CN217003295U

CN217003295U - Valve cover with sealing structure for single crystal furnace

Info

Publication number: CN217003295U
Application number: CN202122896459.2U
Authority: CN
Inventors: 郭克成; 苏志强; 田留生
Original assignee: Tianjin Leige Shengtong Vacuum Equipment Manufacturing Co ltd
Current assignee: Tianjin Leige Shengtong Vacuum Equipment Manufacturing Co ltd
Priority date: 2021-11-24
Filing date: 2021-11-24
Publication date: 2022-07-19
Anticipated expiration: 2031-11-24

Abstract

The utility model relates to the field of valve cover sealing of single crystal furnaces, in particular to a valve cover with a sealing structure for a single crystal furnace, which comprises a main furnace body and an auxiliary furnace body, wherein the top end of the main furnace body is provided with the valve cover, the bottom end of the valve cover is connected with a pressing peripheral frame in a sliding way, the pressing peripheral frame is connected with the main furnace body in a sliding way, the top end of the valve cover is fixedly connected with an air valve, and the inner side of the air valve is connected with an air valve post in a sliding way. The joint of the main furnace body and the valve cover is completely sealed inside and outside, and the sealing effect is improved.

Description

Valve cover with sealing structure for single crystal furnace

Technical Field

The utility model relates to the field of valve cover sealing of single crystal furnaces, in particular to a valve cover with a sealing structure for a single crystal furnace.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method, and mainly comprises parts such as a magnetic fluid, a motor, a crucible supporting shaft, a speed reducer, a flexible corrugated pipe, an upright post, an upper transmission supporting frame, a lower transmission supporting frame, a guide rail and the like, wherein the temperature mainly determines whether the crystals can be formed, the speed directly influences the inherent quality of the crystals, and the influence can only be known by detection after the single crystals are pulled out.

The sealing structure of the valve cover of the existing single crystal furnace is completely arranged inside the main furnace body and the valve cover, the sealing structure is only single-layer sealing, the joint of the valve cover and the main furnace body cannot be sealed in a totally-closed mode, the sealing effect of the valve cover is not strong, the air valve of the valve cover does not have a protection structure, and when the air pressure inside the main furnace body is too high, once the opening speed of the air valve of the valve cover is too high, the air valve cover is easy to pop out, and the damage to operators is caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a valve cover with a sealing structure for a single crystal furnace, which aims to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme:

the valve cover with the sealing structure for the single crystal furnace comprises a main furnace body and an auxiliary furnace body, wherein the top end of the main furnace body is provided with the valve cover, the bottom end of the valve cover is connected with a pressing peripheral frame in a sliding mode, the pressing peripheral frame is connected with the main furnace body in a sliding mode, the top end of the valve cover is fixedly connected with an air valve, and the inner side of the air valve is connected with an air valve column in a sliding mode.

Preferably, the top end of the pressing peripheral frame is fixedly connected with a first spring, the other end of the first spring is fixedly connected with a connecting ring, the bottom end of the connecting ring is fixedly connected with a sealing inner cylinder, and the sealing inner cylinder is in sliding connection with the main furnace body and the pressing peripheral frame.

Preferably, a clamping groove is formed in the outer side of the connecting ring, a clamping block is connected to the inner side of the clamping groove in a sliding mode, an air-tight ring is fixedly connected to the top end of the clamping block and is connected with the valve cover and the connecting ring in a sliding mode, a positioning head is fixedly connected to the top end of the connecting ring and is connected with the air-tight ring in a sliding mode.

Preferably, the bottom end of the air valve column is fixedly connected with a second spring, the other end of the second spring is fixedly connected with a fixing ring, the fixing ring is fixedly connected with the air valve, the top end of the air valve column is fixedly connected with a sealing seat, the air valve column is arranged in a hollow shape, and an air vent is formed in the outer side of the air valve column.

Preferably, the top sliding connection of seal receptacle has the gland, the outside of gland rotates and is connected with the spacing ring, the outside fixedly connected with third spring of spacing ring, and third spring and valve gap fixed connection.

