CN216901146U - Optical Actuators and Projection Equipment - Google Patents

Abstract

The utility model provides an optical actuator, comprising a substrate, a coil, a vibrating mirror frame and a magnet, wherein the coil is arranged on the substrate; the vibrating mirror frame is arranged on the base plate in a deflectable manner, the vibrating mirror frame is provided with a magnet mounting part, the magnet mounting part is provided with a plurality of magnet bonding strips, the plurality of magnet bonding strips are sequentially spaced, a bonding groove is formed between every two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; the magnet is arranged on the magnet mounting part, is bonded with the plurality of magnet bonding strips through the bonding part accommodated in the bonding groove, and is used for being matched with the coil to generate electromagnetic force for driving the vibration mirror frame to deflect. The utility model provides an optical actuator, wherein a magnet is bonded with a plurality of magnet bonding strips through bonding parts, so that the bonding area of the magnet and a vibrating mirror frame can be increased, and the connection strength of the magnet and the vibrating mirror frame is increased. In addition, since the magnet and the galvanometer frame are bonded by the bonding portion, the optical actuator can be reduced in weight. The utility model also provides projection equipment.

Description

Optical Actuators and Projection Equipment

technical field

The utility model relates to the field of optical technology, in particular to an optical actuator and a projection device.

Background technique

Extended Pixel Resolution (XPR) technology is an important technology for the development of high-resolution projection, which can generate an image with a higher resolution than the number of pixels in a spatial light modulator by offsetting and interlacing two consecutive images. with broadly application foreground. The XPR technology specifically realizes the shift of the image by driving the deflection of the glass slide by an optical actuator.

The optical actuator usually drives the optical galvanometer fixed piece connected to the magnet to vibrate repeatedly through the cooperation of the energized coil and the magnet, thereby driving the optical lens set on the optical galvanometer fixed piece to vibrate repeatedly. The connection strength between the existing magnet and the optical galvanometer fixing member is not high, which leads to the risk of the magnet falling off during the vibration of the optical galvanometer fixing member, thereby affecting the acquisition of higher-resolution images. In addition, there is also a micro-projector on the market, which needs to use a micro-optical actuator that is smaller in size than a general optical actuator. However, the existing optical actuator is large in size and heavy as a whole, which is difficult to meet the needs of users. Lightweight requirements.

Utility model content

The purpose of the embodiments of the present invention is to provide an optical actuator and a projection device to solve the above problems. The embodiments of the present invention achieve the above objects through the following technical solutions.

In a first aspect, the present invention provides an optical actuator, which includes a substrate, a coil, a galvanometer frame and a magnet, wherein the coil is arranged on the substrate; the galvanometer frame is deflectable and is arranged on the substrate, and the galvanometer frame is provided with a magnet mounting portion, the magnet mounting portion There are a plurality of magnet bonding strips, the plurality of magnet bonding strips are spaced in sequence, and a bonding groove is formed between two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; the magnet is arranged on the magnet installation The magnet is bonded to a plurality of magnet bonding strips through the bonding portion accommodated in the bonding groove, and the magnet is used to cooperate with the coil to generate an electromagnetic force that drives the galvanometer frame to deflect.

In one embodiment, the galvanometer frame further includes a frame body and a fixing part, the magnet mounting part is connected to the frame body, the fixing part is elastically connected with the frame body, and the fixing part is used for bonding to the substrate.

In one embodiment, the fixing part is provided with a fixing hole, the base plate is provided with a galvanometer frame positioning boss, the galvanometer frame positioning boss is penetrated through the fixing hole, the galvanometer frame positioning boss, the galvanometer frame positioning boss and the fixing part are engaged The part and part of the fixed part are covered by the glue layer.

In one embodiment, the positioning boss of the galvanometer frame passing through the fixing hole protrudes from the fixing portion.

In one embodiment, the galvanometer frame is provided with a light-transmitting hole, the frame body surrounds the light-transmitting hole, the frame body is used for bonding with the light-transmitting glass, and the thickness of the frame body is in the range of 0.3-0.5 mm.

In one embodiment, the optical actuator further includes a protective cover, the protective cover is provided on the galvanometer frame and connected to the base plate, and the protective cover is provided with an escape groove, and the position of the escape groove is opposite to the bonding groove.

In one embodiment, the protective cover includes a connected cover plate and a positioning plate, the cover plate covers the galvanometer frame, the positioning plate extends from the cover plate toward the base plate, the positioning plate is provided with a positioning surface, and the positioning surface is disposed on the positioning plate away from the cover On one side of the board, the base plate is provided with a shield positioning table, and the positioning surface is used for contacting with the positioning table.

In one embodiment, the positioning plate is provided with a glue filling port, and the glue filling port penetrates through the positioning surface.

In one embodiment, the coil overlaps the substrate.

