CN216901146U - Optical actuator and projection apparatus - Google Patents

Abstract

The utility model provides an optical actuator, comprising a substrate, a coil, a vibrating mirror frame and a magnet, wherein the coil is arranged on the substrate; the vibrating mirror frame is arranged on the base plate in a deflectable manner, the vibrating mirror frame is provided with a magnet mounting part, the magnet mounting part is provided with a plurality of magnet bonding strips, the plurality of magnet bonding strips are sequentially spaced, a bonding groove is formed between every two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; the magnet is arranged on the magnet mounting part, is bonded with the plurality of magnet bonding strips through the bonding part accommodated in the bonding groove, and is used for being matched with the coil to generate electromagnetic force for driving the vibration mirror frame to deflect. The utility model provides an optical actuator, wherein a magnet is bonded with a plurality of magnet bonding strips through bonding parts, so that the bonding area of the magnet and a vibrating mirror frame can be increased, and the connection strength of the magnet and the vibrating mirror frame is increased. In addition, since the magnet and the galvanometer frame are bonded by the bonding portion, the optical actuator can be reduced in weight. The utility model also provides projection equipment.

Description

Optical actuator and projection apparatus

Technical Field

The utility model relates to the technical field of optics, in particular to an optical actuator and projection equipment.

Background

The Extended Pixel Resolution (XPR) technology is an important technology for developing high-Resolution projection, can generate an image with a higher Resolution than the number of pixels of the spatial light modulator in a manner that two continuous frames of images are offset and interlaced with each other, and has a wide application prospect. The XPR technique specifically achieves image offset by optical actuator driven slide deflection.

The optical actuator drives the optical galvanometer fixing piece connected with the magnet to repeatedly vibrate through the matching of the electrified coil and the magnet, so as to drive the optical lens arranged on the optical galvanometer fixing piece to repeatedly vibrate. The connection strength of the existing magnet and the optical galvanometer fixing piece is not high, so that the risk of magnet falling off can occur in the vibration process of the optical galvanometer fixing piece, and the acquisition of images with higher resolution ratio is influenced. In addition, there is also a micro-projector on the market, which needs to use a micro-optical actuator with smaller volume than a general optical actuator, however, the existing optical actuator has larger volume and heavier whole body, and is difficult to satisfy the requirement of the user for light weight.

SUMMERY OF THE UTILITY MODEL

An embodiment of the utility model provides an optical actuator and a projection apparatus to solve the above problems. The embodiment of the utility model achieves the aim through the following technical scheme.

In a first aspect, the present invention provides an optical actuator, including a substrate, a coil, a vibrating mirror frame and a magnet, wherein the coil is disposed on the substrate; the vibrating mirror frame is arranged on the base plate in a deflecting mode, the vibrating mirror frame is provided with a magnet mounting part, the magnet mounting part is provided with a plurality of magnet bonding strips, the magnet bonding strips are sequentially spaced, a bonding groove is formed between every two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; the magnet is arranged on the magnet mounting part, the magnet is bonded with the plurality of magnet bonding strips through the bonding part accommodated in the bonding groove, and the magnet is used for being matched with the coil to generate electromagnetic force for driving the vibration mirror frame to deflect.

In one embodiment, the galvanometer frame further comprises a frame body and a fixing part, the magnet mounting part is connected to the frame body, the fixing part is elastically connected with the frame body, and the fixing part is used for being adhered to the substrate.

In one embodiment, the fixing portion is provided with a fixing hole, the substrate is provided with a vibrating mirror frame positioning boss, the vibrating mirror frame positioning boss penetrates through the fixing hole, and the vibrating mirror frame positioning boss, the joint of the vibrating mirror frame positioning boss and the fixing portion and part of the fixing portion are covered by the glue layer.

In one embodiment, the positioning boss of the galvanometer frame penetrating the fixing hole protrudes out of the fixing part.

In one embodiment, the galvanometer frame is provided with a light hole, a frame body surrounds the light hole, the frame body is used for being bonded with the light-transmitting glass sheet, and the thickness of the frame body ranges from 0.3 mm to 0.5 mm.

In one embodiment, the optical actuator further includes a shield cover provided to the vibrating frame and connected to the base plate, the shield cover being provided with a position-avoiding groove located opposite to the bonding groove.

In an embodiment, the protection casing includes cover plate and locating plate that link to each other, and the cover plate covers and is located the mirror frame that shakes, and the locating plate extends towards the base plate from the cover plate, and the locating plate is equipped with the locating surface, and the locating surface sets up in the one side that the locating plate deviates from the cover plate, and the base plate is equipped with the guard shield location platform, and the locating surface is used for contacting with the locating platform.

In one embodiment, the positioning plate is provided with a glue filling opening, and the glue filling opening penetrates through the positioning surface.

In one embodiment, the coil is stacked with the substrate.

