CN216925892U

CN216925892U - Purging force calibration tool and purging device

Info

Publication number: CN216925892U
Application number: CN202220386160.4U
Authority: CN
Inventors: 史继英; 刘博瑞; 谢辉
Original assignee: Chengdu Boteng Shida Intelligent Technology Co ltd
Current assignee: Chengdu Boteng Shida Intelligent Technology Co ltd
Priority date: 2022-02-24
Filing date: 2022-02-24
Publication date: 2022-07-08
Anticipated expiration: 2032-02-24

Abstract

The application provides a sweep power calibration frock and sweep device, sweeps power calibration frock and includes microscope carrier, pressure measurement module and mounting. The carrier is used for bearing the workpiece. The pressure measuring module is connected with the carrying platform and used for detecting the air pressure of air blown to the target area on the carrying platform. The fixing piece is connected with the carrying platform, and the fixing piece is matched with the carrying platform to be used for positioning the workpiece. The purging device can effectively ensure that the target area of the workpiece receives the maximum purging force, and is low in cost and high in accuracy.

Description

Purging force calibration tool and purging device

Technical Field

The utility model relates to the field of semiconductor processing equipment, in particular to a purging force calibration tool and a purging device.

Background

In the process of processing a semiconductor workpiece, when a target area (point) of the workpiece is swept by using compressed gas or other colorless transparent gas, if the response of the swept surface to the airflow cannot be visually shown, whether the target area (point) is effectively swept by the airflow cannot be judged, and then judgment of an operator on a sweeping result is influenced. The current operation methods mainly comprise two methods, wherein one method is that a target area (point) is usually marked at the geometric center of a workpiece, a CCD industrial camera system is used for scanning a contour and finding the target area (point) during purging, and then a gas flow spraying tool is used for purging; secondly, the person holds the air jet tool to traverse the surface containing the target area (point).

The inventor researches and discovers that the conventional workpiece purging device has the following defects:

the CCD industrial camera is high in cost and cannot judge whether the target area is subjected to the maximum purging force; the manual sweeping is adopted, so that time and labor are wasted, the efficiency is low, and the error is large.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a purging force calibration tool and a purging device, which can ensure that a target area of a workpiece is purged by the maximum purging force on the premise of reducing cost.

The embodiment of the utility model is realized by the following steps:

in a first aspect, the present invention provides a purging force calibration tool, including:

the carrying platform is used for carrying a workpiece;

the pressure measuring module is connected with the carrying platform and used for detecting the air pressure of air blown to a target area on the carrying platform;

and the fixing piece is connected with the carrying platform, and the fixing piece is matched with the carrying platform to be used for positioning a workpiece.

In an optional embodiment, the pressure measuring module comprises an air pressure probe, an air conveying pipe and a pressure gauge, the air conveying pipe is communicated with the air pressure probe and the pressure gauge at the same time, the air pressure probe is connected with the carrying platform, the air pressure probe is used for collecting air blown to a target area and conveying the air to the air conveying pipe, and the pressure gauge is used for displaying an air pressure value of the air conveyed by the air conveying pipe.

In an optional embodiment, the carrier has a carrying surface for carrying a workpiece, the carrying surface is provided with a through hole, and the air pressure probe is inserted into the through hole and does not protrude from the carrying surface.

In an alternative embodiment, the outer contour shape of the bearing surface is the same as the outer contour shape of the workpiece.

In an alternative embodiment, the gas line is provided as a hose.

In an alternative embodiment, the fixing member is fixedly connected to the carrier by screws.

In an alternative embodiment, the fixing member includes a mounting ring and a pressing ring connected with each other, the mounting ring is sleeved outside the carrier, and the screw is screwed on the mounting ring and can abut against the carrier; the compression ring is matched with the carrier for clamping a workpiece.

In an optional embodiment, the purge force calibration tool further includes a moving platform, the stage or the fixing member is connected to the moving platform, and the moving platform is configured to drive the stage and the fixing member to move relative to the gas delivery mechanism.

In an alternative embodiment, the mobile platform is configured as a two-dimensional mobile platform or a three-dimensional mobile platform.

In a second aspect, the present invention provides a purge device comprising:

the purging force calibration tool comprises a gas transmission mechanism and the purging force calibration tool in any one of the previous embodiments, wherein the gas transmission mechanism is used for blowing gas to the carrying platform.

The embodiment of the utility model has the beneficial effects that:

in summary, this embodiment provides a calibration fixture for purging force, and when in use, the carrier is unloaded first, that is to say, the workpiece is not placed on the carrier first, and the pressure measuring module on the carrier is not shielded by the workpiece. Then, the carrier is arranged on the air outlet path of the air conveying mechanism, so that the carrier moves relative to the air conveying mechanism within a set range. When the carrying platform moves in the set range, the gas acts on the pressure measuring module, so that the pressure measuring module can detect the air pressure value of the target area on the carrying platform at the current position. The method comprises the following steps that the pressure measuring module is arranged at each position of the carrying platform in a set range, the carrying platform can obtain an air pressure value of the corresponding position through the pressure measuring module, namely, each position where the carrying platform is located corresponds to one air pressure value, therefore, after the carrying platform traverses the set range, a plurality of air pressure values obtained by the pressure measuring module are compared, the maximum air pressure value is the maximum purging force, the position where the carrying platform is located when the target area is subjected to the maximum purging force can be obtained by reversely pushing the position where the carrying platform is located according to the maximum purging force, and then the carrying platform is moved to the position where the target area is subjected to the maximum purging force, so that the calibration of the purging force is completed. Then, the workpiece is arranged on the carrier and is fixed through the carrier and the fixing piece, and the target area of the workpiece is overlapped with the target area of the carrier, so that the maximum sweeping force on the target area of the workpiece can be effectively ensured.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic cross-sectional structural view of a purge force calibration fixture according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a fixing member according to an embodiment of the present invention;

fig. 3 is a schematic perspective view of a purging force calibration tool according to an embodiment of the present invention.

Icon:

100-a stage; 110-a bearing surface; 120-a via hole; 130-a connecting boss; 200-a pressure measuring module; 210-a gas pressure probe; 220-a gas delivery pipe; 230-a pressure gauge; 300-a fixture; 310-a mounting ring; 320-a compression ring; 330-screw; 400-a mobile platform; 410-a substrate; 420-a first moving member; 430-second moving part.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element to which the description refers must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

When the surface of the workpiece is purged by using the air pressure, since the air flow is not easily found by naked eyes, a worker cannot determine whether a target region of the surface of the workpiece is purged and whether the target region of the workpiece is subjected to the maximum purging force during the operation. At present, a CCD industrial camera is adopted for assisting judgment, the method is high in cost, and whether the target area is subjected to the maximum purging force cannot be judged; alternatively, the operator may hold the air-jet tool across the surface of the workpiece to ensure that the target area of the workpiece is swept by the air-jet, which is inefficient and subject to large errors.

In view of this, the designer has designed a calibration frock of blowing power, can effectively guarantee that the target zone of work piece receives the biggest blowing power, and is with low costs, and the accuracy is high.

Referring to fig. 1, in the present embodiment, the purge force calibration tool includes a carrier 100, a pressure measurement module 200, and a fixing member 300. The carrier 100 is used for carrying a workpiece. The pressure measuring module 200 is connected to the stage 100, and detects the pressure of the gas blown toward the target area on the stage 100. The fixed member 300 is connected to the carrier 100, and the fixed member 300 is used to position the workpiece in cooperation with the carrier 100.

In this embodiment, optionally, the carrier 100 has a carrier surface 110, a through hole 120 penetrating through the carrier 100 is disposed on the carrier surface 110, and the through hole 120 is located in a target area on the carrier surface 110. The shape and size of the carrying surface 110 of the carrier 100 match the shape and size of the workpiece to be positioned. That is, for example, if the workpiece is a circular disk and the diameter of the workpiece is Φ 1, the carrying surface 110 is also configured as a circular surface, the diameter of the carrying surface 110 is Φ 2, and Φ 1 is Φ 2. In this way, the target area of the carrying surface 110 is the middle area of the carrying surface 110, and the target area of the workpiece is the middle area of the workpiece itself, and after the workpiece is positioned on the stage 100, the target area of the workpiece coincides with the target area of the stage 100, so that the workpiece and the stage 100 can be assembled more conveniently and reliably. Obviously, in other embodiments, the shape of the workpiece may not be a circular plate, and the workpiece may also be an asymmetric structure, and the design of the stage 100 may be matched with the shape of the workpiece, so that after the workpiece is positioned on the stage 100, the target area of the workpiece directly coincides with the target area on the stage 100, and the assembly is convenient.

Further, the stage 100 is provided with a connection protrusion 130, and the connection protrusion 130 is used for connecting with the moving platform 400. The through hole 120 penetrates the connection boss 130. Alternatively, the connection protrusion 130 may be provided as a screw part, and may be screwed with the moving platform 400.

Referring to fig. 1, in the present embodiment, optionally, the pressure measuring module 200 includes an air pressure probe 210, an air pipe 220 and a pressure gauge 230, the air pipe 220 is simultaneously communicated with the air pressure probe 210 and the pressure gauge 230, the air pressure probe 210 is connected with the carrier 100 and inserted into the through hole 120, and the air pressure probe 210 is inserted into the through hole 120 from the connection convex portion 130 and does not protrude out of the carrier surface 110. The air pressure probe 210 is used to collect air blown to the target area and deliver it to the air delivery conduit 220, and the pressure gauge 230 is used to display the air pressure value of the air delivered by the air delivery conduit 220. Thus, the pressure gauge 230 can accurately reflect the pressure value of the target area in real time. The air pressure values of the target areas of the carrier 100 at different positions can be recorded automatically or manually, and the air pressure values directly reflect the magnitude of the purging force, that is, when the air pressure value is maximum, the maximum purging force applied to the target areas at the positions can be accurately obtained.

Further, the air pipe 220 is set as a hose, the air pipe 220 has strong deformation capacity, can be bent under the action of external force, has strong adaptability, and can move within a set space range.

Referring to fig. 2, in the embodiment, optionally, the fixing member 300 includes a mounting ring 310 and a pressing ring 320, which are connected, the mounting ring 310 is sleeved outside the carrier 100, and the mounting ring 310 can slide in an axis extending direction of the carrier 100 relative to the carrier 100. The orthographic projection of the pressing ring 320 on the axis of the through hole 120 falls into the bearing surface 110, and the portion of the pressing ring 320 falling into the bearing surface 110 cooperates with the bearing surface 110 of the carrier 100 for clamping the workpiece. Because the mounting ring 310 can slide relative to the carrier 100, the distance between the bearing surface 110 and the clamp ring 320 can be adjusted, so that clamping of workpieces with different thicknesses can be accommodated. Meanwhile, the clamp ring 320 is arranged around the carrier 100, the periphery of the clamp ring 320 can be tightly pressed on the workpiece, and the positioning effect of the workpiece is good. Further, a screw 330 is screwed on the mounting ring 310, and by screwing the screw 330, the tightness between the mounting ring 310 and the carrier 100 can be adjusted, that is, when the mounting ring 310 and the carrier 100 need to be fixed, the end of the screw 330 abuts against the outer peripheral surface of the sleeve mounting ring 310 of the carrier 100, and at this time, the mounting ring 310 and the carrier 100 are relatively fixed, so that the clamp ring 320 and the carrier 100 cooperate to clamp and position the workpiece. When the workpiece needs to be attached and detached, the screw 330 is loosened, the end of the screw 330 is spaced apart from the mounting ring 310, and the mounting ring 310 can be removed from the stage 100, so that the work such as the attachment and replacement of the workpiece is performed.

Referring to fig. 3, in the present embodiment, optionally, the purge force calibration tool further includes a moving platform 400, and the moving platform 400 is configured as a two-dimensional moving platform 400 or a three-dimensional moving platform 400. In this embodiment, the two-dimensional moving platform 400 is taken as an example for explanation. The moving platform 400 includes a base 410, a first moving member 420 and a second moving member 430, wherein the first moving member 420 is slidably connected to the base 410 in a first direction, and the second moving member 430 is slidably connected to the first moving member 420 in a second direction, the first direction and the second direction are perpendicular, and obviously, in other embodiments, the first direction and the second direction may be at other angles. The carrier is detachably connected with the second moving member 430 by its connection convex portion 130. The carrier 100 can be driven to move within a set range by moving the platform 400.

It should be understood that the mobile platform 400 may further include a driving module capable of automatically operating the first moving member 420 and the second moving member 430.

The operating principle of the sweeping force calibration tool provided by the embodiment is as follows:

when the pressure measuring device is used, the carrier 100 is unloaded, that is, no workpiece is placed on the carrier 100, and the pressure measuring module 200 on the carrier 100 is not shielded by the workpiece. Then, the stage 100 is placed at a position corresponding to the gas transport mechanism, and the stage 100 is moved relative to the gas transport mechanism within a set range. In the process that the carrier 100 moves within the set range, the gas acts on the gas pressure probe 210, and the gas pressure probe 210 transmits the gas to the pressure gauge 230 through the gas pipe 220, so that the pressure gauge 230 can detect the gas pressure value of the target area on the carrier 100 at the current position. The pressure value of the corresponding position of the carrier 100 can be obtained at each position in the set range through the pressure gauge 230, that is, each position where the carrier 100 is located corresponds to one pressure value, so that after the carrier 100 traverses the set range, a plurality of pressure values obtained by the pressure measuring module 200 are compared, the maximum pressure value is the maximum purging force, the position where the carrier 100 is located is reversely pushed according to the maximum purging force, the position where the carrier 100 is located when the target area receives the maximum purging force can be obtained, then the carrier 100 is moved to the position where the target area receives the maximum purging force, and the calibration of the purging force is completed. Then, the workpiece is set on the stage 100, and is fixed by the stage 100 and the fixing member 300, and the target area of the workpiece and the target area of the stage 100 may be overlapped, so that it is possible to effectively ensure that the target area of the workpiece receives the maximum purge force.

The embodiment further provides a purging device, which comprises a gas transmission mechanism and a purging force calibration tool, wherein the gas transmission mechanism is used for blowing gas to the carrying platform 100, and the gas transmission mechanism can be an air flow spray gun. The purging device can ensure that the target area of the workpiece is subjected to the maximum purging force.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a sweep power calibration frock which characterized in that includes:

the carrying platform is used for carrying a workpiece;

the pressure measuring module is connected with the carrying platform and is used for detecting the air pressure of air blown to a target area on the carrying platform;

2. The purging force calibration tool according to claim 1, wherein:

the pressure measuring module comprises an air pressure probe, an air conveying pipe and a pressure gauge, the air conveying pipe is simultaneously communicated with the air pressure probe and the pressure gauge, the air pressure probe is connected with the carrying platform, the air pressure probe is used for collecting gas blown to a target area and conveying the gas to the air conveying pipe, and the pressure gauge is used for displaying an air pressure value of the gas conveyed by the air conveying pipe.

3. The purging force calibration tool according to claim 2, wherein:

the bearing platform is provided with a bearing surface for bearing a workpiece, a through hole is formed in the bearing surface, and the air pressure probe is inserted into the through hole and does not protrude out of the bearing surface.

4. The purging force calibration tool according to claim 3, wherein:

the outer contour shape of the bearing surface is the same as that of the workpiece.

5. The purging force calibration tool according to claim 2, wherein:

the gas transmission pipe is a hose.

6. The purging force calibration tool according to claim 1, wherein:

the fixing piece is fixedly connected with the carrying platform through a screw.

7. The purging force calibration tool according to claim 6, wherein:

the fixing piece comprises a mounting ring and a pressing ring which are connected, the mounting ring is sleeved outside the carrier, and the screw is screwed on the mounting ring and can be abutted against the carrier; the compression ring is matched with the carrier for clamping a workpiece.

8. The purging force calibration tool according to claim 1, wherein:

the purging force calibration tool further comprises a moving platform, the carrying platform or the fixing piece is connected with the moving platform, and the moving platform is used for driving the carrying platform and the fixing piece to move relative to the gas transmission mechanism.

9. The purging force calibration tool according to claim 8, wherein:

the mobile platform is set to be a two-dimensional mobile platform or a three-dimensional mobile platform.

10. A purge device, comprising:

the purging force calibration tool of any one of claims 1-9 and a gas delivery mechanism for blowing gas onto the stage.