In one embodiment, the coil includes a connected bottom surface and an inner peripheral surface, the bottom surface is arranged opposite to the substrate, the substrate is provided with a coil positioning boss, the coil is sleeved on the coil positioning boss, and the inner peripheral surface is in contact with the coil positioning boss.

In one embodiment, the optical actuator further includes a circuit board, the circuit board includes an electrical connection portion and an extension portion, the extension portion extends outward from the electrical connection portion, and the electrical connection portion is disposed between the substrate and the coil, and is electrically connected to The part is electrically connected to the coil.

In a second aspect, the present invention further provides a projection device comprising any of the above-mentioned optical actuators.

Compared with the prior art, the optical actuator and the projection device provided by the present utility model are provided with a plurality of magnet bonding strips on the magnet mounting part of the galvanometer frame, and a space for use is formed between two adjacent magnet bonding strips. In the bonding groove accommodating the bonding portion, the magnet is bonded to a plurality of magnet bonding strips through the bonding portion accommodated in the bonding groove, which can increase the bonding area between the magnet and the galvanometer frame, thereby increasing the number of magnets and the galvanometer frame. The connection strength of the galvo frame. In addition, since the magnet and the galvanometer frame are bonded by the adhesive portion, the optical actuator and the projection device can be reduced in weight on the basis of ensuring miniaturization.

These and other aspects of the present invention will be more clearly understood in the description of the following embodiments.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following briefly introduces the drawings that are used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, other drawings can also be obtained from these drawings without creative effort.

FIG. 1 is a schematic structural diagram of an optical actuator provided by the present invention from a viewing angle.

FIG. 2 is an exploded view of the optical actuator shown in FIG. 1 .

FIG. 3 is a schematic structural diagram of the optical actuator (excluding the protective plate) shown in FIG. 1 .

FIG. 4 is a schematic view of the assembly of the galvanometer frame and the magnet of the optical actuator shown in FIG. 1 .

FIG. 5 is a partial structural schematic diagram of the optical actuator shown in FIG. 1 .

FIG. 6 is a longitudinal sectional view at A of FIG. 5 .

FIG. 7 is a longitudinal sectional view at B of FIG. 5 .

FIG. 8 is a schematic structural diagram of the optical actuator shown in FIG. 1 from another viewing angle.

FIG. 9 is a schematic structural diagram of the protective cover of the optical actuator shown in FIG. 1 .

FIG. 10 is a schematic diagram of a heat dissipation channel of the optical actuator shown in FIG. 1 .

FIG. 11 is a schematic diagram of another heat dissipation channel of the optical actuator shown in FIG. 1 .

Detailed ways

In order to facilitate the understanding of the embodiments of the present invention, a more comprehensive description of the embodiments of the present invention will be given below with reference to the related drawings. The preferred embodiments of the present invention are shown in the accompanying drawings. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that a thorough and complete understanding of the present disclosure is provided.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which the present invention belongs. The terms used in the embodiments of the present invention herein are only for the purpose of describing specific implementations, and are not intended to limit the present invention.

The inventors of the present application found that micro-projection products have extremely high requirements on the size of each device. The micro-optical actuator, as one of the core components of the opto-mechanical, also has a width that limits the overall size of the opto-mechanical device. thickness. The assembly difficulty between the various parts of the optical actuator often increases with the reduction of the size of the parts. How to design the bonding method between each part is an important design content of the micro-optical actuator.

In order to solve at least part of the above problems, the applicant proposes an optical actuator and a projection device. The parts of the optical actuator are connected by glue, which can not only ensure the connection strength between the parts, but also can be used in miniaturized On this basis, the light weight of the optical actuator is realized. The optical actuator and the projection device provided by the present application will be described in detail below with reference to the specific embodiments and the accompanying drawings.

Please refer to FIG. 1 and FIG. 2 , the present invention provides an optical actuator 10 , which includes a substrate 11 , a coil 13 , a galvanometer frame 14 and a magnet 16 , the coil 13 is arranged on the substrate 11 ; the galvanometer frame 14 is deflectably arranged on the substrate 11. The galvanometer frame 14 is provided with a magnet mounting portion 142, and the magnet mounting portion 142 is provided with a plurality of magnet bonding strips 1421, and the plurality of magnet bonding The connecting groove 1423, the bonding groove 1423 is used for accommodating the bonding portion 100 (FIG. 6); the magnet 16 is arranged on the magnet mounting portion 142, and the magnet 16 is bonded to a plurality of magnets through the bonding portion 100 accommodated in the bonding groove 1423. The connecting strip 1421 is bonded, and the magnet 16 is used to cooperate with the coil 13 to generate an electromagnetic force that drives the galvanometer frame 14 to deflect.

In this embodiment, the optical actuator 10 is a miniature optical actuator, which can be used for micro-projection, business education, or laser television.

