CN216928543U

CN216928543U - Clamp for semiconductor wafer silicon wafer

Info

Publication number: CN216928543U
Application number: CN202220826639.5U
Authority: CN
Inventors: 赵红武; 崔志刚; 范磊
Original assignee: Wuhan Xinzhi Semiconductor Co ltd
Current assignee: Wuhan Xinzhi Semiconductor Co ltd
Priority date: 2022-04-11
Filing date: 2022-04-11
Publication date: 2022-07-08
Anticipated expiration: 2032-04-11

Abstract

The utility model discloses a clamp for a semiconductor wafer silicon wafer, which comprises a clamp table and a pair of horizontal clamps connected to the upper surface of the clamp table in a sliding manner, wherein the bottoms of the two horizontal clamps are fixedly connected with a threaded ring sleeve, the inside of the clamp table is transversely and rotatably connected with a threaded cross shaft, the threaded cross shaft is provided with two external threaded parts with opposite rotating directions, the threaded cross shaft is in threaded fit with the inner annular surface of the threaded ring sleeve through the two external threaded parts, the inside of the clamp table is transversely and rotatably connected with a second cross shaft, the second cross shaft consists of a right cross rod and a left cross rod, the second cross shaft is rotatably connected with the two horizontal clamps, the wafer can be horizontally clamped by adjusting the distance between the two horizontal clamps, the wafer can be pressed and fixed by adjusting the upper and lower positions of the two pressure plates, and the two adjusting modes can be adjusted, therefore, the method is suitable for wafer silicon chips with different thicknesses.

Description

Clamp for semiconductor wafer silicon wafer

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a clamp for a semiconductor wafer silicon wafer.

Background

The semiconductor is from sand to a semiconductor wafer silicon wafer, important steps such as single crystal cylinder, cutting, oxidation, photoetching, etching, film deposition, interconnection and the like are needed, the common front-end process in the actual pilot plant production can generate defective semiconductor, the thickness of the semiconductor is also changed, a worker is sometimes required to utilize a microscope to sample and check whether the semiconductor wafer silicon wafer after the important steps is qualified, and if the problem exists, the front-end process production parameters or even circuit projection can be corrected in time.

In the prior art, a semiconductor wafer silicon wafer is generally fixed in a pressing mode, only the vertical surface direction is fixed, a semiconductor is highly integrated with a circuit and has a smooth surface, the semiconductor is easy to deviate in position on the horizontal plane, an observation target is lost, and the working strength is greatly increased.

SUMMERY OF THE UTILITY MODEL

Objects of the utility model

In order to solve the technical problems in the background technology, the utility model provides a clamp for a semiconductor wafer silicon wafer.

(II) technical scheme

The utility model provides an anchor clamps of semiconductor wafer silicon chip, includes anchor clamps platform and a pair of horizontal jig of sliding connection in anchor clamps bench surface, its characterized in that, two screw ring cover of the equal fixedly connected with in bottom of horizontal jig, the inside transverse rotation of anchor clamps platform is connected with a screw thread cross axle, set up two external screw thread portions opposite in direction of rotation on the screw thread cross axle, the screw thread cross axle cup joints through the interior anchor ring screw thread of two external screw thread portions and screw ring cover soon, the inside transverse rotation of anchor clamps platform is connected with the second cross axle, the second cross axle comprises right horizontal pole and left horizontal pole, the second cross axle and two horizontal jig rotates and connects.

Preferably, the bottom sides of the opposite surfaces of the two horizontal clamps are provided with right-angle clamping grooves, the inside of each horizontal clamp is positioned above the corresponding right-angle clamping groove and provided with a cylindrical groove, the cylindrical groove is movably sleeved with a vertical shaft, and the bottom end of the vertical shaft is fixedly connected with a pressing plate.

Preferably, the vertical shaft chain belt is in transmission connection with a transmission belt, one side, close to the pressing plate, of the vertical shaft is arranged on the external thread, a circular limiting block is fixedly connected to one end, far away from the pressing plate, of the vertical shaft, and the circular limiting block is movably sleeved with the cylindrical groove.

Preferably, the vertical shaft is connected with a second bevel gear through a transmission belt chain belt, one end of the second bevel gear is connected with the shell of the horizontal fixture in a rotating mode, the other end of the second bevel gear is connected with a first bevel gear in a meshed mode, one end, far away from the second bevel gear, of the first bevel gear is connected with a synchronous belt between the second transverse shaft and the second transverse shaft.

Preferably, two belt groove, first cavity and second cavity have all been seted up to horizontal fixture's inside, driving belt is placed to belt groove inside, first cavity all with first conical gear with the second cross axle rotates to be connected, the second cavity all rotates with first conical gear and second conical gear to be connected, first conical gear link up first cavity and second cavity.

Preferably, right side horizontal pole and left horizontal pole all are provided with arc convex part and arc recess, and arc recess length is greater than the arc convex part, and right side horizontal pole and left horizontal pole can dismantle the connection.

Preferably, the bottom of the clamp table is rotatably connected with a cylinder, the other end of the cylinder is fixedly connected with a base, the outer surface of the cylinder is rotatably connected with a support, and the support can perform horizontal circular motion around the cylinder.

Preferably, the threaded transverse shaft and the second transverse shaft are both provided with knobs.

Compared with the prior art, the utility model has the beneficial effects that: according to the utility model, the semiconductor wafer silicon wafer is placed between the two horizontal clamps, the wafer silicon wafer can be horizontally clamped and fixed by adjusting the distance between the two horizontal clamps, the wafer silicon wafer can be pressed and fixed by adjusting the upper and lower positions of the two pressing plates, and the two adjusting modes can be adjusted, so that the semiconductor wafer silicon wafer clamping device is suitable for wafer silicon wafers with different thicknesses.

Drawings

FIG. 1 is a perspective view of a semiconductor wafer chuck according to the present invention;

FIG. 2 is a side view of a clamp for a semiconductor wafer of silicon wafer according to the present invention;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;

FIG. 4 is a cross-sectional view of the right cross bar of the present invention;

FIG. 5 is a perspective view of a second transverse axis of the present invention.

In the figure: the device comprises a clamp table 1, a horizontal clamp 2, a support 3, a base 4, a threaded transverse shaft 5, a right transverse rod 6, a left transverse rod 7, a threaded ring sleeve 8, a synchronous belt 9, a first bevel gear 10, a second bevel gear 11, a transmission belt 12, a cylindrical groove 13, a vertical shaft 14, a pressing plate 15 and a second transverse shaft 16.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

As shown in fig. 1-4, the clamp for a semiconductor wafer silicon wafer according to the present invention comprises a clamp table 1 and a pair of horizontal clamps 2 slidably connected to an upper surface of the clamp table 1, wherein the bottoms of the two horizontal clamps 2 are both fixedly connected with a threaded ring sleeve 8, a threaded cross shaft 5 is laterally and rotatably connected to the interior of the clamp table 1, two external threaded portions with opposite rotation directions are disposed on the threaded cross shaft 5, the threaded cross shaft 5 is threadedly and rotatably connected to an inner annular surface of the threaded ring sleeve 7 through the two external threaded portions, a second cross shaft 16 is laterally and rotatably connected to the interior of the clamp table 1, the second cross shaft 16 is composed of a right cross bar 6 and a left cross bar 7, and the second cross shaft 16 is rotatably connected to the two horizontal clamps 2.

In an optional embodiment, right-angle clamping grooves are formed in the bottom sides of the opposite surfaces of the two horizontal clamps 2, a cylindrical groove 13 is formed in the horizontal clamp 2 and located above the right-angle clamping grooves, a vertical shaft 14 is movably sleeved on the cylindrical groove 13, and a pressing plate 15 is fixedly connected to the bottom end of the vertical shaft 14.

In an optional embodiment, the vertical shaft 14 is connected with the transmission belt 12 in a chain transmission manner, one side of the vertical shaft 14, which is close to the pressing plate 15, is arranged on the external thread, and one end of the vertical shaft 14, which is far away from the pressing plate 15, is fixedly connected with a circular limiting block, and the circular limiting block is movably sleeved with the cylindrical groove 13.

It should be noted that the driving belt 12 only drives the vertical shaft 14 to rotate, and the downward movement of the vertical shaft 14 is caused by the connection of the external thread of the part below the center of the vertical shaft 14 and the corresponding internal thread of the horizontal clamp 2.

In an alternative embodiment, the vertical shaft 14 is connected with a second bevel gear 11 by a transmission belt 12, one end of the second bevel gear 11 is rotatably connected with the shell of the horizontal clamp 2, the other end is connected with a first bevel gear 10 in a meshing manner, and a synchronous belt 9 is arranged between one end of the first bevel gear 10 far away from the second bevel gear 11 and a second horizontal shaft 16.

In an optional embodiment, belt grooves, a first chamber and a second chamber are formed in the two horizontal clamps 2, a transmission belt 12 is placed in the belt grooves, the first chamber is rotatably connected with the first bevel gear 10 and the second transverse shaft 16, the second chamber is rotatably connected with the first bevel gear 10 and the second bevel gear 11, and the first bevel gear 10 penetrates through the first chamber and the second chamber.

In an alternative embodiment, the right cross bar 6 and the left cross bar 7 are both provided with arc-shaped convex parts and arc-shaped grooves, the length of the arc-shaped grooves is larger than that of the arc-shaped convex parts, and the right cross bar 6 and the left cross bar 7 are detachably connected.

It should be noted that, after the clamping apparatus is assembled, the right cross bar 6 and the left cross bar 7 are in a butt joint state with each other, the length of the arc-shaped groove is greater than that of the arc-shaped convex part, and the horizontal sliding distance of the arc-shaped convex part in the arc-shaped groove is greater than or equal to the opposite movement distance of the horizontal clamp 2.

In an alternative embodiment, the bottom of the fixture table 1 is rotatably connected with a cylinder, the other end of the cylinder is fixedly connected with a base 4, the circumferential surface of the cylinder is rotatably connected with a bracket 3, and the bracket can perform horizontal circular motion around the cylinder.

In an alternative embodiment, both the threaded transverse shaft 5 and the second transverse shaft 16 are provided with knobs.

The working principle is as follows: when a worker needs to detect a wafer silicon wafer, the wafer is put on the clamp platform 1, then the threaded cross shaft 5 is rotated clockwise, the two threaded ring sleeves 8 are close to each other, so as to drive the horizontal clamp 2 to be close to each other, and provide clamping force to the wafer in the horizontal direction, meanwhile, the threaded ring sleeves 8 drive the first chambers of the horizontal clamp 2 to be close to each other, so that the right cross rod 6 and the left cross rod 7 are close to each other, because the arc-shaped convex parts with the arc-shaped groove length being larger than that of the arc-shaped convex parts, the right cross rod 6 and the left cross rod 7 move in opposite directions, and cannot cause interference to the opposite movement of the horizontal clamp 2, then the second cross shaft 16 is rotated clockwise, at the moment, the right cross rod 6 and the left cross rod 7 conduct force through the arc-shaped convex parts, then the first conical gear 10 is driven through the synchronous belt 9, the first conical gear 10 and the second conical gear 11 are in meshing transmission, and the second conical gear drives the vertical shaft 14 to rotate through the transmission belt 12, due to the threaded connection between the vertical shaft 14 and the horizontal clamp 2, the vertical shaft 14 moves downwards, so that the pressure plate 15 is driven to press the wafer downwards. Conversely, the clamping force can be removed by first rotating the threaded cross shaft 5 and the second cross shaft 16 counterclockwise. In addition, the staff rotates the support 3, so that the observation tool can move circularly.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.

Claims

1. The utility model provides a semiconductor wafer silicon chip's anchor clamps, includes anchor clamps platform (1) and a pair of horizontal anchor clamps (2) of sliding connection in anchor clamps platform (1) upper surface, its characterized in that, two equal fixedly connected with screw thread ring cover (8) in bottom of horizontal anchor clamps (2), the inside lateral rotation of anchor clamps platform (1) is connected with a screw thread cross axle (5), set up two opposite external screw thread portions of direction of rotation on screw thread cross axle (5), screw thread cross axle (5) cup joint through the interior anchor ring screw thread of two external screw thread portions and screw thread ring cover (8) soon, the inside lateral rotation of anchor clamps platform (1) is connected with second cross axle (16), second cross axle (16) comprise right horizontal pole (6) and left horizontal pole (7), second cross axle (16) and two horizontal anchor clamps (2) rotate and are connected.

2. The clamp for the semiconductor wafer silicon wafer as claimed in claim 1, wherein right-angle clamping grooves are formed in the bottom sides of the opposite surfaces of the two horizontal clamps (2), a cylindrical groove (13) is formed in the horizontal clamp (2) and located above the right-angle clamping grooves, a vertical shaft (14) is movably sleeved on the cylindrical groove (13), and a pressing plate (15) is fixedly connected to the bottom end of the vertical shaft (14).

3. The clamp for the semiconductor wafer silicon wafer as claimed in claim 2, wherein the vertical shaft (14) is connected with a transmission belt (12) in a chain transmission manner, one side of the vertical shaft (14) close to the pressing plate (15) is arranged on the external thread, one end of the vertical shaft (14) far away from the pressing plate (15) is fixedly connected with a circular limiting block, and the circular limiting block is movably sleeved with the cylindrical groove (13).

4. The clamp for the semiconductor wafer silicon wafer as claimed in claim 3, wherein the vertical shaft (14) is chain-connected with a second bevel gear (11) through a transmission belt (12), one end of the second bevel gear (11) is rotatably connected with the shell of the horizontal clamp (2), the other end is engaged with a first bevel gear (10), and a synchronous belt (9) is arranged between one end of the first bevel gear (10) far away from the second bevel gear (11) and the second transverse shaft (16).

5. The clamp of the semiconductor wafer silicon wafer as claimed in claim 4, wherein a belt groove, a first chamber and a second chamber are formed in each of the two horizontal clamps (2), a transmission belt (12) is placed in each belt groove, the first chamber is rotatably connected with the first bevel gear (10) and the second transverse shaft (16), the second chamber is rotatably connected with the first bevel gear (10) and the second bevel gear (11), and the first bevel gear (10) penetrates through the first chamber and the second chamber.

6. The clamp for the semiconductor wafer silicon wafer as claimed in claim 1, wherein the right cross bar (6) and the left cross bar (7) are provided with arc-shaped protrusions and arc-shaped grooves, the length of the arc-shaped grooves is larger than that of the arc-shaped protrusions, and the right cross bar (6) and the left cross bar (7) are detachably connected.

7. The clamp for the semiconductor wafer silicon wafer as claimed in claim 1, wherein a cylinder is rotatably connected to the bottom of the clamp table (1), a base (4) is fixedly connected to the other end of the cylinder, and a support (3) is rotatably connected to the outer surface of the cylinder and can perform horizontal circular motion around the cylinder.

8. The clamp for the silicon wafer of the semiconductor wafer as claimed in claim 1, wherein the threaded transverse shaft (5) and the second transverse shaft (16) are provided with knobs.