CN216940043U

CN216940043U - Mechanical arm for single-side polishing machine and single-side polishing machine with mechanical arm

Info

Publication number: CN216940043U
Application number: CN202220087373.7U
Authority: CN
Inventors: 邵晓东
Original assignee: Xuzhou Xinjing Semiconductor Technology Co Ltd
Current assignee: Zhonghuan Leading Semiconductor Technology Co ltd; Zhonghuan Leading Xuzhou Semiconductor Materials Co ltd
Priority date: 2022-01-13
Filing date: 2022-01-13
Publication date: 2022-07-12
Anticipated expiration: 2032-01-13

Abstract

The utility model discloses a mechanical arm for a single-side polishing machine and the single-side polishing machine with the mechanical arm, comprising: the base is arranged on a machine table of the single-side polishing machine; the bottom of the machine arm shell is rotatably connected with the machine base, a polishing head is arranged at one end, far away from the machine base, of the machine arm shell, a connecting rod is arranged in the machine arm shell, and one end of the connecting rod is rotatably connected with the machine arm shell; the cylinder part comprises a cylinder body and a push rod, the push rod is telescopically arranged in the cylinder body, the lower end of the cylinder body is rotatably connected with the base, and the free end of the push rod is connected with the other end of the connecting rod through threads; the nut, the nut links to each other and is suitable for and the cooperation of connecting rod backstop with the periphery wall screw thread of push rod, and one side lateral wall of horn shell is equipped with the access hole, and the access hole sets up with the nut relatively. According to the mechanical arm for the single-side polishing machine, pressure correction can be performed on the polishing head without a special tool, operation is convenient, and the polishing quality of wafers is guaranteed.

Description

Mechanical arm for single-side polishing machine and single-side polishing machine with mechanical arm

Technical Field

The utility model relates to the field of polishing, in particular to a mechanical arm for a single-side polishing machine and the single-side polishing machine with the mechanical arm.

Background

The single-side polishing machine is used for a polishing procedure in a polishing process, and a mechanical arm of the single-side polishing machine is respectively provided with: a rough polishing mechanical arm, a middle polishing mechanical arm and a fine polishing mechanical arm. In the related art, when the robot is maintained, a special tool is required to perform pressure calibration on the polishing head on the robot, which is inconvenient to operate, and is likely to cause inaccurate pressure calibration, thereby affecting the polishing quality of the wafer.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides the mechanical arm for the single-side polishing machine, which can correct the pressure of the polishing head without a special tool, is convenient to operate and is beneficial to ensuring the polishing quality of the wafer.

The utility model also provides a single-side polishing machine with the mechanical arm.

According to the embodiment of the utility model, the mechanical arm for the single-sided polishing machine comprises: the base is arranged on a machine table of the single-side polishing machine; the bottom of the machine arm shell is rotatably connected with the machine base, a polishing head is arranged at one end, far away from the machine base, of the machine arm shell, an installation cavity is formed in the machine arm shell, a connecting rod is arranged in the installation cavity, and one end of the connecting rod is rotatably connected with the machine arm shell; the air cylinder piece comprises a cylinder body and a push rod, the push rod is telescopically arranged in the cylinder body, the lower end of the cylinder body is rotatably connected with the base, and the free end of the push rod is connected with the other end of the connecting rod through threads; the nut, the nut with the periphery wall screw thread of push rod link to each other and be suitable for with the cooperation of connecting rod backstop, one side lateral wall of horn shell is equipped with the access hole, the access hole with the nut sets up relatively.

According to the mechanical arm for the single-side polishing machine, the maintenance opening is formed in the side wall of one side of the arm shell, the maintenance opening and the nut are arranged oppositely, so that a technician can visually observe the maintenance opening in daily spot inspection, whether the nut is loosened can be judged quickly, the nut can be adjusted in time, the polishing quality of a wafer can be guaranteed, meanwhile, when the mechanical arm is maintained, a maintenance worker can adjust the nut directly through the maintenance opening without a special tool, a corrected state can be observed through the maintenance opening, a visual blind area is avoided, and the accuracy of pressure correction can be improved.

