CN217134348U - Clamping mechanism for semiconductor processing table - Google Patents
Clamping mechanism for semiconductor processing table Download PDFInfo
- Publication number
- CN217134348U CN217134348U CN202220716330.0U CN202220716330U CN217134348U CN 217134348 U CN217134348 U CN 217134348U CN 202220716330 U CN202220716330 U CN 202220716330U CN 217134348 U CN217134348 U CN 217134348U
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- centre gripping
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- semiconductor
- semiconductor processing
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 43
- 238000012545 processing Methods 0.000 title claims abstract description 15
- 230000002457 bidirectional effect Effects 0.000 claims description 11
- 238000013519 translation Methods 0.000 claims description 10
- 230000000712 assembly Effects 0.000 claims description 5
- 238000000429 assembly Methods 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 241000282472 Canis lupus familiaris Species 0.000 abstract description 19
- 230000000694 effects Effects 0.000 description 4
- 238000001125 extrusion Methods 0.000 description 4
- 206010066054 Dysmorphism Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a fixture for semiconductor processing platform, including the loading board, the top symmetry of loading board is provided with two sets of centre gripping subassemblies, and the inner chamber of loading board is provided with the drive assembly that is used for two sets of centre gripping subassemblies to remove, and the centre gripping subassembly includes L type dog and two rectangle dogs, and two rectangle dog symmetries set up in the both sides of L type dog, and the equal fixedly connected with in both sides of L type dog slides the stop screw who alternates the setting with two rectangle dogs respectively, and two stop screw's outer wall threaded connection has lock nut. The utility model discloses a by the centre gripping subassembly that L type dog, two rectangle dogs, stop screw and lock nut are constituteed, can carry out adaptability according to the width size of semiconductor and adjust and reach the centre gripping fixed, cooperate drive assembly to drive two sets of centre gripping subassemblies simultaneously and in opposite directions or reverse movement, realize fixed to the centre gripping of the semiconductor of different length to the steadiness to the semiconductor centre gripping location has been improved.
Description
Technical Field
The utility model relates to a semiconductor processing technology field, in particular to fixture for semiconductor processing platform.
Background
The semiconductor is a material with electric conductivity between a conductor and an insulator at normal temperature, and is applied to the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like, for example, a circuit board chip is a device manufactured by adopting the semiconductor.
At present in to semiconductor course of working, need use fixture to carry out the location of semiconductor fixed to subsequent processing operation improves the processingquality to the semiconductor, but fixture that uses today mostly can only reach two sides extrusion centre gripping, can't carry out the four sides centre gripping of adaptability according to the length and the width of semiconductor, leads to lower to the fastness of semiconductor centre gripping location, has reduced the fixed stability of semiconductor centre gripping
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a fixture for semiconductor processing platform to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a clamping mechanism for a semiconductor processing table comprises a bearing plate, wherein two groups of clamping assemblies are symmetrically arranged at the top end of the bearing plate, and a driving assembly for the movement of the two groups of clamping assemblies is arranged in an inner cavity of the bearing plate;
the clamping assembly comprises an L-shaped check block and two rectangular check blocks, the rectangular check blocks are symmetrically arranged on two sides of the L-shaped check block, two sides of the L-shaped check block are fixedly connected with limit screw rods which are slidably inserted into the two rectangular check blocks respectively, and the outer walls of the limit screw rods are in threaded connection with locking nuts.
Preferably, the corners of the top ends of the two rectangular stop blocks are provided with rectangular through grooves, and the size of each rectangular through groove is the same as the size of the inner side of the top of the L-shaped stop block.
Preferably, the L-shaped check block is fixedly connected with an elastic tension spring on one side opposite to the two rectangular check blocks, and the inner cavity of the elastic tension spring is movably inserted into the limit screw corresponding to the position.
