CN217077840U - Wafer electroplating hanger capable of testing sealing performance - Google Patents
Wafer electroplating hanger capable of testing sealing performance Download PDFInfo
- Publication number
- CN217077840U CN217077840U CN202220852520.5U CN202220852520U CN217077840U CN 217077840 U CN217077840 U CN 217077840U CN 202220852520 U CN202220852520 U CN 202220852520U CN 217077840 U CN217077840 U CN 217077840U
- Authority
- CN
- China
- Prior art keywords
- main board
- wafer
- board body
- sealing ring
- inlet channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Electroplating Methods And Accessories (AREA)
Abstract
The utility model provides a wafer electroplating hanger capable of testing sealing performance, which comprises a main board body and a rear cover, wherein the main board body is provided with an opening, the main board body is provided with a first sealing ring surrounding the opening, the edge part of the surface to be electroplated of a wafer is attached to the first sealing ring, and a second sealing ring is arranged between the rear cover and the main board body; an air inlet channel is arranged in the main board body, an air inlet of the air inlet channel is located in a region, which is not contacted with electroplating liquid, of the upper portion of the hanger, and an air outlet of the air inlet channel is communicated to a closed space formed by the first sealing ring and the second sealing ring. The utility model discloses compare in prior art, set up on the hanger and communicate the inlet channel who communicates the enclosure space that first sealing washer and second sealing washer formed, after on the hanger is installed to the wafer, can detect the leakproofness between wafer and the first sealing washer with the help of gas tightness check out test set to ensure sealed reliability, ensure to electroplate the effect, promote hanger safety in utilization.
Description
Technical Field
The utility model relates to a wafer packaging wet process technical field specifically is a wafer electroplating hanger of testable leakproofness.
Background
In the wet process of wafer packaging, the peripheral edge of the wafer needs to be sealed by an annular sealing ring to prevent the solution from penetrating into the interior of the hanger. If the sealing performance between the sealing ring and the wafer is poor, the electroplating effect is affected, and even the electroplating hanger is damaged. Therefore, it is desirable to improve the structure of the rack to detect the sealing performance of the wafer before electroplating.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model aims to provide a wafer electroplating hanger capable of testing the sealing performance.
In order to achieve the above object, the technical solution of the present invention is: a wafer electroplating hanger capable of testing tightness comprises a main board body and a rear cover, wherein an opening is formed in the main board body, a first sealing ring surrounding the opening is arranged on the main board body, the edge of a surface to be electroplated of a wafer is attached to the first sealing ring, and a second sealing ring is arranged between the rear cover and the main board body; an air inlet channel is arranged in the main board body, an air inlet of the air inlet channel is located in a region, which is not contacted with electroplating liquid, of the upper portion of the hanger, and an air outlet of the air inlet channel is communicated to a closed space formed by the first sealing ring and the second sealing ring.
The utility model discloses compare in prior art, set up on the hanger and communicate the inlet channel who communicates the enclosure space that first sealing washer and second sealing washer formed, after on the hanger is installed to the wafer, can detect the leakproofness between wafer and the first sealing washer with the help of gas tightness check out test set to ensure sealed reliability, ensure to electroplate the effect, promote hanger safety in utilization.
Further, still include the air cock of being made by elastic material, the air cock is installed intake channel's air inlet.
Adopt above-mentioned preferred scheme, the elasticity air cock butt joint of gas tightness check out test set and hanger is aerifyd and is tested, can prevent gas leakage, improves the test accuracy.
Further, including first air flue and the second air flue that is linked together in the air cock, first air flue sets up with mainboard internal inlet channel is coaxial, second air flue sets up with mainboard surface vertical.
Adopt above-mentioned preferred scheme, make things convenient for gas tightness check out test set to dock with the hanger from the direction of positive hanger, improve the test convenience.
Further, the main plate body comprises a bottom plate and a top plate, the top plate is fixedly mounted on the top end face of the bottom plate through a locking piece, and the air inlet channel extends downwards from the top end face of the bottom plate.
By adopting the preferable scheme, the air inlet channel is convenient to manufacture, and the manufacturing cost is reduced.
Further, the air cock includes cylinder portion and square body portion, the top of bottom plate is equipped with circular counter bore and the bayonet socket that is located circular counter bore top, the cylinder portion of air cock install in the circular counter bore of bottom plate, the square body portion of air cock install in the bayonet socket.
Furthermore, the periphery of the cylindrical part of the air tap is provided with a plurality of convex annular parts.
By adopting the preferable scheme, the air nozzle and the air inlet channel on the main board body are combined in a sealing manner.
Furthermore, the square body part of air cock has the ear of evagination toward both sides, the bayonet socket department of bottom plate be equipped with ear assorted spacing groove.
