CN216902800U - Excimer lamp exciter for solving EMI - Google Patents

Excimer lamp exciter for solving EMI Download PDF

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CN216902800U
CN216902800U CN202123102529.9U CN202123102529U CN216902800U CN 216902800 U CN216902800 U CN 216902800U CN 202123102529 U CN202123102529 U CN 202123102529U CN 216902800 U CN216902800 U CN 216902800U
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林延军
罗云
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Zhejiang kaiyao Lighting Co Ltd
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Zhejiang kaiyao Lighting Co Ltd
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes

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Abstract

The utility model discloses an excimer lamp exciter for solving EMI (electro magnetic interference), which comprises an EMC (electro magnetic compatibility) filter circuit, a rectifier bridge circuit, an APFC (active power factor filter) circuit for correcting an input current power factor, an alternative conduction circuit, an LLC (logical link control) resonance circuit and a boost output circuit which are connected in sequence, wherein a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A. According to the technical scheme, the large impedance of the band-pass filter is adopted for blocking strong interference in the range of the fundamental frequency band, the low impedance is adopted for dredging independent pulses in working frequency multiplication, and the electromagnetic interference generated during discharge of high-pressure gas is effectively solved, so that the working process of the excimer lamp is optimized, and the commercialization of products is realized.

Description

Excimer lamp exciter for solving EMI
Technical Field
The utility model relates to the technical field of excimer gas discharge lamps, in particular to an excimer lamp exciter for solving EMI (electro-magnetic interference).
Background
With the rapid development of global biomedical science, the method can detect more germs which bring harm to human survival, can effectively inactivate physically without residues, and is always the direction of joint efforts of the scientific community. Excimer UV lamps are the latest technological achievement today and emit UV light at specific wavelengths. Because the output energy is concentrated and the output intensity is high, the deactivation of viruses, bacteria and microorganisms can be carried out according to different nanometer wavelengths, and urban sewage and air purification and photochemical reaction can be carried out, so that the nano-composite material is used for synthesizing new nano-materials and the like.
The excimer 222nm UV lamp is the latest scientific and technological achievement at present, can emit ultraviolet light with specific wavelength, has very concentrated output energy and high intensity, and can effectively kill light contact germs. Particularly, deep ultraviolet light having a wavelength of 230nm or less has an ultra-short wavelength and a weak transmittance. The deep ultraviolet light with the wavelength below 230nm is scientifically found to be harmless to human bodies and eyes, and can effectively penetrate through bacteria in the air, so that people can coexist in a certain time under the condition of ultraviolet light.
However, the data show that the excimer high-pressure gas discharge lamp has a great difference from the conventional xenon lamp, nano lamp and fluorescent lamp, and the discharge state of the conventional discharge lamp is hardly seen after the high-pressure activation and lighting because the lamp tube characteristic operating voltage is below 280V. Before the excimer lamp is lighted and after the excimer lamp works, the high voltage is almost 2kV unchanged, so that strong high voltage and high frequency are caused to discharge arc in the lamp tube for a long time. The current spike generated by the obvious arcing discharge can seriously affect the normal operation of the local machine or other equipment. Therefore, how to solve the problem of electromagnetic compatibility under high frequency and high voltage becomes a new challenge.
Chinese patent document CN213583699U discloses a radio frequency electrodeless excimer curing lamp. The plasma lamp tube comprises a plasma lamp tube, a reflecting cover, two focalizers and two radio frequency sources, wherein a luminescent substance for ionization excitation is filled in the plasma lamp tube and used for emitting ultraviolet light, the two focalizers are respectively arranged at two ends of the plasma lamp tube, at least part of the luminescent substance is positioned in a focusing area of the focalizers, the two radio frequency sources are respectively arranged on the two focalizers, the reflecting cover is arranged on the plasma lamp tube and used for adjusting the irradiation direction of the plasma lamp tube. The technical scheme can seriously affect the normal operation of the machine or other equipment when facing the electromagnetic compatibility under high frequency and high voltage.