In one embodiment, the coil comprises a bottom surface and an inner circumferential surface which are connected, the bottom surface is arranged opposite to the substrate, the substrate is provided with a coil positioning boss, the coil is sleeved on the coil positioning boss, and the inner circumferential surface is in contact with the coil positioning boss.

In one embodiment, the optical actuator further includes a circuit board, the circuit board includes an electrical connection portion and an extension portion, the extension portion extends outward from the electrical connection portion, the electrical connection portion is disposed between the substrate and the coil, and the electrical connection portion is electrically connected to the coil.

In a second aspect, the present invention also provides a projection apparatus comprising any of the optical actuators described above.

Compared with the prior art, according to the optical actuator and the projection equipment provided by the utility model, the plurality of magnet bonding strips are arranged on the magnet mounting part of the vibrating mirror frame, the bonding groove for accommodating the bonding part is formed between every two adjacent magnet bonding strips, and the magnet is bonded with the plurality of magnet bonding strips through the bonding part accommodated in the bonding groove, so that the bonding area between the magnet and the vibrating mirror frame can be increased, and the connecting strength between the magnet and the vibrating mirror frame is increased. In addition, the magnet and the galvanometer frame are bonded through the bonding part, so that the optical actuator and the projection equipment can be lightened while miniaturization is guaranteed.

These and other aspects of the utility model are apparent from and will be elucidated with reference to the embodiments described hereinafter.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of an optical actuator provided by the present invention at a viewing angle.

Fig. 2 is an exploded view of the optical actuator shown in fig. 1.

Fig. 3 is a schematic structural view of the optical actuator (not including the shielding plate) shown in fig. 1.

Fig. 4 is a schematic view showing the assembly of the diaphragm frame and the magnet of the optical actuator shown in fig. 1.

Fig. 5 is a partial structural schematic view of the optical actuator shown in fig. 1.

Fig. 6 is a longitudinal sectional view at a of fig. 5.

Fig. 7 is a longitudinal sectional view of fig. 5 at B.

Fig. 8 is a schematic structural view of the optical actuator shown in fig. 1 from another viewing angle.

Fig. 9 is a schematic structural view of a shield cap of the optical actuator shown in fig. 1.

Fig. 10 is a schematic view of a heat dissipation channel of the optical actuator shown in fig. 1.

FIG. 11 is a schematic view of another heat dissipation channel of the optical actuator shown in FIG. 1.

Detailed Description

In order to facilitate an understanding of the embodiments of the present invention, the embodiments of the present invention will be described more fully hereinafter with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the examples of the present invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model.

The inventors of the present application have found that the micro-projection product has extremely high requirements on the size of each device, wherein the micro-optical actuator is used as one of the core devices of the optical engine, and the width of the micro-optical actuator also limits the overall thickness of the optical engine. The difficulty of assembling parts of the optical actuator tends to increase along with the reduction of the size of the parts, and how to design the bonding mode between each part is an important design content of the micro optical actuator.

In order to solve at least some of the above problems, the applicant has proposed an optical actuator and a projection apparatus, in which the parts of the optical actuator are connected by glue, so that not only can the connection strength between the parts be ensured, but also the optical actuator can be made more lightweight on the basis of miniaturization. The optical actuator and the projection apparatus provided in the present application are described in detail below with reference to the detailed description and the drawings.

Referring to fig. 1 and 2, an optical actuator 10 according to the present invention includes a substrate 11, a coil 13, a frame 14 and a magnet 16, wherein the coil 13 is disposed on the substrate 11; the vibrating mirror frame 14 is arranged on the base plate 11 in a deflecting manner, the vibrating mirror frame 14 is provided with a magnet mounting portion 142, the magnet mounting portion 142 is provided with a plurality of magnet bonding strips 1421, the plurality of magnet bonding strips 1421 are sequentially spaced, a bonding groove 1423 is formed between two adjacent magnet bonding strips 1421, and the bonding groove 1423 is used for accommodating the bonding portion 100 (fig. 6); the magnet 16 is disposed on the magnet mounting portion 142, the magnet 16 is adhered to the plurality of magnet adhesive strips 1421 via the adhesive portion 100 received in the adhesive groove 1423, and the magnet 16 is used for cooperating with the coil 13 to generate an electromagnetic force for driving the diaphragm frame 14 to deflect.

In this embodiment, the optical actuator 10 is a micro-optical actuator, and can be used for micro-projection, business education, laser television, or the like.

The base plate 11 is the main mounting carrier for the optical actuator 10 for precise positioning and fixing of the coil 13, the frame 14 and other structures. The substrate 11 is a main mounting carrier, and therefore, the substrate 11 needs to have a certain hardness and rigidity, and the substrate 11 may be made of a non-metallic material in order to avoid an influence on the magnetic induction effect of the coil 13. In this embodiment, the substrate 11 may be made of a light-weight plastic material. In other embodiments, the substrate 11 may also be made of resin material or other non-metal material with certain hardness and rigidity.