In some embodiments of the present invention, the service opening is formed in a rectangular shape, the length of the service opening is 130mm to 150mm, and the width of the service opening is 50mm to 60 mm.

In some embodiments of the utility model, the robot arm further comprises: the access door, the access door with horn shell detachably links to each other, the access door is used for opening or closing the access opening.

In some embodiments of the present invention, the access door is provided with a plurality of threaded holes, and a plurality of fasteners are inserted through the plurality of threaded holes in a one-to-one correspondence to be coupled to the horn housing.

In some embodiments of the utility model, the access door is a transparent piece.

In some embodiments of the present invention, the access door is formed substantially in a rectangular shape, and chamfered portions are provided at two corners of the access door near a center line of the polishing head.

In some embodiments of the utility model, the cylinder block is provided with a cylinder regulating valve located at an end of the cylinder block adjacent to the service opening.

In some embodiments of the utility model, the horizontal distance between the cylinder regulating valve and the service opening is 60mm to 70 mm.

In some embodiments of the present invention, an air pressure sensor is disposed in the arm casing, the air pressure sensor is configured to detect a vacuum level of the outer coil of the polishing head, and the air pressure sensor is disposed adjacent to the access opening.

The single-sided polishing machine according to the embodiment of the utility model comprises: the mechanical arm for the single-side polishing machine is disclosed.

According to the single-side polishing machine provided by the embodiment of the utility model, the mechanical arm for the single-side polishing machine is arranged, so that the overall performance of the single-side polishing machine is improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic view of a portion of a robot according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of an access door according to one embodiment of the present invention;

FIG. 3 is a schematic plan view of a robot arm according to one embodiment of the utility model;

FIG. 4 is a schematic top view of a robot arm according to one embodiment of the present invention, wherein the polishing head is not shown;

fig. 5 is a schematic view of the structure of a connecting rod and a cylinder member according to one embodiment of the present invention.

Reference numerals:

a robot arm 100;

a machine base 10; a fixed seat 11; a fixed shaft 111; a carrier 12; a rotation hole 121; a rotating shaft 13;

a horn housing 20; a mounting cavity 21; a connecting rod 22; an internally threaded bore 221; an access opening 23;

a cylinder member 30; a cylinder 31; a push rod 32; an external threaded section 321;

a nut 40;

a polishing head 50; an outer coil 51;

an access door 60; a threaded hole 61; a chamfered portion 62; a fastener 63;

a cylinder regulating valve 70;

a barometric pressure sensor 80;

a vacuum tube 90.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the utility model and are not to be construed as limiting the utility model.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

The robot arm 100 for a single-sided polisher and the single-sided polisher having the same according to an embodiment of the present invention will be described with reference to fig. 1 to 5. The robot 100 may be a rough polishing robot, a middle polishing robot, or a fine polishing robot.

Referring to fig. 1, 2 and 3, a robot arm 100 for a single-sided polisher according to an embodiment of the present invention may include: a machine base 10, a horn housing 20, a cylinder member 30, and a nut 40.

Referring to fig. 1 and 3, the base 10 is disposed on a machine table (not shown) of a single-side polishing machine, and the bottom of the arm casing 20 is rotatably connected to the base 10, for example, as shown in fig. 3, the base 10 includes a fixing base 11 and a stage 12, the fixing base 11 is provided with a fixing shaft 111 extending vertically, the stage 12 is provided with a rotating hole 121, the stage 12 is rotatable relative to the fixing base 11 by the rotating hole 121 matching with the hole shaft of the fixing shaft 111, a rotating shaft 13 is further disposed on the left side of the stage 12, and the bottom of the arm casing 20 is rotatably connected to the stage 12 by the rotating shaft 13.

