CN217110870U - Displacement detection device of furnace tube machine thermocouple - Google Patents

Abstract

The utility model provides a displacement detection device of boiler tube machine thermocouple, the device is including listening mechanism and fixed establishment. Wherein, it further includes step motor, gyro wheel and sensor to listen the mechanism, and step motor contains the motor main part and is connected to the pivot of motor main part, gyro wheel and pivot coaxial coupling, the rotation axis perpendicular to thermocouple's of gyro wheel extending direction set up to the outer fringe and the thermocouple butt of gyro wheel are so that the thermocouple passes through when producing the displacement the pivot is rotated, and the sensor is connected to step motor, and the configuration is to acquire and listen data. Through the utility model discloses a displacement detection device can real time monitoring thermocouple's displacement condition, has not only reduced artifical consumption, has more guaranteed the security of measuring accuracy and boiler tube machine thermocouple work.

Description

Displacement detection device of furnace tube machine thermocouple

Technical Field

The utility model relates to a semiconductor manufacturing equipment technical field especially relates to a displacement detection device of boiler tube machine thermocouple.

Background

In semiconductor manufacturing, a furnace is a high temperature apparatus used for oxidation, deposition, doping, or high temperature processes that change the chemical or physical state of the wafer material. In order to facilitate detection and control of the temperature inside the furnace, a thermocouple is usually installed on the furnace tube machine to measure the temperature. The thermocouple passes through the jack reserved in the furnace body and enters the working area, the protective tube at the periphery of the thermocouple is tightly connected with the furnace body, the thermocouple is arranged without being polluted by deposition gas, the temperature measurement precision is ensured, and meanwhile, the vacuum state of a reaction cavity in the furnace tube machine is also kept stable. However, the reaction chamber is usually in a high-temperature low-pressure state during operation, and the thermocouple is easy to displace due to the pressure difference between the reaction chamber and the outside, so that the risk of thermocouple falling, air leakage in the reaction chamber and the like is caused finally. However, in the prior art, whether the thermocouple generates displacement is usually judged through manual observation, so that the labor consumption is high and the measurement is inaccurate.

Therefore, there is a need in the art for an improved thermocouple displacement detection device for a furnace tube machine.

SUMMERY OF THE UTILITY MODEL

In view of this, the embodiment of the utility model provides a displacement detection device of boiler tube machine thermocouple, the device can detect the displacement of thermocouple in real time, ensures the security of thermocouple work.

Based on above-mentioned purpose, the embodiment of the utility model provides a displacement detection device of boiler tube machine thermocouple, the thermocouple inserts at least part in its extending direction in the cavity of boiler tube machine, the device includes:

a detection mechanism, the detection mechanism further comprising:

a stepping motor including a motor main body and a rotating shaft connected to the motor main body;

the roller is coaxially connected with the rotating shaft, the rotating shaft of the roller is perpendicular to the extending direction of the thermocouple, and the outer edge of the roller is abutted against the thermocouple so that the thermocouple drives the rotating shaft to rotate when generating displacement;

a sensor connected to the stepper motor and configured to acquire detection data indicative of a number of rotational steps of the stepper motor; and

and the fixing mechanism is used for fixedly connecting the stepping motor to the furnace pipe machine.

In some embodiments, the thermocouple is a quartz tube thermocouple having a quartz tube housing that is surrounded by a rubber sleeve, and the outer edge of the roller abuts against the rubber sleeve.

In some embodiments, the roller comprises a first roller layer and a second roller layer which are made of different materials, the first roller layer and the second roller layer are relatively fixedly and coaxially connected, the first roller layer is connected to the rotating shaft and has an inner diameter smaller than or equal to the outer diameter of the rotating shaft, and the second roller layer is abutted to the thermocouple.

In some embodiments, the first roller layer is a metallic material.

In some embodiments, the second roller layer is a high coefficient of friction material.

In some embodiments, the apparatus further comprises a display device communicatively coupled to the sensor to display the sensed data in real-time.

In some embodiments, the apparatus further comprises an alarm module configured to issue an alarm in response to the ping data reaching a threshold.

In some embodiments, the securing mechanism further comprises:

a first connection end connected to the furnace tube machine; and

a second connection end connected to the stepping motor, the second connection end having a first through hole, a second through hole, and a third through hole in a bar shape arranged in parallel, the motor main body being fixed to the second connection end by a bolt fastener extending through the first through hole and the second through hole, the rotation shaft rotatably extending through the third through hole.

Adopt above-mentioned technical scheme, the utility model discloses following beneficial effect has at least:

the utility model discloses a device is through the displacement condition of listening the mechanism real-time supervision thermocouple, specifically, through the gyro wheel and the thermocouple casing contact of listening the mechanism, drive the gyro wheel when the thermocouple produces the displacement and rotate, and the turned angle of gyro wheel further transmits the displacement in order to listen the thermocouple to step motor, the utility model discloses a thereby the device can also realize alarming function through setting up the displacement threshold value, through the utility model discloses a device has not only reduced artifical consumption, has more guaranteed the security of measuring accuracy and boiler tube machine thermocouple work.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic view of a displacement detecting device according to an embodiment of the present invention.