In the present embodiment, the substrate 11 is substantially a hollow rectangular plate structure, and the substrate 11 includes an opposite mounting surface 111 and an opposite mounting back surface 112, where the mounting surface 111 may be used to mount the coil 13, the diaphragm frame 14, and the like, and the mounting back surface 112 may be mounted on a structural member of the projector 30, so as to connect the optical actuator 10 and the structural member of the projector 30. In other embodiments, the substrate 11 may also be a plate-like structure with a circular, oval or other shape.

For convenience of description, the longitudinal direction of the substrate 11 is defined as an X direction, the width direction of the substrate 11 is defined as a Y direction, and the thickness direction of the substrate 11 is defined as a Z direction.

The base plate 11 is provided with a vibrating mirror frame positioning boss 113, the vibrating mirror frame positioning boss 113 is convexly arranged on the mounting surface 111, and the vibrating mirror frame positioning boss 113 is used for supporting and positioning the vibrating mirror frame 14. In this embodiment, the number of the mirror frame positioning bosses 113 may be four, four mirror frame positioning bosses 113 are all protruded on the mounting surface 111, and the four mirror frame positioning bosses 113 are disposed at four corners of the rectangle. In other embodiments, the number of the frame positioning bosses 113 may be one or more.

The mirror frame location boss 113 that shakes includes fixed column 1132 and reference column 1134, fixed column 1132 fixed connection in installation face 111, fixed column 1132 can be used for increasing the interval of mirror frame 14 and installation face 111 that shakes, avoids shaking mirror frame 14 to interfere with installation face 111 at the in-process of deflecting. Positioning post 1134 is fixed to a side of fixing post 1132 away from installation surface 111, and a cross-sectional area of positioning post 1134 is smaller than a cross-sectional area of fixing post 1132, so that a step surface 1136 is formed between fixing post 1132 and positioning post 1134. Locating posts 1134 can locate frame 14. In the present embodiment, positioning pillar 1134 has a cylindrical structure. In other embodiments, the positioning pillar 1134 may also be a triangular prism or a rectangular parallelepiped structure, and the positioning function of the vibrating mirror frame 14 is satisfied, and specifically, the positioning function may be set according to actual conditions.

The substrate 11 is further provided with a shield positioning stage 114, the shield positioning stage 114 is located at the periphery of the substrate 11, the shield positioning stage 114 includes a first positioning surface 1142 located between the mounting surface 111 and the mounting back surface 112, and the shield positioning surface is used for contacting with the shield 18 to perform Z-direction positioning on the shield 18. The number of the shroud positioning stages 114 may be four, and the four shroud positioning stages 114 form two sets, and the two sets of the shroud positioning stages 114 are provided at intervals in the X direction.

Referring to fig. 2 and 3, the substrate 11 further includes a second positioning surface 116 and a third positioning surface 117, wherein the second positioning surface 116 is connected to the first positioning surface 1142, the second positioning surface 116 is used for positioning the shield 18 in the X direction, the third positioning surface 117 is spaced apart from the first positioning surface 1142 and the second positioning surface 116, and the third positioning surface 117 is used for positioning the shield 18 in the Y direction. In the present embodiment, the number of the second positioning surfaces 116 and the number of the third positioning surfaces 117 are four, wherein two of the second positioning surfaces 116 and two of the other second positioning surfaces 116 are provided at intervals in the X direction, and wherein two of the third positioning surfaces 117 and two of the other third positioning surfaces 117 are provided at intervals in the Y direction.

The substrate 11 is further provided with a coil positioning boss 118, and the coil positioning boss 118 is convexly arranged on the mounting surface 111 and can be used for positioning the coil 13 to prevent the coil 13 from being separated from the substrate 11. In this embodiment, the number of the coil positioning bosses 118 is four, four coil positioning bosses 118 are located at four vertices of a rectangle, and each coil positioning boss 118 is disposed between two adjacent galvanometer frame positioning bosses 113. In other embodiments, the number of coil positioning bosses 118 may also be one or more other numbers. In this embodiment, the coil locating boss 118 is formed by two spaced boss structures, oppositely oriented, each of which is generally "n" shaped in cross-section. In other embodiments, the two boss structures may also be connected, i.e., the coil positioning boss 118 is generally oblong in cross-section.

