CN217051928U - Carlo acid wastewater treatment system - Google Patents
Carlo acid wastewater treatment system Download PDFInfo
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- CN217051928U CN217051928U CN202122821757.5U CN202122821757U CN217051928U CN 217051928 U CN217051928 U CN 217051928U CN 202122821757 U CN202122821757 U CN 202122821757U CN 217051928 U CN217051928 U CN 217051928U
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Abstract
The utility model discloses a caro acid wastewater treatment system, which is used for treating wastewater containing caro acid. Caro acid wastewater treatment system includes: a preheating device, a microwave catalytic device and an alkali type washing device. The preheating device is provided with a waste water input end and a preheating liquid output end. The microwave catalytic device is communicated with the fluid of the preheating device and is used for treating wastewater. The microwave catalytic device has a catalyst fixed bed and a microwave generator. The basic washing device is in fluid communication with a gas product discharge end of the microwave catalytic unit.
Description
Technical Field
The utility model relates to a wastewater treatment system, in particular to a caro acid wastewater treatment system.
Background
Carlo acid is also known as peroxomonosulfuric acid (H) 2 SO 5 ) Mainly from high-concentration sulfuric acid (H) 2 SO 4 ) And aqueous hydrogen peroxide (H) 2 O 2 ) And (4) mixing to generate. Carlo acid is an extremely highly oxidizing inorganic acid, which is often used in cyanide oxidation, etching, bleaching or deodorizing processes.
For example, in the exposure and development of semiconductors, caro's acid is often used to remove photoresist residues from the wafer surface. Under high temperature environment, the strong oxidizing property and the dehydration property of the Carlo acid can quickly destroy the hydrocarbon bonding of the organic matters and decompose the organic matters into carbon dioxide, thereby achieving the effect of removing the organic matters on the surface of the wafer.
However, the used caro acid waste liquid still has quite high acidity and oxidizability, and has extremely high danger if not properly treated. For example, Carlo acid, if inadvertently mixed with ethers or ketones, can create potentially explosive hazardous materials (e.g., acetone peroxide).
In the prior art, a caro acid wastewater treatment system is provided, which controls the temperature of a heater to be 120 ℃ to 150 ℃, and achieves the effect of decomposing caro acid through a high-temperature environment. However, in this system, the energy consumption for maintaining the high temperature environment is high, and chain reaction is easy to occur at high temperature, so that there is a risk of system temperature runaway.
Another type of caro acid wastewater treatment system is provided in the prior art, in which a catalyst (manganese oxide, iron oxide) or a reducing agent (sodium bisulfite) is added to a reaction tank to decompose caro acid into a ferric sulfate solution or a sodium sulfate solution. However, catalysts are generally susceptible to corrosion, which, once corroded, can result in the precipitation of large amounts of impurities (e.g., manganese or iron ions). Furthermore, the cost of adding a catalyst or reducing agent is high.
Therefore, it is an important subject to be solved by the industry how to overcome the above-mentioned drawbacks by improving the inconvenience of disposing the caro's acid wastewater through system improvement.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a caro acid wastewater treatment system is provided aiming at the defects of the prior art.
In order to solve the technical problem, the utility model adopts one of the technical schemes that a caro acid wastewater treatment system is provided. A caro acid waste water treatment system is used for treating waste water containing caro acid. Caro acid wastewater treatment system includes: a preheating device, a microwave catalytic device and an alkali type washing device. The preheating device is provided with a waste water input end and a preheating liquid output end. The microwave catalytic device is communicated with the fluid of the preheating device and is used for treating wastewater. The microwave catalytic device has a catalyst fixed bed and a microwave generator. The basic washing device is in fluid communication with a gas product discharge end of the microwave catalytic unit.
Still further, the caro acid wastewater treatment system further comprises: a treatment fluid collection tank in fluid communication with a treatment fluid discharge end of the microwave catalytic unit.
Further, the preheating device has a heat exchange tube, a high temperature liquid receiving end and a low temperature liquid discharging end, the heat exchange tube is fluidly connected between the high temperature liquid receiving end and the low temperature liquid discharging end, and the high temperature liquid receiving end is fluidly connected to a processing liquid discharging end of the microwave catalytic device.
Still further, the caro acid wastewater treatment system further comprises: and the treatment liquid collecting tank is in fluid communication with the low-temperature liquid discharge end of the preheating device.
