CN216947280U

CN216947280U - Inner pipe double-side welding single crystal furnace auxiliary furnace chamber

Info

Publication number: CN216947280U
Application number: CN202123349652.0U
Authority: CN
Inventors: 汪书文; 高典; 高文柱
Original assignee: Jiaxing Kunbo New Energy Equipment Manufacturing Co ltd
Current assignee: Jiaxing Kunbo New Energy Equipment Manufacturing Co ltd
Priority date: 2021-12-28
Filing date: 2021-12-28
Publication date: 2022-07-12
Anticipated expiration: 2031-12-28

Abstract

The utility model discloses an inner tube double-side welding single crystal furnace auxiliary furnace chamber, which relates to the technical field of single crystal furnace auxiliary furnace chambers, is inconvenient to install in single crystal furnaces in the current market, mostly adopts manual rotation single crystal furnaces, and comprises a base, wherein an outer tube is rotatably installed on the upper surface of the base, an inner tube is slidably installed inside the outer tube, inner clamping blocks are welded on the front side and the rear side of the inner tube, clamping grooves matched with the inner clamping blocks are formed in the front side and the rear side of the inner tube, the inner clamping blocks are slidably clamped inside the clamping grooves, and positioning grooves are formed in the front surfaces of two ends of each inner clamping block. This vice furnace chamber of inner tube double-sided welding single crystal growing furnace through setting up interior fixture block and outer fixture block, can be quick give quick equipment with inner tube and outer tube, replaces traditional flange mounting's mode, has improved the leakproofness and the connection stability of contact surface between inner tube and the outer tube, improves the practicality of this vice furnace chamber of single crystal growing furnace.

Description

Auxiliary furnace chamber of single crystal furnace with two-sided welding inner pipe

Technical Field

The utility model relates to the technical field of auxiliary furnace chambers of single crystal furnaces, in particular to an auxiliary furnace chamber of a single crystal furnace with an inner tube welded on two sides.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method.

The single crystal furnace on the market, inner tube and upper flange, lower flange full weld inside and outside respectively, because the internal diameter of upper and lower flange external diameter will be big than the internal diameter of outer tube, the outer tube can't be directly overlap and use, can only borrow the frock to push open the outer tube, make the outer tube internal diameter be greater than the external diameter of flange, then overlap into, because will borrow the frock to push open the outer tube, make the outer tube internal diameter be greater than the external diameter of flange, then overlap into, it enters to use the frock cover, the time is more wasted to operate the frock, efficiency is lower, simultaneously add the rotatory manual operation that mostly adopts of single crystal furnace auxiliary furnace room on the market during processing, there is work efficiency low, there is the problem of potential safety hazard.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model provides an auxiliary furnace chamber of a single crystal furnace with an inner tube welded on two sides, which solves the problems that the single crystal furnace in the market is inconvenient to install and most of the single crystal furnaces are manually rotated.

In order to achieve the purpose, the utility model is realized by the following technical scheme: the utility model provides an inner tube double-sided welding single crystal growing furnace auxiliary furnace room, includes the base, the upper surface of base rotates installs the outer tube, the inside slidable mounting of outer tube has the inner tube, fixture block in all welding of the front and back side of inner tube, the joint groove with interior fixture block looks adaptation is all seted up to the inside front and back side of outer tube, interior fixture block slip joint is in the inside in joint groove, the constant head tank has all been seted up to the both ends front surface of interior fixture block, the slot corresponding with the constant head tank is all seted up to the upper and lower below front and back side of outer tube, slidable mounting is run through to the inside of slot has outer fixture block, one side position department that the upper surface of base is located the outer tube is provided with the rotating member.

Preferably, the one end joint of outer fixture block is in the inside of constant head tank, and after the joint, outer fixture block welds in the outer wall of outer tube.

Preferably, the outer diameter of the inner tube is equal to the inner diameter of the outer tube.

Preferably, the rotating part comprises a main gear rotatably connected to the upper surface of the base, a driving motor is arranged on the upper surface of the main gear, a gear sleeve is meshed with one side of the main gear, and the gear sleeve is sleeved on the outer surface of the lower side of the outer tube.

Preferably, the drive motor is controlled to work by a PLC controller.

Preferably, the lower side of the driving motor is connected with supporting rods at the front and rear positions of the output shaft of the driving motor, and the lower ends of the supporting rods are fixedly mounted on the upper surface of the base through bolts.

Advantageous effects

The utility model provides an auxiliary furnace chamber of a single crystal furnace with two sides welded by an inner pipe, which has the following beneficial effects compared with the prior art:

1. this vice furnace chamber of inner tube double-sided welding single crystal growing furnace through setting up interior fixture block and outer fixture block, can be quick give quick equipment with inner tube and outer tube, replaces traditional flange mounting's mode, has improved the leakproofness and the connection stability of contact surface between inner tube and the outer tube, improves the practicality of this vice furnace chamber of single crystal growing furnace.

2. This inner tube double-sided welding single crystal growing furnace auxiliary furnace room through setting up the rotating member, adopts electric control, realizes auxiliary furnace room autogiration action, has realized automated operation, has solved to have single crystal growing furnace auxiliary furnace room rotatory to adopt artifical manually operation more among the prior art, and work efficiency is lower and have the problem of potential safety hazard.

Drawings

FIG. 1 is a schematic view of the structure of the present invention;

FIG. 2 is a schematic view of the inner tubular structure of the present invention;

FIG. 3 is a schematic view of the structure of the rotary member of the present invention.

