CN217056809U - Multi-way valve, pipeline structure and etching machine - Google Patents
Multi-way valve, pipeline structure and etching machine Download PDFInfo
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- CN217056809U CN217056809U CN202122471683.7U CN202122471683U CN217056809U CN 217056809 U CN217056809 U CN 217056809U CN 202122471683 U CN202122471683 U CN 202122471683U CN 217056809 U CN217056809 U CN 217056809U
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Abstract
The application discloses a multi-way valve, a pipeline structure and an etching machine, wherein the multi-way valve comprises a first channel; the second channel is communicated with the first channel, and a first valve and a second valve are arranged on the second channel; the third channel is communicated with the first channel, and a third valve and a fourth valve are arranged on the third channel; along the extending direction of the second channel, the first valve is positioned between the second valve and the first channel, and along the extending direction of the third channel, the third valve is positioned between the fourth valve and the first channel. Set up a plurality of valves in a plurality of passageways of this application multi-ported valve for the electron of different temperatures in a plurality of passageways can each other noninterference between the liquid, avoids the valve to fluoridize the liquid influence and can't close completely because of being fluoridized by the electron of the different temperatures in both sides, thereby avoids the electron of different temperatures to fluoridize the liquid and mixes each other.
Description
Technical Field
The utility model belongs to the technical field of the etching technique and specifically relates to a multi-ported valve, pipeline structure and etching machine.
Background
In the related technology, the etching machine uses a two-channel refrigerating device, the temperature of the temperature control liquid in the two channels is different, the two channels are respectively connected with two ends of a valve, and finally one end of the two channels is synthesized to be connected into an Electrostatic Chuck (ESC), and the opening and closing of the two channels of the refrigerating device are controlled through the valve, so that the temperature of the Electrostatic Chuck can be controlled.
When the two-channel refrigerating device is used for controlling the temperature of the electrostatic chuck, the valve of one channel is opened, the valve of the other channel is in a closed state, and the temperature control liquid in the channel opened by the valve can be introduced into the electrostatic chuck to regulate and control the temperature of the electrostatic chuck.
SUMMERY OF THE UTILITY MODEL
The utility model provides a multi-way valve, pipeline structure and etching machine can solve the valve because of the unable problem of closing completely of the accuse temperature liquid influence of the different temperatures in both sides.
The embodiment of this application provides a multi-ported valve, includes:
a first channel; the second channel is communicated with the first channel, and a first valve and a second valve are arranged on the second channel; and the third channel is communicated with the first channel, and a third valve and a fourth valve are arranged on the third channel.
Wherein, along the extending direction of the second channel, the first valve is positioned between the second valve and the first channel, and along the extending direction of the third channel, the third valve is positioned between the fourth valve and the first channel.
In some embodiments of the present application, the first valve is a check valve.
Based on the above embodiment, the check valve is also called a check valve, and the first valve only allows the temperature control liquid to flow from the second channel to the first channel and the third channel in one direction, and prevents the temperature control liquid from flowing in the opposite direction, so as to prevent the temperature control liquid in the first channel and the third channel from flowing into the second channel.
In some embodiments of the present application, the third valve is a check valve.
Based on the above embodiment, the third valve only allows the temperature control liquid to flow from the third channel to the first channel in one direction, and prevents the temperature control liquid from flowing in the opposite direction, so as to prevent the temperature control liquid in the first channel and the second channel from flowing into the third channel.
In some embodiments of the present application, the second valve and the fourth valve are both on-off valves.
Based on the above embodiment, the second valve may control the on/off of the second channel, and the fourth valve may control the on/off of the third channel. When one of the second valve or the fourth valve is in an open state, the temperature control liquid in the channel corresponding to the open valve can flow to the first channel, and at the moment, the other one of the second valve or the fourth valve is in a closed state.
The embodiment of the application further provides a pipeline structure, which comprises a first pipeline, wherein the first pipeline comprises a first pipeline, a second pipeline, a third pipeline and the multi-way valve in any one of the embodiments.
Wherein the inlet of the first pipeline is communicated with the outlet of the first channel, the outlet of the second pipeline is communicated with the inlet of the second channel, and the outlet of the third pipeline is communicated with the inlet of the third channel.
In some embodiments of the present disclosure, the first tube, the second tube, and the third tube are all sealingly connected to the multi-way valve via a sealing ring.
Based on the embodiment, the tightness of the connection among the multi-way valve, the first pipeline, the second pipeline and the third pipeline is improved, and the series flow of temperature control liquid in the pipelines is prevented.