Disclosure of Invention
The utility model mainly solves the technical problem that the normal operation of a machine or other equipment can be seriously influenced when the electromagnetic compatibility under high frequency and high voltage is faced by the original technical scheme, and provides an excimer lamp exciter for solving the EMI.
The technical problem of the utility model is mainly solved by the following technical scheme: the utility model comprises an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternate conduction circuit, an LLC resonance circuit and a boost output circuit which are connected in sequence, wherein a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A. The excimer lamp exciter adopts AC 120-277V input voltage, is protected by a fuse F11 for input, an EMC filter is formed by L11, C11 and other devices, then is rectified by a DS11-DS14 forming a rectifier bridge and then is converted into direct current by C21 filtering, then is boosted to DC410V through an input current power factor correction circuit APFC circuit formed by US21 control MOS Q21 and L21 and loaded on a C22 electrolytic capacitor, then is sent to a half-bridge control IC US31 by a DC-AC control IC US41 to drive QS41 and QS42 to be alternately conducted, then forms an LLC resonance circuit by L42 and L41, and C43 and C44, and outputs a half-bridge voltage with a frequency of 110KHZ and a pulsating voltage of 3500V AC by X42A and X41A terminals to excite the excimer lamp to emit light.
Preferably, the EMC filter circuit includes a common mode inductor L11, one end of an input end of the common mode inductor L11 is connected to a fuse F11, one end of an output end of the common mode inductor L11 is connected to an inductor L12A, the other end of the input end of the common mode inductor L11 is connected to a power supply terminal X11B, the other end of the output end of the common mode inductor L12B, a capacitor C11 is disposed between one end of the input end of the common mode inductor L11 and the other end of the input end of the common mode inductor L11, the other end of the inductor L12A is connected to one end of an input end of a common mode inductor L12, one end of an output end of the common mode inductor L12 is connected to one end of an input end of a common mode inductor L13, the other end of the inductor L12B is connected to the other end of an input end of a common mode inductor L12, the other end of an output end of the common mode inductor L12 is connected to the other end of an input end of a common mode inductor L13, one end of an inductor L12A is connected to a power supply terminal X11C through a capacitor C13B, the other end of an inductor L12A is connected to a power supply terminal X11C through a capacitor C13C, one end of an inductor L12B is connected to a power supply terminal X11C through a capacitor C13A, one end of an inductor L12B is connected with a power supply end X11C through a capacitor C13D, a capacitor C15 is connected in parallel between one end of the input end of the common mode inductor L13 and the other end of the input end of the common mode inductor L13, and one end of the output end of the common mode inductor L13 and the other end of the output end of the common mode inductor L13 are connected with the rectifier bridge circuit.
Preferably, the rectifier bridge circuit comprises a diode DS11 and a diode DS13 which are connected in series, and a diode DS12 and a diode DS14 which are connected in series, the diode DS11 and the diode DS13 which are connected in parallel with the diode DS12 and the diode DS14 which are connected in series, and anodes of the diode DS13 and the diode DS14 are connected with a power supply end X21B.
Preferably, the APFC circuit includes a chip US21, a pin 1 of the chip US21 is grounded through a source end resistor RS26D, a source end resistor RS26C, a source end resistor RS26B, a source end resistor RS26A and a capacitor C22 in sequence, and is grounded through a source end resistor RS26F at the same time, a pin 2 is connected with the pin 1 through a capacitor CS26 and is connected with the pin 1 through a source end resistor RS23 and a capacitor CS27 in sequence, a pin 3 is grounded through a capacitor CS29 and is grounded through a source end resistor RS21E and a source end resistor CS 21E in sequence, a pin 3 is grounded through a source end resistor RS E and a source end resistor CS E in sequence, a pin 4 is grounded through a capacitor C E and a source end resistor RS E and a source end resistor E in sequence, a resistor RS E, a source end resistor 68525 and a source end resistor E connected in parallel are arranged between the resistor RS E and the ground terminal RS E, the ground through a resistor RS E and a ground terminal E, a source end resistor E and a resistor E in sequence, a resistor E and a source end resistor E in sequence, pin 6 is grounded, pin 7 is connected to the base of MOS Q21, the emitter of MOS Q21 is grounded through parallel connected source resistor RS25A, source resistor RS25B and source resistor RS25C, the collector of MOS Q21 is grounded through capacitor CS21 and connected to diode DS21A, and pin 8 is grounded through capacitor CS28 and connected to the power supply.