Adopt above-mentioned preferred scheme, improve air cock position stability.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic view of a hidden rear cover according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view of an embodiment of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3 at A;
FIG. 5 is a schematic view of a bottom plate top structure;
FIG. 6 is a partial enlarged view of FIG. 5 at B;
FIG. 7 is a schematic view of the structure of the air faucet.
Names of corresponding parts represented by numerals and letters in the drawings:
11-a main board body; 111-a backplane; 112-a top plate; 113-a circular counter bore; 114-bayonet; 115-a limiting groove; 12-rear cover; 13-a first sealing ring; 14-a second sealing ring; 15-an intake passage; 16-air tap; 161-a first airway; 162-a second airway; 163-a cylindrical portion; 164-a square body portion; 165-ring body portion; 166-ear.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 to 4, an embodiment of the present invention is: a wafer electroplating hanger capable of testing sealing performance comprises a main board body 11 and a rear cover 12, wherein an opening is formed in the main board body 11, a first sealing ring 13 surrounding the opening is arranged on the main board body 11, the edge of a surface to be electroplated of a wafer is attached to the first sealing ring 12, and a second sealing ring 14 is further arranged between the rear cover 12 and the main board body 11; an air inlet passage 15 is arranged in the main plate body 11, an air inlet of the air inlet passage 15 is located in an area, which is not contacted with electroplating solution, of the upper portion of the hanger, and an air outlet of the air inlet passage 15 is communicated to a closed space formed by the first sealing ring and the second sealing ring.
The beneficial effect of adopting above-mentioned technical scheme is: the rack is provided with an air inlet channel communicated with a closed space formed by the first sealing ring and the second sealing ring, and after the wafer is installed on the rack, the tightness between the wafer and the first sealing ring can be detected by means of air tightness detection equipment, so that the sealing reliability is ensured, the electroplating effect is ensured, and the use safety of the rack is improved.
Right the utility model discloses the basic principle that the gas tightness detected is carried out to the hanger is: compressed air with set pressure is filled into an air inlet channel of the hanger through air tightness detection equipment, and whether leakage exists or not is detected through measuring the internal pressure or flow change of a workpiece so as to judge air tightness. The air tightness detection equipment and the hanging tool are arranged in a split mode, and butt joint and inflation are carried out during testing. The utility model discloses do not injecing gas tightness check out test set, gas tightness check out test set can follow prior art and acquire, if adopt the model of the too automatic science and technology limited company of Anhui ying sale be AL-T60's airtight leak detector of differential pressure type.
As shown in fig. 1 to 4, in other embodiments of the present invention, the air faucet further includes an air faucet 16 made of an elastic material, and the air faucet 16 is installed at an air inlet of the air inlet passage 15. The beneficial effect of adopting above-mentioned technical scheme is: the air tightness detection equipment is in butt joint with the elastic air nozzle of the hanging tool for inflation and testing, air leakage can be prevented, and testing accuracy is improved.
As shown in fig. 4, in other embodiments of the present invention, the air faucet 16 includes a first air channel 161 and a second air channel 162 connected to each other, the first air channel 161 is coaxial with the main body internal air inlet channel 15, and the second air channel 162 is perpendicular to the surface of the main body. The beneficial effect of adopting above-mentioned technical scheme is: make things convenient for gas tightness check out test set and hanger butt joint from the direction of positive hanger, improve the test convenience.
As shown in fig. 2 to 4, in other embodiments of the present invention, the main plate 11 includes a bottom plate 111 and a top plate 112, the top plate 112 is fixedly mounted on the top end surface of the bottom plate 111 via a locking member, and the air inlet passage 15 extends downward from the top end surface of the bottom plate 111. The beneficial effect of adopting above-mentioned technical scheme is: the air inlet channel is convenient to manufacture, and the manufacturing cost is reduced.
As shown in fig. 5-7, in other embodiments of the present invention, the air faucet 16 includes a cylindrical portion 163 and a square portion 164, the top end of the bottom plate 111 is provided with a circular counter bore 113 and a bayonet 114 located at the top end of the circular counter bore, the cylindrical portion 163 of the air faucet is installed in the circular counter bore 113 of the bottom plate, and the square portion 164 of the air faucet is installed in the bayonet 114.
In other embodiments of the present invention, as shown in fig. 7, a plurality of outwardly protruding ring portions 165 are provided around the cylindrical portion 163 of the air faucet. The beneficial effect of adopting above-mentioned technical scheme is: the air nozzle and the air inlet channel on the main board body are combined in a sealing mode.
As shown in fig. 6 and 7, in another embodiment of the present invention, the square body 164 of the air faucet has ears 166 protruding outward from both sides, and the fastening opening 114 of the bottom plate is provided with a limiting groove 115 matching with the ears. The beneficial effect of adopting above-mentioned technical scheme is: the position stability of the air nozzle is improved.