In some embodiments of the present application, the pipeline structure further comprises a second pipeline comprising a fourth pipeline, a fifth pipeline, and a sixth pipeline.
The fifth pipeline is communicated with the fourth pipeline, a fifth valve is arranged on the fifth pipeline, the sixth pipeline is communicated with the fourth pipeline, and a sixth valve is arranged on the sixth pipeline.
Based on the above embodiment, the second pipeline may serve as a liquid outlet pipeline, and the temperature control liquids at different temperatures may flow out through the fifth pipeline and the sixth pipeline, respectively. The fifth valve is used for controlling the opening and closing of the fifth pipeline, and the sixth valve is used for controlling the opening and closing of the sixth pipeline.
In some embodiments of the present application, the first pipeline is a liquid inlet pipeline of the electronic fluorination liquid, and the second pipeline is a liquid outlet pipeline of the electronic fluorination liquid.
Based on the above embodiment, the first pipeline and the second pipeline are both independently arranged, and the flow of the electronic fluorinated liquid in the two pipelines is not interfered with each other.
In some embodiments of the present application, the pipeline structure further includes a first conduit for communicating the second pipeline and the fifth pipeline, and a seventh valve is disposed on the first conduit; the second conduit is used for communicating the third pipeline with the sixth pipeline, and an eighth valve is arranged on the second conduit; the fifth pipeline comprises a first liquid outlet, and the sixth pipeline comprises a second liquid outlet.
Wherein, along the extending direction of the fifth pipeline, the communication point of the first conduit and the fifth pipeline is located between the fifth valve and the first liquid outlet, and along the extending direction of the sixth pipeline, the communication point of the second conduit and the sixth pipeline is located between the sixth valve and the second liquid outlet.
Based on the above embodiment, the second pipe, the first conduit and the fifth pipe are communicated to form a self-circulation loop, and the third pipe, the second conduit and the sixth pipe are communicated to form a self-circulation loop.
The embodiment of the application also provides an etching machine which comprises a refrigerating device, an electrostatic chuck and the pipeline structure in any one of the embodiments.
The outlet of the first pipeline is communicated with the electrostatic chuck, the inlet of the second pipeline is communicated with the refrigerating device, and the inlet of the third pipeline is communicated with the refrigerating device.
The beneficial effect of this application does:
this application is provided with the check valve among the inlet channel of multi-ported valve, the check valve only allows electron fluoridize the liquid unilateral and flows, prevents electron fluoridize the liquid and flow to opposite direction moreover to make in the passageway electron fluoridize the one side that the liquid can not flow the ooff valve in another passageway, thereby avoid the ooff valve in another passageway because of being damaged and unable complete closure by the electron fluoridize the liquid of the different temperatures in both sides.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in related arts, the drawings used in the description of the embodiments or related arts will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of a multi-way valve according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram illustrating an overall structure of a pipeline structure according to an embodiment of the present application;
FIG. 3 is a schematic structural diagram of a piping structure according to another embodiment of the present application;
fig. 4 is a schematic structural diagram of an etching machine according to an embodiment of the present application.
Reference numerals are as follows:
1. a multi-way valve; 11. a first channel; 12. a second channel; 121. a first valve; 122. a second valve; a third channel; 133. a third valve; 134. a fourth valve; 14. a seal ring; 2. a pipeline structure; 2a. a first pipeline; 21. a first pipe; 22 a second conduit; 23. a third pipeline; 2b. a second pipeline; 24. a fourth conduit; 25. a fifth pipeline; 251. a first liquid outlet; 255. a fifth valve; 26. a sixth pipeline; 262. a second liquid outlet; 266. a sixth valve; 27. a first conduit; 277. a seventh valve; 28. a second conduit; 288. an eighth valve; 31. a refrigeration device; 32. an electrostatic chuck.
Detailed Description
In order to more clearly illustrate the embodiments of the present application or technical solutions in related arts, the following description will be clearly and completely described in conjunction with the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments.
In the related art, the etching machine can use a dual-channel refrigerating device, the temperature of temperature control liquid in two channels is different, the two channels are respectively connected with two ends of a valve, finally, one end of the valve is synthesized to be connected into the electrostatic chuck, different temperatures are set through the electrostatic chuck, and the temperature of the electrostatic chuck can be controlled by controlling the opening and closing of the two channels of the refrigerating device through the valve. When the valve of one channel of the refrigerating device is opened and the valve of the other channel is closed, the temperature control liquid in the channel with the opened valve can be introduced into the electrostatic chuck so as to regulate and control the temperature of the electrostatic chuck. The temperature of the temperature control liquid on two sides of the valve in the closed state is different, and the generated temperature difference can damage the closed valve, so that the valve cannot be completely closed, and the temperature control liquid with different temperatures in two channels are mixed with each other.