Referring to fig. 1 and 3, a polishing head 50 is disposed at an end of the arm housing 20 away from the base 10, and the polishing head 50 is used for polishing a wafer, wherein the wafer is a silicon chip used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular in shape, and various circuit device structures can be manufactured on the wafer, so that an IC product with specific electrical functions can be obtained.

Referring to fig. 1 and 3, a mounting cavity 21 is formed in the horn housing 20, a connecting rod 22 is provided in the mounting cavity 21, one end of the connecting rod 22 is rotatably connected to the horn housing 20, and for example, as shown in fig. 3 and 4, an upper end of the connecting rod 22 is hinged to an inner wall of the horn housing 20.

Referring to fig. 3-5, the cylinder member 30 includes a cylinder 31 and a push rod 32, the push rod 32 is telescopically disposed in the cylinder 31, the lower end of the cylinder 31 is rotatably connected to the machine base 10, the free end of the push rod 32 is connected to the other end of the connecting rod 22 through a screw, as shown in fig. 5, the outer diameter of the connecting rod 22 is larger than the outer diameter of the push rod 32, the free end of the push rod 32 is provided with an external threaded section 321, the other end of the connecting rod 22 is provided with an internal threaded hole 221 adapted to cooperate with the external threaded section 321, and the push rod 32 is movable and rotatable relative to the cylinder 31.

Referring to fig. 3 and 5, a nut 40 is threadedly coupled to the outer peripheral wall of the push rod 32 and adapted to be in stop-fit with the connecting rod 22, and an access opening 23 is formed in a side wall of the horn housing 20, the access opening 23 being opposite to the nut 40 (see fig. 1).

It can be understood that, because the polishing head 50 of the mechanical arm 100 is fast in normal operation, the shaking phenomenon occurs, the push rod 32 of the cylinder piece 30 and the nut 40 are in a loose risk, the quality influence can be caused to the processed wafer, the maintenance port 23 is arranged on one side wall of the arm shell 20, the technician can visually observe the nut at daily point inspection, whether the nut 40 is loose or not can be judged quickly, the nut 40 can be adjusted timely, the polishing quality of the wafer can be ensured, meanwhile, when the mechanical arm 100 is maintained, a maintenance worker does not need special tools, the nut 40 can be adjusted directly through the maintenance port 23, the corrected state can be observed through the maintenance port 23, the visual blind area is avoided, and the accuracy of pressure correction can be improved.

For example, referring to fig. 3 and 5, when it is judged that the downward pressure of the polishing head 50 is small, the cylinder member 30 may be controlled such that the push rod 32 is rotated to be elongated in the direction of F1, and the nut 40 may be adjusted directly through the access port 23, thereby clamping the polishing head 50; when it is judged that the downward pressure of the polishing head 50 is large, the cylinder member 30 can be controlled so that the push rod 32 is rotated to be shortened in the direction of F1, and the nut 40 is adjusted through the access opening 23, thereby loosening the polishing head 50.

In some embodiments of the present invention, referring to fig. 1 and 3, the access opening 23 is formed in a rectangular shape, and the length of the access opening 23 is 130mm to 150mm, in other words, the length of the access opening 23 may take any value of 130mm to 150mm, for example, the length of the access opening 23 may be 130mm, 135mm, 140mm, 145mm, 150mm, or the like;

referring to fig. 1 and 3, the width of the access opening 23 is 50mm to 60mm, in other words, the width of the access opening 23 may take any value of 50mm to 60mm, for example, the width of the access opening 23 may take 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, 56mm, 57mm, 58mm, 59mm, or 60 mm.

It can be understood that, by making the length of the access opening 23 be 130mm-150mm and the width of the access opening 23 be 50mm-60mm, on one hand, the opening area of the access opening 23 is not too small, thereby facilitating the visual inspection of the technician, and on the other hand, the opening area of the access opening 23 is not too large, thereby being beneficial to ensuring the structural strength of the arm shell 20 and the working reliability of the mechanical arm 100.