In the figure:

1. a detection mechanism; 2. a fixing mechanism; 2.1 a first connection end; 2.2 a second connection end; 3. a thermocouple; 4. a stepping motor; 5. a sensor; 6. a rotating shaft; 7. a roller; 8. and a thermocouple rubber sleeve.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

It should be noted that, in the embodiments of the present invention, all expressions using "first" and "second" are used to distinguish two entities with the same name but different names or different parameters, and it is understood that "first" and "second" are only for convenience of expression and should not be understood as limitations of the embodiments of the present invention, and the following embodiments do not describe this any more.

The embodiment of the utility model provides a displacement detection device is used for surveying the displacement condition of the thermocouple of loading to the boiler tube machine, and wherein, the boiler tube machine can be chemical vapor deposition boiler tube machine, and its inside contains the cavity that is used for high temperature deposition, and the thermocouple inserts at least part on its extending direction in the cavity of boiler tube machine is with the temperature of measuring the cavity, and the remainder of thermocouple exposes outside the boiler tube machine. In the course of the work, be in the low pressure state in the boiler tube machine cavity, the pressure differential inside and outside the cavity can make the thermocouple produce certain displacement to the cavity direction, can lead to the thermocouple pine to take off and multiple risks such as gas leakage in the cavity when the displacement is too big, and current listening is accomplished by manual measurement usually, and not only the manual work consumes greatly and has the inaccurate problem of measurement, consequently the embodiment of the utility model provides a displacement detection device of boiler tube machine thermocouple, the device can real time monitoring and take notes the displacement of thermocouple, has not only reduced artifical consumption, has more guaranteed the security of measuring accuracy and boiler tube machine thermocouple work.

Fig. 1 shows a displacement detecting device according to an embodiment of the present invention, which includes a detecting mechanism 1 and a fixing mechanism 2 for fixedly connecting the detecting mechanism 1 to a furnace pipe machine.

The detection mechanism 1 further comprises a stepping motor 4, a roller 7 and a sensor 5, wherein the stepping motor 4 comprises a motor main body and a rotating shaft 6 connected to the motor main body, the roller 7 is coaxially connected with the rotating shaft 6, the rotating shaft of the roller 7 is arranged perpendicular to the extending direction of the thermocouple 3, and the outer edge of the roller 7 is abutted against the thermocouple 3 so that the thermocouple 3 drives the rotating shaft 6 to rotate through the roller 7 when displacement occurs; the sensor 5 is communicatively connected to the stepping motor 4 and configured to acquire detection data indicating the number of rotation steps of the stepping motor 4, for example, the number of rotation steps, the rotation angle, the accumulated displacement, and the like.

Further, gyro wheel 7 includes the first gyro wheel layer and the second gyro wheel layer of different materials, first gyro wheel layer and second gyro wheel layer coaxial coupling relatively fixed ground, wherein, first gyro wheel layer is the metal material, and first gyro wheel layer is connected to pivot 6 and the internal diameter is less than or equal to the external diameter of pivot 6 to make first gyro wheel layer and pivot 6 zonulae occludens, second gyro wheel layer and thermocouple 3 butt, second gyro wheel layer are high coefficient of friction material, in the embodiment of the utility model provides an use on second gyro wheel layer is the rubber material. It should be appreciated that "coaxially coupled in a relatively fixed relationship" is intended to mean that the first and second roller layers are not displaced relative to each other, either directly in close proximity to each other or indirectly via other media.

Further, the detecting mechanism 1 further includes an alarm module (not shown in the figure), a displacement threshold value can be set in the alarm module, and when the displacement of the thermocouple is detected to exceed the threshold value, the alarm module sends out a sound signal to alarm.

Further, the device further comprises a display device (not shown in the figure), which is in communication connection with the detection mechanism 1 and can specifically display the rotation angle, the accumulated displacement, the displacement threshold value and the like of the roller.

The fixing mechanism 2 comprises a first connecting end 2.1 connected to the furnace tube machine and a second connecting end 2.2 connected to the stepping motor 4, and the fixing mechanism 2 is made of a high-temperature-resistant and high-hardness material, such as stainless steel. The second connecting end 2.2 has a first through hole, a second through hole and a third through hole which are arranged in parallel in a strip shape, the motor body is fixed to the second connecting end 2.2 through bolt fasteners extending through the first through hole and the second through hole, the rotating shaft 6 rotatably extends through the third through hole, and the arrangement of the strip-shaped through holes enables technicians to adjust the fixing position of the stepping motor 4 according to actual conditions.