In order to solve the above technical problem, an embodiment of the present application provides a multi-way valve, a pipeline structure and an etching machine, which can solve the problem that the valve cannot be completely closed due to the influence of temperature control liquids at different temperatures on two sides.
In a first aspect, referring to fig. 1, the present application provides a multi-way valve 1, where the multi-way valve 1 includes a first channel 11, a second channel 12, and a third channel 13. In the embodiment of the present application, the multi-way valve 1 can be a three-way valve, of course, according to actual requirements, the multi-way valve 1 can also be a four-way valve, a five-way valve or more, and the specific working principle of the multi-way valve 1 is disclosed in the related art, which is not described in detail in the present application.
Specifically, the second channel 12 is communicated with the first channel 11, and the second channel 12 is provided with a first valve 121 and a second valve 122; the third channel 13 is communicated with the first channel 11, and the third channel 13 is provided with a third valve 133 and a fourth valve 134. The material for manufacturing the multi-way valve 1 may be metal or plastic, and is not limited herein.
Wherein, along the extending direction of the second channel 12, the first valve 121 is located between the second valve 122 and the first channel 11, and along the extending direction of the third channel 13, the third valve 133 is located between the fourth valve 134 and the first channel 11.
It should be noted that the multi-way valve 1 includes a liquid inlet channel, and in the related art, a valve is disposed in each liquid inlet channel of the multi-way valve 1, and the valve can control opening and closing of the liquid inlet channel. When the temperature control liquids with different temperatures are respectively introduced into the channels, the temperature control liquids with different temperatures are arranged on two sides of the valve in a closed state, the temperature difference generated by the temperature control liquids with different temperatures can damage the closed valve, the valve cannot be completely closed, and the temperature control liquids with different temperatures in the two channels are mixed with each other. In this embodiment, two valves are disposed in each liquid inlet channel of the multi-way valve 1, taking the valve in the first channel 11 as an example, when the second valve 122 is closed, one side of the first valve 121 is the temperature control liquid at the first temperature, one side of the second valve 122 away from the first valve 121 is the temperature control liquid at the second temperature, and there is no temperature control liquid at different temperatures on two sides of the second valve 122, so that it is avoided that the temperature control liquids at different temperatures in the two channels are mixed with each other due to the damage of the second valve 122 by the temperature control liquids at different temperatures.
In some embodiments, the first valve 121 is a check valve.
It should be noted that the check valve is also called a check valve, the first valve 121 only allows the temperature control liquid to flow from the second channel 12 to the first channel 11 and the third channel 13 in a single direction, and prevents the temperature control liquid from flowing in a reverse direction, so as to prevent the temperature control liquid in the first channel 11 and the third channel 13 from flowing into the second channel 12 and contacting the second valve 122, so that there is no temperature control liquid at different temperatures on two sides of the second valve 122, and prevent the temperature control liquid at different temperatures from mixing with each other in the two channels due to the second valve 122 being damaged by the temperature control liquid at different temperatures. And the first valve 121 can be opened or closed automatically by depending on the flowing pressure of the temperature control liquid in the channel, and manual regulation and control are not needed, so that the operation is more convenient.
Similarly, it can be understood that, in some embodiments, the third valve 133 is a check valve, and the third valve 133 only allows the temperature-control liquid to flow from the third channel 13 to the first channel 11 in one direction, and prevents the temperature-control liquid from flowing in the opposite direction, so as to prevent the temperature-control liquids in the first channel 11 and the second channel 12 from flowing into the third channel 13 and contacting the fourth valve 134, so that there is no temperature-control liquid at different temperatures on both sides of the fourth valve 134, and thus the temperature-control liquids at different temperatures in the two channels are prevented from being mixed with each other due to the damage of the fourth valve 134 by the temperature-control liquids at different temperatures. And the third valve 133 can be automatically opened or closed by the flowing pressure of the temperature control liquid in the channel without manual regulation and control.
As shown in fig. 1, when the first valve 121 is installed, the flow direction of the temperature control liquid should be the same as the direction of the arrow on the first valve 121, and when the third valve 133 is installed, the flow direction of the temperature control liquid should be the same as the direction of the arrow on the third valve 133.
