CN217032943U - Air tightness detection device - Google Patents
Air tightness detection device Download PDFInfo
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- CN217032943U CN217032943U CN202220266080.5U CN202220266080U CN217032943U CN 217032943 U CN217032943 U CN 217032943U CN 202220266080 U CN202220266080 U CN 202220266080U CN 217032943 U CN217032943 U CN 217032943U
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Abstract
The utility model discloses an air tightness detection device which comprises butt-joint pieces, sealing pieces and a recorder, wherein the two butt-joint pieces are respectively connected with two adjacent coating structures and are in butt joint with each other, the two adjacent coating cavities are communicated with each other, an air outlet is arranged on the outer side of one butt-joint piece, the butt-joint pieces are provided with an air inlet, an air outlet and an air flow channel which are communicated with each other, the sealing pieces are clamped between the two butt-joint pieces, the air inlet is positioned on the inner side of the sealing pieces, and the recorder is connected with the air outlet and used for recording pressure change within preset time. According to the air tightness detection device provided by the utility model, the recorder can record the pressure change before and after the coating cavity within the preset time, if the difference between the pressure difference before and after is large, the air leakage condition exists at the butt joint part of the butt joint piece, and the air tightness detection is carried out on the two mutually butted coating structures, so that the investigation range can be reduced when the air leakage condition occurs, and the coating structure with the air leakage condition can be quickly positioned.
Description
Technical Field
The utility model relates to the technical field of coating equipment, in particular to an air tightness detection device for quickly detecting air tightness after butt joint of cavities.
Background
In the photovoltaic industry, a silicon wafer needs to be coated in a high-vacuum continuous cavity, absolute sealing of a butt joint of adjacent cavities needs to be guaranteed when the high-vacuum continuous cavity is formed, air tightness testing needs to be carried out after the cavities are in butt joint, next operation can be carried out after the air tightness testing is carried out, in the related technology, the whole continuous cavity is detected, when air leakage occurs, the air leakage to which cavity cannot be quickly positioned, and the difficulty in checking is high, and the time is long.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides an air tightness detection device which can be used for rapidly detecting an air leakage cavity.
The air tightness detection device provided by the embodiment of the utility model is used for detecting the air tightness of the butt joint of the coating structure, and the coating structure is internally provided with a coating cavity, and is characterized by comprising:
the two butt-joint pieces are respectively connected with the two adjacent coating structures and are in butt joint with each other, the coating cavities of the adjacent coating structures are communicated with each other, the outer side of one butt-joint piece is provided with an air outlet, the inner side of the butt-joint piece is provided with an air inlet, an air flow channel is arranged in the butt-joint piece, and two ends of the air flow channel are respectively communicated with the air inlet and the air outlet;
the sealing element is annular and is clamped between the two butt joint elements, and the air inlet is positioned on the inner side of the sealing element;
and the recorder is connected to the air outlet and used for recording pressure change within preset time.
The air tightness detection device provided by the embodiment of the utility model at least has the following beneficial effects:
according to the air tightness detection device in the embodiment of the utility model, the recorder can record the pressure change before and after in the preset time, if the difference between the pressure difference before and after is larger, the air leakage condition exists at the butt joint part of the butt joint piece, and by carrying out air tightness detection on two mutually butted coating structures, when the air leakage condition occurs, the investigation range can be reduced, and the coating structure with the air leakage condition can be quickly positioned.
According to some embodiments of the utility model, the gas meter further comprises a gas connector, one end of the gas connector is inserted into the gas outlet, and the other end of the gas connector is connected with the recorder.
According to some embodiments of the utility model, the gas fitting is threaded to the gas outlet.
According to some embodiments of the utility model, the gas connector further comprises a plug, and one end of the plug can be inserted into the gas connector and plug the gas connector.
According to some embodiments of the utility model, the projection of the air inlet and the air outlet in the radial direction of the docking piece coincides.
According to some embodiments of the utility model, the cross-section of the air flow channel increases gradually in a direction from the air outlet towards the air inlet.
According to some embodiments of the utility model, two opposite sides of the two butt pieces facing each other are provided with mounting grooves, and the sealing piece is embedded into the mounting grooves.
According to some embodiments of the utility model, the mounting groove is arc-shaped in cross-section.
According to some embodiments of the utility model, the abutment is provided as a flange.
According to some embodiments of the utility model, the vacuum pump is communicated to the coating cavity through a pipeline and is used for forming vacuum in the coating cavity.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described with reference to the following figures and examples, in which:
FIG. 1 is a schematic structural view of an embodiment of the air-tightness detecting device of the present invention;
fig. 2 is a schematic structural view of another embodiment of the air-tightness detecting device of the present invention.
Reference numerals:
the butt joint piece 100, the air outlet 110, the air inlet 120, the airflow channel 130 and the mounting groove 140; a seal member 200; a recorder 300; and an air connector 400.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the above, below, exceeding, etc. are understood as excluding the present numbers, and the above, below, within, etc. are understood as including the present numbers. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Referring to fig. 1, an embodiment of the present invention provides an air-tightness detecting device for detecting air tightness of a butt joint of coating structures, where a coating cavity is usually disposed inside a coating structure, the coating cavity provides a closed coating environment for a to-be-coated part, and after adjacent coating structures are butted, the coating cavities are communicated to form a coating system with a continuous cavity.
In order to detect whether an air leakage phenomenon exists at the butt joint of the rapid coating structures and ensure high vacuum degree of a coating environment, in one embodiment, the air tightness detecting device comprises two butt joints 100, a sealing element 200 and a recorder 300, wherein the two butt joints 100 are respectively connected with two adjacent coating structures, after the two butt joints 100 are mutually butted, the two adjacent coating structures are connected, and coating cavities in the two coating structures are communicated. An annular sealing element 200 is clamped between the two butting pieces 100, and the annular sealing element 200 can provide a sealing effect on the whole circumferential direction of the butting pieces 100 so as to block an air gap at the butting position of the butting pieces 100 and ensure the sealing strength; the seal 200 should be placed as close as possible to the edge of the interface element 100 to maximize the sealing range of the seal 200.
An air outlet 110 is arranged on the outer side of one of the two butt-joint pieces 100, an air inlet 120 is arranged on the inner side of the butt-joint piece 100, the air inlet 120 is positioned on the inner side of the sealing piece 200, an air flow channel 130 is arranged inside the butt-joint piece 100, and two ends of the air flow channel 130 are respectively communicated with the air inlet 120 and the air outlet 110, so that the air outlet 110 and the air inlet 120 are in the same pressure environment. The recorder 300 is connected to the air outlet 110 and can record pressure changes within a preset time; because the coating cavity is communicated with the airflow channel 130 through the air inlet 120, the pressure at the air outlet 110 is consistent with the pressure in the coating cavity, if the butt joint of the butt joint piece 100 is well sealed, the pressure in the air outlet 110, the coating cavity, the air inlet 120 and the airflow channel 130 is always kept at an initial level, if the butt joint of the butt joint piece 100 has an air leakage phenomenon, the air inside and outside the butt joint piece 100 circulates, the pressure at the air outlet 110 changes within a certain time, the pressure change condition at the air outlet 110 within a preset time is recorded through the recorder 300, and whether the butt joint of the butt joint piece 100 leaks air or not can be known.
When the air tightness detection is performed, the air tightness detection device in the embodiment is set, the recorder 300 records the pressure change before and after the preset time, if the difference between the pressure difference before and after the preset time is larger, it is indicated that the air leakage condition exists at the butt joint of the butt joint piece 100, at least one of the two coating structures has the air leakage defect, and therefore the effect of quickly positioning the air leakage cavity is achieved.
Through carrying out airtight detection to two coating film structures that dock each other, when the gas leakage condition appears, can reduce the investigation scope, can fix a position the coating film structure that has the gas leakage condition fast. For example, the coating structures in the coating system are divided into a group two by two, the air tightness detection device detects the coating structures of different groups, or a plurality of air tightness detection devices can be used simultaneously to detect the coating structures of different groups; when the air leakage condition exists in one group of coating structures, the butt joint of one coating structure in the group and one coating structure in the other group can be detected, the other group is a group without the air leakage condition after detection, if the result of secondary detection indicates that the air leakage does not exist, the air leakage exists in the coating structure on the other side in the group, if the air leakage exists in the detection result, the air leakage exists in the detected coating structure, the air leakage does not need to be checked one by one, and the air tightness detection efficiency is improved.
It should be noted that, in order to enable the two abutting pieces 100 to be mutually abutted, the coating cavities of the coating structure can be mutually communicated, the two abutting pieces 100 can be annular, and the two abutting pieces 100 can be connected in a threaded fastening and clamping manner, so that the two abutting pieces 100 can be conveniently assembled and disassembled. For example, the docking member 100 may be a flange having a relatively flat side surface to ensure the air tightness after docking, and a plurality of connection holes are formed in the outer edge of the flange, and the connection holes of different flanges correspond to each other and are connected by locking in a threaded fastener; the flange belongs to the adapting unit that commonly uses, is convenient for acquire, and the cost is lower.
In addition, the air inlet 120 may be provided at a region where two docking members 100 contact each other, or at an inner side of the docking members 100. As shown in fig. 1, the air inlet 120 is located in a region where the two butt-joint parts 100 are in contact with each other, if the sealing performance at the butt-joint part of the two butt-joint parts 100 is good, air in the coating cavity will not leak to the outside of the butt-joint part 100, and air in the external environment will not enter the coating cavity through the butt-joint part, if there is an air leakage situation, when air flows from the butt-joint part, the pressure at the air inlet 120 changes, and there is a difference between the previous and subsequent recording results of the recorder 300. As shown in fig. 2, the docking piece 100 is annular, the air inlet 120 is disposed on the inner sidewall of the docking piece 100, the air inlet 120 is communicated with the coating chamber, the pressure change of the air in the coating chamber directly reacts to the air outlet 110 through the air inlet 120, and if there is an air leakage condition, the front and rear measurement results of the recorder 300 are different; in this case, the projections of the air inlet 120 and the air outlet 110 in the radial direction of the docking piece 100 coincide, the air entering from the air inlet 120 can rapidly flow to the air outlet 110, and the path through which the air flow passes is short, so that the recorder 300 can rapidly record the air pressure change in the coating chamber; the radial direction of the docking member 100 refers to a direction from the center position of the docking member 100 to the edge position, and does not limit the shape of the docking member 100.
Further, as shown in fig. 2, the projections of the air inlet 120 and the air outlet 110 in the radial direction of the docking piece 100 coincide, and the air flow channel 130 is linear, so that the air pressure in the coating chamber can quickly react to the air outlet 110 through the air flow channel 130, and the testing accuracy of the recorder 300 can be ensured. Of course, in order to realize that the gas pressure at the gas inlet 120 can reflect the gas pressure in the coating chamber, the gas flow channel 130 may also be configured to be a broken line type or a curve type.
After the adjacent coating structures are mutually butted, the original gas environment in the adjacent coating cavities is the same, and corresponding air pressure is formed, and when air leakage exists at the butt joint of the coating structures, the original gas environment in the coating cavities and the air pressure change and are reflected to the recorder 300. In one embodiment, the air tightness detecting device may be provided with a vacuum pump, after the adjacent coating structures are butted with each other, the vacuum pump is communicated to the coating cavity through a pipeline, so that vacuum is formed in the coating cavity, if air leaks at the butted position of the coating structures, air outside the coating structures enters the coating cavity through the butted position, the vacuum state in the coating cavity is influenced, and the air is reflected to the recorder 300; the original state of the coating cavity is set to be vacuum, when air leakage exists, the air pressure reaction in the coating cavity is obvious, and the difference of the front and back readings of the recorder 300 is large, so that observation is facilitated. Therefore, the recorder 300 can be a pressure gauge, a vacuum gauge, or the like to detect the vacuum degree and pressure change in the coating chamber.
In order to ensure the tightness of the connection between the recorder 300 and the air outlet 110, the air tightness detecting device further comprises an air connector 400, one end of the air connector 400 is inserted into the air outlet 110, and the other end of the air connector 400 is connected with the recorder 300; the air connector 400 can satisfy the sealing requirements of pneumatic tubing and connect the recorder 300 with the docking piece 100.
The air joint 400 can be fixed in the air outlet 110 in a threaded connection manner, external threads are arranged outside the air joint 400, and internal threads matched with the air joint 400 are arranged on the inner wall of the air channel 130 at the air outlet 110, so that the connection strength between the air joint 400 and the butt-joint piece 100 and the sealing performance at the connection part between the air joint 400 and the butt-joint piece 100 are ensured; the air joint 400 can be a plastic structure or a metal joint, and the thread of the air joint 400 can be coated with polytetrafluoroethylene leakage-proof glue to ensure sealing. The end of the recorder 300 is inserted into the other end of the air connector 400, or the air connector 400 is screwed into the recorder 300, thereby achieving the sealing property after the recorder 300, the air connector 400, and the interface 100 are connected.
The air tightness detecting device further comprises a plug which can be inserted into one end of the air joint 400 far away from the butt-joint piece 100 and plug the air joint 400. After the air tightness detection is completed, the air joint 400 can be retained at the air outlet 110, and the film coating cavity is isolated from the external environment by inserting a plug into the air joint 400. The plug may be screwed to the gas connector 400, or the plug may be plugged into the gas connector 400 by a tight fit.
In addition, in order to make the pressure change in the coating chamber quickly react to the recorder 300, the cross section of the airflow channel 130 is gradually increased along the direction from the air outlet 110 to the air inlet 120, so that the airflow channel 130 is in a flaring shape in the direction from the air outlet 110 to the air inlet 120, the gas in the coating chamber can quickly enter the airflow channel 130 and is reflected to the recorder 300, and the detection accuracy of the recorder 300 is improved.
It should be noted that the cross section of the airflow channel 130 may be circular, rectangular, etc.; when the interface element 100 is configured as a flange, the gas flow channel 130 should be flared toward the radial direction of the interface element 100 to avoid over-thinning the thickness of the interface element 100 and affecting the structural strength of the interface element 100.
In addition, two opposite joint parts 100 are provided with mounting grooves 140 on both sides facing each other, the sealing element 200 is embedded into the mounting grooves 140, and the mounting grooves 140 are used for limiting the sealing element 200, so that the sealing element 200 is prevented from moving at the butt joint of the two opposite joint parts 100, and the sealing of the two opposite joint parts 100 at the butt joint is prevented from being influenced. Moreover, when the sealing member 200 is installed in the installation groove 140, the two installation grooves 140 can assist in positioning the two abutting members 100, so that the two abutting members 100 have high installation accuracy.
The mounting groove 140 may be curved to match the outer shape of the sealing member 200; alternatively, the opening degree of the mounting groove 140 is smaller than the sectional size of the sealing member 200, so that the sealing member 200 can be tightly fitted to the groove wall of the mounting groove 140, and the sealing member 200 is prevented from being separated from the mounting groove 140.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.
Claims (10)
1. Gas tightness detection device for detect the gas tightness of coating film structure butt joint department, the inside of coating film structure has the coating film chamber, its characterized in that includes:
the two butt-joint pieces are respectively connected with the two adjacent coating structures and are in butt joint with each other, the coating cavities of the adjacent coating structures are mutually communicated, the outer side of one butt-joint piece is provided with an air outlet, the inner side of the butt-joint piece is provided with an air inlet, an air flow channel is arranged in the butt-joint piece, and two ends of the air flow channel are respectively communicated with the air inlet and the air outlet;
the sealing element is annular and is clamped between the two butt joint elements, and the air inlet is positioned on the inner side of the sealing element;
and the recorder is connected to the air outlet and used for recording pressure change in preset time.
2. The airtightness detection apparatus according to claim 1, further comprising an air connector, one end of which is inserted into the air outlet, and the other end of which is connected to the recorder.
3. The airtightness detection apparatus according to claim 2, wherein the gas joint is screwed to the gas outlet.
4. The airtightness detection apparatus according to claim 2, further comprising a plug, one end of which is capable of being inserted into the gas joint and blocking the gas joint.
5. The air-tightness detecting device according to claim 1, wherein the air inlet and the air outlet coincide with each other in a projection of the air outlet in a radial direction of the interface element.
6. The airtightness detection apparatus according to claim 1, wherein the cross section of the air flow channel gradually increases in a direction from the air outlet toward the air inlet.
7. The airtightness detection apparatus according to claim 1, wherein two sides of the two abutting pieces facing each other are provided with mounting grooves into which the sealing pieces are inserted.
8. The airtightness detection apparatus according to claim 7, wherein the mounting groove has an arc-shaped cross section.
9. The airtightness detection apparatus according to any one of claims 1 to 8, wherein the abutting member is provided as a flange.
10. The airtightness detection apparatus according to any one of claims 1 to 8, further comprising a vacuum pump communicating with the coating chamber through a pipe and for forming a vacuum in the coating chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220266080.5U CN217032943U (en) | 2022-02-09 | 2022-02-09 | Air tightness detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220266080.5U CN217032943U (en) | 2022-02-09 | 2022-02-09 | Air tightness detection device |
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| Publication Number | Publication Date |
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| CN217032943U true CN217032943U (en) | 2022-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220266080.5U Active CN217032943U (en) | 2022-02-09 | 2022-02-09 | Air tightness detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117906881A (en) * | 2024-03-19 | 2024-04-19 | 临沂市交通制冷工程有限公司 | Vacuum testing device of refrigerator |
| CN117906881B (en) * | 2024-03-19 | 2024-05-24 | 临沂市交通制冷工程有限公司 | Vacuum testing device of refrigerator |
-
2022
- 2022-02-09 CN CN202220266080.5U patent/CN217032943U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117906881A (en) * | 2024-03-19 | 2024-04-19 | 临沂市交通制冷工程有限公司 | Vacuum testing device of refrigerator |
| CN117906881B (en) * | 2024-03-19 | 2024-05-24 | 临沂市交通制冷工程有限公司 | Vacuum testing device of refrigerator |
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