The base plate 11 is the main assembly carrier of the optical actuator 10, and is used for precise positioning and fixing of the coil 13, the galvanometer frame 14 and other structures. Since it is the main assembly carrier, the substrate 11 needs to have certain hardness and rigidity. In addition, in order to avoid affecting the magnetic induction effect of the coil 13 , the substrate 11 may also be a non-metallic material. In this embodiment, the substrate 11 can be made of a plastic material with a lighter weight. In other embodiments, the substrate 11 can also be made of resin material or other non-metallic materials with certain hardness and rigidity.

In this embodiment, the base plate 11 is substantially a hollow rectangular plate structure, and the base plate 11 includes a mounting surface 111 and a mounting back surface 112 opposite to each other. The back surface 112 may be mounted on the structural member of the projector 30 to realize the connection of the optical actuator 10 to the structural member of the projector 30 . In other embodiments, the substrate 11 may also be a circular, oval or other shaped plate-like structure.

For convenience of description, the length direction of the substrate 11 is defined as the X direction, the width direction of the substrate 11 is defined as the Y direction, and the thickness direction of the substrate 11 is defined as the Z direction.

The base plate 11 is provided with a galvanometer frame positioning boss 113 , the galvanometer frame positioning boss 113 is protruded from the mounting surface 111 , and the galvanometer frame positioning boss 113 is used to support and position the galvanometer frame 14 . In this embodiment, the number of the galvanometer frame positioning bosses 113 may be four, the four galvanometer frame positioning bosses 113 are all protruded on the mounting surface 111 , and the four galvanometer frame positioning bosses 113 are set at the four corners of the rectangle place. In other embodiments, the number of the galvanometer frame positioning bosses 113 may also be one or more.

The galvanometer frame positioning boss 113 includes a fixing column 1132 and a positioning column 1134. The fixing column 1132 is fixedly connected to the mounting surface 111, and the fixing column 1132 can be used to increase the distance between the galvanometer frame 14 and the mounting surface 111 to avoid the galvanometer frame 14 in the process of deflection It interferes with the mounting surface 111 . The positioning column 1134 is fixed on the side of the fixing column 1132 away from the mounting surface 111 . The cross-sectional area of the positioning column 1134 is smaller than that of the fixing column 1132 , so that a stepped surface 1136 is formed between the fixing column 1132 and the positioning column 1134 . The positioning column 1134 can position the galvanometer frame 14 . In this embodiment, the positioning column 1134 is a cylindrical structure. In other embodiments, the positioning column 1134 may also be a triangular prism or a rectangular parallelepiped structure, which can satisfy the function of positioning the galvanometer frame 14 , and may be set according to actual conditions.

The base plate 11 is further provided with a shield positioning stage 114, the shield positioning stage 114 is located on the outer periphery of the base plate 11, the shield positioning stage 114 includes a first positioning surface 1142, and the shield positioning surface is located between the mounting surface 111 and the mounting back surface 112, The hood positioning surface is used to contact the shield 18 to position the shield 18 in the Z direction. The number of shield positioning platforms 114 may be four, and the four shield positioning platforms 114 form two groups, and the two groups of shield positioning platforms 114 are arranged at intervals along the X direction.

Referring to FIGS. 2 and 3 , the substrate 11 further includes a second positioning surface 116 and a third positioning surface 117 , wherein the second positioning surface 116 is connected to the first positioning surface 1142 , and the second positioning surface 116 is used for positioning the protective cover 18 For positioning in the X direction, the third positioning surface 117 is spaced apart from the first positioning surface 1142 and the second positioning surface 116 , and the third positioning surface 117 is used for positioning the shield 18 in the Y direction. In this embodiment, the number of the second positioning surfaces 116 and the third positioning surfaces 117 are both four, and two of the second positioning surfaces 116 and the other two second positioning surfaces 116 are spaced apart along the X direction, two of which are The third positioning surface 117 and the other two third positioning surfaces 117 are spaced apart in the Y direction.

The substrate 11 is further provided with a coil positioning boss 118 . The coil positioning boss 118 is protruded from the mounting surface 111 and can be used for positioning the coil 13 to avoid separation of the coil 13 from the substrate 11 . In this embodiment, the number of coil positioning bosses 118 is four, the four coil positioning bosses 118 are located at the four vertices of the rectangle, and each coil positioning boss 118 is set between two adjacent galvanometer frame positioning bosses 113 between. In other embodiments, the number of coil positioning bosses 118 may also be one or more than one other number. In this embodiment, the coil positioning boss 118 is composed of two spaced boss structures, the two boss structures are oriented in opposite directions, and the cross section of each boss structure is substantially "n" shaped. In other embodiments, the two boss structures may also be connected, ie, the cross-section of the coil positioning boss 118 is substantially oval.

The substrate 11 is further provided with a light-passing port 119 , and the light-passing port 119 can be used for the passage of light, so that the light can be incident on the light-passing glass 17 provided on the galvanometer frame 14 . The clear glass 17 can be used to actuate the incident light beam. Specifically, the light beam will be refracted when passing through the clear glass 17, and the magnetic field generated by the coil 13 after being energized and the attractive force generated by the action of the magnetic block will cause the clear glass to be refracted. The sheet 17 is deflected, thereby changing the angle of refraction of the light, and finally actuating the light beam. Anti-reflection coatings can be coated on both sides of the light-transmitting glass slide 17 to make the light transmittance higher. The arrangement of the light port 119 can also reduce the weight of the substrate 11 , which is beneficial to the lightening of the optical actuator 10 . In addition, the light port 119 can also be used for air intake, which is conducive to the passage of air flow and improves the heat dissipation performance of the optical actuator 10 .

The coil 13 is provided on the substrate 11 . The coil 13 is approximately in the shape of an elliptical ring, and the coil 13 can be disposed around the outer circumference of the coil positioning boss 118 , for example, the coil 13 is sleeved on the coil positioning boss 118 . The coil 13 has a length dimension along its major axis direction, a width dimension along its minor axis direction, and a thickness dimension along the Z direction, and the thickness dimension is smaller than the length dimension and the width dimension. The thickness direction of the coil 13 is consistent with the thickness direction of the substrate 11, both in the Z direction, that is, the coil 13 and the substrate 11 are stacked, so that the coil 13 does not occupy too much space in the thickness direction of the substrate 11, which is beneficial to reduce Thickness of the optical actuator 10 . The coil 13 can be a wire wound by a high-precision jig. In this embodiment, due to the hollow structure of the galvanometer frame 14 as a whole, it is lightweight, and the driving current requirement of the coil 13 is small. The power consumption of the optical actuator 10 is reduced.

The coil 13 includes a connected bottom surface 132 and an inner peripheral surface 134, wherein the bottom surface 132 is substantially an annular surface, the bottom surface 132 is disposed opposite to the substrate 11, and the inner peripheral surface 134 is in contact with the coil positioning boss 118, so that the coil positioning boss 118 can face the coil positioning boss 118. The coil 13 is positioned, that is, the coil 13 adopts the inner ring positioning scheme, so that this scheme has a high tolerance for assembly errors, is not easy to make mistakes in assembly, and has good stability. The spot consistency is high. The coil 13 may be disposed on the coil positioning boss 118 by means of interference fit. In this embodiment, the coil 13 and the coil positioning boss 118 are also fixed by dispensing glue. Since the bottom surface 132 is an annular surface, it has a larger surface area, so that the bonding area of the coil 13 can be increased, so that the coil 13 can be bonded more firmly.

Please refer to FIG. 3 and FIG. 4 , the galvanometer frame 14 is used for connecting with the light-transmitting glass 17 . The galvanometer frame 14 is disposed on the substrate 11 in a deflectable manner, and the deflection of the galvanometer frame 14 can drive the light-transmitting glass 17 to deflect, thereby realizing image shift. The galvanometer frame 14 is substantially a hollowed out rectangular sheet-like structure. The galvanometer frame 14 may be a thin metal frame manufactured by an etching process.

The galvanometer frame 14 is provided with a magnet mounting portion 142 , and the magnet mounting portion 142 can be used to mount the magnet 16 to realize the connection between the magnet 16 and the galvanometer frame 14 . In this embodiment, the magnet mounting portion 142 is provided with a plurality of magnet adhesive strips 1421, the plurality of magnet adhesive strips 1421 are spaced in sequence, and an adhesive groove 1423 is formed between two adjacent magnet adhesive strips 1421, and the adhesive The groove 1423 is used for accommodating the bonding portion 100 ( FIG. 6 ), wherein the bonding portion 100 may be UV glue, other glues or adhesive strips, etc., as long as the purpose of bonding the magnet 16 is satisfied. The magnet 16 is bonded to the plurality of magnet bonding strips 1421 through the bonding portion 100 accommodated in the bonding groove 1423 . While the overall weight is reduced by hollowing out the galvanometer frame 14 , the adhesion between the magnet 16 and the galvanometer frame 14 can be increased. The contact area and the mutual nesting force between the glue and the glue increase the connection strength between the magnet 16 and the galvanometer frame 14, avoid the separation of the magnet 16 and the galvanometer frame 14 during the deflection process of the galvanometer frame 14, and improve the optical performance. stability of the actuator 10.

The galvanometer frame 14 further includes a frame body 144 and a fixing portion 146 , wherein the frame body 144 is substantially a hollow octagonal sheet structure, and the frame body 144 is the main assembly carrier of the galvanometer frame 14 . The magnet mounting portion 142 is substantially a hollowed-out rectangular sheet structure. Both the magnet mounting portion 142 and the fixing portion 146 are connected to the frame body 144 , wherein the fixing portion 146 is elastically connected to the frame body 144 , and the fixing portion 146 is used for bonding to the substrate 11 . . The galvanometer frame 14 further includes an elastic arm 148 , and the elastic arm 148 is connected between the fixing portion 146 and the frame body 144 . The elastic arm 148 is generally a continuously curved bar-shaped structure. In this embodiment, the number of the magnet mounting portions 142 and the fixing portions 146 are both four, wherein the four magnet mounting portions 142 are connected to the outer periphery of the frame body 144 , for example, the four magnet mounting portions 142 are connected to the octagonal frame Among the four sides of the body 144 spaced apart from each other, the four fixing portions 146 correspond to the other four sides of the octagonal frame body 144 that are spaced apart from each other, that is, each fixing portion 146 is located at two adjacent magnet mounting portions 142 between. The number of the elastic arms 148 is eight, and every two elastic arms 148 are connected between the frame body 144 and a fixed portion 146 , and the two elastic arms 148 are connected to opposite sides of the frame body 144 . The fixing portion 146 has a substantially symmetrical structure.

The frame body 144 is used for bonding with the light-transmitting glass slide 17. During assembly, UV glue is placed on the surface to be bonded of the frame body 144. After the light-transmitting glass slide 17 is placed, the ultraviolet light can pass through the light-transmitting glass slide 17 directly. The glue between the light-transmitting glass slide 17 and the frame body 144 is irradiated to cure the glue, so as to realize the assembly of the light-transmitting glass slide 17 and the frame body 144 . The light-transmitting glass sheet 17 can be stacked with the frame body 144, that is, the surface to be bonded can be a recessed part in the frame body 144, and the thickness direction of the light-transmitting glass sheet 17 can be consistent with the thickness direction of the frame body 144, thereby reducing the thickness of the frame body 144. The thickness and volume of the small optical actuator 10 as a whole. In this embodiment, the thickness of the frame body 144 is in the range of 0.3-0.5 mm, which can not only ensure the strength of the frame body 144 but also avoid the increase of the overall thickness of the optical actuator 10 due to the excessive thickness of the frame body 144 . As an example, the thickness of the frame body 144 may be about 0.38 mm.

The fixing portion 146 is provided with a fixing hole 1461 , the galvanometer frame positioning boss 113 is inserted through the fixing hole 1461 , and the fixing portion 146 is bonded to the stepped surface 1136 . In this embodiment, the fixing hole 1461 is a circular hole, which is adapted to the cylindrical positioning post 1134 . In other embodiments, when the positioning post 1134 has other shapes, the shape of the fixing hole 1461 can be adaptively changed. The galvanometer frame positioning boss 113, the junction of the galvanometer frame positioning boss 113 and the fixing part 146, and part of the fixing part 146 are covered by the glue layer. The galvanometer frame positioning boss 113 is coated with glue, and the glue spreads to the junction of the galvanometer frame positioning boss 113 and the fixing part 146, and the surface of the fixing part 146 around the galvanometer frame positioning boss 113. After the glue is cured, it can make the galvanometer frame 14 is fixed to the base plate 11. By this fixing method, the connection strength of the positioning boss 113 of the galvanometer frame can be ensured in a simple manner, and the overall structure can be made lighter.

In this embodiment, the elastic arm 148 has at least one bent portion formed thereon. For example, the bent portion may be an elastic wire that is bent at least twice in a row. The galvanometer frame 14 can be deflected around at least one axis under the action of the electromagnetic force generated by the cooperation of the coil 13 and the magnet 16, wherein the axis refers to the connecting line between the two fixed parts 146 located on the diagonal, thereby driving the galvanometer frame 14. When the light-transmitting glass 17 is deflected, the elastic arm 148 undergoes torsional deformation, and the elastic arm 148 can reset the frame body 144 under the action of its own elastic force.

Referring to FIGS. 5 to 7 , in one embodiment, the galvanometer frame positioning bosses 113 penetrated through the fixing holes 1461 protrude from the fixing portion 146 , so that after the glue is cured, the galvanometer frame positioning bosses 113 and the galvanometer frame The joint between the positioning boss 113 and the fixing part 146 and part of the fixing part 146 form a cap-like structure, which increases the connection strength between the galvanometer frame 14 and the substrate 11, prevents the galvanometer frame 14 from separating from the substrate 11 during the deflection process, and improves the assembly strength.

The galvanometer frame 14 is further provided with a light-transmitting hole 149 , and the light-transmitting hole 149 is formed by being enclosed by the frame body 144 , that is, the frame body 144 is arranged around the light-transmitting hole 149 . The light-transmitting hole 149 can be used for light-transmitting, and also for reducing the weight of the galvanometer frame 14 , which is beneficial to the lightening of the optical actuator 10 . In this embodiment, the shape of the light-transmitting hole 149 is approximately an octagon. In other embodiments, the shape of the light-transmitting holes 149 may also be hexagonal or other polygons. The light-transmitting hole 149 is also provided as a polygon to enhance the strength of the connection between the frame body 144 and the light-transmitting glass 17 and the stability during vibration.

The magnet 16 is disposed on the magnet mounting portion 142 , and the magnet 16 is bonded to the plurality of magnet bonding strips 1421 via the bonding portion 100 accommodated in the bonding groove 1423 . For example, when the magnet 16 is fixed to the magnet mounting portion 142, glue is applied to the bonding groove 1423 and the plurality of magnet bonding strips 1421. After the glue is cured, the button-like structure formed by the glue can attach the plurality of magnet bonding strips 1421 to the glue. It is firmly connected to the magnet 16, wherein the button-like structure refers to the middle part of the glue being bonded to the magnet bonding strip 1421, and the two sides of the glue crossing the magnet bonding strip 1421 and bonding with the magnet 16 to form an inverted button shape. The magnet 16 is used to cooperate with the coil 13 to generate an electromagnetic force that drives the galvanometer frame 14 to deflect, thereby driving the light-transmitting glass 17 to deflect. The magnets 16 and the coils 13 are stacked, that is, the magnets 16 and the coils 13 are arranged in a tiled manner, which is beneficial to reduce the size of the optical actuator 10 in the thickness direction. The magnet 16 may be located above the geometric center of the coil 13 . In this embodiment, the number of magnets 16 is four, and each magnet 16 is mounted on one magnet mounting portion 142 . The four magnets 16 are fixed on the outer periphery of the galvanometer frame 14, and are in one-to-one correspondence with the four coils 13 and are magnetically matched. The magnets 16 can be permanent magnets 16, and the alternating electromagnetic fields generated by the permanent magnets 16 and the coils 13 generate alternating electromagnetic force, Thus, the galvanometer frame 14 is driven to deflect.

Please continue to refer to FIG. 4 , in some embodiments, there is a gap (not shown) between the magnet 16 and the transparent glass 17 . During assembly, the gap is filled with glue, and after the glue is cured, the magnet 16 and the light-transmitting glass slide 17 can be bonded, which not only ensures the relative position of the light-passing glass slide 17 and the magnet 16, but also makes the light-transmitting glass slide 17 and the The magnet 16 can be further fixed on the galvanometer frame 14 by the glue cured in the gap, so as to improve the stability of the galvanometer frame 14 . During assembly, the light-transmitting glass 17, the magnet 16 and the galvanometer frame 14 can be pre-positioned by a jig, and the three are bonded by dispensing glue, so as to realize the light-transmitting glass 17, the magnet 16 and the galvanometer frame. 14 assembly.

Please refer to FIG. 8 and FIG. 9 , in this embodiment, the optical actuator 10 further includes a protective cover 18 , the protective cover 18 is covered on the galvanometer frame 14 and connected to the base plate 11 to protect the galvanometer frame 14 . The galvanometer frame 14 is protected from external force damage. In order to reduce the overall thickness of the optical actuator 10, the thickness of the protective cover 18 can be less than 0.2 mm, and can be stamped from small hardware. Since the working environment of the optical actuator 10 requires no magnetic field and certain strength requirements, as a As an example, the material of the protective cover 18 may be SUS304 (Steel Use Stainless).

The protective cover 18 includes a connected cover plate 182 and a positioning plate 184. The cover plate 182 is substantially a hollow rectangular plate structure. The cover plate 182 is covered on the galvanometer frame 14. The positioning plate 184 extends from the cover plate 182 toward the base plate 11. 184 may be in contact with the substrate 11 to enable positioning of the shield 18 . In this embodiment, the number of positioning plates 184 is four, and each positioning plate 184 is connected to one side of the rectangular cover plate 182 .

The "button-like structure" formed by the glue after curing when the galvanometer frame 14 and the magnet 16 are fixed, and the "cap-like structure" formed by the cured glue where the galvanometer frame 14 and the substrate 11 are fixed will make the glue significantly higher than the galvanometer frame 14 In order to ensure that the optical actuator 10 has a small thickness, the layout along the thickness direction of the optical actuator 10 is relatively compact, so the distance between the protective cover 18 and the galvanometer frame 14 is small. The thickness of the glue may touch the protective cover 18 and increase the thickness of the optical actuator 10 . Therefore, removing part of the material of the protective cover 18 corresponding to the glue filling position can avoid the risk of interference between the protective cover 18 and the glue layer.

Specifically, the cover plate 182 is provided with an escape groove 1821 and a central hole 1823. The position of the escape groove 1821 is opposite to the bonding groove 1423 to avoid covering the bonding groove 1423, the plurality of magnet bonding strips 1421 and some of the magnets 16. The cured glue layer on top. The central hole 1823 corresponds to the position of the clear glass 17 for the projection light beam to pass through the clear glass 17 . The cover plate 182 is also provided with an avoidance groove 1825. The avoidance groove 1825 corresponds to the position of the galvanometer frame positioning boss 113 to avoid covering the galvanometer frame positioning boss 113, the junction and part of the galvanometer frame positioning boss 113 and the fixing portion 146. The glue layer of the fixing part 146 . By forming the avoidance slot 1821 , the center hole 1823 and the avoidance slot 1825 on the cover plate 182 , the weight of the protective cover 18 can be reduced, the weight of the optical actuator 10 can be reduced, and the heat dissipation of the optical actuator 10 can be facilitated.

