CN217154981U

CN217154981U - Sealed furnace door of diffusion furnace

Info

Publication number: CN217154981U
Application number: CN202220199609.6U
Authority: CN
Inventors: 赵海军; 孟庆昌
Original assignee: Qingdao Haitongda Microelectronics Co ltd
Current assignee: Qingdao Haitongda Microelectronics Co ltd
Priority date: 2022-01-25
Filing date: 2022-01-25
Publication date: 2022-08-09
Anticipated expiration: 2032-01-25

Abstract

The utility model relates to the technical field of diffusion furnaces, and provides a diffusion furnace sealing furnace door, which comprises a furnace body, a turnover mechanism, a switch mechanism and a sealing mechanism; the utility model discloses a setting of on-off mechanism, can be effectual realize the effect of switch to the furnace gate body, and reduce its space that occupies, avoided simultaneously that people cause the injury to the staff for the inside hot unrestrained appearance of switch, in order to reduce its danger, and the compactness and the sealed effect of switch have been improved, through tilting mechanism's setting, can be used to rotate it to the top when opening, so that people carry out feeding ejection of compact work, and supplementary on-off mechanism carries out the switch work to it, make it reach better effect, utilize sealing mechanism's setting, can be used to play sealed effect to it, and conveniently guarantee the stability of its inside temperature, and supporting mechanism can be used to support the furnace body, thereby still can prevent instrument or the material and be convenient for people's follow-up operation.

Description

Sealed furnace door of diffusion furnace

Technical Field

The utility model belongs to the technical field of the diffusion furnace, especially, relate to a diffusion furnace sealing furnace gate.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like. The quartz boat or the quartz tube is used for directly placing the quartz boat or the quartz tube in which the monocrystalline silicon or the polycrystalline silicon wafers are inserted in a furnace body during heating or annealing.

The furnace door is required to be used for sealing the diffusion furnace during working, but the conventional diffusion furnace door occupies a larger space in the opening and closing process, and meanwhile, the diffusion furnace door needs manual operation, certain danger can occur in the manual operation process, so that the diffusion furnace door is not beneficial to safety production, and meanwhile, the sealing effect is reduced by manual closing.

SUMMERY OF THE UTILITY MODEL

Based on the above background, the utility model aims at providing a diffusion furnace seals furnace gate to shared space when reducing the switch, and avoid the sealed bad phenomenon that the people caused for the switch to take place, reduced the danger of work simultaneously.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a sealed furnace door of a diffusion furnace comprises a furnace body, a turnover mechanism, a switching mechanism and a sealing mechanism, wherein the turnover mechanism is arranged in an inner cavity of the furnace body;

the installation box in the turnover mechanism is installed at the top of the furnace body, the connection box in the switch mechanism is arranged in the inner cavity of the installation box, and the connection frame in the sealing mechanism is arranged at one end of the furnace body;

the switch mechanism is characterized by further comprising a second motor, a third gear, a toothed plate, a connecting plate, a sliding groove and a sliding block, wherein the second motor is installed on one side of the inner cavity of the connecting box, the third gear is in key connection with an output shaft of the second motor, the connecting plate is meshed with the bottom of the third gear, the connecting plate is installed at the bottom of the toothed plate, the sliding groove is arranged at the bottom of the connecting plate, the sliding block is connected to the inner cavity of the sliding groove in a sliding mode, and the bottom of the sliding block is installed at the bottom of the inner cavity of the connecting box.

Preferably, the turnover mechanism comprises a first motor, a first gear, a second gear and a rotating rod, the first motor is installed on the back of the inner cavity of the installation box, and the first gear is in key connection with an output shaft of the first motor.

Preferably, the second gear is meshed with one side of the first gear, the rotating rod penetrates through two sides of the second gear, one end of the rotating rod is mounted on the back of the connecting box, and the other end of the rotating rod is movably mounted on the back of the inner cavity of the mounting box.

Preferably, a cross rod is installed on the upper portion of the surface of the connecting box, and one end of the cross rod is movably installed on the upper portion of the surface of the inner cavity of the installing box.

Preferably, the sealing mechanism comprises a furnace door body and a plug, the furnace door body is mounted on the lower portion of the back face of the connecting frame, the upper portion of the back face of the connecting frame is mounted on the surface of the connecting plate, and the plug is mounted on the back face of the furnace door body.

Preferably, the ceramic fiber ring is installed on the back of the furnace door body and on the outer side of the plug, and a ceramic fiber plate is installed at one end of the plug.

Preferably, the bottom of the furnace body is provided with a supporting mechanism, the supporting mechanism comprises a supporting plate, a supporting column and a placing plate, the supporting plate is installed at the bottom of the furnace body, the supporting column is installed around the bottom of the supporting plate, and the placing plate is installed on the surface of the supporting plate.

Preferably, the surface of the furnace body is provided with a furnace opening, the surface of the installation box is provided with a first through opening, and the surface of the connection box is provided with a second through opening.