Preferably, the driving assembly comprises a strip-shaped slot and a translation mechanism, the strip-shaped slot is arranged in the middle of the top end of the bearing plate, and the translation mechanism is arranged in an inner cavity of the strip-shaped slot and is in transmission connection with the two L-shaped check blocks.
Preferably, the translation mechanism comprises a bidirectional screw and two nut seats, the bidirectional screw is rotatably arranged in the inner cavity of the bar-shaped groove, the two nut seats are respectively and alternately connected with the bidirectional screw in a threaded manner, the two nut seats are symmetrically arranged, the top ends of the two nut seats are respectively and fixedly connected with the bottom ends of the two L-shaped check blocks, and one end of the bidirectional screw penetrates through the outer part of the bearing plate and is fixedly connected with a rotating handle.
Preferably, the equal fixedly connected with of edge of loading board bottom supports the footing, support the footing and be the right angle form of buckling, just the bottom mounting of supporting the footing is provided with anti-skidding rubber pad.
The utility model discloses a technological effect and advantage:
(1) the utility model discloses a by the L type dog, two rectangle dogs, stop screw and lock nut constitute the centre gripping subassembly, can carry out adaptability according to the width size of semiconductor and adjust and reach the centre gripping fixed, cooperate the drive assembly to drive two sets of centre gripping subassemblies simultaneously and move in opposite directions or reverse direction, realize the centre gripping fixed to the semiconductor of different length to the steadiness of semiconductor centre gripping location has been improved;
(2) the utility model discloses utilize the fixed elastic tension spring that sets up between L type dog and the rectangle dog, rethread stop screw makes two rectangle dogs can carry out self-centering centre gripping to placing the semiconductor on L type dog to elastic tension spring's limiting displacement, improves the accurate nature to semiconductor location to improve the convenience of using.
Drawings
Fig. 1 is a schematic view of the three-dimensional structure of the present invention.
Fig. 2 is a schematic view of a part of an enlarged structure of fig. 1 according to the present invention.
FIG. 3 is a schematic front sectional view of the loading plate of the present invention.
In the figure: 1. a carrier plate; 2. an L-shaped stop block; 3. a rectangular stop block; 4. a rectangular through groove; 5. a limit screw; 6. an elastic tension spring; 7. locking the nut; 8. slotting in a strip shape; 9. a bidirectional screw; 10. a nut seat; 11. a handle is rotated; 12. supporting the feet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a clamping mechanism for a semiconductor processing table as shown in figures 1-3, which comprises a bearing plate 1, wherein two groups of clamping components are symmetrically arranged at the top end of the bearing plate 1, and a driving component for moving the two groups of clamping components is arranged in the inner cavity of the bearing plate 1;
the driving assembly comprises a strip-shaped slot 8 and a translation mechanism, the strip-shaped slot 8 is arranged in the middle of the top end of the bearing plate 1 and is used for installing the translation mechanism, the translation mechanism is arranged in an inner cavity of the strip-shaped slot 8 and is in transmission connection with the two L-shaped stop blocks 2, the translation mechanism comprises a two-way screw 9 and two nut seats 10, the two-way screw 9 is rotatably arranged in the inner cavity of the strip-shaped slot 8, the two nut seats 10 are respectively in threaded insertion connection with the two-way screw 9, the two nut seats 10 are symmetrically arranged, the top ends of the two nut seats 10 are respectively fixedly connected with the bottom ends of the two L-shaped stop blocks 2, an operator rotates the two-way screw 9 clockwise or anticlockwise to drive the two nut seats 10 to synchronously move towards or away from each other on the two-way screw 9 by utilizing the threaded insertion between the two-way screw 9 and the threaded insertion of the strip-shaped slot 8 to limit the nut seats 10, thereby driving the two groups of clamping assemblies to approach or move away from each other, clamping and fixing the two sides of the semiconductor are realized, one end of the bidirectional screw 9 penetrates through the outside of the bearing plate 1 and is fixedly connected with a rotating handle 11, and the outer wall of the rotating handle 11 is provided with anti-skidding textures, so that an operator can conveniently rotate the bidirectional screw 9, and the convenience of operation is improved;