Preferably, the alternately conducting circuit comprises a DC-AC half-bridge control IC US31 and a half-bridge drive IC US41, pin 1 of US31 is connected to pin 16 through a source resistor RS31B while being grounded through a capacitor CS33 and a source resistor RS33B connected in parallel, pin 9 is connected through a source resistor RS36, pin 2 is connected to pin 16 through a capacitor CS34 and a source resistor RS33A connected in parallel while being grounded through a source resistor RS31A, pin 5 is connected to pin 7 through a capacitor CS31 while being grounded through a source resistor RS34, pin 6 is connected to the collector of MOS Q33 through a source resistor RS35A and a source resistor RS35B connected in parallel while being grounded, the emitter of MOS Q33 is connected to pin 6 through a source resistor RS35C, the base of MOS Q33 is connected to pin 8 through a resistor RS35D, pin 8 is connected to ground through a capacitor CS32, and pin 9 is connected to ground through a capacitor CS35, pin 10 is connected to ground through a capacitor CS37 and is connected to pin 5 of US41 through a capacitor CS68, pin 11 of US31 is connected to pin 2 of US41, pin 12 of US31 is connected to ground, pin 13 is connected to ground through a capacitor CS66, pin 14 is connected to pin 1 of US41, pin 15 of US31 is connected to ground through a capacitor CS66 and is connected to pin 5 of US 66, pin 3 of US 66 is connected to ground, pin 4 is connected to one end of a source end resistor RS42 66 through a parallel capacitor CS66 and a diode DS 66, the other end of resistor RS42 66 is connected to the base of MOS Q66 and is connected to the emitter of MOS Q66 through a source end resistor RS42 66, the emitter of MOS Q66 is connected to ground through a parallel source end resistor RS 66, source end resistor RS46 66, resistor 66, collector of MOS Q66 and the collector of MOS Q66 are connected to the emitter of the MOS Q66 through a diode CS 6856, pin 5 is connected to pin 8 through diode DS61 while being grounded through parallel capacitor C67 and capacitor CS67, pin 6 is connected to the emitter of MOS Q41 while being connected to the base of MOS Q41 through source resistor RS4, the collector of MOS Q41 is connected to the emitter of MOS Q41 through diode DS41 while being connected to the base of MOS Q3626 through inductor LS47 and capacitor C41 in turn, pin 7 is connected to one end of source resistor RS41A through parallel capacitor CS45 and diode DS44, the other end of source resistor RS41A is connected to the base of MOS Q41, and pin 8 is connected to pin 6 through capacitor CS 41.
Preferably, the LLC resonant circuit includes an inductor L41A and an inductor L41B connected in series, the other end of the inductor L41A is connected to the other end of the inductor L41B through an inductor L42, a capacitor C42A, a source end resistor RS43A, a source end resistor RS43B, and a source end resistor RS43C in sequence, and is connected to the other end of the inductor L41B through an inductor L42, a capacitor C42B, a source end resistor RS44C, a source end resistor RS44B, and a source end resistor RS44A in sequence, and the other end of the inductor L41B is connected to the capacitor C42A through a capacitor C43 and is connected to the capacitor C42B through a capacitor C44.
