CN216946788U - Carbon crucible pot with coating - Google Patents

Carbon crucible pot with coating Download PDF

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Publication number
CN216946788U
CN216946788U CN202122435235.1U CN202122435235U CN216946788U CN 216946788 U CN216946788 U CN 216946788U CN 202122435235 U CN202122435235 U CN 202122435235U CN 216946788 U CN216946788 U CN 216946788U
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China
Prior art keywords
coating
carbon
crucible
crucible side
composite
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CN202122435235.1U
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Chinese (zh)
Inventor
胡友军
容青城
郭建军
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Hunan Yuxing Carbon Co ltd
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Hunan Yuxing Carbon Co ltd
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Abstract

The utility model provides a carbon crucible side with coating, includes crucible side body and wraps up the composite coating on crucible side surface, and crucible side body is the circular bowl bodily form structure of bottomless, and composite coating includes adhesion layer, multilayer nanometer coating and the reinforced protective coating of from interior to exterior spraying, and the adhesion layer is the chromium nitride coating, and the nanometer coating is the multilayer coating of nanometer carborundum coating and the alternate deposit of silicon nitride coating, and reinforced protective coating is the titanium aluminium nitride coating. According to the utility model, the surface is added with the composite coating to realize the hole sealing treatment of the crucible side surface layer, so that the crucible side surface layer has better air tightness, and can seal low-temperature unsintered impurities stored in the carbon-carbon composite material, thereby reducing the diffusion of the impurities and improving the use quality of customers, and the application of the high-compactness and wear-resistant material can effectively isolate the corrosion of silicon compounds in the single crystal furnace and reduce the adhesion of silicon steam, thereby improving the corrosion resistance of the carbon-carbon crucible side body and prolonging the service life of the carbon-carbon crucible side.

Description

Carbon crucible pot with coating
Technical Field
The utility model relates to the technical field of single crystal furnace accessories, in particular to a carbon crucible with a coating.
Background
Carbon crucible nation plays the effect of supporting carbon crucible in the single crystal growing furnace, in carbon composite's production process, need be in high temperature low pressure state with the single crystal growing furnace always, and long-time high temperature low pressure, then oxide and silicon steam erosion carbon fiber make carbon crucible nation porcelainizing intensity reduce in can making the single crystal growing furnace, be intolerant to strike, again because carbon crucible hole is great, the inflation silicon steam that is heated gets into and piles up, thereby will prevent the carbon fiber shrink and lead to the crucible to prop the fracture after the cooling, and because the limitation of the crucible nation intensity of current crucible, make the crucible nation corrode very easily, lead to intensity not enough, very easy harm, and then the cost has been increased.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects of the prior art and provide a carbon crucible pot with a coating, which is corrosion-resistant, high-temperature resistant in a low-pressure environment and long in service life.
The utility model is realized by the following technical scheme: the utility model provides a carbon crucible bang with coating, includes crucible bang body and wraps up the composite coating on crucible bang surface, crucible bang body is the round bowl bodily form structure of bottomless, composite coating includes from interior and outer spray coating's adhesion layer, nanometer coating and intensive protective coating, the adhesion layer is the chromium nitride coating, the nanometer coating is nanometer carborundum coating and the sedimentary multilayer coating in turn of silicon nitride coating, it is titanium aluminium nitride coating to strengthen protective coating.
In order to enhance the corrosion resistance and the high temperature resistance of the coating, the total number of the layers of the nano coating is 6-14.
Further, the total thickness of the composite coating is 2.5-4 μm.
Further, the thickness of the adhesion layer is 5% -10% of the composite coating.
Further, the thickness of the nano coating is 80% -90% of that of the composite coating.
Further, the thickness of the reinforced protective coating is 5% -10% of that of the composite coating.
Further, the crucible body is made of carbon-carbon material.
The utility model has the beneficial effects that: utilize the surface to increase composite coating, realize the hole sealing treatment on crucible bang top layer for crucible bang top layer gas tightness is better, can seal the not sintered impurity of low temperature of carbon-carbon composite memory, thereby reduce the diffusion of this type of impurity, improve customer's use quality, and its high compactness and wearability material's application can effectively keep apart the interior silica compound erosion of single crystal furnace and reduce silicon steam and adhere to, thereby promote the corrosion resistance of carbon crucible bang body, improve carbon crucible bang's life.
Drawings
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a schematic structural view of a composite coating of the present invention;
FIG. 3 is a schematic structural view of a nanocoating of the composite coating of the present invention;
in the figure: 1. the crucible comprises a crucible body, 2, an adhesion layer, 3, a nano coating, 4, a reinforced protective coating, 31, a silicon carbide coating and 32, a silicon nitride coating.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the utility model more readily understood by those skilled in the art, and thus will more clearly and distinctly define the scope of the utility model.
As shown in fig. 1-3, a carbon-carbon crucible pot with a coating comprises a crucible pot body 1 and a composite coating wrapped on the surface of the crucible pot, wherein the crucible pot body 1 is made of a carbon material and is of a bottomless circular bowl-shaped structure, the total thickness of the composite coating is 2.5-4 μm, the composite coating comprises an adhesion layer 2, a nano coating 3 and a reinforced protective coating 4 which are sequentially sprayed from inside to outside, the adhesion layer 2 is a chromium nitride coating, the thickness of the adhesion layer is 5-10% of the total thickness of the composite coating, the nano coating 3 is a multilayer coating alternately deposited by a nano silicon carbide coating 31 and a silicon nitride coating 32, the total number of the nano coating 3 is 6-14, the thickness of the nano coating is 80-90% of the total thickness of the composite coating, the reinforced protective coating 4 is a titanium aluminum nitride coating, and the thickness of the nano coating is 5-10% of the total thickness of the composite coating, the titanium aluminum nitride coating is adopted, so that the crucible bonding strength is strengthened, and the production requirement is met.
Further, the thickness of composite coating has decided the performance on crucible bang surface, adjusts composite coating's thickness according to the thickness of actual crucible bang, and then ensures the corrosion-resistant, the high temperature resistant and life performance of low pressure environment of crucible bang.
The above-mentioned embodiments only express the embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the utility model, and these changes and modifications are all within the scope of the utility model.