Further, the microwave generator faces the catalyst fixed bed.
Further, a microwave generator surrounds the fixed catalyst bed.
Furthermore, the microwave generator is connected to the catalyst fixed bed through a microwave waveguide.
Further, the catalyst fixed bed is filled with a catalyst, and the volume filling amount of the catalyst is 1/3 to 1/2 of the total volume of the catalyst fixed bed.
Furthermore, the average particle diameter of the catalyst is 1 mm to 5 mm, and the catalyst is ceramic particle balls, high-density ball-type activated carbon catalyst, silicon carbide particle balls or a combination thereof, the surface of which is coated with platinum metal catalyst.
Furthermore, the microwave catalytic device is a vertical microwave catalytic device, and the microwave catalytic device has a preheating liquid receiving end, a treatment liquid discharging end and a gas product discharging end, wherein the preheating liquid receiving end is located at a bottom end of the microwave catalytic device, and the treatment liquid discharging end and the gas product discharging end are located at a top end of the microwave catalytic device.
The utility model discloses an one of them beneficial effect lies in, the utility model provides a caro acid effluent disposal system, it can have a waste water input end and a preheating liquid output through "preheating device" and "microwave catalytic unit has the technical scheme of a catalyst fixed bed and a microwave generator" to reach the effect of handling waste water. During the whole treatment process, the hydrogen peroxide generated by the decomposition of the caro acid can be used as an oxidant, and through the induction of microwaves, the hydrogen peroxide can generate free radicals with strong oxidizing power on the surface of the catalyst. In addition, under the synergistic action of the free radicals and the catalyst, the caro acid in the wastewater can be decomposed, so that sulfuric acid, oxygen and water are generated, and the effect of decomposing the caro acid in the wastewater is achieved.
For a further understanding of the nature and technical content of the present invention, reference should be made to the following detailed description and accompanying drawings, which are provided for reference and illustration purposes only and are not intended to limit the invention.
Drawings
FIG. 1 is a schematic view of a caro acid wastewater treatment system according to a first embodiment of the present invention.
Fig. 2 is a schematic sectional view of the microwave catalytic apparatus of the present invention.
FIG. 3 is a schematic view of a caro acid wastewater treatment system according to a second embodiment of the present invention.
Detailed Description
The following is a description of the embodiments of the "caro acid wastewater treatment system" disclosed in the present invention by specific examples, and those skilled in the art can understand the advantages and effects of the present invention from the disclosure of the present specification. The present invention can be implemented or applied through other different specific embodiments, and various details in the present specification can be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. The drawings of the present invention are merely schematic illustrations, and are not drawn to scale, but are described in advance. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention. Additionally, the term "or" as used herein is intended to include any one or combination of the associated listed items, as the case may be.
The caro acid wastewater treatment system of the utility model can be carried out at a lower temperature (80 ℃ to 120 ℃) and has lower energy consumption. In the treatment process, no catalyst or reducing agent is needed to be added, so that no impurity is generated.
The mechanism for decomposing caro's acid of the utility model comprises: (1) applying microwave to induce free radical generation, and decomposing caro acid under the synergistic action of the free radical and the catalyst; and (2) applying microwave to heat the Caro's acid for thermal decomposition. Particularly, the caro acid wastewater treatment system of the utility model can decompose caro acid into sulfuric acid, oxygen and water.
[ first embodiment ]
Referring to fig. 1, a first embodiment of the present invention provides a caro acid wastewater treatment system, which includes: a preheating device 1, a microwave catalytic device 2, an alkali type washing device 3 and a processing liquid collecting tank 4.
The preheating device 1 is used for preheating wastewater so as to treat the wastewater subsequently. The microwave catalytic device 2 is in fluid communication with the preheating device 1, and the microwave catalytic device 2 is used for decomposing caro acid in the wastewater to form a treatment solution, and the specific decomposition mode of caro acid will be described later. The basic washing device 3 is in fluid communication with the microwave catalytic device 2, and the basic washing device 3 is used for neutralizing and washing to remove acid gas (sulfur trioxide) in a gas product generated by the microwave catalytic device 2. A treatment fluid collection tank 4 is in fluid communication with the microwave catalytic apparatus 2, the treatment fluid collection tank 4 being for collecting treatment fluid generated by the microwave catalytic apparatus 2.
