (7) of vertical setting, first correlation radio eye (41) are located the upper end of connecting piece (7), positioning sensor (5) are located the lower extreme of connecting piece (7), second correlation radio eye (42) are located the connecting piece middle part just is located first correlation radio eye (41) with between positioning sensor (5).

6. A cassette counting mechanism according to claim 3, characterized in that said positioning sensor (5) further comprises: and the fine adjustment structure is used for finely adjusting the positioning ruler strip along the horizontal direction so as to calibrate the alignment of the positioning ruler strip and the wafer groove (21).

7. The film cassette counting mechanism of claim 5, wherein:

the power mechanism (6) comprises a mounting seat (61) vertically arranged below the material platform (1), a driving unit (62) and a transmission structure (63) arranged on the mounting seat (61), wherein the driving unit (62) is used for driving a moving part (8) of the transmission structure (63) to horizontally move, and the connecting piece (7) is arranged on the moving part (8).

8. The cassette mechanism of claim 7, wherein the driving unit (62) is a cylinder unit, the transmission structure (63) comprises a piston rod of the cylinder unit and a guide rail (631) disposed on the mounting base (61), the moving member (8) is mounted at the end of the piston rod, and the moving member (8) is mounted on the guide rail (631) through a guide groove (81).

9. The film cassette counting mechanism of claim 1, further comprising:

install in stopper (9) at material platform (1) top, this stopper (9) are equipped with spacing groove (91), spool box (2) bottom be equipped with spacing muscle (22) of spacing groove (91) assorted.

10. Wafer cleaning equipment comprises a feeding device and a discharging device, and is characterized in that the feeding device and/or the discharging device adopts a wafer box counting mechanism according to any one of claims 1 to 9.