The substrate 11 is further provided with a light-passing port 119, and the light-passing port 119 can be used for passing light, so that the light can be incident on the light-passing glass sheet 17 arranged on the galvanometer frame 14. The light-transmitting slide 17 can be used for actuating an incident light beam, specifically, the light beam can be refracted when passing through the light-transmitting slide 17, and the light-transmitting slide 17 can be deflected by an attractive force generated by the action of a magnetic field generated by the energized coil 13 and the magnetic block, so that the refraction angle of the light beam is changed, and finally the light beam is actuated. Both sides of the light-transmitting glass sheet 17 can be coated with antireflection films, so that the light transmittance is higher. The light-transmitting port 119 can also reduce the weight of the substrate 11, which is advantageous for reducing the weight of the optical actuator 10. In addition, the light inlet 119 can be used for air intake, which is beneficial to the air flow passing through, and improves the heat dissipation performance of the optical actuator 10.

The coil 13 is provided on the substrate 11. The coil 13 is substantially in an elliptical ring shape, and the coil 13 may be disposed around the outer circumference of the coil positioning boss 118, for example, the coil 13 is sleeved on the coil positioning boss 118. The coil 13 has a length dimension in its major axis direction, a width dimension in its minor axis direction, and a thickness dimension in the Z direction, the thickness dimension being smaller than the length dimension and the width dimension. The thickness direction of the coil 13 coincides with the thickness direction of the substrate 11, both in the Z direction, i.e., the coil 13 is superposed on the substrate 11, so that the coil 13 does not occupy an excessive space in the thickness direction of the substrate 11, which is advantageous for reducing the thickness of the optical actuator 10. The coil 13 may be formed by winding a wire with a high-precision jig. In the present embodiment, the weight of the entire diaphragm frame 14 is reduced due to the hollow structure, the driving current requirement of the coil 13 is small, the operating current range of the coil 13 is 50 to 70mA, the heat generation amount of the coil 13 is small, and the energy consumption of the optical actuator 10 can be reduced.

The coil 13 includes a bottom surface 132 and an inner circumferential surface 134 connected to each other, wherein the bottom surface 132 is substantially a ring surface, the bottom surface 132 is disposed opposite to the substrate 11, and the inner circumferential surface 134 contacts with the coil positioning boss 118, so that the coil positioning boss 118 can position the coil 13, that is, the coil 13 adopts an inner ring positioning scheme, so that the scheme has high tolerance to assembly errors, is not prone to assembly errors, and has good stability, and therefore, the optical actuator 10 of the present invention has high consistency of light spots for image forming actuation. The coil 13 may be disposed on the coil positioning boss 118 in an interference fit manner, and in this embodiment, the coil 13 and the coil positioning boss 118 are fixed by dispensing. Since the bottom surface 132 is a ring-shaped surface having a large surface area, the bonding area of the coil 13 can be increased, so that the coil 13 can be bonded more firmly.

Referring to fig. 3 and 4, the vibrating mirror frame 14 is used to connect with a transparent glass sheet 17. The vibrating mirror frame 14 is arranged on the base plate 11 in a deflecting mode, and the light-transmitting glass sheet 17 can be driven to deflect by the deflecting of the vibrating mirror frame 14, so that the image is shifted. The frame 14 is generally an open rectangular sheet-like structure. The diaphragm frame 14 may be a thin sheet metal frame manufactured by an etching process.

The diaphragm frame 14 is provided with a magnet mounting portion 142, and the magnet mounting portion 142 may be used to mount the magnet 16 to enable connection of the magnet 16 to the diaphragm frame 14. In this embodiment, the magnet mounting portion 142 is provided with a plurality of magnet bonding strips 1421, the plurality of magnet bonding strips 1421 are sequentially spaced, a bonding groove 1423 is formed between two adjacent magnet bonding strips 1421, and the bonding groove 1423 is used for accommodating the bonding portion 100 (fig. 6), wherein the bonding portion 100 may be UV glue, other glue, or a glue strip, and the like, which satisfies the purpose of bonding the magnet 16. The magnet 16 is bonded with the plurality of magnet bonding strips 1421 through the bonding part 100 accommodated in the bonding groove 1423, the overall weight is reduced by hollowing out the vibrating mirror frame 14, the bonding area between the magnet 16 and the vibrating mirror frame 14 can be increased, and the holding force nested with glue can be increased, so that the connection strength between the magnet 16 and the vibrating mirror frame 14 is increased, the magnet 16 and the vibrating mirror frame 14 are prevented from being separated in the deflection process of the vibrating mirror frame 14, and the stability of the optical actuator 10 is improved.