The positioning plate 184 is provided with a positioning surface 1842 , and the positioning surface 1842 is used for positioning the protective cover 18 . The positioning surface 1842 is disposed on the side of the positioning plate 184 away from the cover plate 182 , and may be a section formed by punching. The positioning surface 1842 is used for contacting with the positioning table. For example, the positioning surface 1842 is in contact with the first positioning surface 1142 to position the protective cover 18 in the Z direction to ensure that the protective cover 18 does not protrude from the mounting back surface 112 .

The positioning plate 184 is provided with a glue filling port 1844 , and the glue filling port 1844 penetrates through the positioning surface 1842 . In this embodiment, the number of the glue filling openings 1844 is eight, and each positioning plate 184 is provided with two glue filling openings 1844 at intervals. The glue filling port 1844 can be used for the penetration of the dispensing needle and put glue. Specifically, after the positioning of the positioning plate 184 light-transmitting positioning surface 1842 is completed, glue is dispensed at the eight surrounding glue filling ports 1844. After the glue is cured, the protective cover is formed. It is completely fixed to the base plate 11 . In this embodiment, the glue filling port 1844 is semicircular. In other embodiments, the glue filling port 1844 may also be oval, square or other shapes.

The positioning plate 184 is further provided with a heat dissipation gap 1846 , and the heat dissipation gap 1846 is used for the passage of airflow, which is beneficial to the heat dissipation of the coil 13 . In this embodiment, the number of heat dissipation gaps 1846 is four, and each positioning plate 184 is provided with one heat dissipation gap 1846 and two glue filling openings 1844 , wherein each heat dissipation gap 1846 is located between the two glue filling openings 1844 .

Please refer to FIG. 10 and FIG. 11 , in this embodiment, the main heating element of the optical actuator 10 is the coil 13 , so the problem of heat dissipation of the coil 13 may be mainly solved when heat dissipation is considered. In this embodiment, there is no other structure around the coil 13, and the escape groove 1821, the center hole 1823 and the escape groove 1825 of the protective cover 18 also provide heat dissipation channels around the coil 13, so that the airflow in all directions can be Through the coil 13 , the coil 13 will not form heat accumulation, which prolongs the service life of the coil 13 . Specifically, the optical actuator 10 can form two kinds of heat dissipation channels, one of which is a heat dissipation channel along the X direction. For example, the airflow can enter from the heat dissipation gap 1846 opened on one of the positioning plates 184 arranged along the X direction, and in turn After passing through one of the coils 13 and the cavity above the light-transmitting glass 17, it passes through the other coil 13, and then flows out from the heat dissipation gap 1846 opened on the other positioning plate 184 arranged along the X direction; The heat dissipation channels from the middle to the periphery of the actuator 10, as shown in FIG. 11, for example, the airflow entering the cavity above the light-transmitting glass sheet 17 from the central hole 1823 passes through the four coils 13, respectively, and flows along the corresponding positioning plate. The heat dissipation gap 1846 opened on the 184 flows out.

Please continue to refer to FIGS. 1 and 2 , the optical actuator 10 further includes a circuit board 19 , and the circuit board 19 includes an electrical connection portion 191 and an extension portion 193 . The extension portion 193 extends outward from the electrical connection portion. The extension portion 193 is provided with a wiring seat 1932 and two screw holes 1934. The wiring seat 1932 can be used for electrical connection with the power supply, and the screw holes 1934 can be used for screw penetration. , so that the circuit board 19 and the housing of the projector 30 are locked and fixed by screws. The electrical connection portion 191 is electrically connected to the coil 13 to provide an electrical signal to the coil 13 to generate an electromagnetic field to drive the magnet 16 and the coil 13 to make regular attraction and repulsion motions, drive the galvanometer frame 14 to deflect, and thereby drive the light-transmitting glass 17 to generate Deflection, so as to achieve the offset of the image. The electrical connection portion 191 is disposed between the substrate 11 and the coil 13 . For example, the substrate 11 , the electrical connection portion 191 and the coil 13 are sequentially stacked along the thickness direction of the substrate 11 . The stacking design along the thickness direction of the substrate 11 is beneficial to maximize the use of the width space of the optical actuator 10 and reduce the thickness of the optical actuator 10 under the premise of ensuring that the circuit board 19 has enough space for wiring. While ensuring that the thickness and width of the optical actuator 10 are as small as possible, the assembly and bonding of the various components of the optical actuator 10 have high reliability. The electrical connection portion 191 may be fixed to the mounting surface 111 of the substrate 11 by gluing.