Claims (7)

1. A carbon crucible pot with a coating is characterized in that: body (1), parcel are in including crucible nation body (1) internal surface and the composite coating of surface, composite coating includes the follow adhesion layer (2), nanometer coating (3) that body (1) surface set gradually and reinforce protective coating (4) are banned to the crucible, adhesion layer (2) are the chromium nitride coating, nanometer coating (3) are the coating of nanometer carborundum coating (31) and silicon nitride coating (32) alternate deposition, it is titanium aluminium nitride coating to reinforce protective coating (4).
2. The coated carbon crucible pot of claim 1, wherein: the crucible side body (1) is made of carbon material, and the crucible side body (1) is of a bottomless circular bowl-shaped structure.
3. The coated carbon crucible pot of claim 1, wherein: the total number of the nano coating (3) is 6-14.
4. The coated carbon crucible pot of claim 1, wherein: the total thickness of the composite coating is 2.5-4 μm.
5. The coated carbon crucible pot of claim 1, wherein: the thickness of the adhesion layer (2) is 5% -10% of the composite coating.
6. The coated carbon crucible pot of claim 1, wherein: the thickness of the multilayer nano coating (3) is 80-90% of that of the composite coating.
7. The coated carbon crucible pot of claim 1, wherein: the thickness of the reinforced protective coating (4) is 5% -10% of that of the composite coating.
CN202122435235.1U 2021-10-09 2021-10-09 Carbon crucible pot with coating Active CN216946788U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122435235.1U CN216946788U (en) 2021-10-09 2021-10-09 Carbon crucible pot with coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122435235.1U CN216946788U (en) 2021-10-09 2021-10-09 Carbon crucible pot with coating

Publications (1)

Publication Number Publication Date
CN216946788U true CN216946788U (en) 2022-07-12

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122435235.1U Active CN216946788U (en) 2021-10-09 2021-10-09 Carbon crucible pot with coating

Country Status (1)

Country Link
CN (1) CN216946788U (en)

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