The vibrating mirror frame 14 further includes a frame body 144 and a fixing portion 146, wherein the frame body 144 is a substantially hollow octagonal plate structure, and the frame body 144 is a main assembly carrier of the vibrating mirror frame 14. The magnet mounting portion 142 is substantially a hollow rectangular sheet structure, and both the magnet mounting portion 142 and the fixing portion 146 are connected to the frame 144, wherein the fixing portion 146 is elastically connected to the frame 144, and the fixing portion 146 is used for being adhered to the substrate 11. The frame 14 further includes a spring arm 148, and the spring arm 148 is connected between the fixing portion 146 and the frame 144. The spring arm 148 is generally a continuously curved strip-like structure. In the present embodiment, the number of the magnet mounting portions 142 and the fixing portions 146 is four, wherein four magnet mounting portions 142 are connected to the outer periphery of the frame body 144, for example, four magnet mounting portions 142 are connected to four sides of the octagonal frame body 144 spaced apart from each other, and four fixing portions 146 correspond to the other four sides of the octagonal frame body 144 spaced apart from each other, that is, each fixing portion 146 is located between two adjacent magnet mounting portions 142. The number of the elastic arms 148 is eight, two elastic arms 148 are connected between the frame 144 and one fixing portion 146, two elastic arms 148 are connected to two opposite sides of the frame 144, and the two elastic arms 148 may have a substantially symmetrical structure with respect to the fixing portion 146.

The frame body 144 is used for bonding with the transparent glass sheet 17, during assembly, a UV glue is applied on the surface to be bonded of the frame body 144, after the transparent glass sheet 17 is placed, the glue between the transparent glass sheet 17 and the frame body 144 can be directly irradiated by ultraviolet light through the transparent glass sheet 17, and the glue is cured, so that the assembly of the transparent glass sheet 17 and the frame body 144 is realized. The light-passing slide 17 may be superposed on the frame body 144, that is, the surface to be bonded may be a recessed portion in the frame body 144, and the thickness direction of the light-passing slide 17 may coincide with the thickness direction of the frame body 144, thereby reducing the thickness and volume of the optical actuator 10 as a whole. In the present embodiment, the thickness of the frame 144 is in the range of 0.3 to 0.5mm, which not only ensures the strength of the frame 144, but also avoids the increase in the thickness of the optical actuator 10 due to the excessive thickness of the frame 144. As an example, the thickness of the frame 144 may be about 0.38 mm.

The fixing portion 146 is provided with a fixing hole 1461, the galvanometer frame positioning boss 113 is inserted into the fixing hole 1461, and the fixing portion 146 is bonded to the step surface 1136. In this embodiment, the fixing hole 1461 is a circular hole, and is adapted to the cylindrical positioning pillar 1134. In other embodiments, the shape of the fixing holes 1461 can be adaptively changed when the positioning posts 1134 have other shapes. The mirror frame positioning boss 113 shakes, the junction of mirror frame positioning boss 113 and fixed part 146 and part of fixed part 146 are all covered by the glue layer, specifically, fixed hole 1461 and mirror frame positioning boss 113 cooperate the location back, can be at mirror frame positioning boss 113 spot rubberizing water that shakes, glue spreads to the junction of mirror frame positioning boss 113 and fixed part 146 that shakes, and shake the surface of fixed part 146 around the mirror frame positioning boss 113, can make after the glue solidification shake the mirror frame 14 and be fixed with base plate 11, through this kind of fixed mode, can use simple and easy mode to guarantee the joint strength of mirror frame positioning boss 113 that shakes, and make overall structure lightweight moreover.

In this embodiment, the elastic arm 148 has at least one bending portion. For example, the bending part may be formed by bending the elastic thread at least twice in succession. The vibrating mirror frame 14 can deflect around at least one axis under the action of electromagnetic force generated by the matching of the coil 13 and the magnet 16, wherein the axis refers to a connecting line between two diagonal fixing portions 146, so that the light-transmitting glass sheet 17 is driven to deflect, the elastic arm 148 is subjected to torsional deformation, and the elastic arm 148 can reset the frame body 144 under the action of self elastic force.

Referring to fig. 5 to 7, in one embodiment, the mirror frame positioning boss 113 penetrating the fixing hole 1461 protrudes from the fixing portion 146, so that after the glue is cured, a cap-shaped structure is formed at the mirror frame positioning boss 113, the joint of the mirror frame positioning boss 113 and the fixing portion 146, and a portion of the fixing portion 146, thereby increasing the connection strength between the mirror frame 14 and the substrate 11, preventing the mirror frame 14 from separating from the substrate 11 during the deflection process, and improving the assembly strength.

The frame 14 further has a light-transmitting hole 149, and the light-transmitting hole 149 is formed by enclosing the frame body 144, that is, the frame body 144 is disposed around the light-transmitting hole 149. The light-transmitting hole 149 may serve to transmit light and also serve to reduce the weight of the diaphragm frame 14, contributing to the light-weight of the optical actuator 10. In the present embodiment, the light-transmitting hole 149 has a substantially octagonal shape. In other embodiments, the shape of the light-transmitting hole 149 may be other polygonal shapes such as a hexagon. The light transmission hole 149 is also provided in a polygonal shape in order to enhance the strength of the connection of the frame body 144 to the light-transmitting slide 17 and the stability during vibration.

The magnet 16 is disposed on the magnet mounting portion 142, and the magnet 16 is bonded to the plurality of magnet bonding bars 1421 via the bonding portion 100 accommodated in the bonding groove 1423. For example, when the magnet 16 is fixed to the magnet mounting portion 142, glue is applied to the bonding groove 1423 and the plurality of magnet bonding bars 1421, and after the glue is cured, a button-like structure formed by the glue can firmly connect the plurality of magnet bonding bars 1421 to the magnet 16, where the button-like structure means that the middle portion of the glue is bonded to the magnet bonding bars 1421, and both sides of the glue cross over the magnet bonding bars 1421 and are bonded to the magnet 16 to form an inverted button shape. The magnet 16 is used for cooperating with the coil 13 to generate electromagnetic force for driving the vibrating mirror frame 14 to deflect, thereby driving the light-transmitting slide 17 to deflect. The overlapping of the magnet 16 and the coil 13, that is, the flat arrangement of the magnet 16 and the coil 13, facilitates the reduction of the size of the optical actuator 10 in the thickness direction. The magnet 16 may be located above the geometric center of the coil 13. In the present embodiment, the number of magnets 16 is four, and each magnet 16 is mounted to one magnet mounting portion 142. The four magnets 16 are fixed on the periphery of the vibrating mirror frame 14, correspond to the four coils 13 one by one and are in magnetic fit, the magnets 16 can be permanent magnets 16, and alternating electromagnetic fields generated by the permanent magnets 16 and the coils 13 generate alternating electromagnetic force, so that the vibrating mirror frame 14 is driven to deflect.

With continued reference to fig. 4, in some embodiments, there is a gap (not shown) between the magnet 16 and the clear slide 17. During the equipment, with the glue of filling in the clearance, can bond magnet 16 with logical smooth slide 17 after the glue solidification, not only guaranteed logical smooth slide 17 and magnet 16's relative position, make moreover to lead to smooth slide 17 and magnet 16 can be further fixed on the frame 14 that shakes through the glue after the clearance internal cure, promote the stability of frame 14 that shakes. During assembly, the transparent glass sheet 17, the magnet 16 and the vibrating mirror frame 14 can be pre-positioned by a jig, and the three can be bonded by dispensing, so that the transparent glass sheet 17, the magnet 16 and the vibrating mirror frame 14 can be assembled.

Referring to fig. 8 and 9, in the present embodiment, the optical actuator 10 further includes a protective cover 18, and the protective cover 18 is covered on the vibrating mirror frame 14 and connected to the base plate 11 to protect the vibrating mirror frame 14 and protect the vibrating mirror frame 14 from being damaged by external force. In order to reduce the overall thickness of the optical actuator 10, the thickness of the protective cover 18 may be less than 0.2mm, and the protective cover 18 may be stamped from a small piece of hardware, since the operating environment of the optical actuator 10 requires no magnetic field and has certain strength requirements, and as an example, the material of the protective cover 18 may be SUS304(Steel Use Stainless Steel).

The protection mask 18 includes a cover plate 182 and a positioning plate 184 connected to each other, the cover plate 182 is substantially a hollow rectangular plate-shaped structure, the cover plate 182 covers the vibrating frame 14, the positioning plate 184 extends from the cover plate 182 toward the base plate 11, and the positioning plate 184 can contact with the base plate 11 to position the protection mask 18. In the present embodiment, the number of the positioning plates 184 is four, and each positioning plate 184 is attached to one side of the rectangular cover plate 182.

The "button-like structure" formed by the cured glue when the vibrating mirror frame 14 is fixed to the magnet 16 and the "cap-like structure" formed by the cured glue at the fixing position of the vibrating mirror frame 14 to the base plate 11 both make the glue significantly higher than the surface of the vibrating mirror frame 14, and in order to ensure that the optical actuator 10 has a small thickness, the layout in the thickness direction of the optical actuator 10 is compact, so that the distance between the protective cover 18 and the vibrating mirror frame 14 is small. The glue thickness risks touching the protective cover 18, increasing the thickness of the optical actuator 10, and therefore removing the material of the protective cover 18 corresponding to the glue filling position avoids the risk of interference of the protective cover 18 with the glue layer.

Specifically, the cover plate 182 has a clearance groove 1821 and a central hole 1823, and the clearance groove 1821 is opposite to the bonding groove 1423 to avoid the cured glue layer covering the bonding groove 1423, the plurality of magnet bonding strips 1421, and a portion of the magnet 16. The center hole 1823 corresponds to the position of the clear slide 17 for the projection beam to pass through the clear slide 17. The cover plate 182 further has an avoiding groove 1825, the avoiding groove 1825 corresponds to the position of the vibrating frame positioning boss 113 to avoid a glue layer covering the vibrating frame positioning boss 113, the joint of the vibrating frame positioning boss 113 and the fixing portion 146, and a part of the fixing portion 146. By providing the shielding plate 182 with the shielding groove 1821, the central hole 1823, and the shielding groove 1825, the weight of the shield 18 can be reduced, the optical actuator 10 can be reduced in weight, and heat dissipation of the optical actuator 10 can be facilitated.