Preferably, the boost output circuit includes an inductor L41C, one end of the inductor L41C is connected to a power supply terminal X41A through an inductor LS49, the other end of the inductor L41C is connected to a power supply terminal X42A through an inductor LS50, and a capacitor C47A, a source resistor RS45A and a capacitor C47B are connected in series between two ends of the inductor L41C.
The beneficial effects of the utility model are: the band-pass filter is used for blocking strong interference in the range of the fundamental frequency band, the low-pass filter is used for dredging low impedance for independent pulses in working frequency multiplication, and electromagnetic interference generated during discharge of high-pressure gas is effectively solved, so that the working process of the excimer lamp is optimized, and commercialization of products is realized.
Drawings
Fig. 1 is an EMC filter circuit diagram of the present invention.
Fig. 2 is a circuit diagram of a typical application of the main body of a circuit of the utility model.
Detailed Description
The technical scheme of the utility model is further specifically described by the following embodiments and the accompanying drawings.
Example (b): an excimer lamp exciter for solving EMI of the present embodiment, as shown in fig. 1 and fig. 2, includes an EMC filter circuit, a rectifier bridge circuit, an APFC line for input current power factor correction, an alternate conduction circuit, an LLC resonant circuit, and a boost output circuit, which are connected in sequence, and a fuse F11 is disposed between the EMC filter circuit and a power supply terminal X11A.
The EMC filter circuit comprises a common mode inductor L11, one end of an input end of a common mode inductor L11 is connected with a fuse F11, one end of an output end of the common mode inductor L11 is connected with an inductor L12A, the other end of an input end of the common mode inductor L11 is connected with a power supply end X11B, the other end of the output end of the common mode inductor L12B, a capacitor C11 is arranged between one end of an input end of the common mode inductor L11 and the other end of an input end of a common mode inductor L11, the other end of the inductor L12A is connected with one end of an input end of a common mode inductor L12, one end of an output end of the common mode inductor L12 is connected with one end of an input end of a common mode inductor L13, the other end of an inductor L12B is connected with the other end of an input end of a common mode inductor L12, the other end of an output end of a common mode inductor L12 is connected with the other end of an input end of a common mode inductor L13, one end of an inductor L12A is connected with a power supply end X11C through a capacitor C13B, the other end of an inductor L12A is connected with a power supply end X11C through a capacitor C13C, one end of an inductor L12B is connected with a power supply end of a power supply end X11C through a capacitor C13A, one end of an inductor L12B is connected with a power supply end X11C through a capacitor C13D, a capacitor C15 is connected in parallel between one end of the input end of the common mode inductor L13 and the other end of the input end of the common mode inductor L13, and one end of the output end of the common mode inductor L13 and the other end of the output end of the common mode inductor L13 are connected with the rectifier bridge circuit.
The rectifier bridge circuit comprises a diode DS11 and a diode DS13 which are connected in series, and a diode DS12 and a diode DS14 which are connected in series, wherein the diode DS11 and the diode DS13 which are connected in series are connected in parallel with the diode DS12 and the diode DS14 which are connected in series, and anodes of the diode DS13 and the diode DS14 are connected with a power supply end X21B.
The APFC circuit comprises a chip US21, a pin 1 of the chip US21 is grounded through a source end resistor RS26D, a source end resistor RS26C, a source end resistor RS26B and a source end resistor RS26A in sequence and a capacitor C22, and is grounded through a source end resistor RS26F, a pin 2 is connected with the pin 1 through a capacitor CS26 and is connected with the pin 1 through a source end resistor RS23 and a capacitor CS27 in sequence, a pin 3 is grounded through a capacitor CS29 and is grounded through a source end resistor RS21E and a source end resistor CS 21E in sequence, the pin 3 is grounded through a source end resistor RS21E, a source end resistor RS 68521E, a source end resistor RS E, a resistor RS E, an inductor L21E, a diode DS 68521E and a capacitor C E in sequence, the source end 4 is grounded through a capacitor C E and a resistor RS E and a resistor E, the pin E, the source end resistor RS E and the ground is connected in parallel, and the ground is connected between the resistor RS E and the ground in sequence, pin 7 is connected to the base of MOS Q21, the emitter of MOS Q21 is grounded through parallel connected source resistor RS25A, source resistor RS25B and source resistor RS25C, the collector of MOS Q21 is grounded through capacitor CS21 and connected to diode DS21A, and pin 8 is grounded through capacitor CS28 and connected to the power supply.