The above embodiments are only for illustrating the technical conception and the features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and the protection scope of the present invention can not be limited thereby, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (7)
1. A wafer electroplating hanger capable of testing sealing performance is characterized by comprising a main board body and a rear cover, wherein an opening is formed in the main board body, a first sealing ring surrounding the opening is arranged on the main board body, the edge of a surface to be electroplated of a wafer is attached to the first sealing ring, and a second sealing ring is arranged between the rear cover and the main board body; an air inlet channel is arranged in the main board body, an air inlet of the air inlet channel is located in a region, which is not contacted with electroplating liquid, of the upper portion of the hanger, and an air outlet of the air inlet channel is communicated to a closed space formed by the first sealing ring and the second sealing ring.
2. The wafer plating rack capable of testing tightness according to claim 1, further comprising a gas nozzle made of an elastic material, wherein the gas nozzle is installed at the gas inlet of the gas inlet channel.
3. The wafer electroplating rack capable of testing the sealing performance according to claim 2, wherein the gas nozzle comprises a first gas passage and a second gas passage which are communicated with each other, the first gas passage is coaxially arranged with the gas inlet channel in the main board body, and the second gas passage is vertically arranged with the surface of the main board body.
4. The wafer plating rack capable of testing tightness according to claim 3, wherein the main plate body comprises a bottom plate and a top plate, the top plate is fixedly installed on the top end surface of the bottom plate through a locking member, and the air inlet channel extends downwards from the top end surface of the bottom plate.
5. The wafer electroplating hanger capable of testing the sealing performance as claimed in claim 4, wherein the gas nozzle comprises a cylindrical portion and a square portion, the top end of the bottom plate is provided with a circular counter bore and a bayonet at the top end of the circular counter bore, the cylindrical portion of the gas nozzle is installed in the circular counter bore of the bottom plate, and the square portion of the gas nozzle is installed in the bayonet.
6. The wafer plating hanger capable of testing the tightness according to claim 5, wherein the air faucet has a plurality of convex ring bodies around the cylinder body.
7. The wafer electroplating hanger capable of testing the tightness according to claim 5, wherein the square body of the air faucet is provided with lugs protruding outwards from two sides, and the bayonet of the bottom plate is provided with limiting grooves matched with the lugs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220852520.5U CN217077840U (en) | 2022-04-13 | 2022-04-13 | Wafer electroplating hanger capable of testing sealing performance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220852520.5U CN217077840U (en) | 2022-04-13 | 2022-04-13 | Wafer electroplating hanger capable of testing sealing performance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217077840U true CN217077840U (en) | 2022-07-29 |
Family
ID=82500061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220852520.5U Active CN217077840U (en) | 2022-04-13 | 2022-04-13 | Wafer electroplating hanger capable of testing sealing performance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217077840U (en) |
-
2022
- 2022-04-13 CN CN202220852520.5U patent/CN217077840U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209069533U (en) | A kind of auxiliary device for the close property strength test of ship's space | |
| CN217077840U (en) | Wafer electroplating hanger capable of testing sealing performance | |
| CN112284636B (en) | Novel pipeline quick leak detection device capable of releasing colored gas | |
| CN205826239U (en) | A kind of carbon slipper many gas circuits air seal test platform | |
| CN2394213Y (en) | Leakage detector for bath sealer | |
| CN215811474U (en) | Automatic leak-pressure detection device for complex parts | |
| CN208833439U (en) | A kind of coil plug air tightness test tooling | |
| CN113028178A (en) | Workpiece quick joint for vacuum helium leak detection | |
| TWM655578U (en) | A wafer electroplating hanger capable of testing sealing properties | |
| CN213121005U (en) | Air tightness detection device for aircraft oil tank port | |
| CN221260927U (en) | Leak-proof sealing structure of gas metering detector | |
| CN215217982U (en) | Ball cover leakproofness detection device | |
| CN210664902U (en) | Safety device for air tightness test | |
| CN214251393U (en) | Air tightness comprehensive detector convenient for clamping product to be detected | |
| CN220583689U (en) | High-precision air tightness detection equipment with double sealing structures | |
| CN216449124U (en) | Air tightness detection device with alarm prompt function | |
| CN209856783U (en) | Air inlet pipe with air inlet pressure sensor | |
| CN220960491U (en) | Sealing cover air tightness detection jig | |
| CN212254504U (en) | Simple wind power motor front end cover air tightness testing tool | |
| CN210953221U (en) | Pressure sensor pressure chamber testing device | |
| CN221198834U (en) | Gas tightness test fixture of pipeline | |
| CN214702614U (en) | Oil pan dry-type gas tightness detection device | |
| CN210322198U (en) | Thread air tightness detection device for pre-coated sealant bolt | |
| CN216645735U (en) | A gas tightness device for detecting connecting pipe | |
| CN215984485U (en) | Negative pressure measuring jig for flexible circuit board |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |