CN217026063U

CN217026063U - Sinking type vacuum cavity

Info

Publication number: CN217026063U
Application number: CN202123372318.7U
Authority: CN
Inventors: 张俊峰; 赵子东; 许春立; 魏庆瑄
Original assignee: Shanghai Zichuang Coating Technology Co ltd
Current assignee: Shanghai Zichuang Coating Technology Co ltd
Priority date: 2021-12-29
Filing date: 2021-12-29
Publication date: 2022-07-22
Anticipated expiration: 2031-12-29

Abstract

The utility model belongs to the technical field of vacuum coating equipment, and particularly discloses a sunken vacuum cavity which comprises a bottom plate, wherein side plates are fixedly connected to the tops of the edges of the bottom plate, an edge plate is arranged at the top end of each side plate, an air suction opening and a support arm are arranged on the side plate on the left side, a cover plate is sunken in a cavity enclosed by the four side plates, air discharge baffles are arranged on two sides of the bottom of the cover plate, and air discharge holes are arranged on two sides of each air discharge baffle; the top of the cover plate is fixedly connected with a cover plate sinking plate; the top of the cover plate sinking plate is fixedly connected with a surrounding plate, and the tops of two sides of the cover plate sinking plate are respectively provided with a quick air outlet air inlet and a soft air outlet air inlet; the top of the cover plate sinking plate is fixedly connected with a cover plate overturning arm, and one end of the cover plate overturning arm extends to the outside of the coaming and is connected with the supporting arm; the outer sides of the side plates positioned at the two ends of the bottom plate are fixedly connected with end plates, a plurality of fixing holes are formed in the end plates, and fastening bolts are arranged in the fixing holes; the utility model can prevent the substrate from being blown or broken by directly charging the inflation airflow into the vacuum cavity, and has high production efficiency.

Description

Sinking type vacuum cavity

Technical Field

The utility model relates to the technical field of vacuum coating equipment, in particular to a sunken vacuum cavity.

Background

The vacuum coating process chamber is a core component of vacuum coating equipment, and various vacuum coating processes are required to be carried out in the vacuum chamber. Different functional components are arranged in the vacuum coating chamber, and different coating processes can be realized by the vacuum coating equipment.

The vacuum cavity needs to reduce the volume of the vacuum cavity as much as possible on the premise of not influencing the function of equipment so as to accelerate the vacuumizing time of the cavity and improve the production efficiency, particularly, the air inlet/outlet chamber of large-scale continuous vacuum coating equipment needs to frequently exhaust and deflate in the operation process of the equipment, and the air flow is prevented from damaging the substrate when the air is filled into a vacuum chamber during deflation.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a sunken vacuum chamber to solve the above problems.

In order to achieve the purpose, the utility model provides the following technical scheme: a sunken vacuum cavity comprises a bottom plate, wherein side plates are fixedly connected to the tops of the edges of the bottom plate, an edge plate is arranged at the top end of each side plate, an air suction port and a support arm are arranged on the side plate on the left side, a cover plate sinks in a cavity defined by the four side plates, air discharge baffles are arranged on two sides of the bottom of the cover plate, and an air discharge hole is formed in each of two sides of each air discharge baffle; the top of the cover plate is fixedly connected with a cover plate sinking plate, and the bottom of the cover plate sinking plate is arranged at the top of the edge plate; the top of the cover plate sinking plate is fixedly connected with a coaming plate in a shape like a Chinese character 'kou', and the tops of the two sides of the cover plate sinking plate and the inside of the coaming plate are both provided with a quick air discharging air inlet and a soft air discharging air inlet; a cover plate overturning arm is fixedly connected to the top of the cover plate sinking plate, and one end of the cover plate overturning arm extends to the outer part of the enclosing plate and is movably connected with the supporting arm; the end plates are fixedly connected to the outer sides of the side plates at the two ends of the bottom plate, a plurality of fixing holes are formed in the corresponding positions of the enclosing plates on the end plates, and fastening bolts are movably arranged in the fixing holes.

Preferably, the air bleeding baffle is of a U-shaped structure, and the bottom ends of the quick air bleeding air inlet and the soft air bleeding air inlet are communicated with the inside of the air bleeding baffle.

Preferably, both ends of one side of the coaming, which is far away from the supporting arm, are hinged with the end plate.

Preferably, two seal grooves are formed in the bottom of the cover plate sinking plate, the two seal grooves correspond to the edge plate, seal rings are arranged in the two seal grooves, and the seal rings protrude out of the notches of the two seal grooves.

Preferably, a connecting hole is formed in the corresponding position of the outer side wall of the enclosing plate and the fixing hole, and the connecting hole is connected with the head end of the fastening bolt.

Preferably, a plurality of transverse reinforcing ribs and longitudinal reinforcing ribs are arranged at the top of the cover plate sinking plate in the enclosing plate, and the longitudinal reinforcing ribs are fixedly sleeved at the tops of the transverse reinforcing ribs.

Compared with the prior art, the utility model has the beneficial effects that:

1. according to the utility model, the bottom plate, the side plate, the cover plate sinking plate, the enclosing plate, the double sealing grooves and the like are assembled together to form the vacuum cavity, the two sides of the cover plate in the cavity are provided with the air discharge baffles, and the two sides of each air discharge baffle are respectively provided with a row of air discharge holes.

2. According to the utility model, the soft deflation air inlet is arranged on the cover plate sinking plate, small air flow is firstly filled into the vacuum cavity, and then large air flow is filled into the vacuum cavity, so that inflation air is prevented from flowing through the large blowing substrate.

3. The cover plate in the vacuum cavity is installed in a sinking mode, the volume of the vacuum cavity can be reduced, the vacuumizing time is saved, and the production efficiency is improved.

Drawings

FIG. 1 is a schematic view of the internal structure of the present invention;

FIG. 2 is a schematic view of the overall structure of the present invention;

FIG. 3 is a schematic view of the structure of the base plate of the present invention;

FIG. 4 is a schematic diagram of the right side view of FIG. 3;

FIG. 5 is a schematic structural diagram of the cover plate of the present invention;

FIG. 6 is a bottom view of the structure of FIG. 5;

fig. 7 is a schematic view of the construction of the bleed baffle of the present invention.

In the figure: 1. a base plate; 2. a side plate; 3. a port plate; 4. an air exhaust port; 5. a cover plate; 6. an air bleed baffle; 7. an exhaust hole; 8. a cover plate sinking plate; 9. enclosing plates; 10. a quick air bleed inlet; 11. a soft bleed air inlet; 12. a support arm; 13. an end plate; 14. a fixing hole; 15. fastening a bolt; 16. a double seal groove; 17. connecting holes; 18. transverse reinforcing ribs; 19. longitudinal reinforcing ribs; 20. a cover plate overturning arm.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Referring to fig. 1-7, the present invention provides a technical solution: a sunken vacuum cavity comprises a bottom plate 1, wherein side plates 2 are fixedly connected to the tops of the edges of the bottom plate 1, an edge plate 3 is arranged at the top end of each side plate 2, an air suction port 4 and a support arm 12 are arranged on the side plate 2 on the left side, a cover plate 5 is sunken in a cavity enclosed by the four side plates 2, air discharge baffles 6 are arranged on two sides of the bottom of the cover plate 5, and air discharge holes 7 are arranged on two sides of each air discharge baffle 6; a cover plate sinking plate 8 is fixedly connected to the top of the cover plate 5, and the bottom of the cover plate sinking plate 8 is arranged on the top of the edge plate 3; the top of the cover plate sinking plate 8 is fixedly connected with a coaming 9 in a shape like a Chinese character 'kou', and the top of the two sides of the cover plate sinking plate 8 and the coaming 9 are both provided with a quick air discharging air inlet 10 and a soft air discharging air inlet 11; a cover plate overturning arm 20 is fixedly connected to the top of the cover plate sinking plate 8, and one end of the cover plate overturning arm 20 extends to the outside of the enclosing plate 9 and is movably connected with the supporting arm 12; the outer sides of the side plates 2 at the two ends of the bottom plate 1 are fixedly connected with end plates 13, a plurality of fixing holes 14 are formed in the corresponding positions of the coamings 9 on the end plates 13, and fastening bolts 15 are movably arranged in the fixing holes 14.

Furthermore, the air bleeding baffle 6 is of a U-shaped structure, and the bottom ends of the quick air bleeding air inlet 10 and the soft air bleeding air inlet 11 are communicated with the inside of the air bleeding baffle 6.

Furthermore, both ends of one side of the enclosing plate 9, which is far away from the supporting arm 12, are hinged with the end plate 13, and the cover plate 5 is convenient to open through the cover plate overturning arm 20.

Further, two seal grooves 16 have been seted up to the bottom of apron heavy plate 8, and two seal grooves 16 correspond the setting with bead board 3, and all are equipped with the sealing washer in the two seal grooves 16, and the notch of sealing washer protrusion in two seal grooves 16 for vacuum chamber's leakproofness.

Furthermore, connecting hole 17 has been seted up with the corresponding department of fixed orifices 14 to the lateral wall of bounding wall 9, and connecting hole 17 is connected with fastening bolt 15's head end for fix bounding wall 9, thereby can avoid appearing leaking the phenomenon, and easy operation, the installation of being convenient for.