In an exemplary embodiment, the preheating device 1 has a waste water input 11 and a preheating liquid output 12. The waste water input 11 is configured to introduce waste water into the preheating device 1, the waste water referred to by the present invention containing caro's acid. For example, the wastewater generated from the semiconductor wafer cleaning process includes caro's acid with a concentration of 40 wt% to 80 wt%. The preheat liquid output 12 is configured to discharge heated wastewater. The preheating device 1 may heat the wastewater to 60 to 70 ℃.
In some embodiments, the preheating device 1 may be provided with a heating device for directly heating the waste water. In other embodiments, the preheating device 1 may be provided with a heat exchange pipe to indirectly heat the waste water by introducing other fluid with higher temperature.
In practice, the waste water input 11 of the preheating device 1 can be introduced into the waste water through a first conveying line A1. The wastewater may be subjected to one or more pre-treatment processes, such as physical treatment processes (e.g., screening, homogenizing, etc.), to remove suspended solid particulate impurities from the wastewater or to adjust the concentration of the caro's acid, and then introduced into the first transfer line a 1.
In some embodiments, the caro's acid wastewater treatment system may further include a wastewater storage tank (not shown) for storing wastewater to be treated, and the wastewater storage tank may be in communication with the wastewater input 11 of the preheater 1 through the first transfer line a 1.
In an exemplary embodiment, the microwave catalytic apparatus 2 has a preheating liquid receiving end 21, a gaseous product discharging end 22 and a treatment liquid discharging end 23. The preheating liquid receiving end 21 is configured to receive the wastewater heated by the preheating device 1. The gaseous product discharge end 22 is configured to discharge the gaseous products (sulfur trioxide, oxygen, moisture) generated by the microwave catalytic device 2. The treatment liquid discharge end 23 is configured to discharge the treatment liquid generated by the microwave catalytic apparatus 2.
In practical use, the preheating liquid receiving end 21 of the microwave catalytic device 2 can be in fluid communication with the preheating liquid output end 12 of the preheating device 1 through a second conveying line a 2.
Referring to fig. 2, the microwave catalytic apparatus 2 has a main body 20, a preheating liquid receiving end 21 is formed at a bottom end of the main body 20, and a gaseous product discharging end 22 and a treatment liquid discharging end 23 are formed at a top end of the main body 20. That is, the microwave catalytic apparatus 2 may be a vertical type microwave catalytic apparatus, and wastewater is introduced from the bottom end and the treatment solution is discharged from the top end.
The body 20 has a fixed catalyst bed 24 therein, and the fixed catalyst bed 24 is in fluid communication between the bottom end and the top end of the body 20. Therefore, the waste liquid flowing in through the preheating liquid receiving terminal 21 flows through the catalyst fixed bed 24 and then flows out of the catalytic reaction device 2.
The catalyst fixed bed 24 may be a quartz catalyst fixed bed. The catalyst fixed bed 24 is filled with a catalyst 25 in the form of pellets. The material of the catalyst 25 may be ceramic particle balls, high-density ball-type activated carbon catalyst, silicon carbide particle balls or a combination thereof, the surface of which is coated with platinum metal catalyst. The catalyst 25 has an average particle diameter of 1 mm to 5 mm. The volume filling amount of the catalyst 25 in the fixed catalyst bed 24 is 1/3 to 1/2(33.3 to 50 vol.%) based on the total volume of the fixed catalyst bed 24 (100 vol.%).
The microwave catalytic apparatus 2 has a microwave generator 26. The microwave generator 26 faces the catalyst fixed bed 24 to apply microwaves to the catalyst fixed bed 24. In an exemplary embodiment, the microwave generator 26 surrounds the fixed catalyst bed 24, so that the microwave generator 26 can stably and continuously provide microwaves and prevent the microwaves from leaking.
In an exemplary embodiment, the microwave generator 26 is in communication with the catalyst fixed bed 24 through a microwave waveguide 27. The microwave generator 26 is directed to the catalyst 25 in the catalyst fixed bed 24 through the microwave waveguide 27 to achieve the best decomposition effect. Preferably, the microwave generator 26 may set the microwave wavelength range to 0.9GHz to 2.45 GHz.