In some embodiments of the present invention, referring to fig. 1 and 2, the robot arm 100 further includes: and an access door 60, the access door 60 being detachably connected to the arm casing 20, the access door 60 being used to open or close the access opening 23. Wherein, the 'detachable connection' can be clamping, riveting or threaded connection and the like. From this, be convenient for the technical staff to open or close access hole 23, it is convenient to dismantle, simultaneously, when manipulator 100 during operation, access door 60 closes access hole 23, is favorable to preventing that external debris for example polishing solution from getting into in manipulator 100 through access hole 23, is favorable to guaranteeing the reliability of manipulator 100 work.

In some embodiments of the present invention, as shown in fig. 1 and 2, the access door 60 is provided with a plurality of threaded holes 61, and a plurality of fasteners 63 are coupled to the horn housing 20 through the plurality of threaded holes 61 in a one-to-one correspondence. It will be appreciated that the fastener 63 has the advantages of simple structure and easy assembly, and the tight connection of the access door 60 and the horn housing 20 can be achieved by a plurality of fasteners 63. In addition, the cost can be reduced while the connection strength of the access door 60 and the arm casing 20 is ensured. Alternatively, the fastener 63 may be a screw, bolt, or stud.

In some embodiments of the present invention, as shown with reference to fig. 1 and 2, the access door 60 is a transparent piece. For example, the access door 60 may be an acrylic plate, wherein acrylic is also called specially processed organic glass, which is a replacement product for organic glass, and the access door 60 made of acrylic has the advantages of good light transmittance, beautiful appearance, long service life, etc. It can be understood that, by making the access door 60 transparent, the technician need not to open the access door 60, just can visual observation, is favorable to judging fast whether the nut 40 is not hard up, is favorable to improving the efficiency and the degree of accuracy of inspection.

In some embodiments of the present invention, referring to fig. 1 and 2, the access door 60 is formed substantially in a rectangular shape, and chamfered portions 62 are provided at two corners of the access door 60 near the center line of the polishing head 50. Therefore, the access door 60 can adapt to the shape of the horn housing 20, and meanwhile, the material consumption of the access door 60 can be reduced, which is beneficial to reducing the production cost.

In some embodiments of the present invention, referring to FIG. 3, the cylinder block 31 is provided with a cylinder adjustment valve 70, the cylinder adjustment valve 70 being located at an end of the cylinder block 31 adjacent the service opening 23. It will be appreciated that by having the cylinder adjustment valve 70 disposed adjacent the access opening 23, a technician can open the access opening 23 to replace and maintain the cylinder adjustment valve 70, facilitating maintenance and replacement of the cylinder adjustment valve 70.

In some embodiments of the present invention, as illustrated with reference to FIG. 3, the horizontal distance between the cylinder adjustment valve 70 and the service opening 23 is 60mm to 70 mm. For example, as shown in fig. 3, the distance between the center of the cylinder regulator valve 70 and the center of the service opening 23 in the left-right direction is L, and L may take any value of 60mm to 70 mm. Therefore, the distance between the cylinder regulating valve 70 and the access opening 23 is not too large, and the maintenance and replacement of the cylinder regulating valve 70 are convenient for technicians.

In some embodiments of the present invention, referring to fig. 3, an air pressure sensor 80 is disposed in the arm casing 20, the air pressure sensor 80 is used for detecting the vacuum degree of the outer rim 51 of the polishing head 50, and the air pressure sensor 80 is disposed adjacent to the access opening 23.

For example, as shown in fig. 3, the robot arm 100 further includes a vacuum tube 90, the vacuum tube 90 penetrates the arm housing 20 and communicates with the outer disc 51, the air pressure sensor 80 may be disposed on the vacuum tube 90 or fixed on the cylinder 31, and the air pressure sensor 80 detects the vacuum degree of the outer disc 51 of the polishing head 50 by detecting the air pressure of the vacuum tube 90.