Furthermore, the top of the cover plate sinking plate 8 is provided with a plurality of transverse reinforcing ribs 18 and longitudinal reinforcing ribs 19 in the enclosing plate 9, and the longitudinal reinforcing ribs 19 are fixedly sleeved on the top of the transverse reinforcing ribs 18, so that the strength of the enclosing plate 9 is improved, and the rigidity requirement of the vacuum cavity can be met.

The working principle is as follows: when the device is used, the bottom plate 1, the side plates 2, the cover plate 5, the cover plate sinking plate 8, the surrounding plate 9, the double sealing grooves 16 and the like are assembled together to form a vacuum cavity, when the vacuum cavity is inflated, high-pressure gas firstly enters the deflation baffle 6 through the quick deflation gas inlet 10 and the soft deflation gas inlet 11, airflow is buffered at the bottom of the deflation baffle 6 and then dispersed into the vacuum cavity from the exhaust holes 7 at two sides, the substrate is prevented from being blown or broken by directly inflating into the cavity, small airflow is inflated into the vacuum cavity through the soft deflation gas inlet 11, and atmospheric airflow is inflated into the vacuum cavity through the quick deflation gas inlet 10, so that the inflation gas is prevented from flowing through the large blowing substrate; when the vacuum cavity is exhausted, air is exhausted through the air exhaust ports 4, and the air exhaust ports 4 are multiple, so that air can be exhausted simultaneously, and the air exhaust efficiency is improved; according to the utility model, the cover plate 5 in the vacuum cavity is installed in a sinking manner, so that the volume of the vacuum cavity can be reduced, the vacuumizing time is saved, and the production efficiency is improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A sunken vacuum cavity is characterized by comprising a bottom plate (1), wherein side plates (2) are fixedly connected to the tops of the edges of the bottom plate (1), edge plates (3) are arranged at the top ends of the side plates (2), an air suction opening (4) and a support arm (12) are arranged on the side plate (2) on the left side, a cover plate (5) is sunken in a cavity enclosed by the four side plates (2), air discharge baffles (6) are arranged on two sides of the bottom of the cover plate (5), and air discharge holes (7) are arranged on two sides of each air discharge baffle (6); a cover plate sinking plate (8) is fixedly connected to the top of the cover plate (5), and the bottom of the cover plate sinking plate (8) is arranged on the top of the edge plate (3); the top of the cover plate sinking plate (8) is fixedly connected with a coaming (9) in a shape like a Chinese character kou, and the tops of the two sides of the cover plate sinking plate (8) and the inside of the coaming (9) are respectively provided with a quick air discharging air inlet (10) and a soft air discharging air inlet (11); a cover plate overturning arm (20) is fixedly connected to the top of the cover plate sinking plate (8), and one end of the cover plate overturning arm (20) extends to the outside of the enclosing plate (9) and is movably connected with the supporting arm (12); the outer sides of the side plates (2) positioned at the two ends of the bottom plate (1) are fixedly connected with end plates (13), a plurality of fixing holes (14) are formed in the corresponding positions of the surrounding plates (9) on the end plates (13), and fastening bolts (15) are movably arranged in the fixing holes (14).

2. A submerged vacuum chamber according to claim 1, wherein: the air bleeding baffle (6) is of a U-shaped structure, and the bottom ends of the quick air bleeding air inlet (10) and the soft air bleeding air inlet (11) are communicated with the inside of the air bleeding baffle (6).

3. The submerged vacuum chamber of claim 1, wherein: both ends of one side of the coaming (9) far away from the supporting arm (12) are hinged with the end plate (13).

4. A submerged vacuum chamber according to claim 1, wherein: two seal grooves (16) have been seted up to the bottom of apron sunken board (8), and two seal grooves (16) correspond the setting with edge oral plate (3), and all are equipped with the sealing washer in two seal grooves (16), and the notch of sealing washer protrusion in two seal grooves (16).

5. The submerged vacuum chamber of claim 1, wherein: connecting holes (17) are formed in the corresponding positions of the outer side wall of the enclosing plate (9) and the fixing holes (14), and the connecting holes (17) are connected with the head ends of the fastening bolts (15).

6. The submerged vacuum chamber of claim 1, wherein: the top of the cover plate sinking plate (8) is provided with a plurality of transverse reinforcing ribs (18) and longitudinal reinforcing ribs (19) in the enclosing plate (9), and the longitudinal reinforcing ribs (19) are fixedly sleeved on the tops of the transverse reinforcing ribs (18).