The alternate conduction circuit comprises a DC-AC half-bridge control IC US31 and a half-bridge drive IC US41, wherein a pin 1 of US31 is connected with a pin 16 through a source resistor RS31B and a source resistor RS36 while being grounded through a capacitor CS33 and a source resistor RS33B which are connected in parallel, a pin 2 is connected with a pin 16 through a source resistor RS31A while being grounded through a capacitor CS34 and a source resistor RS33A which are connected in parallel, a pin 5 is connected with a pin 7 through a source resistor RS34 while being grounded through a capacitor CS31, a pin 6 is connected with a collector of a MOS Q33 while being grounded through a source resistor RS35A and a source resistor RS35B which are connected in parallel, an emitter of the MOS Q33 is connected with a pin 6 through a source resistor RS35C, a base of a source of the MOS Q33 is connected with a pin 8 through a resistor RS35D and a capacitor CS32 while the pin 9 is grounded through a capacitor CS35, and the pin 10 is connected with the US41 while being grounded through a capacitor CS6, pin 11 of US31 is connected to pin 2 of US41, pin 12 of US31 is grounded, pin 13 is grounded through a capacitor CS66, pin 14 is connected to pin 1 of US41, pin 15 of US31 is grounded through a capacitor CS66 and is connected to pin 5 of US41, pin 3 of US41 is grounded, pin 4 is connected to one end of a source resistor RS42 46 through a capacitor CS46 and a diode DS 46 connected in parallel, the other end of the source resistor RS42 46 is connected to the base of MOS Q46 and is connected to the emitter of MOS Q46 through a source resistor RS42 46, the emitter of MOS Q46 is connected to the emitter of MOS Q46 through a source resistor RS46 46, a resistor RS 68546 46, a source resistor RS46, a resistor RS46, a resistor RS46, a resistor 46 and a resistor RS46 connected to ground, the collector of MOS Q46 is connected to the emitter of MOS Q46 through a diode DS 46 and is connected to the inductor LS 6, the pin CS46, and the capacitor CS46 are connected in parallel, the pin 6 is connected with the emitter of the MOS Q41 and is connected with the base of the MOS Q41 through a source end resistor RS4, the collector of the MOS Q41 is connected with the emitter of the MOS Q41 through a diode DS41 and is sequentially grounded through an inductor LS47 and a capacitor C41, the pin 7 is connected with one end of a source end resistor RS41A through a parallel capacitor CS45 and a diode DS44, the other end of the source end resistor RS41A is connected with the base of the MOS Q41, and the pin 8 is connected with the pin 6 through a capacitor CS 41.
The LLC resonant circuit comprises an inductor L41A and an inductor L41B which are connected in series, the other end of the inductor L41A is connected with the other end of the inductor L41B through an inductor L42, a capacitor C42A, a source end resistor RS43A, a source end resistor RS43B and a source end resistor RS43C in sequence, and is connected with the other end of the inductor L41B through an inductor L42, a capacitor C42B, a source end resistor RS44C, a source end resistor RS44B and a source end resistor RS44A in sequence, and the other end of the inductor L41B is connected with a capacitor C42A through a capacitor C43 and is connected with a capacitor C42B through a capacitor C44.
The boost output circuit comprises an inductor L41C, one end of the inductor L41C is connected with a power supply end X41A through an inductor LS49, the other end of the inductor L41C is connected with a power supply end X42A through an inductor LS50, and a capacitor C47A, a source end resistor RS45A and a capacitor C47B are connected between two ends of the inductor L41C in series.