Compared with the prior art, the utility model has the beneficial effects that:

1. according to the utility model, through the arrangement of the pressing peripheral frame, the connecting ring, the sealing inner cylinder and the air-closing ring, the arrangement is matched with the sliding connection between the pressing peripheral frame and the main furnace body, the fixed connection between the connecting ring and the sealing inner cylinder and the sliding connection between the air-closing ring and the connecting ring, the clamping block at the bottom end of the air-closing ring is clamped in the clamping groove of the connecting ring, the connecting ring and the sealing inner cylinder are placed in the main furnace body and the valve cover, the pressing peripheral frame is clamped at the outer side of the main furnace body, and the valve cover is closed, so that the connection part between the main furnace body and the valve cover is completely sealed inside and outside, and the sealing effect is improved;

2. according to the utility model, through the arrangement of the air valve, the air valve column, the second spring and the third spring, the arrangement is matched with the sliding connection between the air valve and the air valve column, the fixed connection between the second spring and the fixed ring and the fixed connection between the third spring and the limiting ring, the air valve column is inserted into the air valve, when the gland is opened, the second spring on the fixed ring pulls the air valve column, the impact force of air pressure is reduced through the air valve column, and the third spring on the limiting ring outside the gland is matched to be connected to the valve cover, so that the harm to workers caused by the ejection of the gland is avoided.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the mounting structure of the press-fit peripheral frame of the present invention;

FIG. 3 is a schematic view of the structure of FIG. 1 at point A according to the present invention;

fig. 4 is a schematic view of the mounting structure of the gas valve of the present invention.

In the figure: 1-main furnace body, 2-auxiliary furnace body, 3-valve cover, 4-pressing peripheral frame, 5-first spring, 6-connecting ring, 7-sealing inner cylinder, 8-clamping groove, 9-positioning head, 10-air-closing ring, 11-clamping block, 12-air valve, 13-air valve column, 14-second spring, 15-fixing ring, 16-air hole, 17-sealing seat, 18-pressing cover, 19-limiting ring and 20-third spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution:

the utility model provides a valve gap that single crystal growing furnace used has seal structure, including main furnace body 1 and vice furnace body 2, the top of main furnace body 1 is provided with valve gap 3, the bottom sliding connection of valve gap 3 has pressfitting peripheral frame 4, and pressfitting peripheral frame 4 and main furnace body 1 sliding connection, be favorable to pressfitting peripheral frame 4 to cup joint and seal in the outside of main furnace body 1, the top fixedly connected with pneumatic valve 12 of valve gap 3, the inboard sliding connection of pneumatic valve 12 has pneumatic valve post 13, pneumatic valve post 13 is located the inside of pneumatic valve 12, slow down the impact force of atmospheric pressure to pneumatic valve 12.

The top end of the pressing peripheral frame 4 is fixedly connected with a first spring 5, the other end of the first spring 5 is fixedly connected with a connecting ring 6, the bottom end of the connecting ring 6 is fixedly connected with a sealing inner cylinder 7, the sealing inner cylinder 7 is in sliding connection with the main furnace body 1 and the pressing peripheral frame 4, the pressing peripheral frame 4 and the sealing inner cylinder 7 are respectively positioned at the outer side and the inner side of the main furnace body 1, the sealing effect is enhanced, the pressing peripheral frame 4 extrudes the first spring 5 at the top end to be compressed and deformed, and the outer side of the main furnace body 1 rises below the connecting ring 6, so that the sealing effect at the connecting part of the main furnace body 1 and the valve cover 3 is enhanced; the outer side of the connecting ring 6 is provided with a clamping groove 8, the inner side of the clamping groove 8 is connected with a clamping block 11 in a sliding manner, the top end of the clamping block 11 is fixedly connected with an air-tight ring 10, the air-tight ring 10 is connected with the valve cover 3 and the connecting ring 6 in a sliding manner, the top end of the connecting ring 6 is fixedly connected with a positioning head 9, the positioning head 9 is connected with the air-tight ring 10 in a sliding manner, the clamping block 11 at the bottom end of the air-tight ring 10 is positioned in the clamping groove 8 of the connecting ring 6, the positioning head 9 is matched to be positioned in the air-tight ring 10 to enhance the positioning effect, and the air-tight ring 10 is directly attached to the valve cover 3 for sealing, so that the air-tight ring 10 can be conveniently mounted or dismounted and cleaned; the bottom end of the air valve column 13 is fixedly connected with a second spring 14, the other end of the second spring 14 is fixedly connected with a fixing ring 15, the fixing ring 15 is fixedly connected with the air valve 12, the top end of the air valve column 13 is fixedly connected with a sealing seat 17, the air valve column 13 is arranged in a hollow shape, the outer side of the air valve column 13 is provided with an air vent 16, the air valve column 13 is connected to the fixing ring 15 in the air valve 12 through the second spring 14, the air valve column 13 is discharged through the hollow arrangement of the air valve column 13 during air bleeding and is discharged through the air vent 16, so that the air valve column 13 is conveniently connected through the second spring 14, the air valve column 13 is pulled to be positioned in the air valve 12, and the phenomenon that the air valve column pops up and damages operators is avoided; the top sliding connection of seal receptacle 17 has gland 18, the outside of gland 18 is rotated and is connected with spacing ring 19, the outside fixedly connected with third spring 20 of spacing ring 19, and third spring 20 and valve gap 3 fixed connection, be connected to the third spring 20 on the spacing ring 19 in the gland 18 outside and advance line location on the valve gap 3, when rotating gland 18 and extracting, gas valve post 13 pops out gland 18, third spring 20 connects 19 location glands 18 of spacing ring, avoid gland 18 to pop out, be convenient for strengthen the connection to gland 18.