In this application, the check valve can be over-and-under type check valve, and over-and-under type check valve need install on horizontal pipeline, and over-and-under type check valve is that the valve clack slides along the vertical center line of valve body, and the valve clack can freely go up and down in the valve body, and when the accuse temperature liquid flows down, the valve clack is leaned on accuse temperature liquid thrust to open, and when accuse temperature liquid stopped flowing, the valve clack leaned on self gravity to drop on the disk seat, played the effect that prevents accuse temperature liquid against the current.
Of course, the check valve may also be a swing check valve, in which a valve flap of the swing check valve is disk-shaped and rotates around a rotating shaft of a valve seat channel, and the valve is automatically opened or closed by the pressure of temperature control liquid flowing in a pipeline.
In some embodiments, the second valve 122 and the fourth valve 134 are both on-off valves.
It will be appreciated that the second valve 122 may control the opening and closing of the second channel 12 and the fourth valve 134 may control the opening and closing of the third channel 13. When the temperature control liquid is introduced into the second passage 12, the second valve 122 is in an open state, and the fourth valve 134 is in a closed state. Similarly, it can be known that when the temperature control liquid is introduced into the third channel 13, the fourth valve 134 is in an open state, and the second valve 122 is in a closed state. The switch valve may be a pneumatic switch valve or an electric switch valve, and is not limited in this respect.
In a second aspect, based on the multi-way valve 1 described above, the present embodiment further provides a pipeline structure 2, and referring to fig. 1, fig. 2 and fig. 3, the pipeline structure 2 includes a first pipeline 2a, the first pipeline 2a includes a first tube 21, a second tube 22, a third tube 23, and the multi-way valve 1 in any one of the above embodiments. The material for preparing the above-mentioned pipe may be metal or plastic, etc., and is not limited in particular here.
Wherein the inlet of the first duct 21 communicates with the outlet of the first passage 11, the outlet of the second duct 22 communicates with the inlet of the second passage 12, and the outlet of the third duct 23 communicates with the inlet of the third passage 13.
In some embodiments, with reference to fig. 1 and 2, the first duct 11, the second duct 12 and the third duct 13 are all sealingly connected to the multi-way valve 1 by sealing rings.
It will be appreciated that the provision of the sealing rings 14 improves the tightness of the communication between the multi-way valve 1 and the first, second and third ducts 21, 22, 23, preventing the cross-flow of the temperature control fluid in the ducts. The sealing ring 14 may be made of a rubber material, which has the advantages of elasticity, high temperature resistance, corrosion resistance, and the like, and thus has a good sealing effect. Of course, the sealing ring 14 may be made of other materials, such as metal, plastic, or asbestos material.
The multi-way valve 1 and the first pipeline 11, the second pipeline 12 and the third pipeline 13 can be connected in a clamping and pressing mode, the clamping and pressing connection enables the pipelines to be clamped on the multi-way valve 1 through radial shrinkage external force, sealing is achieved through a peripheral sealing ring, and the sealing connection effect is achieved. Of course, the multi-way valve 1 and the first, second and third pipes 11, 12, 13 may also be connected by other means, such as flange connection or socket connection.
In some embodiments, referring to fig. 3, the pipeline structure 2 further comprises a second pipeline 2b, the second pipeline 2b comprising a fourth pipe 24, a fifth pipe 25 and a sixth pipe 26.
The fifth pipeline 25 is communicated with the fourth pipeline 24, a fifth valve 255 is arranged on the fifth pipeline 25, the sixth pipeline 26 is communicated with the fourth pipeline 24, and a sixth valve 266 is arranged on the sixth pipeline 26.
Specifically, the fifth valve 255 is used for controlling the opening and closing of the fifth pipeline 25, and the sixth valve 266 is used for controlling the opening and closing of the sixth pipeline 26. The types of the fifth valve 255 and the sixth valve 266 are not limited, and the valves having the opening and closing functions in the art can meet the requirements, and are not specifically limited herein. The second pipeline 2b can be used as a liquid outlet pipeline, and temperature control liquids with different temperatures can flow out through the fifth pipeline 25 and the sixth pipeline 26 respectively.
In some embodiments, referring to fig. 3, the first pipe 2a is an inlet pipe of the electronic fluorination liquid, and the second pipe 2b is an outlet pipe of the electronic fluorination liquid. The first pipeline 2a and the second pipeline 2b are both independently arranged, and the flow of the electronic fluorinated liquid in the two pipelines is not interfered with each other.
