CN217152967U

CN217152967U - Quartz furnace tube with tube opening sealing structure

Info

Publication number: CN217152967U
Application number: CN202220591379.8U
Authority: CN
Inventors: 孙建平; 朱国飞; 费斌斌
Original assignee: Suzhou Guangxie Photoelectric Technology Co ltd
Current assignee: Suzhou Guangxie Photoelectric Technology Co ltd
Priority date: 2022-03-18
Filing date: 2022-03-18
Publication date: 2022-08-09
Anticipated expiration: 2032-03-18

Abstract

The utility model discloses a quartzy boiler tube with mouth of pipe seal structure, concretely relates to quartzy boiler tube field, including quartzy boiler tube main part, the fixed cover of one end of quartzy boiler tube main part has connect the lantern ring, the one end fixedly connected with sealing rubber pad of the lantern ring of connection, the crack between the one end port of sealing rubber pad and quartzy boiler tube main part forms the inserting groove, it has body port sealing connection lid to peg graft in the inserting groove, threaded connection has the fastening sealing ring on the lantern ring, just the both sides surface of fastening sealing ring all sets up flutedly. The utility model discloses a set up sealing rubber pad and fastening sealing ring, through wrench movement fastening sealing ring for the continuous extrusion sealing rubber pad of fastening sealing ring right-hand member makes the inseparable laminating on body port sealing connection lid surface by the suppression of sealing rubber pad, realizes the inseparable sealed effect of junction with this.

Description

Quartz furnace tube with tube opening sealing structure

Technical Field

The utility model relates to a quartzy boiler tube technical field, more specifically say, the utility model relates to a quartzy boiler tube with mouth of pipe seal structure.

Background

The quartz furnace tube is usually used together with a diffusion furnace, is commonly used for high-temperature diffusion of silicon wafers in semiconductor processing, and is a process of putting the silicon wafers and a silicon wafer bracket into the quartz furnace tube during a high-temperature diffusion process.

However, in practical use, both ends of the quartz furnace tube need to be sealed when the quartz furnace tube is used, and when the quartz furnace tube is connected in a sealing manner, the sealing structure of the tube opening is single, and the loosening condition is easy to occur along with long-term high-temperature use.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above-mentioned defects of the prior art, the embodiments of the present invention provide a quartz furnace tube with a tube opening sealing structure to solve the problems proposed in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a quartzy boiler tube with mouth of pipe seal structure, includes quartzy boiler tube main part, the fixed cover in one end of quartzy boiler tube main part has connect the lantern ring, the one end fixedly connected with sealing rubber pad of the lantern ring, the crack between the one end port of sealing rubber pad and quartzy boiler tube main part forms the inserting groove, it has body port sealing connection lid to peg graft in the inserting groove, threaded connection has the fastening sealing ring on the lantern ring, just the both sides surface of fastening sealing ring all sets up flutedly, the one end surface of body port sealing connection lid is provided with the buckle subassembly that is used for carrying out the joint with the fastening sealing ring.

Preferably, buckle subassembly includes the buckle, the one end of buckle is hung and is located fastening sealing ring on, just the one end of buckle is connected with the laminating of the recess inner wall surface in the fastening sealing ring outside.

Preferably, the outer surface of the pipe body port sealing connection cover is fixedly sleeved with a buckle connection ring, the buckle connection ring is fixedly connected with a plurality of connection blocks, and the connection blocks are rotatably connected with the buckle plate through the rotary columns.

Preferably, the outer surface of the connecting lantern ring is fixedly connected with a connecting external thread, and the fastening sealing ring is connected to the connecting external thread through an internal thread and a thread.

Preferably, the inner surface of the sealing rubber pad is closely attached to the outer surface of the pipe body port sealing connection cover.

Preferably, the outer surface of one end part of the quartz furnace tube main body is closely attached and connected with the inner surface of the tube body port sealing connection cover.

Preferably, the outer surface of the pipe port sealing connection cover is fixedly connected with an external pipe.

The utility model discloses a technological effect and advantage:

1. compared with the prior art, through setting up sealing rubber pad and fastening sealing ring, through wrench movement fastening sealing ring for the continuous extrusion sealing rubber pad of fastening sealing ring right-hand member makes the inseparable laminating on body port sealing connection lid surface by the suppression of sealing rubber pad, with this realization junction inseparable sealing effect.

2. Compared with the prior art, the buckle plate is arranged, the buckle plate on the pipe body port sealing connection cover is buckled in the groove on the outer side of the fastening sealing ring, and the fixing effect is achieved.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is an enlarged schematic view of the a position of the present invention.

Fig. 3 is a schematic structural view of the sealing rubber gasket of the present invention.

Fig. 4 is an enlarged schematic view of the position B of the present invention.