the clamping assembly comprises an L-shaped stop block 2 and two rectangular stop blocks 3, the two rectangular stop blocks 3 are symmetrically arranged on two sides of the L-shaped stop block 2, two sides of the L-shaped stop block 2 are fixedly connected with limit screw rods 5 which are respectively arranged in a sliding and inserting manner with the two rectangular stop blocks 3, a smooth limit slide bar can be additionally arranged between the L-shaped stop block 2 and the rectangular stop block 3 to carry out the sliding bearing and guiding of the rectangular stop blocks 3, the moving smoothness and stability of the rectangular stop blocks 3 are improved, rectangular through grooves 4 are formed in the corners of the top ends of the two rectangular stop blocks 3, the size of each rectangular through groove 4 is the same as that of the inner side of the top of the L-shaped stop block 2, locking nuts 7 are in threaded connection with the outer walls of the two limit screw rods 5, the two rectangular stop blocks 3 are matched with the rectangular through grooves 4 to carry out clamping and positioning on the two corners of the semiconductor, and then the locking nuts 7 are matched to rotate and move on the limit screw rods 5, extruding the rectangular stop block 3 to ensure that the rectangular stop block 3 keeps tight extrusion on the semiconductor;
the equal fixedly connected with elasticity extension spring 6 in one side that L type dog 2 is relative with two rectangle dogs 3, the inner chamber of elasticity extension spring 6 and the 5 activities interlude settings of stop screw that correspond the position utilize the tensile deformation of elasticity extension spring 6 to produce elastic restoring force, make two rectangle dogs 3 can carry out the centre gripping location to two corners of semiconductor automatically, play the effect of an assistance-localization real-time and centre gripping, increase the accurate nature and the convenience of semiconductor location.
Equal fixedly connected with in the edge of 1 bottom of loading board supports footing 12, supports footing 12 and is the right angle form of buckling, and supports the bottom mounting of footing 12 and be provided with anti-skidding rubber pad, supports loading board 1, keeps the stability that loading board 1 placed, has the effect of making an uproar of falling of antiskid simultaneously.
The utility model discloses the theory of operation: an operator clamps the length of a positioned semiconductor according to the requirement, the approximate distance between two groups of clamping components is debugged in advance, two sides of the semiconductor can be carried between two L-shaped check blocks 2, the operator manually pushes away the rectangular check blocks 3 at two sides of the L-shaped check blocks 2 to drive the elastic tension springs 6 between the two groups of clamping components to stretch and deform to generate elastic restoring force, after the end part of the semiconductor is placed in the clamping groove at the inner side of the L-shaped check blocks 2, the thrust to the rectangular check blocks 3 is loosened, the elastic restoring force of the elastic tension springs 6 is utilized to enable the two rectangular check blocks 3 to self-center and clamp two sides of the end part of the semiconductor through the rectangular through grooves 4 formed in the two rectangular check blocks 3, after two end parts of the semiconductor are respectively positioned on the two L-shaped check blocks 2, the operator clockwise rotates the rotating handle 11 to drive the two-way screw rods 9 to rotate, and the two nut seats 10 drive the two groups of clamping components to synchronously move towards each other, carry out the centre gripping fixed to the both sides of semiconductor, screw up lock nut 7 on the stop screw 5 again at last, make lock nut 7 extrusion rectangle dog 3, make rectangle dog 3 extrusion semiconductor's lateral wall to it is fixed to carry out the centre gripping to four lateral walls of semiconductor, increases the steadiness of its centre gripping.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses the standard parts that use all can purchase from the market, and dysmorphism piece all can be customized according to the record of the description with the drawing.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The clamping mechanism for the semiconductor processing table comprises a bearing plate (1), and is characterized in that two groups of clamping assemblies are symmetrically arranged at the top end of the bearing plate (1), and a driving assembly for moving the two groups of clamping assemblies is arranged in an inner cavity of the bearing plate (1);
the clamping assembly comprises an L-shaped check block (2) and two rectangular check blocks (3), wherein the rectangular check blocks (3) are symmetrically arranged on two sides of the L-shaped check block (2), the two sides of the L-shaped check block (2) are fixedly connected with limit screw rods (5) which are slidably inserted into the two rectangular check blocks (3) respectively, and the outer walls of the limit screw rods (5) are in threaded connection with locking nuts (7).