To sum up, in the optical actuator 10 provided by the present invention, a plurality of magnet adhesive strips 1421 are arranged on the magnet mounting portion 142 of the galvanometer frame 14, and a space for the capacity of the magnet adhesive strips 1421 is formed between two adjacent magnet adhesive strips. A bonding groove 1423 for glue is placed, and the magnet 16 is bonded to a plurality of magnet bonding strips 1421 through the glue accommodated in the bonding groove 1423. While reducing the overall weight by hollowing out the frame, it can increase the size of the magnet 16 and the galvanometer frame. The bonding area of the magnet 14 and the nesting force with the glue increase the connection strength between the magnet 16 and the galvanometer frame 14 . In addition, since the magnet 16 and the galvanometer frame 14 are bonded by glue, the optical actuator 10 can be reduced in weight on the basis of miniaturization.

The present invention also provides a projection device (not shown), including the optical actuator 10 of any of the above embodiments.

To sum up, the projection device 1 provided by the present invention includes the optical actuator 10 and the projector 30. The optical actuator 10 is provided with a plurality of magnet adhesive strips 1421 on the magnet mounting portion 142 of the galvanometer frame 14, and adjacent to each other. A bonding groove 1423 for accommodating glue is formed between the two magnet bonding strips 1421. The magnet 16 is bonded to the plurality of magnet bonding strips 1421 through the glue accommodated in the bonding groove 1423. While the overall weight is small, the bonding area between the magnet 16 and the galvanometer frame 14 can be increased, as well as the mutual nesting force between the magnet 16 and the glue, thereby increasing the connection strength of the magnet 16 and the galvanometer frame 14 . In addition, since the magnet 16 and the galvanometer frame 14 are bonded by glue, the miniaturization and weight reduction of the projection device 1 can be realized on the basis of realizing the miniaturization and weight reduction of the optical actuator 1 .

The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as limiting the scope of the present invention. It should be pointed out that for those of ordinary skill in the art, some modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for this utility model shall be subject to the appended claims.

Claims (12)

1. An optical actuator, comprising:

a substrate;

a coil disposed on the substrate;

the vibrating mirror frame is arranged on the base plate in a deflecting mode, the vibrating mirror frame is provided with a magnet installation part, the magnet installation part is provided with a plurality of magnet bonding strips, the magnet bonding strips are sequentially spaced, a bonding groove is formed between every two adjacent magnet bonding strips, and the bonding groove is used for accommodating the bonding part; and

the magnet is arranged on the magnet installation part, is adhered to the plurality of magnet adhesion strips through the adhesion part accommodated in the adhesion groove, and is used for being matched with the coil to generate electromagnetic force for driving the vibrating mirror frame to deflect.

2. The optical actuator according to claim 1, wherein the lens frame further includes a frame body, and a fixing portion, the magnet mounting portion is connected to the frame body, the fixing portion is elastically connected to the frame body, and the fixing portion is configured to be bonded to the substrate.

3. The optical actuator according to claim 2, wherein the fixing portion is provided with a fixing hole, the base plate is provided with a galvanometer frame positioning boss, the galvanometer frame positioning boss is inserted into the fixing hole, and the galvanometer frame positioning boss, a joint of the galvanometer frame positioning boss and the fixing portion, and a part of the fixing portion are covered with a glue layer.

4. An optical actuator as claimed in claim 3, wherein the bezel positioning projection passing through the fixing hole protrudes from the fixing portion.

5. An optical actuator according to claim 2, wherein the frame is provided with a light-transmitting hole, the frame surrounds the light-transmitting hole, the frame is used for bonding with a light-transmitting slide, and the thickness of the frame is in the range of 0.3-0.5 mm.

6. An optical actuator according to claim 1, further comprising a shield cover provided to the mirror frame and connected to the base plate, the shield cover being provided with a position-avoiding groove located opposite to the bonding groove.

7. An optical actuator according to claim 6, wherein the shield comprises a cover plate and a positioning plate connected to each other, the cover plate being arranged to cover the frame, the positioning plate extending from the cover plate towards the base plate, the positioning plate being provided with a positioning surface arranged on a side of the positioning plate facing away from the cover plate, the base plate being provided with a shield positioning table, the positioning surface being arranged to contact the positioning table.

8. An optical actuator according to claim 7, wherein the positioning plate is provided with a glue filling opening, the glue filling opening penetrating the positioning surface.

9. An optical actuator according to claim 1, wherein the coil is stacked with the substrate.

10. An optical actuator according to claim 9, wherein the coil includes a bottom surface and an inner peripheral surface connected to each other, the bottom surface is disposed opposite to the substrate, the substrate is provided with a coil positioning boss, the coil is fitted over the coil positioning boss, and the inner peripheral surface is in contact with the coil positioning boss.

11. An optical actuator according to any one of claims 1 to 10, further comprising a wiring board including an electrical connection portion and an extension portion, the extension portion extending outwardly from the electrical connection portion, the electrical connection portion being disposed between the substrate and the coil, the electrical connection portion being electrically connected to the coil.

12. A projection device comprising an optical actuator as claimed in any one of claims 1-11.

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