The reference signs are: 1. a quartz furnace tube main body; 2. the end opening of the tube body is hermetically connected with the cover; 3. sealing the rubber pad; 4. a connecting lantern ring; 5. connecting external threads; 6. fastening a sealing ring; 7. a groove; 8. buckling the plate; 9. connecting blocks; 10. inserting grooves; 201. is externally connected with a pipe body; 202. a snap connection ring.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in the attached figures 1-4, the quartz furnace tube with the tube opening sealing structure comprises a quartz furnace tube main body 1, one end of the quartz furnace tube main body 1 is fixedly sleeved with a connecting sleeve ring 4, one end of the connecting sleeve ring 4 is fixedly connected with a sealing rubber pad 3, a splicing groove 10 is formed by the sealing rubber pad 3 and a gap between one end port of the quartz furnace tube main body 1, a tube body port sealing connecting cover 2 is inserted in the splicing groove 10, the connecting sleeve ring 4 is connected with a fastening sealing ring 6 in a threaded manner, grooves 7 are respectively formed in the two side surfaces of the fastening sealing ring 6, a buckle assembly used for being clamped with the fastening sealing ring 6 is arranged on the outer surface of one end of the tube body port sealing connecting cover 2, so that the fastening sealing ring 6 is twisted to the left position shown in the attached figure 3, and then the fracture of the tube body port sealing connecting cover 2 is inserted between the sealing rubber pad 3 and one end port of the quartz furnace tube main body 1, that is to say in the inserting groove 10, then through wrench movement fastening sealing ring 6 for 6 right-hand members of fastening sealing ring constantly extrude sealing rubber pad 3, make sealing rubber pad 3 make closely laminate on body port sealing connection lid 2 surfaces by the suppression, with this realization junction inseparable sealing effect, then establish buckle 8 on body port sealing connection lid 2 in fastening sealing ring 6's outside recess 7 with buckle again, realize the fixed action.

In a preferred embodiment, as shown in fig. 1, fig. 2 and fig. 3, the buckle assembly comprises a buckle plate 8, one end of the buckle plate 8 is hung on the fastening sealing ring 6, and one end of the buckle plate 8 is attached to the inner wall surface of the groove 7 on the outer side of the fastening sealing ring 6, the outer surface of the tube port sealing connection cap 2 is fixedly sleeved with a buckle connection ring 202, the buckle connection ring 202 is fixedly connected with a plurality of connection blocks 9, the connection blocks 9 are rotatably connected with the buckle plate 8 through rotation columns, the outer surface of the connection lantern ring 4 is fixedly connected with a connection external thread 5, the fastening sealing ring 6 is connected to the connection external thread 5 through internal thread threads, the inner surface of the sealing rubber pad 3 is closely attached to the outer surface of the tube port sealing connection cap 2, the outer surface of one end of the quartz furnace tube body 1 is closely attached to the inner surface of the tube port sealing connection cap 2, the outer surface of the pipe port sealing connection cover 2 is fixedly connected with an external pipe 201.

The utility model discloses theory of operation: when the device is used, firstly, the fastening sealing ring 6 is twisted to the left position as shown in the attached drawing 3, then the fracture of the pipe body port sealing connection cover 2 is deep between the sealing rubber pad 3 and one end port of the quartz furnace tube main body 1, namely in the insertion groove 10, then the fastening sealing ring 6 is twisted, so that the sealing rubber pad 3 is continuously extruded by the right end of the fastening sealing ring 6, the sealing rubber pad 3 is pressed to be tightly attached to the outer surface of the pipe body port sealing connection cover 2, so that the tight sealing effect of the connection part is realized, then the buckle plate 8 on the pipe body port sealing connection cover 2 is buckled in the outer groove 7 of the fastening sealing ring 6, and the fixing effect is realized.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a quartzy boiler tube with mouth of pipe seal structure, includes quartzy boiler tube main part (1), its characterized in that: the fixed cover in one end of quartzy boiler tube main part (1) has connect the lantern ring (4), the one end fixedly connected with sealing rubber pad (3) of the lantern ring (4), crack between the one end port of sealing rubber pad (3) and quartzy boiler tube main part (1) forms inserting groove (10), it has body port sealing connection lid (2) to peg graft in inserting groove (10), threaded connection has fastening sealing ring (6) on the lantern ring (4), just recess (7) have all been seted up on the both sides surface of fastening sealing ring (6), the one end surface of body port sealing connection lid (2) is provided with the buckle subassembly that is used for carrying out the joint with fastening sealing ring (6).

2. The quartz furnace tube with tube orifice sealing structure of claim 1, wherein: the buckle assembly comprises a buckle plate (8), one end of the buckle plate (8) is hung on the fastening sealing ring (6), and one end of the buckle plate (8) is connected with the surface of the inner wall of the groove (7) on the outer side of the fastening sealing ring (6) in a laminating manner.

3. The quartz furnace tube with tube orifice sealing structure of claim 1, wherein: the outer surface of the pipe body port sealing connection cover (2) is fixedly sleeved with a buckle connection ring (202), the buckle connection ring (202) is fixedly connected with a plurality of connection blocks (9), and the connection blocks (9) are rotatably connected with a buckle plate (8) through rotating columns.

4. The quartz furnace tube with tube opening sealing structure according to claim 3, wherein: the outer surface of the connecting sleeve ring (4) is fixedly connected with a connecting external thread (5), and the fastening sealing ring (6) is connected to the connecting external thread (5) through an internal thread and a thread.

5. The quartz furnace tube with tube opening sealing structure according to claim 4, wherein: the inner surface of the sealing rubber pad (3) is closely attached to the outer surface of the pipe body port sealing connection cover (2).

6. The quartz furnace tube with tube opening sealing structure according to claim 5, wherein: the outer surface of one end part of the quartz furnace tube main body (1) is tightly attached and connected with the inner surface of the tube body port sealing connection cover (2).

7. The quartz furnace tube with tube orifice sealing structure of claim 6, wherein: the outer surface of the pipe body port sealing connection cover (2) is fixedly connected with an external pipe body (201).