The excimer lamp exciter adopts AC 120-277V input voltage, is protected by a fuse F11 for input, an EMC filter is formed by L11, C11 and other devices, then is rectified by a DS11-DS14 forming a rectifier bridge and then is converted into direct current by C21 filtering, then is boosted to DC410V through an input current power factor correction circuit APFC circuit formed by US21 control MOS Q21 and L21 and loaded on a C22 electrolytic capacitor, then is sent to a half-bridge control IC US31 by a DC-AC control IC US41 to drive QS41 and QS42 to be alternately conducted, then forms an LLC resonance circuit by L42 and L41, and C43 and C44, and outputs a half-bridge voltage with a frequency of 110KHZ and a pulsating voltage of 3500V AC by X42A and X41A terminals to excite the excimer lamp to emit light.
In the solution of electromagnetic interference of high-voltage high-frequency pulses generated by LLC resonance on whole line and external equipment, the solution of EMC mainly adopts the following 5 parts of functions to make bypass and attenuation.
One is to adopt magnetic resistances LS47 and LS48 with larger impedance to different frequency bands to attenuate high DV/DT and VI/DT generated by QS41 and QS42 switching, then to attenuate the spike interference of L41 high and low voltage distributed capacitance series connection by L42, and to block the current spike generated when the high voltage discharges the lamp tube by LS49 and LS 50. Then the EMC is input into the L13 annular small common mode magnetic ring to perform overall ultrahigh 10M-300MHZ frequency band attenuation so as to solve the problem of electromagnetic radiation interference of the product;
and the second adopts L12 common mode inductance of more than 35mH and X capacitance C15 of more than 100nF to form a blocking filter, C15 bypasses and reflows high-frequency components of more than about 700KHZ, and then the high impedance generated by the common mode inductance L12 is attenuated. The overall common mode quantity of 150K-2MHZ can be reduced by about 7dB of noise.
Thirdly, the odd energy is quite strong under the high voltage of 3KV and the high frequency of 110KHZ, wherein 3579 odd frequency peaks are prominent, and two sets of schemes are adopted for contending for special peaks. The combination of C13C, L12A and C13B and the combination of C13D, L12B and C13A are adopted to form the double pi-shaped filter on LN. The double-pi-shaped filter is characterized in that the double-pi-shaped filter forms 4 pairs of low-pass filters on an LN line respectively, and effectively reduces peaks of frequencies of 330KHZ and 770 KHZ. Wherein the combination of C13C <800pF, L12A >5mH and the combination of C13D <800pF, L12B >5mH gives an effective filtering of 330 KHZ; the combination of C13B >1000PF, L12A >5mH combined with C13A >1000PF, L12B >5mH effectively filtered 770 KHZ. Four sets of low-pass filters 3 and 7 times while effectively attenuating 5 and 9 times.
And finally, an L11 and 50mH common mode inductor and an X capacitor C11 and 270nF are adopted to form a blocking filter, background noise and high-frequency peaks introduced by a high-voltage output lead wire or a lamp through a distributed capacitor and a front Y capacitor are subjected to secondary interference caused by backflow to LN through a test network, the background noise and the high-frequency peaks above 450KHZ are subjected to backflow through a C11 bypass, and then high impedance generated by the L11 large common mode inductor is attenuated, so that the overall interference to the LN wire is effectively prevented.
After the above 5 combined filtering, arc discharge phenomenon is formed in the excimer lamp tube at the voltage of more than 3000KV and the high-frequency pulse output of 110KHZ, and the generated high peak current and voltage interference noise is effectively attenuated and bypassed. According to a standard wiring mode, in an actual measurement adopting EN5501, a margin of more than 10dB in a frequency band of 10-150KHZ is conducted, a margin of more than 6dB in a frequency band of 150K-2MHZ is conducted, and a margin of more than 6dB in a frequency band of 2M-30MHZ is conducted. The 30M-300M band is >7dB margin in CDN testing.