The utility model discloses following beneficial effect has:

the utility model discloses a switch mechanism's setting can be effectual realizes the effect of switch to the furnace gate body to reduce its space that occupies, avoided simultaneously artificially the switch inside hot unrestrained injury that causes the staff that appears, in order to reduce its danger, and improved the compactness and the sealed effect of switch.

The utility model discloses through tilting mechanism's setting, can be used to rotate it to the top when opening to people carry out feeding ejection of compact work, thereby make things convenient for people's operation, and auxiliary switch mechanism carries out the switch work to it, makes it reach better effect.

The utility model discloses utilize sealing mechanism's setting, can be used to play sealed effect to it to conveniently guarantee the stability of its inside temperature, thereby supporting mechanism can be used to support the furnace body and still can prevent instrument or the material people's of being convenient for follow-up operation.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic view of the overall structure;

FIG. 2 is a schematic view of a first motor structure;

fig. 3 is a structural schematic diagram of a toothed plate;

FIG. 4 is a schematic view of a second motor;

FIG. 5 is a schematic view of a plugging structure;

FIG. 6 is a schematic view of the structure of the furnace mouth.

The reference numbers illustrate:

1. a furnace body; 2. a turnover mechanism; 21. installing a box; 22. a first motor; 23. a first gear; 24. a second gear; 25. a rotating rod; 3. a switch mechanism; 31. a connecting box; 32. a second motor; 33. a third gear; 34. a toothed plate; 35. a connecting plate; 36. a chute; 37. a slider; 4. a sealing mechanism; 41. a connecting frame; 42. a furnace door body; 43. plugging; 5. a support mechanism; 51. a support plate; 52. a pillar; 53. placing the plate; 6. and (4) a furnace mouth.

The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

Referring to fig. 1-4, a sealed furnace door of a diffusion furnace comprises a furnace body 1, a turnover mechanism 2, a switch mechanism 3 and a sealing mechanism 4, wherein the turnover mechanism 2 is arranged in an inner cavity of the furnace body 1, the switch mechanism 3 is arranged in the inner cavity of the turnover mechanism 2, and the sealing mechanism 4 is arranged at one end of the furnace body 1;

wherein, the installation box 21 in the turnover mechanism 2 is installed at the top of the furnace body 1, the connecting box 31 in the switch mechanism 3 is arranged in the inner cavity of the installation box 21, and the connecting frame 41 in the sealing mechanism 4 is arranged at one end of the furnace body 1;

it should be noted that, as shown in the figure, the switch mechanism 3 further includes a second motor 32, a third gear 33, a toothed plate 34, a connecting plate 35, a sliding chute 36 and a sliding block 37, the second motor 32 is installed at one side of the inner cavity of the connecting box 31, the third gear 33 is in key connection with the output shaft of the second motor 32, the connecting plate 35 is meshed with the bottom of the third gear 33, the connecting plate 35 is installed at the bottom of the toothed plate 34, the sliding chute 36 is opened at the bottom of the connecting plate 35, the sliding block 37 is slidably connected to the inner cavity of the sliding chute 36, the bottom of the sliding block 37 is installed at the bottom of the inner cavity of the connecting box 31, first, the second motor 32 is used to drive the third gear 33 to rotate, the third gear 33 can drive the toothed plate 34 and the connecting plate 35 to extend or retract backwards reversely through the meshed connection relationship, thereby opening the door to avoid the artificial opening while reducing the danger thereof, and lowering the space occupied by the opening thereof by the cooperation of the upward reverse rotation of the turnover mechanism 2.

Example 1

In addition, as shown in fig. 1 and 2, the turnover mechanism 2 includes a first motor 22, a first gear 23, a second gear 24 and a rotating rod 25, the first motor 22 is installed on the back of the inner cavity of the installation box 21, the first gear 23 is connected with an output shaft key of the first motor 22, and the first gear 23 is driven by the first motor 22 to perform a transmission function, so as to facilitate driving the second gear 24 to rotate.

In addition, as shown in fig. 1 and 2, the second gear 24 is meshed with one side of the first gear 23, the rotating rod 25 penetrates through two sides of the second gear 24, one end of the rotating rod 25 is mounted on the back of the connecting box 31, the other end of the rotating rod 25 is movably mounted on the back of the inner cavity of the mounting box 21, and the second gear 24 is convenient for driving the rotating rod 25 and the connecting box 31 to rotate, so that the oven door is turned upside down after being opened, the oven door is convenient to open, the space in front of the oven door is reduced, and the oven door is turned back to the original position after being closed.

In addition, as shown in fig. 2, a cross bar is mounted on the upper portion of the surface of the connecting box 31, one end of the cross bar is movably mounted on the upper portion of the surface of the inner cavity of the mounting box 21, and the cross bar is used for assisting the rotating rod 25 to support the connecting box 31 and to rotate.

Example 2

Preferably, as shown in fig. 1 and 5, the sealing mechanism 4 includes a door body 42 and a plug 43, the door body 42 is mounted on the lower portion of the back of the connecting frame 41, the upper portion of the back of the connecting frame 41 is mounted on the surface of the connecting plate 35, the plug 43 is mounted on the back of the door body 42, the connecting frame 41 is used for connecting and supporting the door body 42, and is driven to open and close, and the plug 43 is used for sealing.