In the embodiment of the present invention, the thermocouple is a quartz tube thermocouple, the quartz tube housing is wrapped with a thermocouple rubber sleeve 8, and the quartz tube thermocouple is at least partially inserted into the cavity of the furnace tube machine in the extending direction thereof.

The utility model discloses displacement detection device concrete application method as follows:

and starting the furnace pipe machine and the displacement detection device, and setting a displacement threshold value of 2mm in the alarm module. In the working process of the furnace pipe machine, the quartz pipe thermocouple is displaced towards the chamber direction due to the pressure difference between the inside and the outside of the furnace pipe machine.

Because the second roller layer of the roller is made of rubber and is abutted with the thermocouple rubber sleeve outside the thermocouple, the roller can be prevented from being damaged by the thermocouple, due to the action of friction force, the displacement of the quartz tube thermocouple can drive the roller wheel to rotate to generate angle change, the roller wheel is tightly connected with a rotating shaft connected to the stepping motor, therefore, the rotation of the roller further drives the rotation shaft to rotate and enable the stepping motor to count, the sensor connected to the stepping motor obtains the detection data detected by the stepping motor, namely the number of rotation steps, and further converting the data into a rotation angle and accumulated displacement, further transmitting the rotation angle and accumulated displacement data to a display device by a sensor for data display, when the accumulated displacement value exceeds the displacement threshold value initially set in the alarm module, the alarm module gives out a sound alarm to prompt a technician to check the working state of the quartz tube thermocouple.

Through the utility model discloses a displacement detection device can real time monitoring and take notes the displacement of thermocouple, has reduced artifical consumption, has guaranteed the security of measuring accuracy and boiler tube machine thermocouple work.

In this application, the use of the conjunction of the contrary intention is intended to include the conjunction. The use of definite or indefinite articles is not intended to indicate cardinality. In particular, references to "the" object or "an" and "an" object are intended to mean one of many such objects possible. Furthermore, the conjunction "or" may be used to convey simultaneous features, rather than mutually exclusive schemes. In other words, the conjunction "or" should be understood to include "and/or". The term "comprising" is inclusive and has the same scope as "comprising". The above-described embodiments are possible examples of the embodiments of the present invention, and are given only for clearly understanding the principles of the present invention by those skilled in the art.

Those skilled in the art will understand that: the above discussion of any embodiment is merely exemplary, and is not intended to intimate that the scope of the disclosure, including the claims, of embodiments of the invention is limited to these examples; the technical features of the above embodiments or of the different embodiments can also be combined with each other under the general idea of the invention and produce many other variations of the different aspects of the embodiments of the invention as described above, which are not provided in the detailed description for the sake of brevity. Therefore, any omissions, modifications, substitutions, improvements, and the like that may be made without departing from the spirit and principles of the embodiments of the present invention are intended to be within the scope of the claims.

Claims (8)

1. A displacement sensing device for a furnace tube machine thermocouple, the thermocouple being at least partially inserted into a cavity of the furnace tube machine in a direction of extension thereof, the device comprising:

a detection mechanism, the detection mechanism further comprising:

a stepping motor including a motor main body and a rotating shaft connected to the motor main body;

the roller is coaxially connected with the rotating shaft, the rotating shaft of the roller is perpendicular to the extending direction of the thermocouple, and the outer edge of the roller is abutted against the thermocouple so that the thermocouple drives the rotating shaft to rotate when generating displacement;

a sensor connected to the stepper motor and configured to acquire detection data indicative of a number of rotational steps of the stepper motor; and

and the fixing mechanism is used for fixedly connecting the stepping motor to the furnace pipe machine.

2. The apparatus of claim 1, wherein the thermocouple is a quartz tube thermocouple having a quartz tube housing, the quartz tube housing is covered by a rubber sleeve, and the outer edge of the roller abuts against the rubber sleeve.

3. The device of claim 1, wherein the roller comprises a first roller layer and a second roller layer made of different materials, the first roller layer and the second roller layer are relatively and fixedly connected coaxially, the first roller layer is connected to the shaft and has an inner diameter smaller than or equal to an outer diameter of the shaft, and the second roller layer abuts against the thermocouple.

4. The apparatus of claim 3, wherein the first roller layer is made of a metal material.

5. The apparatus of claim 3, wherein the second roller layer is made of a material with a high friction coefficient.

6. The apparatus of claim 1, further comprising a display device communicatively coupled to the sensor for displaying the detection data in real time.

7. The apparatus of claim 1, further comprising an alarm module configured to generate an alarm in response to the detection data reaching a threshold.

8. The apparatus of claim 1, wherein the fixing mechanism further comprises:

a first connection end connected to the furnace tube machine; and

a second connection end connected to the stepping motor, the second connection end having a first through hole, a second through hole, and a third through hole in a bar shape arranged in parallel, the motor main body being fixed to the second connection end by a bolt fastener extending through the first through hole and the second through hole, the rotation shaft rotatably extending through the third through hole.

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