2. The clamping mechanism for the semiconductor processing table according to claim 1, wherein rectangular through grooves (4) are formed at corners of the top ends of the two rectangular stop blocks (3), and the size of each rectangular through groove (4) is the same as that of the inner side of the top of each L-shaped stop block (2).
3. The clamping mechanism for the semiconductor processing table as claimed in claim 1, wherein one side of the L-shaped stop block (2) opposite to the two rectangular stop blocks (3) is fixedly connected with an elastic tension spring (6), and an inner cavity of the elastic tension spring (6) is movably inserted into a limiting screw rod (5) at a corresponding position.
4. The clamping mechanism for the semiconductor processing table as claimed in claim 1, wherein the driving assembly comprises a strip-shaped slot (8) and a translation mechanism, the strip-shaped slot (8) is arranged in the middle of the top end of the bearing plate (1), and the translation mechanism is arranged in the inner cavity of the strip-shaped slot (8) and is in transmission connection with the two L-shaped stop blocks (2).
5. The clamping mechanism for the semiconductor processing table according to claim 4, wherein the translation mechanism comprises a bidirectional screw (9) and two nut seats (10), the bidirectional screw (9) is rotatably arranged in the inner cavity of the strip-shaped slot (8), the two nut seats (10) are respectively in threaded insertion connection with the bidirectional screw (9), the two nut seats (10) are symmetrically arranged, the top ends of the two nut seats (10) are respectively fixedly connected with the bottom ends of the two L-shaped stoppers (2), and one end of the bidirectional screw (9) penetrates through the outer part of the bearing plate (1) and is fixedly connected with a rotating handle (11).
6. The clamping mechanism for the semiconductor processing table as claimed in claim 1, wherein the supporting feet (12) are fixedly connected to the corners of the bottom end of the loading plate (1), the supporting feet (12) are bent at right angles, and the bottom end of the supporting feet (12) is fixedly provided with an anti-skid rubber pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220716330.0U CN217134348U (en) | 2022-03-30 | 2022-03-30 | Clamping mechanism for semiconductor processing table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220716330.0U CN217134348U (en) | 2022-03-30 | 2022-03-30 | Clamping mechanism for semiconductor processing table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217134348U true CN217134348U (en) | 2022-08-05 |
Family
ID=82644831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220716330.0U Expired - Fee Related CN217134348U (en) | 2022-03-30 | 2022-03-30 | Clamping mechanism for semiconductor processing table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217134348U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116884903A (en) * | 2023-07-10 | 2023-10-13 | 苏州苏纳光电有限公司 | Wafer self-adaptation leveling device |
| CN117554789A (en) * | 2024-01-11 | 2024-02-13 | 远东(三河)多层电路有限公司 | PCB board test fixture |
-
2022
- 2022-03-30 CN CN202220716330.0U patent/CN217134348U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116884903A (en) * | 2023-07-10 | 2023-10-13 | 苏州苏纳光电有限公司 | Wafer self-adaptation leveling device |
| CN117554789A (en) * | 2024-01-11 | 2024-02-13 | 远东(三河)多层电路有限公司 | PCB board test fixture |
| CN117554789B (en) * | 2024-01-11 | 2024-03-19 | 远东(三河)多层电路有限公司 | PCB board test fixture |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220805 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |