CN216904700U

CN216904700U - Vibration structure

Info

Publication number: CN216904700U
Application number: CN202090000661.3U
Authority: CN
Inventors: 远藤润; 大寺昭三; 石浦丰
Original assignee: Murata Manufacturing Co Ltd
Current assignee: Murata Manufacturing Co Ltd
Priority date: 2019-10-23
Filing date: 2020-10-19
Publication date: 2022-07-05
Anticipated expiration: 2030-10-19
Also published as: US20220097098A1; JPWO2021079836A1; JP6958773B2; WO2021079836A1

Abstract

The present invention provides a vibration structure (101), comprising: a vibrator (12) that vibrates in a planar direction; a case (13) that holds the vibrator (12); and a cushion member (14) connected to the member held by the case (13) and the case (13), wherein the thickness of the cushion member (14) in a direction orthogonal to the planar direction is larger than the gap between the member held by the case (13) and the case (13).

Description

Vibration structure

Technical Field

The present invention relates to a vibration structure for generating vibration.

Background

In recent years, a tactile sensation presenting apparatus has been proposed which, in a touch panel or the like, causes a user to feel realistically that an operation is being performed through the touch panel or the like by transmitting vibration upon contact by the user.

For example, a vibration device that provides tactile feedback to a user using a piezoelectric film is proposed in patent document 1. A conventional vibration device is disposed in a housing of an electronic apparatus or the like in a superposed manner.

Patent document 1: japanese patent No. 6237959.

When the vibration device is disposed in a housing of an electronic apparatus or the like in a superposed manner, the portion where the vibration device is disposed has a large volume in addition to the thickness of the vibration device, and the number of components connecting the vibration device and the housing increases. Here, if the member connecting the vibration device and the housing is made thin in order to suppress an increase in volume, the housing easily restricts the vibration device. Thus, the vibration of the vibration device is hindered.

SUMMERY OF THE UTILITY MODEL

In view of the above, an object of the present invention is to provide a vibration structure that suppresses the restriction by a housing and suppresses an increase in volume when the vibration structure is disposed in an electronic device or the like.

The vibration structure of the present invention is characterized by comprising: a vibrator configured to vibrate in a planar direction; a case holding the vibrator; and a buffer member connected to the member held by the case and the case, wherein a thickness of the buffer member in a direction orthogonal to the planar direction is larger than a gap between the member held by the case and the case.

In this configuration, the members held by the case including the vibrator are connected via the cushion. Since the thickness of the buffer is larger than the gap between the member held by the housing and the housing, at least a part of the buffer enters the housing side. For example, a notch is provided in the housing, and a part of the buffer member is fitted into the notch. Alternatively, in the case where the case has an opening, the buffer member may be attached to a side surface of the case. The thickness of the entire vibrating structure can be reduced by the amount of the buffer member entering the case side. The thickness of the buffer is longer than the length of the gap between the member held by the case and the case. The thicker the thickness of the vibrator in the direction orthogonal to the planar direction, the more difficult the damper hinders the vibration of the vibrator. Therefore, the buffer member can suppress the restriction by the case. Therefore, the vibration structure can suppress the limitation of the housing, and the entire vibration structure can be thinned, thereby suppressing an increase in volume.

According to the present invention, when the electronic device is disposed in an electronic apparatus or the like, the restriction by the housing can be suppressed, and the increase in volume can be suppressed.

Drawings

Fig. 1 (a) is an exploded perspective view of the vibration structure 101 according to the first embodiment, and fig. 1 (B) is a plan view of the vibration structure 101.

Fig. 2 (a) is a cross-sectional view taken along the line I-I shown in fig. 1 (B), and fig. 2 (B) is a partially enlarged view of fig. 2 (a).

Fig. 3 (a) is a rear perspective view of the transducer 12, and fig. 3 (B) is a cross-sectional view taken along line II-II shown in fig. 3 (a).

Fig. 4 (a) is a cross-sectional view of the vibrating structure 102 according to the second embodiment, and fig. 4 (B) is a partially enlarged view of fig. 4 (a).

Fig. 5 (a) is a cross-sectional view of the vibrating structure 103 according to the third embodiment, and fig. 5 (B) is a partially enlarged view of fig. 5 (a).

Fig. 6 (a) is a diagram for explaining a modification 1 of the vibrating structure 101, and fig. 6 (B) is a diagram for explaining a modification 2 of the vibrating structure 101.

Fig. 7 is a diagram for explaining modification 3 of vibration structure 101.

Fig. 8 (a) is an exploded perspective view of the vibration structure 201 according to the fourth embodiment, and fig. 8 (B) is a plan view of the vibration structure 201.

Fig. 9 (a) is a cross-sectional view taken along line III-III shown in fig. 8 (B), and fig. 9 (B) is a partially enlarged view of fig. 9 (a).

Detailed Description

Fig. 1 (a) is an exploded perspective view of the vibrating structure 101 according to the first embodiment, and fig. 1 (B) is a plan view of the vibrating structure 101 as viewed from the + Z direction toward the-Z direction. Fig. 2 (a) is a cross-sectional view taken along line I-I shown in fig. 1 (B), and fig. 2 (B) is a partially enlarged view of fig. 2 (a). Hereinafter, each drawing shows only a part of the housing 13 of the electronic apparatus, and shows the wiring omitted. Fig. 1 (B) shows a member overlapping the case 13 through the case 13 by a broken line, and shows a region where the substrate 11 is present by hatching.

As shown in fig. 1 (a), 1 (B), and 2 (a), the vibration structure 101 of the present embodiment includes a substrate 11, a vibrator 12, a case 13, a cushion material 14, and a double-sided tape 15. In fig. 1 a and 1B, the width direction (lateral direction) of the vibrating structure 101 is defined as the X-axis direction, the length direction (longitudinal direction) is defined as the Y-axis direction, and the thickness direction is defined as the Z-axis direction. The XY plane direction corresponds to the "plane direction" in the present invention, and the Z axis direction corresponds to the "direction orthogonal to the plane direction" in the present invention.

The substrate 11 is a flat plate having a first main surface 18 and a second main surface 19. The first main surface 18 and the second main surface 19 are rectangular in plan view. When the vibrating structure 101 is disposed in the case 13 of the electronic device, the second main surface 19 is a touch panel that receives a touch operation by a user. The substrate 11 includes an electrostatic capacitance sensor, not shown, for detecting a touch operation. The substrate 11 is an example of a "flat plate" in the present invention.

The vibrator 12 is connected to the first main surface 18 of the substrate 11. The vibrator 12 is connected to the substrate 11 via a double-sided tape 15. The double-sided adhesive tape 15 is an example of the "connecting member" in the present invention. The connecting member may be a member other than a double-sided tape as long as it is a member for connecting the vibrator 12 and the substrate 11. The vibrator 12 is connected to a driving circuit, not shown, and constitutes a vibration unit together with the substrate 11.

Fig. 3 (a) is a rear perspective view of the transducer 12, and fig. 3 (B) is a cross-sectional view taken along line II-II shown in fig. 3 (a). As shown in fig. 3 (a), the transducer 12 has a substantially flat plate shape. The vibrator 12 is substantially rectangular in plan view. The area of the vibrator 12 is smaller than the area of the first main surface 18 of the substrate 11. The short side direction of transducer 12 is parallel to the X-axis direction, and the long side direction of transducer 12 is parallel to the Y-axis direction.

As shown in fig. 3 (a) and 3 (B), the vibrator 12 includes a vibration film 33, a support portion 35, a frame member 36, a vibration portion 38, and a connection portion 39.

The frame member 36 has a rectangular shape in plan view. The frame-like member 36 has two first openings 31 and two second openings 32. The first openings 31 are disposed on both ends of the frame-like member 36 in the Y-axis direction, which is the longitudinal direction. The second openings 32 are disposed on both ends of the frame-like member 36 in the X-axis direction, which is the short-side direction. The first opening 31 is substantially rectangular and is long in the X-axis direction. The second opening 32 is a substantially rectangular opening that is long in the Y-axis direction. Both ends of the second opening 32 in the Y-axis direction extend in a rectangular shape toward the central axis of the frame member 36 (line II-II in the figure).

The vibrating portion 38 is rectangular in plan view and is disposed inside the frame member 36. The area of the vibrating portion 38 is smaller than the area surrounded by the frame-like member 36.

The support portion 35 connects the vibrating portion 38 and the frame member 36. The support portion 35 supports the vibration portion 38 to the frame member 36. In this example, the support portion 35 is a rectangle elongated in the X axis direction, and holds the vibration portion 38 at both ends of the vibration portion 38 in the Y axis direction. The length of the support portion 35 in the X axis direction is longer than the length in the Y axis direction.

The frame-like member 36, the vibrating portion 38, and the support portion 35 are formed of the same member (for example, acrylic resin, PET, polycarbonate, epoxy glass, FRP, metal, glass, or the like). Examples of the metal include SUS (stainless steel material), and if necessary, the metal may be coated with a resin such as polyimide to be insulated.

The frame member 36, the vibrating portion 38, and the supporting portion 35 are formed by punching one rectangular plate member along the shapes of the first opening 31 and the second opening 32. The frame-like member 36, the vibrating portion 38, and the supporting portion 35 may be different members, but they can be easily manufactured by forming them from the same member. Alternatively, the frame-like member 36, the vibrating portion 38, and the supporting portion 35 are formed of the same member, and thus it is not necessary to use another member (a member having creep deterioration) such as rubber for supporting the vibrating portion 38. Therefore, the frame member 36 can stably hold the vibrating portion 38 for a long period of time.

The vibration film 33 is connected to the frame member 36 and the vibration part 38 via a connection part 39. A first end of the vibration film 33 in the longitudinal direction is connected to a first end of the frame member 36 in the Y-axis direction. The second end of the vibration film 33 is connected to the second end of the vibrating portion 38 in the Y-axis direction. The connection portion 39 is made of an insulating and adhesive material. The vibration film 33 is connected to the frame member 36 through a connection portion 39 by thermal welding, for example.

The connecting portion 39 is a rectangle that is long along the short side direction of the frame-like member 36 in a plan view. The connecting portion 39 has a certain thickness, and connects the diaphragm 33 and the vibrating portion 38 at a position separated by a certain distance so that the diaphragm 33 does not contact the vibrating portion 38. Thus, the electrodes, not shown, provided on both main surfaces of the vibration film 33 do not contact the vibration portion 38, and therefore, even if the vibration film 33 expands and contracts and the vibration portion 38 vibrates, the electrodes are not scratched.

The vibration film 33 is an example of a piezoelectric film that vibrates by deforming in the plane direction when a voltage is applied. The diaphragm 33 has a rectangular shape elongated in the longitudinal direction of the frame member 36 in plan view. The vibration film 33 is made of, for example, polyvinylidene fluoride (PVDF). The vibration film 33 may be formed of a chiral polymer. Examples of the chiral polymer include levorotatory polylactic acid (PLLA) and dextrorotatory polylactic acid (PDLA).

In the case where PVDF is used as the vibration film 33, since PVDF has water resistance, the electronic device including the vibration member in this example can vibrate in the same manner in any humidity environment.

In addition, when PLLA is used for the diaphragm 33, PLLA is a highly permeable material, and therefore if the electrode and the vibrating portion attached to PLLA are transparent materials, the internal state of the device can be visually recognized, and thus the manufacturing is easy. PLLA has no pyroelectricity, and therefore can vibrate similarly in any temperature environment. When the vibration film 33 is formed of PLLA, the outer peripheries thereof are cut so as to be at substantially 45 ° with respect to the extending direction, and are stretchable in the Y-axis direction.

A driving circuit, not shown, applies a voltage to the vibration film 33 to expand and contract the vibration film 33. The vibration film 33 deforms in the planar direction when a voltage is applied. Specifically, the diaphragm 33 expands and contracts in the Y-axis direction when a voltage is applied. The vibrating portion 38 vibrates in the Y-axis direction by the expansion and contraction of the vibrating membrane 33 in the Y-axis direction. That is, the vibrator 12 vibrates in the Y-axis direction. Thereby, the vibration generated in vibrator 12 is transmitted to the user via substrate 11.

It should be noted that vibrator 12 may vibrate in the XY plane direction, and the method of vibrating vibrator 12 is not limited to the above example. For example, a motor or the like may be used to vibrate the vibrator 12.

The casing 13 has a rectangular shape in plan view. The housing 13 includes an opening 16. The housing 13 is made of metal such as aluminum.

The opening 16 is rectangular in plan view. The opening 16 is formed to have a smaller area than the substrate 11 in a plan view. In a plan view, the case 13 has an opening 16 formed at a position overlapping the substrate 11. The case 13 is connected to the second main surface 19 of the substrate 11 via the cushion material 14. The user can directly contact the substrate 11 through the space surrounded by the opening 16 and the cushion material 14. In the present embodiment, the substrate 11 is an example of the "member held by the case" in the present invention.

The cushion member 14 is formed of a material that is more easily deformed when an external force is applied thereto than the case 13 and the substrate 11. Therefore, the cushion member 14 suppresses the restriction of the substrate 11 by the case 13 when the substrate 11 and the case 13 are connected. Therefore, the cushion member 14 connects the substrate 11 to the case 13 without hindering the vibration of the substrate 11. The buffer 14 is an example of the "buffer" in the present invention.

The buffer 14 is formed in a frame shape. The cushion member 14 has a rectangular frame shape in plan view. The cushion member 14 is disposed at a position spaced apart from the opening 16 by a predetermined distance in a plan view. The outer periphery of the cushion material 14 overlaps the outer periphery of the substrate 11 in plan view. The buffer material 14 may partially overlap the substrate 11 in a plan view.

The cushion material 14 is preferably disposed so as to surround the opening 16 in a plan view. Further, the cushion member 14 is enclosed between the case 13 and the substrate 11. Therefore, even if water splashes into the opening 16 of the case 13, if the cushion member 14 is made of a material such as rubber through which water does not pass, water can be prevented from entering the internal space on the case 13 side.

As shown in fig. 2 (a) and 2 (B), a thickness L1 of the cushion 14 in the Z-axis direction, that is, the Z-axis direction of the vibrator 12 is greater than a length L2 of the gap between the second main surface 19 of the substrate 11 and the case 13. That is, the thickness L1 of the cushion material 14 in the Z-axis direction can be secured to be equal to or greater than the length L2 of the gap between the second main surface 19 of the substrate 11 and the case 13. The thicker the thickness L1 of the cushion member 14 in the Z-axis direction, the higher the flexibility in the planar direction. The higher the flexibility of the cushion member 14 in the planar direction, the more likely the substrate 11 vibrates. Therefore, the cushion member 14 can suppress the restriction of the case 13 to the substrate 11.

The concave portion 17 is formed at a position where the case 13 contacts the buffer 14. That is, the recess 17 is formed at a position spaced apart from the end face 131 of the case 13 forming the opening 16 toward the end face 132 on the outer side of the case 13 by a predetermined distance in a plan view. The recess 17 is an example of a "notch" in the present invention.

The recess 17 is a groove having a rectangular cross section when cut by an XZ plane or a YZ plane, and is configured such that a part of a surface of the case 13 facing the substrate 11 is recessed toward the inside of the case 13. The cross section when cut by the XY plane of the concave portion 17 is formed to be slightly larger than the cross section when cut by the XY plane of the cushion member 14. Therefore, the cushion member 14 can enter the concave portion 17. Further, since the cushion member 14 is not restricted by the side surfaces of the depressed portions 17, the movement with respect to the XY plane is not suppressed.

By forming the concave portion 17, a part of the cushion member 14 is connected to the case 13 in a state of being entered to the case 13 side. The thickness of the entire vibrating structure 101 in the Z-axis direction is reduced by the amount of the buffer 14 entering the case 13 side. As a result, the thickness of the entire vibrating structure 101 in the Z-axis direction can be reduced as compared with the case where the recess 17 is not formed in the case 13, and an increase in the volume of the vibrating structure 101 can be suppressed.

In the present embodiment, the cushion member 14 has a frame shape surrounding the opening 16 in a plan view, but is not limited to this form. The cushion material 14 may be disposed at least partially around the opening 16. For example, the cushion material 14 may be disposed at one or more positions around the opening 16.

In the present embodiment, the case 13 is a case of an electronic device in which the vibration structure 101 is provided, but the present invention is not limited to this form.

Fig. 4 (a) is a cross-sectional view of the vibrating structure 102 according to the second embodiment, and fig. 4 (B) is a partially enlarged view of fig. 4 (a). In the description of the second embodiment, only the portions different from the first embodiment will be described, and will be omitted.

As shown in fig. 4 (a), the vibrating structure 102 is different from the vibrating structure 101 in that a stepped portion 27 is formed in the case 13 instead of the recess 17. The other structures are the same as the vibration structure 101. In the vibrating structure 102, the step portion 27 is formed along the opening portion 16 in a plan view. That is, in a plan view, the step portion 27 has a shape in which a part of the end surface 131 is recessed from the end surface 131 on the inner side of the case 13 toward the end surface 132 on the outer side of the case 13. The step portion 27 is an example of the "notch" in the present invention.

In the vibrating structure 102, the cushion 14 is disposed along the outside of the opening 16 in a plan view. The side surface 141 of the cushion member 14 is not restricted by the case 13, and therefore, the movement of the cushion member 14 with respect to the XY plane is not suppressed. The side surface 141 inside the cushion material 14 does not contact the case 13 even when the cushion material 14 is deformed. Therefore, the degree of freedom of movement of the cushion member 14 with respect to the XY plane increases. Further, the cushion member 14 is connected to the housing 13 in a state of being inserted into the housing 13 side through the step portion 27. Therefore, the thickness of the entire vibrating structure 102 in the Z-axis direction can be made thinner than in the case where the stepped portion 27 is not formed in the case 13. Therefore, the vibration structure 102 can suppress the restriction of the case 13 to the substrate 11 and suppress the increase in volume.

Fig. 5 (a) is a cross-sectional view of the vibrating structure 103 according to the third embodiment, and fig. 5 (B) is a partially enlarged view of fig. 5 (a). In the description of the third embodiment, only the portions different from the second embodiment will be described, and will be omitted.

As shown in fig. 5 (a), in vibration structure 103, a step portion 37 is formed in housing 13 instead of step portion 27, and the arrangement of cushion member 14 with respect to housing 13 is different from vibration structure 102. The same as the vibrating structure 102 for the other structures. In the vibrating structure 103, the step portion 37 is formed on the inner end surface 131 of the case 13 in a plan view. The step portion 37 is formed along the opening portion 16 in a plan view. That is, the stepped portion 37 has a shape in which a part of the end surface 131 is recessed from the end surface 131 on the inner side of the case 13 toward the end surface 132 on the outer side of the case 13 in a plan view.

In the vibrating structure 103, the cushion member 14 is connected to the inner end surface 131 of the case 13. That is, the cushion member 14 is disposed along the inside of the opening 16 in a plan view. The cushion member 14 is not connected to the portion of the inner end surface 131 of the housing 13 where the step 37 is provided. The cushion member 14 is not restricted by the housing 13 by the height of the step portion 37 in the Z-axis direction. Therefore, the vibration structure 103 can also suppress the restriction of the case 13 to the substrate 11 and suppress the increase in volume.

Fig. 6 (a) is a diagram for explaining the vibration structure 104 according to modification 1 of the vibration structure 101, and fig. 6 (B) is a diagram for explaining the vibration structure 105 according to modification 2 of the vibration structure 101. Fig. 7 is a diagram for explaining vibration structure 106 according to modification 3 of vibration structure 101. In the description of modification 1 and modification 3, only the portions different from the first embodiment will be described, and will not be described later. In the description of modification 2, only the portions different from vibration structure 104 according to modification 1 will be described, and will not be described later.

As shown in fig. 6 (a), the vibration structure 104 differs from the vibration structure 101 in that a buffer member 24 is used instead of the buffer member 14, and is otherwise the same as that of the other structure. In the vibrating structure 104, the cross-sectional area of the damper 24 in the XY plane varies along the Z-axis direction. The buffer member 24 is thickened at both ends and thinned at the center in the Z-axis direction. The cushioning material 24 becomes thin and becomes more flexible in the planar direction. When the flexibility of the cushion material 24 is increased, the cushion material 24 easily follows the vibration of the substrate 11. Therefore, the cushion member 24 can further suppress the restriction of the substrate 11 by the case 13.

In addition, the side surface 242 of the cushion member 24 becomes farther from the side surface of the case 13 formed by the concave portion 17, and therefore is less likely to come into contact with the case 13. This increases the degree of freedom of movement of the cushion member 24 with respect to the XY plane. If the degree of freedom of movement of the cushion material 24 with respect to the XY plane increases, the cushion material 24 easily follows the vibration of the substrate 11. Therefore, the cushion material 24 can further suppress the restriction of the case 13 to the substrate 11.

The buffer member 24 is formed thick at both ends in the Z-axis direction. This widens the area of connection between the cushion material 24 and the case 13 and between the cushion material 24 and the substrate 11. Therefore, the cushion material 24 can be firmly connected to the case 13 and the substrate 11.

As shown in fig. 6 (B), the vibration structure 105 is different from the vibration structure 104 in that a damper 34 is used instead of the damper 24, and is the same as the other structure. In the vibrating structure 105, the cross-sectional area of the damper 34 in the XY plane changes along the Z-axis direction, and is tapered. The cushion member 34 is thicker on the substrate 11 side and thinner on the case 13 side in the Z-axis direction. The cushion member 34 may be thicker on the case 13 side and thinner on the substrate 11 side in the Z-axis direction.

The shape in which the cushion 34 is thickened toward the substrate 11 and thinned toward the case 13 along the Z-axis direction is more preferable than the shape in which the case 13 is thickened and thinned toward the substrate 11 along the Z-axis direction. The damper 34 is tapered along the Z-axis direction housing 13 side, so the side 342 of the damper 34 becomes farther from the side of the housing 13 formed by the recess 17. Therefore, the buffer 34 is less likely to contact the housing 13. Therefore, the degree of freedom of movement of the cushion member 34 with respect to the XY plane increases. If the degree of freedom of movement of the cushion member 34 with respect to the XY plane increases, the cushion member 34 easily follows the vibration of the substrate 11. Therefore, the cushion member 34 can further suppress the restriction of the case 13 to the substrate 11.

As shown in fig. 7, the vibration structure 106 is different from the vibration structure 101 in that a recess 47 is formed in place of the recess 17, and is the same as the other structures. In the vibrating structure 106, the recess 47 is a groove whose cross section when cut by the XZ plane or the YZ plane expands from the case 13 side toward the substrate 11. The recess 47 is a structure in which a part of the surface of the housing 13 facing the substrate 11 is recessed toward the inside of the housing 13. The cross section of the recess 47 when cut along the XY plane is a shape extending from the inner side of the case 13 toward the outer side of the case 13, that is, toward the surface side of the case 13 facing the substrate 11. Therefore, the side 142 of the cushion member 14 becomes farther from the side of the case 13 formed by the concave portion 47 toward the outside of the case 13, and thus is less likely to come into contact with the case 13. Therefore, the degree of freedom of movement of the cushion member 14 with respect to the XY plane increases. If the degree of freedom of movement of the cushion member 14 with respect to the XY plane increases, the cushion member 14 easily follows the vibration of the substrate 11. Therefore, the concave portion 47 can further suppress the restriction of the substrate 11 by the case 13.

Fig. 8 (a) is an exploded perspective view of the vibration structure 201 according to the fourth embodiment, and fig. 8 (B) is a plan view of the vibration structure 201 viewed from the + Z direction toward the-Z direction. Fig. 9 (a) is a cross-sectional view taken along line III-III shown in fig. 8 (B), and fig. 9 (B) is a partially enlarged view of fig. 9 (a). Fig. 8 (B) shows a part overlapping the substrate 11 through the substrate 11 by a broken line. In the description of the fourth embodiment, only the portions different from the first embodiment will be described, and the description thereof will be omitted.

As shown in fig. 8 (a), 8 (B), and 9 (a), the vibration structure 201 of the present embodiment includes a substrate 11, a vibrator 12, a case 13, a cushion material 14, and a double-sided tape 15. The vibrator 12 is connected to the first main surface 18 of the substrate 11 via a double-sided tape 15. The vibrator 12 constitutes a vibration unit together with the substrate 11.

The case 13 is connected to the vibrator 12 via a cushion 14. The outer periphery of the cushion 14 overlaps the outer periphery of the vibrator 12 in plan view. In addition, the cushion 14 may be overlapped with the frame-shaped member 36 of the vibrator 12 in a plan view. In this way, the member held by the case may be the vibrator 12.

As shown in fig. 9 (B), a recess 17 is formed in the housing 13. By forming the concave portion 17, a part of the cushion member 14 is connected to the housing 13 in a state of being inserted into the housing 13 side. As a result, the thickness of the entire vibration structure 201 in the Z-axis direction can be reduced as compared with the case where the recess 17 is not formed in the case 13, and an increase in volume of the vibration structure 201 can be suppressed.

The thickness L1 of the cushion member 14 in the Z-axis direction is greater than the length L2 of the gap between the vibrator 12 and the case 13. That is, the thickness L1 of the cushion member 14 in the Z-axis direction can be secured to be equal to or greater than the length L2 of the gap between the vibrator 12 and the case 13. This can suppress the restriction of the case 13 to the substrate 11 by the cushion member 14.

Finally, the description of the present embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated not by the above embodiments but by the claims. The scope of the present invention is intended to include meanings equivalent to the claims and all modifications within the scope.

Description of the reference numerals

11 … a substrate; 12 … vibrator; 13 … a housing; 14. 24, 34 … bumpers (bumpers); 15 … double-sided adhesive tape; 16 … opening part; 17. 47 … recess (notch); 18 … a first major face; 19 … second major face; 27. 37 … step (notch); 101. 102, 103, 104, 105, 201 … vibrating structure; l1 … thickness (thickness of the buffer in the direction orthogonal to the planar direction); l2 … length (length of gap between the component held by the housing and the housing).

Claims

1. A vibration structure is characterized by comprising:

a vibrator configured to vibrate in a planar direction;

a case holding the vibrator; and

a buffer member connected to the member held by the housing and the housing,

the thickness of the buffer in the direction orthogonal to the planar direction is greater than the gap between the member held by the housing and the housing.

2. The vibration structure according to claim 1, further comprising:

a plate having a first major surface and a second major surface; and

and a connection member connecting the first main surface of the flat plate and the vibrator.

3. Vibrating structure according to claim 2,

an opening is formed at a position where the case and the flat plate overlap each other in a plan view,

the case holds the flat plate and the vibrator via the buffer,

the thickness of the buffer member is larger than the gap between the second main surface and the case.

4. Vibrating structure according to claim 3,

the buffer member is disposed at a position spaced apart from the opening by a predetermined distance in a plan view.

5. Vibrating structure according to claim 3,

the buffer member is disposed along the opening in a plan view.

6. The vibrating structure according to any one of claims 3 to 5,

the buffer member is disposed so as to surround the opening in a plan view.

7. The vibrating structure according to any one of claims 1 to 5,

the housing is formed with a notch at a position contacting the buffer.

8. Vibrating structure according to claim 6,

the housing is formed with a notch at a position contacting the buffer.

9. Vibrating structure according to claim 7,

the housing has a recess formed at least at a position where the housing contacts the buffer member.

10. Vibrating structure according to claim 8,