In some embodiments, with continued reference to fig. 3, the pipeline structure 2 further includes a first conduit 27 and a second conduit 28. The first conduit 27 leads the second pipeline 22 and the fifth pipeline 25, and a seventh valve 277 is arranged on the first conduit 27; the second conduit 28 connects the third pipe 23 and the sixth pipe 26, and the second conduit 28 is provided with an eighth valve 288. The fifth pipe 25 includes a first outlet 251 and the sixth pipe 26 includes a second outlet 262.
Wherein, along the extending direction of the fifth pipeline 25, the communication point of the first conduit 27 and the fifth pipeline 25 is located between the fifth valve 255 and the first liquid outlet 251, and along the extending direction of the sixth pipeline 26, the communication point of the second conduit 28 and the sixth pipeline 26 is located between the sixth valve 266 and the second liquid outlet 262.
It should be noted that, as shown in fig. 3, the communication of the second pipe 22, the fifth pipe 25 and the first conduit 27 may form a self-circulation return channel; it is also understood that the third conduit 23, the sixth conduit 26 and the second conduit 28 may be connected to form a self-circulating return passage. Taking the second pipe 22 as an example, and the fifth pipe 25 as an example, at this time, the second valve 122 and the fifth valve 255 are opened, the fourth valve 134 and the sixth valve 266 are closed, the seventh valve 277 is closed, the eighth valve 288 is opened, and the self-circulation return passage formed by the third pipe 23, the sixth pipe 26, and the second conduit 28 being connected is opened.
It should be noted that, according to the actual use situation, a check valve may be further disposed between the first conduit 27 and the fifth valve 255 along the extending direction of the fifth pipeline 25; a non-return valve is also provided between the second conduit 28 and the sixth valve 266 in the direction of extension of the sixth conduit 26. Taking the example that the temperature-control liquid at the first temperature flows from the fourth pipe 24 to the fifth pipe 25, the fifth valve 255 is in an open state, the sixth valve 266 is in a closed state, and the temperature-control liquid at the first temperature can only flow to one side of the sixth valve 266 in the sixth pipe 26. The temperature control liquid at the second temperature circularly flows in the self-circulation return channel formed by the communication of the third pipeline 23, the sixth pipeline 26 and the second conduit 28, and the check valve in the sixth pipeline 26 prevents the temperature control liquid at the second temperature from flowing towards the sixth valve 266, so that the temperature control liquids at different temperatures in the two channels are prevented from being mixed with each other due to the fact that the sixth valve 266 is damaged by the temperature control liquids at different temperatures.
In a third aspect, based on the pipeline structure 2, an etching machine is further provided in the embodiment of the present application, and referring to fig. 4, the etching machine includes a refrigeration device 31, an electrostatic chuck 32, and the pipeline structure 2 in any of the embodiments. Wherein, the outlet of the first pipeline 21 is communicated with the electrostatic chuck 32, the inlet of the second pipeline 22 is communicated with the refrigerating device 31, and the inlet of the third pipeline 23 is communicated with the refrigerating device 31.
Specifically, in the first pipeline 2a, the temperature control liquid is introduced from the refrigerating device 31 into the inlet of the second pipeline 22 or the third pipeline 23, flows to the outlet of the first pipeline 21, and then is introduced into the electrostatic chuck 32 to control the temperature of the electrostatic chuck.
It should be noted that the refrigeration apparatus 31 includes two accommodating cavities, and the two accommodating cavities can respectively provide two temperature control liquids with different temperatures for the second pipeline 22 and the third pipeline 23.
In the present application, the complete cycle working process of the temperature control liquid in the etching machine is as follows:
when the temperature-control fluid at the first temperature is introduced from the first accommodating cavity of the refrigeration device 31 into the inlet of the second pipeline 22, at this time, the second valve 122 is opened, the seventh valve 277 and the fourth valve 134 are closed, and the temperature-control fluid flows from the second pipeline 22 to the first pipeline 21, and then enters the electrostatic chuck 32 to control the temperature of the temperature-control fluid. The temperature control liquid after the temperature control of the electrostatic chuck 32 flows out from the electrostatic chuck 32 to the fourth pipe 24, at this time, the fifth valve 255 is opened, the sixth valve 266 is closed, and then the temperature control liquid flows from the fourth pipe 24 to the outlet of the fifth pipe 25 and returns to the first accommodating cavity of the refrigeration device 31.