In addition, as shown in fig. 5, a ceramic fiber ring is installed on the back of the oven door body 42 and outside the plug 43, a ceramic fiber plate is installed at one end of the plug 43, and the ceramic fiber ring and the ceramic fiber plate play roles of high temperature resistance and sealing, thereby ensuring the temperature inside the oven door body to be stable.

Example 3

Further, as shown in fig. 1, the supporting mechanism 5 includes a supporting plate 51, a pillar 52 and a placing plate 53, the supporting plate 51 is installed at the bottom of the furnace body 1, the pillar 52 is installed around the bottom of the supporting plate 51, the placing plate 53 is installed on the surface of the supporting plate 51, the pillar 52 is used for supporting the supporting plate 51, the placing plate 53 is used for placing materials or other tools in advance, and the supporting plate 51 is used for supporting and installing the furnace body 1.

In addition, as shown in fig. 1, 2 and 6, a furnace mouth 6 is opened on the surface of the furnace body 1, a first through hole is opened on the surface of the installation box 21, a second through hole is opened on the surface of the connection box 31, the furnace mouth 6 is convenient for taking and placing materials, and the first through hole and the second through hole are both convenient for enabling the connection plate 35 to penetrate through the installation box 21 and the connection box 31 to achieve the extending and retracting functions.

Of course, the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and the changes, modifications, additions or substitutions made by those skilled in the art within the scope of the present invention should also belong to the protection scope of the present invention.

Claims

1. The sealed furnace door of the diffusion furnace is characterized by comprising a furnace body (1), a turnover mechanism (2), a switch mechanism (3) and a sealing mechanism (4), wherein the turnover mechanism (2) is arranged in an inner cavity of the furnace body (1), the switch mechanism (3) is arranged in the inner cavity of the turnover mechanism (2), and the sealing mechanism (4) is arranged at one end of the furnace body (1);

the installation box (21) in the turnover mechanism (2) is installed at the top of the furnace body (1), the connecting box (31) in the switch mechanism (3) is arranged in the inner cavity of the installation box (21), and the connecting frame (41) in the sealing mechanism (4) is arranged at one end of the furnace body (1);

switch mechanism (3) are still including second motor (32), third gear (33), pinion rack (34), connecting plate (35), spout (36) and slider (37), second motor (32) are installed in one side of connecting box (31) inner chamber, the output shaft key-type connection of third gear (33) and second motor (32), connecting plate (35) mesh in the bottom of third gear (33), the bottom in pinion rack (34) is installed in connecting plate (35), the bottom in connecting plate (35) is seted up in spout (36), slider (37) sliding connection is in the inner chamber of spout (36), the bottom of slider (37) and the bottom installation of connecting box (31) inner chamber.

2. The diffusion furnace sealing furnace door according to claim 1, characterized in that the turnover mechanism (2) comprises a first motor (22), a first gear (23), a second gear (24) and a rotating rod (25), the first motor (22) is installed on the back of the inner cavity of the installation box (21), and the first gear (23) is in key connection with the output shaft of the first motor (22).

3. The diffusion furnace sealing furnace door according to claim 2, characterized in that the second gear (24) is meshed with one side of the first gear (23), the rotating rod (25) penetrates through two sides of the second gear (24), one end of the rotating rod (25) is installed on the back of the connecting box (31), and the other end of the rotating rod (25) is movably installed on the back of the inner cavity of the mounting box (21).

4. The door of the diffusion furnace sealing furnace according to claim 2, characterized in that a cross bar is mounted on the upper part of the surface of the connecting box (31), and one end of the cross bar is movably mounted on the upper part of the inner cavity surface of the mounting box (21).

5. The sealing oven door of the diffusion oven according to claim 1, characterized in that the sealing mechanism (4) comprises an oven door body (42) and a plug (43), the oven door body (42) is mounted at the lower part of the back surface of the connecting frame (41), the upper part of the back surface of the connecting frame (41) is mounted with the surface of the connecting plate (35), and the plug (43) is mounted at the back surface of the oven door body (42).

6. The diffusion furnace sealing furnace door according to claim 5, characterized in that a ceramic fiber ring is installed on the back of the furnace door body (42) and outside the plug (43), and a ceramic fiber plate is installed on one end of the plug (43).

7. The diffusion furnace sealing furnace door according to claim 1, characterized in that a supporting mechanism (5) is arranged at the bottom of the furnace body (1), the supporting mechanism (5) comprises a supporting plate (51), a pillar (52) and a placing plate (53), the supporting plate (51) is installed at the bottom of the furnace body (1), the pillar (52) is installed at the periphery of the bottom of the supporting plate (51), and the placing plate (53) is installed on the surface of the supporting plate (51).

8. The diffusion furnace sealing furnace door according to claim 1, characterized in that a furnace opening (6) is formed in the surface of the furnace body (1), a first through opening is formed in the surface of the installation box (21), and a second through opening is formed in the surface of the connection box (31).