The positioning plate 184 has a positioning surface 1842, and the positioning surface 1842 is used for positioning the shield 18. The positioning surface 1842 is disposed on a side of the positioning plate 184 facing away from the cover plate 182, and may be a punched section. Locating surface 1842 is configured to contact a locating table, e.g., locating surface 1842 contacts first locating surface 1142, to position shield 18 in the Z-direction to ensure that shield 18 does not protrude beyond mounting back 112.

The positioning plate 184 has a glue filling hole 1844, and the glue filling hole 1844 penetrates through the positioning surface 1842. In this embodiment, the number of glue holes 1844 is eight, and two spaced glue holes 1844 are provided for each positioning plate 184. The glue filling port 1844 may be used for inserting a dispensing needle and dispensing glue, specifically, after the positioning plate 184 is completely positioned by the light-passing positioning surface 1842, dispensing glue through the eight glue filling ports 1844 at the periphery, and after the glue is cured, the shield is completely fixed to the substrate 11. In this embodiment, the glue fill port 1844 is semi-circular. In other embodiments, the glue fill port 1844 may also be oval, square, or otherwise shaped.

The positioning plate 184 further has a heat dissipation notch 1846, and the heat dissipation notch 1846 is used for passing air flow, thereby facilitating heat dissipation of the coil 13. In this embodiment, the number of the heat dissipation notches 1846 is four, and each positioning plate 184 is provided with one heat dissipation notch 1846 and two glue filling holes 1844, wherein each heat dissipation notch 1846 is located between two glue filling holes 1844.

Referring to fig. 10 and 11, in the present embodiment, the main heating element of the optical actuator 10 is the coil 13, so that the heat dissipation problem of the coil 13 is mainly solved when heat dissipation is considered. In this embodiment, there is no other structure shielding around the coil 13, and the avoiding groove 1821, the central hole 1823, and the avoiding groove 1825 of the shield 18 also provide a heat dissipation channel for the periphery of the coil 13, so that the airflow in each direction can pass through the coil 13, the coil 13 does not form heat accumulation, and the service life of the coil 13 is prolonged. Specifically, the optical actuator 10 may form two heat dissipation channels, one of which is a heat dissipation channel along the X direction, for example, the air flow may enter from a heat dissipation notch 1846 formed on one of the positioning plates 184 arranged along the X direction, sequentially pass through one of the coils 13 and the cavity above the transparent glass 17, then pass through the other coil 13, and then flow out from a heat dissipation notch 1846 formed on the other positioning plate 184 arranged along the X direction; another is a heat dissipation channel from the middle to the periphery of the optical actuator 10, as shown in fig. 11, for example, the air flow entering the cavity above the light-transmitting slide 17 from the central hole 1823 passes through the four coils 13, and then flows out along the corresponding heat dissipation notch 1846 opened on the positioning plate 184.

With continued reference to fig. 1 and 2, the optical actuator 10 further includes a circuit board 19, and the circuit board 19 includes an electrical connection portion 191 and an extension portion 193. The extension portion 193 extends outwards from the electrical connection portion, the extension portion 193 is provided with a wire holder 1932 and two screw holes 1934, the wire holder 1932 can be used for being electrically connected with a power supply, and the screw holes 1934 can be used for penetrating of screws, so that the circuit board 19 is fixed with the shell of the projector 30 through screw locking. The electrical connection portion 191 is electrically connected to the coil 13 to provide an electrical signal to the coil 13, so as to generate an electromagnetic field to drive the magnet 16 and the coil 13 to perform regular attraction and repulsion motions, and drive the vibrating mirror frame 14 to deflect, thereby driving the light-transmitting slide 17 to deflect, thereby realizing image offset. The electrical connection portion 191 is disposed between the substrate 11 and the coil 13, for example, the substrate 11, the electrical connection portion 191 and the coil 13 are sequentially stacked in the thickness direction of the substrate 11, and by stacking the coil 13, the electrical connection portion 191 and the substrate 11 in the thickness direction of the substrate 11, it is beneficial to maximally utilize the width space of the optical actuator 10 on the premise of ensuring that the circuit board 19 has a sufficient wiring space, so as to reduce the thickness of the optical actuator 10, and ensure that the assembling and bonding of each device of the optical actuator 10 have high reliability while ensuring that the thickness and the width of the optical actuator 10 are as small as possible. The electrical connection portion 191 may be fixed to the mounting surface 111 of the substrate 11 by gluing.