Specifically, caronic acid is hydrolyzed to generate sulfuric acid and hydrogen peroxide (formula (I)) when mixed with water, and hydrogen peroxide is easily decomposed into oxygen and water (formula (II)) in a high-temperature environment. Thus, as can be seen from formula (III), karo acid, upon decomposition, produces sulfuric acid, oxygen and water.
Formula (I):
formula (II): 2H 2 O 2 →O 2 +2H 2 O。
Formula (III): h 2 SO 5 +H 2 O→H 2 SO 4 +0.5O 2 +H 2 O。
After the wastewater is introduced into the catalyst fixed bed 24, the hydrogen peroxide in the wastewater is induced by the microwave to generate free radicals on the surface of the catalyst 25. Then, caro's acid (H) 2 SO 5 ) Will react with free radicals (e.g.: hydroxyl radical) and produces sulfuric acid, oxygen and water. In addition, sulfuric acid is easily decomposed to generate sulfur trioxide in a high temperature environment, so that the gas product generated by the microwave catalytic device 2 includes oxygen and sulfur trioxide, and the treatment solution generated by the microwave catalytic device 2 includes sulfuric acid and water.
In an exemplary embodiment, the reaction temperature of the microwave catalytic device 2 at steady state is 80 ℃ to 120 ℃, and the average residence time of the wastewater in the catalyst fixed bed 24 is 5 minutes to 20 minutes. After the treatment by the microwave catalytic device 2, the residual concentration of the Caro acid in the treatment liquid is less than 5 ppm.
The basic washing device 3 has a gas product receiving end 31, and the gas product receiving end 31 is configured to receive the gas product generated by the microwave catalytic device 2. The basic scrubbing unit 3 neutralizes the sulfur trioxide in the gaseous product to expel non-polluting oxygen.
In practical use, the gas product receiving end 31 of the basic washing device 3 can be fluidly connected to the gas product discharging end 22 of the microwave catalytic apparatus 2 through a gas conveying line B1.
The processing liquid collecting tank 4 has a processing liquid receiving end 41, and the processing liquid receiving end 41 is configured to receive the processing liquid generated by the microwave catalytic apparatus 2. In practical use, the treatment liquid receiving end 41 of the treatment liquid collecting tank 4 can be in fluid communication with the treatment liquid discharging end 23 of the microwave catalytic device 2 through a third conveying line a 3.
Due to the highly corrosive nature of caro's acid and sulfuric acid, the preheating device 1, the microwave catalytic device 2, the basic washing device 3, and the treatment fluid collection tank 4 are made of materials with high corrosion resistance, such as: quartz, tantalum metal or alloy, polytetrafluoroethylene or perfluoroalkoxyalkane polymers.
[ second embodiment ]
Referring to fig. 3, a caro acid wastewater treatment system according to a second embodiment of the present invention is similar to the caro acid wastewater treatment system of the first embodiment (fig. 1), and the differences are: the third transfer line a3 is connected to flow between the microwave catalytic apparatus 2 and the preheating apparatus 1 to introduce the treatment liquid into the preheating apparatus 1. In addition, the caro acid wastewater treatment system further includes a fourth delivery line a4, the fourth delivery line a4 is connected to flow between the preheating device 1 and the treatment solution collecting tank 4 to collect the treatment solution.
In an exemplary embodiment, the preheating device 1 further has a heat exchange tube, a high temperature liquid receiving end 13 and a low temperature liquid discharging end 14, and the heat exchange tube is fluidly connected between the high temperature liquid receiving end 13 and the low temperature liquid discharging end 14. The third transfer line A3 is in fluid communication with the high temperature liquid receiving end 13 and the treating liquid discharging end 23 of the microwave catalytic device 2, so that the third transfer line A3 can introduce the high temperature treating liquid into the preheating device 1, and the high temperature treating liquid can exchange heat with the wastewater to heat the wastewater.
In the second embodiment, the treatment liquid collection tank 4 is in fluid communication with the preheating device 1. In practical use, the processing liquid receiving end 41 of the processing liquid collecting tank 4 can be in fluid communication with the low-temperature liquid discharging end 14 of the preheating device 1 through a fourth conveying line a4 to receive the heat-exchanged low-temperature processing liquid.