The specific embodiments described herein are merely illustrative of the spirit of the utility model. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the utility model as defined in the appended claims.
Although the terms EMC filter circuit, rectifier bridge circuit, APFC line, etc. are used more often herein, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.

Claims (7)

1. An excimer lamp exciter for solving EMI is characterized by comprising an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternative conduction circuit, an LLC resonance circuit and a boost output circuit which are connected in sequence, wherein a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A.
2. The excimer lamp exciter for solving the EMI problem of claim 1, wherein the EMC filter circuit comprises a common mode inductor L11, one end of an input terminal of the common mode inductor L11 is connected to a fuse F11, one end of an output terminal is connected to an inductor L12A, the other end of an input terminal of the common mode inductor L11 is connected to a power supply terminal X11B, the other end of the output terminal is connected to an inductor L12B, a capacitor C11 is provided between one end of an input terminal of the common mode inductor L11 and the other end of an input terminal of the common mode inductor L11, the other end of the inductor L12A is connected to one end of an input terminal of a common mode inductor L12, one end of an output terminal of a common mode inductor L12 is connected to one end of an input terminal of a common mode inductor L13, the other end of an inductor L12B is connected to the other end of an input terminal of a common mode inductor L12, the other end of an output terminal of a common mode inductor L12 is connected to the other end of an input terminal of a common mode inductor L13, one end of an inductor L12A is connected to a power supply terminal X11C through a capacitor C13B, and the other end of an inductor L12A is connected to a power supply terminal X11C through a capacitor C13C, one end of an inductor L12B is connected with a power supply end X11C through a capacitor C13A, one end of an inductor L12B is connected with a power supply end X11C through a capacitor C13D, a capacitor C15 is connected in parallel between one end of an input end of a common mode inductor L13 and the other end of an input end of a common mode inductor L13, and one end of an output end of the common mode inductor L13 and the other end of an output end of the common mode inductor L13 are connected with a rectifier bridge circuit.
3. The excimer lamp exciter for solving the EMI problem of claim 1 or 2, wherein the rectifier bridge circuit comprises a diode DS11 and a diode DS13 which are connected in series, and a diode DS12 and a diode DS14 which are connected in series, wherein the series diode DS11 and the diode DS13 are connected in parallel with the series diode DS12 and the diode DS14, and anodes of the diode DS13 and the diode DS14 are connected with a power supply end X21B.
4. The excimer lamp exciter for solving the problem of EMI as claimed in claim 1, wherein the APFC circuit includes a chip US21, pin 1 of the chip US21 is grounded through a source end resistor RS26D, a source end resistor RS26C, a source end resistor RS26B, a source end resistor RS26A and a capacitor C22 in sequence, and is grounded through a source end resistor RS26F, pin 2 is connected with pin 1 through a capacitor CS26 and is connected with pin 1 through a source end resistor RS23 and a capacitor CS27 in sequence, pin 3 is grounded through a capacitor CS29 and is grounded through a source end resistor RS21E and a source end resistor CS21F in sequence, pin 3 is grounded through a source end resistor RS21D, a source end resistor RS21C, a source end resistor RS21B, a resistor source end RS21A, an inductor L21A, a diode DS21A and a capacitor C22 in sequence, pin 4 is grounded through a capacitor C24 and a resistor RS24 in sequence, and a resistor RS24 is connected between the source end and the source end resistor RS24 in parallel, and the source end resistor RS25A, A source end resistor RS25B and a source end resistor RS25C, a pin 5 is grounded through a source end resistor RS22 and an inductor L21B in sequence, a pin 6 is grounded, a pin 7 is connected with a base electrode of a MOS Q21, an emitter of the MOS Q21 is grounded through the source end resistor RS25A, the source end resistor RS25B and the source end resistor RS25C which are connected in parallel, a collector of the MOS Q21 is grounded through a capacitor CS21 and is connected with a diode DS21A, and a pin 8 is grounded through a capacitor CS28 and is connected with a power supply end.