It will be appreciated that by having the air pressure sensor 80 disposed adjacent the access opening 23, a technician can open the air cylinder regulator valve 70 for replacement and maintenance through the access opening 23, facilitating maintenance and replacement of the air pressure sensor 80.

The single-sided polishing machine according to the embodiment of the utility model comprises: the robot arm 100 for the single-sided polishing machine according to the above embodiment of the present invention. Optionally, the single-side polishing machine further comprises a machine cover (not shown), the machine table and the mechanical arm 100 are both arranged in the machine cover, an operation window is arranged on the front side of the machine cover, the machine arm shell 20 can rotate relative to the machine table, the machine arm shell 20 is provided with an overhauling position, and the operation window is right opposite to the overhauling port 23 of the machine arm shell 20 at the overhauling position, so that when the mechanical arm 100 is maintained, a technician can further conveniently adjust the nut 40 through the overhauling port 23, and meanwhile, the corrected state can be observed through the overhauling port 23, a visual blind area is avoided, and the accuracy of pressure correction is improved.

According to the single-side polishing machine provided by the embodiment of the utility model, the mechanical arm 100 for the single-side polishing machine provided by the embodiment of the utility model is arranged, so that the overall performance of the single-side polishing machine is improved.

Other configurations and operations of the single-sided polisher according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the second feature or the first and second features may be indirectly contacting each other through intervening media. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the utility model have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A robotic arm for a single-sided buffing machine, comprising:

the base is arranged on a machine table of the single-side polishing machine;

the bottom of the machine arm shell is rotatably connected with the machine base, a polishing head is arranged at one end, far away from the machine base, of the machine arm shell, an installation cavity is formed in the machine arm shell, a connecting rod is arranged in the installation cavity, and one end of the connecting rod is rotatably connected with the machine arm shell;

the air cylinder part comprises a cylinder body and a push rod, the push rod is telescopically arranged on the cylinder body, the lower end of the cylinder body is rotatably connected with the base, and the free end of the push rod is connected with the other end of the connecting rod through threads;

the nut, the nut with the periphery wall screw thread of push rod link to each other and be suitable for with the cooperation of connecting rod backstop, one side lateral wall of horn shell is equipped with the access hole, the access hole with the nut sets up relatively.

2. The robot arm for a single-sided polishing machine as claimed in claim 1, wherein the access opening is formed in a rectangular shape, the length of the access opening is 130mm to 150mm, and the width of the access opening is 50mm to 60 mm.

3. The robotic arm for a single facer polisher according to claim 1 further comprising:

the access door, the access door with horn shell detachably links to each other, the access door is used for opening or closing the access opening.

4. The robotic arm for a single facer as in claim 3, wherein the access door is provided with a plurality of threaded holes through which a plurality of fasteners are attached to the horn housing in a one-to-one correspondence.

5. A robot arm for a single side polisher according to claim 3 with the access door being transparent.

6. The robot arm for a single-sided polisher as claimed in claim 3, wherein the access door is formed substantially in a rectangular shape, and chamfered portions are provided at two corners of the access door near the centerline of the polishing head.

7. The robotic arm for a single facer polisher according to claim 1 with the cylinder block provided with a cylinder adjustment valve located at one end of the cylinder block adjacent the access port.

8. The robotic arm for a single side polisher according to claim 7 with the horizontal distance between the cylinder adjustment valve and the access opening being 60mm to 70 mm.

9. The robot arm for a single-sided polisher as claimed in claim 1, wherein a pneumatic sensor is disposed in the arm housing for detecting a vacuum level of the outer disk of the polishing head, the pneumatic sensor being disposed adjacent to the access opening.

10. A single side polisher, comprising: a robot arm for a single facer polisher according to any one of claims 1-9.