In the process of feeding and discharging the temperature control liquid at the first temperature, the eighth valve 288 is opened, and the temperature control liquid at the second temperature flows in a self-circulation return channel formed by the communication of the third pipeline 23, the sixth pipeline 26 and the second conduit 28.
When the temperature control liquid at the second temperature is introduced into the inlet of the third pipe 23 from the second accommodating cavity of the refrigeration apparatus 31, at this time, the fourth valve 134 is opened, the eighth valve 288 and the second valve 122 are closed, and the temperature control liquid always flows from the third pipe 23 to the outlet of the first pipe 21, and then the temperature control liquid enters the electrostatic chuck 32 to control the temperature of the temperature control liquid. The temperature control liquid after the temperature control of the electrostatic chuck 32 flows out from the electrostatic chuck 32 to the fourth pipe 24, at this time, the sixth valve 266 is opened, the fifth valve 255 is closed, and then the temperature control liquid flows from the fourth pipe 24 to the outlet of the sixth pipe 26 and returns to the second accommodating cavity of the refrigerating apparatus 31.
In the process of feeding and discharging the temperature control liquid at the second temperature, the seventh valve 277 is opened, and the temperature control liquid at the first temperature flows in a self-circulation return channel formed by the communication of the second pipeline 22, the fifth pipeline 25 and the first conduit 27.
The above description is only a preferred embodiment of the present application and should not be taken as limiting the present application, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A multi-way valve, comprising:
a first channel;
the second channel is communicated with the first channel, and a first valve and a second valve are arranged on the second channel;
the third channel is communicated with the first channel, and a third valve and a fourth valve are arranged on the third channel;
wherein, along the extending direction of the second channel, the first valve is positioned between the second valve and the first channel, and along the extending direction of the third channel, the third valve is positioned between the fourth valve and the first channel.
2. The multi-way valve of claim 1,
the first valve is a check valve.
3. The multi-way valve of claim 1,
the third valve is a check valve.
4. Multi-way valve according to claim 2 or 3,
the second valve and the fourth valve are both switch valves.
5. A piping structure, comprising:
a first conduit comprising a first tube, a second tube, a third tube, and the multi-way valve of any one of claims 1-4;
wherein the inlet of the first pipeline is communicated with the outlet of the first channel, the outlet of the second pipeline is communicated with the inlet of the second channel, and the outlet of the third pipeline is communicated with the inlet of the third channel.
6. The piping structure according to claim 5,
the first pipeline, the second pipeline and the third pipeline are all connected with the multi-way valve in a sealing mode through sealing rings.
7. The piping structure according to claim 5, characterized in that the piping structure further comprises:
a second pipeline comprising a fourth pipeline, a fifth pipeline, and a sixth pipeline;
the fifth pipeline is communicated with the fourth pipeline, a fifth valve is arranged on the fifth pipeline, the sixth pipeline is communicated with the fourth pipeline, and a sixth valve is arranged on the sixth pipeline.
8. The piping structure according to claim 7,
the first pipeline is a liquid inlet pipeline of the electronic fluorination liquid, and the second pipeline is a liquid outlet pipeline of the electronic fluorination liquid.
9. The piping structure according to claim 7, further comprising:
the first pipe conducts the second pipeline and the fifth pipeline, and a seventh valve is arranged on the first pipe;
the second conduit is used for communicating the third pipeline and the sixth pipeline, and an eighth valve is arranged on the second conduit;
the fifth pipeline comprises a first liquid outlet, and the sixth pipeline comprises a second liquid outlet;
along the extending direction of the fifth pipeline, the communication point of the first conduit and the fifth pipeline is located between the fifth valve and the first liquid outlet, and along the extending direction of the sixth pipeline, the communication point of the second conduit and the sixth pipeline is located between the sixth valve and the second liquid outlet.
10. An etcher, comprising:
a refrigeration device, an electrostatic chuck, and a conduit structure according to any one of claims 5 to 9;
the outlet of the first pipeline is communicated with the electrostatic chuck, the inlet of the second pipeline is communicated with the refrigerating device, and the inlet of the third pipeline is communicated with the refrigerating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122471683.7U CN217056809U (en) | 2021-10-13 | 2021-10-13 | Multi-way valve, pipeline structure and etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122471683.7U CN217056809U (en) | 2021-10-13 | 2021-10-13 | Multi-way valve, pipeline structure and etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217056809U true CN217056809U (en) | 2022-07-26 |
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| CN202122471683.7U Active CN217056809U (en) | 2021-10-13 | 2021-10-13 | Multi-way valve, pipeline structure and etching machine |
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