5. The excimer lamp exciter for solving the EMI problem of claim 1, wherein the alternately conducting circuit includes a DC-AC half-bridge control IC US31 and a half-bridge drive IC US41, the US31 pin 1 is connected to pin 16 through a source resistor RS31B while being grounded through a parallel capacitor CS33 and a source resistor RS33B, and is connected to pin 9 through a source resistor RS36, pin 2 is connected to pin 16 through a source resistor RS31A while being grounded through a parallel capacitor CS34 and a source resistor RS33A, pin 5 is connected to pin 7 through a source resistor RS34 while being grounded through a capacitor CS31, pin 6 is connected to pin 6 through a source resistor RS34 35A and a source resistor RS35B, and is connected to the collector of MOS Q33 while being grounded, the emitter of MOS Q33 is connected to pin 6 through a source resistor RS35C, the base of MOS Q33 is connected to pin 8 through a source resistor RS35D, and the pin 8 is connected to ground through a capacitor CS32, pin 9 is grounded through a capacitor CS35, pin 10 is grounded through a capacitor CS37 and is connected to pin 5 of US41 through a capacitor CS68, pin 11 of US31 is connected to pin 2 of US41, pin 12 of US31 is grounded, pin 13 is grounded through a capacitor CS31, pin 14 is connected to pin 1 of US31, pin 15 of US31 is grounded through a capacitor CS31 and is connected to pin 5 of US31, pin 3 of US31 is grounded, pin 3 is grounded, pin 31 is connected to one end of a resistor RS42 31 through a capacitor CS31 and a diode DS 31 connected in parallel, the other end of the source resistor RS42 31 is connected to the base of MOS Q31 and is connected to the emitter of MOS Q31 through a source resistor RS46 31, RS31 and RS31, the emitter of MOS Q31 is connected to the collector of the MOS Q31 through a source resistor LS 31 and a collector of the source resistor LS 31 connected to the emitter of the MOS Q31 through a source resistor 31, pin 5 is connected to pin 8 through diode DS61 while being grounded through parallel capacitor C67 and capacitor CS67, pin 6 is connected to the emitter of MOS Q41 while being connected to the base of MOS Q41 through source resistor RS4, the collector of MOS Q41 is connected to the emitter of MOS Q41 through diode DS41 while being connected to the base of MOS Q3626 through inductor LS47 and capacitor C41 in turn, pin 7 is connected to one end of source resistor RS41A through parallel capacitor CS45 and diode DS44, the other end of source resistor RS41A is connected to the base of MOS Q41, and pin 8 is connected to pin 6 through capacitor CS 41.
6. The excimer lamp exciter capable of solving the problem of EMI as claimed in claim 1, wherein said LLC resonant circuit includes an inductor L41A and an inductor L41B connected in series, the other end of said inductor L41A is connected to the other end of the inductor L41B through an inductor L42, a capacitor C42A, a source end resistor RS43A, a source end resistor RS43B, a source end resistor RS43C in sequence, and is connected to the other end of the inductor L41B through an inductor L42, a capacitor C42B, a source end resistor RS44C, a source end resistor RS44B, a source end resistor RS44A in sequence, and the other end of the inductor L41B is connected to the capacitor C42A through a capacitor C43 and is connected to the capacitor C42B through a capacitor C44.
7. The excimer lamp exciter for solving the EMI problem of claim 1, wherein the boost output circuit comprises an inductor L41C, one end of the inductor L41C is connected to a power supply terminal X41A through an inductor LS49, the other end of the inductor L41C is connected to a power supply terminal X42A through an inductor LS50, and a capacitor C47A, a source terminal resistor RS45A and a capacitor C47B are connected in series between two terminals of the inductor L41C.
CN202123102529.9U 2021-12-07 2021-12-07 Excimer lamp exciter for solving EMI Active CN216902800U (en)

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