The working process is as follows: the device is an external power supply, an operator sleeves a pressing peripheral frame 4 at the outer side of the top end of a main furnace body 1, a sealing inner cylinder 7 is inserted into the inner side of the main furnace body 1, a clamping block 11 at the bottom end of a gas-closing ring 10 is clamped in a clamping groove 8 at the outer side of a connecting ring 6, the gas-closing ring 10 is clamped in a positioning head 9, the connection of the gas-closing ring 10 and the connecting ring 6 is enhanced, a valve cover 3 is taken out to cover on the connecting ring 6, the valve cover 3 is pressed downwards, the connecting ring 6 pushes the connecting ring 6 downwards to enter the main furnace body 1 through the gas-closing ring 10, the sealing inner cylinder 7 is pressed into the main furnace body 1 through the connecting ring 6, the connecting ring 6 extrudes a first spring 5 at the bottom end to be compressed and deformed, the pressing peripheral frame 4 is moved to the lower part of the connecting ring 6 and the valve cover 3, the sealing effect at the connecting part of the main furnace body 1 and the valve cover 3 is enhanced, in the process of using the main furnace body 1 and an auxiliary furnace body 2, when the internal air pressure is overhigh, the operator rotates a pressing cover 18 on the main furnace body 12, when gland 18 rotates and breaks away from pneumatic valve 12, the inside atmospheric pressure of main furnace body 1 promotes pneumatic valve post 13 and bounces, pneumatic valve post 13 sets up through the cavity and looses out with air vent 16, second spring 14 connects solid fixed ring 15 and pneumatic valve post 13, gland 18 is connected through spacing ring 19 to third spring 20, avoid atmospheric pressure too big, directly pop out gland 18, injury operating personnel, the back is accomplished in the gassing, impress pneumatic valve post 13 in pneumatic valve 12, rotate gland 18, promote the seal receptacle 17 card on pneumatic valve post 13 top at the top of pneumatic valve 12, strengthen sealedly, prevent losing breath.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a valve gap with seal structure for single crystal growing furnace, includes main furnace body (1) and auxiliary furnace body (2), its characterized in that: the top of main furnace body (1) is provided with valve gap (3), the bottom sliding connection of valve gap (3) has pressfitting outer surrounding frame (4), and pressfitting outer surrounding frame (4) and main furnace body (1) sliding connection, the top fixedly connected with pneumatic valve (12) of valve gap (3), the inboard sliding connection of pneumatic valve (12) has pneumatic valve post (13).

2. The valve cover with the sealing structure for the single crystal furnace according to claim 1, wherein: the top fixedly connected with first spring (5) of pressfitting peripheral frame (4), the other end fixedly connected with go-between (6) of first spring (5), the sealed inner tube (7) of bottom fixedly connected with of go-between (6), and sealed inner tube (7) and main furnace body (1) and pressfitting peripheral frame (4) sliding connection.

3. The valve cover with the sealing structure for the single crystal furnace according to claim 2, wherein: the gas valve is characterized in that a clamping groove (8) is formed in the outer side of the connecting ring (6), a clamping block (11) is connected to the inner side of the clamping groove (8) in a sliding mode, a gas-tight ring (10) is fixedly connected to the top end of the clamping block (11), the gas-tight ring (10) is connected with the valve cover (3) and the connecting ring (6) in a sliding mode, a positioning head (9) is fixedly connected to the top end of the connecting ring (6), and the positioning head (9) is connected with the gas-tight ring (10) in a sliding mode.

4. The valve cover with the sealing structure for the single crystal furnace according to claim 1, wherein: the bottom fixedly connected with second spring (14) of air valve post (13), the other end fixedly connected with of second spring (14) is fixed ring (15), and fixed ring (15) and pneumatic valve (12) fixed connection, the top fixedly connected with seal receptacle (17) of air valve post (13), air valve post (13) are the setting of cavity form, air vent (16) have been seted up in the outside of air valve post (13).

5. The valve cover with the sealing structure for the single crystal furnace according to claim 4, wherein: the top sliding connection of seal receptacle (17) has gland (18), the outside of gland (18) is rotated and is connected with spacing ring (19), the outside fixedly connected with third spring (20) of spacing ring (19), and third spring (20) and valve gap (3) fixed connection.