In summary, in the optical actuator 10 provided by the present invention, the plurality of magnet bonding strips 1421 are disposed on the magnet mounting portion 142 of the vibrating mirror frame 14, and the bonding groove 1423 for accommodating glue is formed between two adjacent magnet bonding strips 1421, and the magnet 16 is bonded to the plurality of magnet bonding strips 1421 through the glue accommodated in the bonding groove 1423, so that the overall weight is reduced by frame hollowing, the bonding area between the magnet 16 and the vibrating mirror frame 14 can be increased, and the holding force between the magnet 16 and the glue which are mutually nested can be increased, thereby increasing the connection strength between the magnet 16 and the vibrating mirror frame 14. Further, since the magnet 16 and the galvanometer frame 14 are bonded by glue, the optical actuator 10 can be miniaturized and reduced in weight.

The utility model also provides a projection device (not shown) comprising an optical actuator 10 according to any of the embodiments described above.

In summary, the projection apparatus 1 provided by the present invention includes the optical actuator 10 and the projector 30, the optical actuator 10 is configured with a plurality of magnet bonding strips 1421 on the magnet mounting portion 142 of the galvanometer frame 14, and a bonding groove 1423 for accommodating glue is formed between two adjacent magnet bonding strips 1421, the magnet 16 is bonded to the plurality of magnet bonding strips 1421 through the glue accommodated in the bonding groove 1423, and the frame is hollowed to reduce the overall weight, and at the same time, the bonding area between the magnet 16 and the galvanometer frame 14 and the holding force between the magnet 16 and the glue which are nested with each other can be increased, so as to increase the connection strength between the magnet 16 and the galvanometer frame 14. In addition, since the magnet 16 and the galvanometer frame 14 are bonded by glue, miniaturization and weight reduction of the projection apparatus 1 can be realized on the basis of miniaturization and weight reduction of the optical actuator 1.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (12)

1. An optical actuator, comprising:

a substrate;

a coil disposed on the substrate;

the vibrating mirror frame is arranged on the base plate in a deflecting mode, the vibrating mirror frame is provided with a magnet installation part, the magnet installation part is provided with a plurality of magnet bonding strips, the magnet bonding strips are sequentially spaced, a bonding groove is formed between every two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; and

the magnet is arranged on the magnet installation part, is adhered to the plurality of magnet adhesion strips through the adhesion part accommodated in the adhesion groove, and is used for being matched with the coil to generate electromagnetic force for driving the vibrating mirror frame to deflect.

2. The optical actuator according to claim 1, wherein the lens frame further includes a frame body, and a fixing portion, the magnet mounting portion is connected to the frame body, the fixing portion is elastically connected to the frame body, and the fixing portion is configured to be bonded to the substrate.

3. The optical actuator according to claim 2, wherein the fixing portion is provided with a fixing hole, the base plate is provided with a galvanometer frame positioning boss, the galvanometer frame positioning boss is inserted into the fixing hole, and the galvanometer frame positioning boss, a joint of the galvanometer frame positioning boss and the fixing portion, and a part of the fixing portion are covered with a glue layer.

4. An optical actuator as claimed in claim 3, wherein the bezel positioning projection passing through the fixing hole protrudes from the fixing portion.

5. An optical actuator according to claim 2, wherein the frame is provided with a light-transmitting hole, the frame surrounds the light-transmitting hole, the frame is used for bonding with a light-transmitting slide, and the thickness of the frame is in the range of 0.3-0.5 mm.

6. An optical actuator according to claim 1, further comprising a shield cover provided to the mirror frame and connected to the base plate, the shield cover being provided with a position-avoiding groove located opposite to the bonding groove.

7. An optical actuator according to claim 6, wherein the shield comprises a cover plate and a positioning plate connected to each other, the cover plate being arranged to cover the frame, the positioning plate extending from the cover plate towards the base plate, the positioning plate being provided with a positioning surface arranged on a side of the positioning plate facing away from the cover plate, the base plate being provided with a shield positioning table, the positioning surface being arranged to contact the positioning table.

8. An optical actuator according to claim 7, wherein the positioning plate is provided with a glue filling opening, the glue filling opening penetrating the positioning surface.

9. An optical actuator according to claim 1, wherein the coil is stacked with the substrate.

10. An optical actuator according to claim 9, wherein the coil includes a bottom surface and an inner peripheral surface connected to each other, the bottom surface is disposed opposite to the substrate, the substrate is provided with a coil positioning boss, the coil is fitted over the coil positioning boss, and the inner peripheral surface is in contact with the coil positioning boss.

11. An optical actuator according to any one of claims 1 to 10, further comprising a wiring board including an electrical connection portion and an extension portion, the extension portion extending outwardly from the electrical connection portion, the electrical connection portion being disposed between the substrate and the coil, the electrical connection portion being electrically connected to the coil.

12. A projection device comprising an optical actuator as claimed in any one of claims 1-11.

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