[ advantageous effects of the embodiments ]
The utility model discloses an one of them beneficial effect lies in, the utility model provides a caro acid effluent disposal system, it can have a waste water input end and a preheating liquid output through "preheating device" and "microwave catalytic unit has the technical scheme of a catalyst fixed bed and a microwave generator" to reach the effect of handling waste water. In the whole treatment process, the hydrogen peroxide generated by the decomposition of the caro acid can be used as an oxidizing agent, and through the induction of microwaves, the hydrogen peroxide can generate free radicals with strong oxidizing power on the surface of the catalyst. In addition, under the synergistic action of the free radicals and the catalyst, the caro acid in the wastewater can be decomposed, so that sulfuric acid, oxygen and water are generated, and the effect of decomposing the caro acid in the wastewater is achieved.
Furthermore, the microwave generator can be further configured to face the catalyst fixed bed, or the microwave generator can face the catalyst fixed bed through the arrangement of the microwave waveguide, so that the microwaves generated by the microwave generator can be completely absorbed by the catalyst fixed bed. By combining the configuration relationship of the microwave generator and the catalyst fixed bed, the microwave generator can be arranged outside the catalyst fixed bed in a surrounding way, and the microwave generator is communicated with the catalyst fixed bed by a microwave waveguide tube. Therefore, the utility model can optimize the treatment effect of the waste water by adjusting the relative setting relationship between the catalyst fixed bed and the microwave generator.
Furthermore, the filling ratio of the catalyst in the fixed bed reaction and the particle size of the catalyst can be further controlled. By controlling the specification and size of the catalyst in the catalyst fixed bed, the wastewater treatment efficiency can be optimized, so that a large amount of wastewater can be treated in a short time.
The above disclosure is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of the claims of the present invention, so that all the equivalent technical changes made by the contents of the specification and the drawings are included in the scope of the claims of the present invention.
Claims (10)
1. A caro acid wastewater treatment system for treating a wastewater containing caro acid, the caro acid wastewater treatment system comprising:
the preheating device is provided with a wastewater input end and a preheating liquid output end;
a microwave catalytic device in fluid communication with the preheating device, the microwave catalytic device being for treating the wastewater; wherein the microwave catalytic device is provided with a catalyst fixed bed and a microwave generator; and
an alkaline scrubbing device in fluid communication with a gas product discharge end of the microwave catalytic unit.
2. The caro acid wastewater treatment system of claim 1, further comprising: and the treatment liquid collecting tank is communicated with a treatment liquid discharge end of the microwave catalytic device in a fluid manner.
3. The carotic acid wastewater treatment system of claim 1, wherein the preheating device has a heat exchange tube, a high temperature liquid receiving end, and a low temperature liquid discharge end, the heat exchange tube being in fluid communication between the high temperature liquid receiving end and the low temperature liquid discharge end; wherein the high temperature liquid receiving end is in fluid communication with a treatment liquid discharge end of the microwave catalytic device.
4. The caro acid wastewater treatment system of claim 3, further comprising: a treatment fluid collection tank in fluid communication with the low temperature fluid discharge end of the preheating device.
5. The caronic acid wastewater treatment system of claim 1, wherein the microwave generator faces the fixed catalyst bed.
6. The caronic acid wastewater treatment system of claim 1, wherein the microwave generator surrounds the fixed catalyst bed.
7. The caronic acid wastewater treatment system of claim 1, wherein the microwave generator is in communication with the catalyst fixed bed through a microwave waveguide.
8. The caronic acid wastewater treatment system of claim 1, wherein the fixed catalyst bed is filled with a catalyst, and the volume filling amount of the catalyst is 1/3-1/2 of the total volume of the fixed catalyst bed.
9. The caro acid wastewater treatment system of claim 8, wherein the catalyst has an average particle size of 1 mm to 5 mm.
10. The caronic acid wastewater treatment system of claim 1, wherein the microwave catalytic device is a vertical microwave catalytic device having a preheating liquid receiving end, a treatment liquid discharge end and a gas product discharge end, the preheating liquid receiving end being located at a bottom end of the microwave catalytic device, the treatment liquid discharge end and the gas product discharge end being located at a top end of the microwave catalytic device.
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| CN202122821757.5U CN217051928U (en) | 2021-11-17 | 2021-11-17 | Carlo acid wastewater treatment system |
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| CN202122821757.5U CN217051928U (en) | 2021-11-17 | 2021-11-17 | Carlo acid wastewater treatment system |
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