In the figure: 1. a base; 2. an outer tube; 3. an inner tube; 4. an inner clamping block; 5. a clamping groove; 6. positioning a groove; 7. a slot; 8. an outer clamping block; 9. a rotating member; 91. a main gear; 92. a drive motor; 93. a gear sleeve; 94. a support rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-2, the utility model provides a technical scheme, an inner tube double-side welding single crystal furnace auxiliary furnace chamber comprises a base 1, an outer tube 2 is rotatably installed on the upper surface of the base 1, an inner tube 3 is slidably installed inside the outer tube 2, inner clamping blocks 4 are welded on the front side and the rear side of the inner tube 3, clamping grooves 5 matched with the inner clamping blocks 4 are formed in the front side and the rear side of the inside of the outer tube 2, the inner clamping blocks 4 are slidably clamped inside the clamping grooves 5, positioning grooves 6 are formed in the front surfaces of the two ends of the inner clamping blocks 4, inserting grooves 7 corresponding to the positioning grooves 6 are formed in the front side and the rear side of the upper part and the lower part of the outer tube 2, outer clamping blocks 8 are slidably installed inside the inserting grooves 7, a rotating piece 9 is arranged at the position, on one side of the outer tube 2, one end of each outer clamping block 8 is clamped inside the positioning groove 6, and after clamping, the outer clamping blocks 8 are welded on the outer wall of the outer tube 2, the outer diameter of the inner tube 3 is equal to the inner diameter of the outer tube 2.

Referring to fig. 3, in the embodiment of the present invention, the rotating member 9 includes a main gear 91 rotatably connected to the upper surface of the base 1, a driving motor 92 is disposed on the upper surface of the main gear 91, a gear sleeve 93 is engaged with one side of the main gear 91, the gear sleeve 93 is sleeved on the outer surface of the lower side of the outer tube 2, the driving motor 92 is controlled by a PLC controller to operate, the driving motor 92 is CH/V, support rods 94 are connected to the lower side of the driving motor 92 at positions on the front and rear sides of the output shaft, the lower ends of the support rods 94 are fixedly mounted on the upper surface of the base 1 through bolts, and the support rods 94 support the driving motor 92 stably.

And those not described in detail in this specification are well within the skill of those in the art.

The working principle is as follows: connect the joint of interior fixture block 4 on the inner tube 3 to the joint groove 5 of 2 inner walls of outer tube, and make two constant head tanks 6 on the interior fixture block 4 align with slot 7 on the outer tube 2, after aligning will outer fixture block 8 pass slot 7 inside and joint to constant head tank 6, later with outer fixture block 8 weld to the outer wall of outer tube 2 on, the equipment work has been accomplished, furthermore, at the during operation, make PLC controller control driving motor 92 work, driving motor 92 drives master gear 91 and rotates, master gear 91 drives and rotates rather than the geared sleeve 93 of meshing, geared sleeve 93 drives outer tube 2 and rotates, outer tube 2 will drive inner tube 3 and rotate, and then accomplish the autogiration work.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Claims

1. The utility model provides a two-sided welding single crystal growing furnace auxiliary furnace room of inner tube, includes base (1), outer tube (2) are installed in the last surface rotation of base (1), the inside slidable mounting of outer tube (2) has inner tube (3), its characterized in that: inner fixture blocks (4) are welded to the front side and the rear side of the inner pipe (3), the joint grooves (5) matched with the inner fixture blocks (4) are formed in the front side and the rear side of the inner part of the outer pipe (2), the inner fixture blocks (4) are slidably connected in the joint grooves (5), the positioning grooves (6) are formed in the front surfaces of the two ends of the inner fixture blocks (4), the slots (7) corresponding to the positioning grooves (6) are formed in the front surfaces and the rear sides of the upper portion and the lower portion of the outer pipe (2), the outer fixture blocks (8) are slidably installed in the inner portion of the slots (7) in a penetrating mode, and the rotating piece (9) is arranged at one side position, located on the outer pipe (2), of the upper surface of the base (1).

2. The secondary furnace chamber of the inner tube double-sided welding single crystal furnace as claimed in claim 1, characterized in that: one end of the outer clamping block (8) is clamped inside the positioning groove (6), and after clamping, the outer clamping block (8) is welded on the outer wall of the outer pipe (2).

3. The secondary furnace chamber of the inner tube double-sided welding single crystal furnace as claimed in claim 1, characterized in that: the outer diameter of the inner tube (3) is equal to the inner diameter of the outer tube (2).

4. The secondary furnace chamber of the inner tube double-sided welding single crystal furnace as claimed in claim 1, characterized in that: the rotating part (9) comprises a main gear (91) which is rotatably connected to the upper surface of the base (1), a driving motor (92) is arranged on the upper surface of the main gear (91), a gear sleeve (93) is meshed with one side of the main gear (91), and the gear sleeve (93) is sleeved on the outer surface of the lower side of the outer pipe (2).

5. The inner tube double-sided welding single crystal furnace auxiliary furnace chamber of claim 4, characterized in that: the drive motor (92) controls the operation thereof through a PLC controller.

6. The inner tube double-sided welding single crystal furnace auxiliary furnace chamber of claim 4, characterized in that: the lower side of the driving motor (92) is located at the front side and the rear side of an output shaft of the driving motor and is connected with a supporting rod (94), and the lower end of the supporting rod (94) is fixedly installed on the upper surface of the base (1) through a bolt.